• Title/Summary/Keyword: Ti addition

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Etch Characteristics of TiN Thin Film with Addition Cl2 Gas in BCl3/Ar Plasma (BCl3/Ar 플라즈마에 Cl2 가스 첨가에 따른 TiN 박막의 식각 특성)

  • Um, Doo-Seung;Woo, Jong-Chang;Kim, Dong-Pyo;Kim, Chang-Il
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.12
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    • pp.1051-1056
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    • 2008
  • In this study, the investigations of the TiN etching characteristics were carried out with addition of $Cl_2$ gas in an inductively coupled $BCl_3$-base plasma system. Dry etching of the TiN was studied by varying the etching parameters including $Cl_2$ gas addition ratio, RF power, DC-bias voltage and pressure. The etch rate of TiN thin film was maximum when the $Cl_2$ gas addition flow was 2 sccm with fixed other conditions. As the RF power DC-bias voltage were increased, the etch rate of TiN thin film showed increasing tendency. $BCl_3/Cl_2$/Ar plasmas were characterized by optical emission spectroscopy (OES) analysis. The chemical reaction on the surface of the etched TiN films was investigated with X-ray photoelectron spectroscopy (XPS).

Fabrication of Electrically Conductive $TiB_2$-BN-AlN Composites (전기 전도성 $TiB_2$-BN-AlN 복합체의 제조)

  • 배동식;한경섭;최상홀
    • Journal of the Korean Ceramic Society
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    • v.33 no.5
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    • pp.524-530
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    • 1996
  • TiB2-BN-AlN composite was fabricated with the addition of 0~12 wt% WC by HP-sintering. Their sinterability. microstructure mechanical and electrical properties were studied as a function of the WC content. The addition of WC up to 12 wt% increased the flexural strength and decreased electrical resistivity as compared with those of the TiB2-BN-AlN composites. The electrical resistivity of TiB2-BN-AlN composite with 4.3 wt% WC was 640$\mu$$\Omega$-cm. It was found that the TiB2-BN-AlN composites with WC addition more than 4wt% was suitable for the application to the Al evaporation boat.

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Effect of Si on the Microstructure and Mechanical Properties of Ti-Al-Si-C-N Coatings (Si 함량에 따른 Ti-Al-Si-C-N 코팅막의 미세구조와 기계적 특성의 변화에 관한 연구)

  • Hong, Young-Su;Kwon, Se-Hun;Kim, Kwang-Ho
    • Journal of the Korean institute of surface engineering
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    • v.42 no.2
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    • pp.73-78
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    • 2009
  • Quinary Ti-Al-Si-C-N films were successfully synthesized on SUS 304 substrates and Si wafers by a hybrid coating system combining an arc ion plating technique and a DC reactive magnetron sputtering technique. In this work, the effect of Si content on the microstructure and mechanical properties of Ti-Al-C-N films were systematically investigated. It was revealed that the microstructure of Ti-Al-Si-C-N coatings changed from a columnar to a nano-composite by the Si addition. Due to the nanocomposite microstructure of Ti-Al-Si-C-N coatings, the microhardness of The Ti-Al-Si-C-N coatings significantly increased up to 56 GPa. In addition the average friction coefficients of Ti-Al-Si-C-N coatings were remarkably decreased with Si addition. Therefore, Ti-Al-Si-C-N coatings can be applicable as next-generation hard-coating materials due to their improved hybrid mechanical properties.

Effect of Al2O3 Addition and WO3 Modification on Catalytic Activity of NiO/Al2O3-TiO2/WO3 for Ethylene Dimerization

  • Pae, Young-Il;Sohn, Jong-Rack
    • Bulletin of the Korean Chemical Society
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    • v.28 no.10
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    • pp.1763-1770
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    • 2007
  • Strong solid acid catalysts, NiO/Al2O3-TiO2/WO3 for ethylene dimerization were prepared by the addition of Al2O3 and the modification with WO3. The acid sites and acid strength were increased by the inductive effect of WO3 species bonded to the surface of catalysts. The larger the dispersed WO3 amount, the higher both the acidity and catalytic activity for ethylene dimerization. The addition of Al2O3 to TiO2 up to 5 mol% enhanced acidity and catalytic activity gradually due to the interaction between Al2O3 and TiO2 and consequent formation of Al-O-Ti bond.

Corrosion Behavior of Ti-Pd System Alloys by Microstructural changes (Ti-Pd계 합금의 미세조직변화에 따른 부식거동)

  • Cha, Sung-Soo;Kwak, Dong-Ju;Nam, Sang-Yong
    • Journal of Technologic Dentistry
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    • v.30 no.2
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    • pp.9-16
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    • 2008
  • The surface microstructural changes, mechanical properties and corrosion resistance of Ti-Pd alloys for dental biomaterials have been investigated. Ti, Ti-Pd alloys were melted in arc furnace and the corrosion resistance of Ti-Pd alloys was evaluated by anodic polarization test. The surface microstructural changes and mechanical properties of Ti-Pd alloys were analysed by scanning electron microscope and Vickers micro-hardness tester. The vickers hardnees of pure Ti improved by addition of Pd but Ti-25Pd alloy showed decreasing compared with Ti-15Pd. And anodic polarization and potentiostatic test were conducted in 5% HCl to quantify the resistance to corrosion with the addition of Pd, There was no significant difference in corrosion resistance between pure Ti, Ti-5Pd and Ti-15Pd alloy. However, Ti-25Pd alloy showed decreasing compared with pure Ti in corrosion resistance. From these results, it was concluded that newly formulated Ti-15Pd experimental alloy have adequate hardness and high corrosion resistance, and this alloy is promising candidate for a successful dental casting alloy.

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The effect of Zn2TiO4 on willemite crystalline glaze (Zn2TiO4가 아연결정유약에 미치는 효과)

  • Lee, Chi-Youn;Lee, Hyun-Soo;Shin, Kyung-Hyun
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.24 no.2
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    • pp.70-76
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    • 2014
  • $Zn_2TiO_4$, using an anatase form of $TiO_2$ on zinc crystalline glaze, was shown as effective nuclear agent. Thus the effects on glaze were studied with synthesized $Zn_2TiO_4$ at low temperature. First, the chromophore elements were employed in synthesized $Zn_2TiO_4$ then add them in the zinc crystalline glaze. Crystal creation and development of color by $Zn_2TiO_4$ addition on the zinc crystalline glaze were more effective. Addition of $Zn_2TiO_4$, which is developed in low range temperature, is effected as zinc crystalline nuclear in the willemite glaze. When 5 wt% of synthesized $Zn_2TiO_4$ was added to the willemite glaze, nuclear creation increases and steadily retains. Therefore addition of respectively doped $Zn_2TiO_4$ with CoO, NiO, and CuO would increase doped effects in the glaze, various color willemite crystal were obtained.

Effects of $B_2O_3$ Addition on the Sintering Behavior and the Microwave Dielectric Properties of $(Mg_{0.93}Ca_{0.07})TiO_3$ Ceramics ($(Mg_{0.93}Ca_{0.07})TiO_3$ 세라믹스의 소결 및 마이크로파 유전특성에 미치는 $B_2O_3$의 영향)

  • 이득우;박재환;김인태;박재관;김윤호;최덕균
    • Journal of the Korean Ceramic Society
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    • v.35 no.3
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    • pp.287-293
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    • 1998
  • The effects of B2O3 addition on the sintering behavior and th microwave dielectric properties of $(Mg_{0.93}Ca_{0.07})TiO_3$ ceramics were investigated. By addition of $B_2O_3$, increases the density of the ceramics increases and grain growth enhances, It was densified to over 94% of $(Mg_{0.93}Ca_{0.07})TiO_3$ theoretical density by the addition of 0.15-1.0wt% B2O3 and stable microwave dielectric properties observed by the addition of 0.2-0.4wt% $B_2O_3.\;(Mg_{0.93}Ca_{0.07})TiO_3$ ceramics sintered at $1200^{\circ}C$ exhibits maximum dielectric constants of 24-25 quality factor($Q{\times}f$) of more than 70000 and temperature coefficient of resonant frequency of $0\;ppm/^{\circ}C$ by adding of 0.15-0.4wt% $B_2O_3$.

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The Effect of $Tio_2$ Addition on the Magnetic Properties of Mn-Zn Ferrites ($Tio_2$첨가가 Mn-Zn Ferrites의 자기적 특성에 미치는 영향)

  • 박종원;한영호
    • Journal of the Korean Magnetics Society
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    • v.9 no.6
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    • pp.278-284
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    • 1999
  • The effect of TiO$_2$addition has been studied on the power loss, density, initial permeability, resistivity, and microstructure of Mn-Zn ferrites. TiO$_2$addition increased the density of sintered body and decreased of the initial permeability. Activation energy for electron hopping as well as electrical resistivity increased with TiO$_2$addition. The toroidal core sintered at 1150 $^{\circ}C$ with 1.5 wt% of TiO$_2$demonstrated the power loss of 83 mW/㎤ at 1 MHz, 25 mT, 8$0^{\circ}C$. However, the same specimen sintered at 120$0^{\circ}C$ lead to the power loss, 1168 mW/㎤ at 1 MHz, 25 mT, 8$0^{\circ}C$ and developed an exaggerated grain growth.

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The Structural properties of $BaTiO_3+Nb_2O_5$ ceramics with sintering temperature (소결온도에 따른 $BaTiO_3+Nb_2O_5$ 세라믹스 구조적 특성)

  • Lee, Sang-Chul;Kim, Ji-Heon;Kim, Kang;Ryu, Ki-Won;Lee, Young-Hie
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.05c
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    • pp.127-130
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    • 2001
  • The $BaTiO_3+xNb_2O_5$(x=6, 8, 10wt%) ceramics were prepared by conventional mixed oxide method. The structural properties of the $BaTiO_3+Nb_2O_5$ ceramics with the sintering temperature and addition of $Nb_2O_5$ were investigated by XRD and SEM. Increasing the sintering temperature, the $2{\theta}$ value of BT(110) peak was shifted to the lower degree and intensity of the $Ba_6Ti_2Nb_8O_{30}$ (133) peak was increased. Increasing the addition of $Nb_2O_5$, the intensity of $BaTiNb_4O_{13}$ (201) peak was decreased and $Ba_6Ti_2Nb_8O_{30}$ (133) peak was increased. The grain size of the $BaTiO_3+Nb_2O_5$ ceramics sintered at $1500^{\circ}C$ were almost uniform.

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Ductile-Brittle Transition Property of Sintered TiC-Nb Composites (TiC-Nb 소결 복합재료의 연성-취성 천이 특성)

  • Shin, Soon-Gi
    • Korean Journal of Materials Research
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    • v.24 no.1
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    • pp.13-18
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    • 2014
  • In order to clarify the effect of Nb addition on the ductile-brittle transition property of sintered TiC, TiC-10 mol% Nb composites were researched using a three-point bending test at temperatures from room temperature to 2020 K, and the fracture surface was observed by scanning electron microscopy. It was found that the Nb addition decreases the ductile-brittle transition temperature of sintered TiC by 300 K and increases the ductility. The room temperature bending strength was maintained at up to 1800 K, but drastically dropped at higher temperatures in pure TiC. The strength increased moderately to a value of 320MPa at 1600 K in TiC-10 mol% Nb composites, which is 40% of the room temperature strength. Pores were observed in both the grains and the grain boundaries. It can be seen that, as Nb was added, the size of the grain decreased. The ductile-brittle transition temperature in TiC-10 mol% Nb composites was determined to be 1550 K. Above 1970 K, yieldpoint behavior was observed. When the grain boundary and cleavage strengths exceed the yield strength, plastic deformation is observed at about the same stress level in bending as in compression. The effect of Nb addition is discussed from the viewpoint of ability for plastic deformation.