• Title/Summary/Keyword: Ti

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The Thermal Reaction and Oxygen Behavior in the Annealed TiN/Ti/Si Structures (열처리에 따른 TiN/Ti/Si 구조의 열적반응 및 산소원자의 거동에 관한 연구)

  • 류성용;신두식;최진성;오원웅;오재응;백수현;김영남;심태언;이종길
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.29A no.7
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    • pp.73-81
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    • 1992
  • We have investigated the thermal reaction property and the oxygen behavior of TiN/Ti/Si structure after different hear treatments using x-ray photoelectron spectroscopy and cross-sectional transmission electron microscopy measurements. During the heat treatment in N$_2$ amibient, the considerable amount of oxygen atoms incorporates into TiN/Ti/Si Structures. It is found that oxygen atoms pile up at the top surface of TiN and TiN/Ti interface, forming a compound of TiO$_2$ above $600^{\circ}C$. Inside the TiN film, the oxygen content increases as the annealing temperature increases, mostly TiO and Ti$_2$O$_3$ rather than thermodynamically stable TiO$_2$. Above the annealing temperature of 55$0^{\circ}C$, the TiSi$_2$ formation has initiated. One thing to note is that a severe blistering is observed in the sample annealed at $600^{\circ}C$, due to (1) the difference of thermal expansion coefficient between TiN and Si` (2) the compressive stress induced by the volume reduction caused by the Ti-Silicide grain while elevating temperatures.

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Reaction Synthesis of Ti3AlC2 at High Temperature (고온 반응에 의한 Ti3AlC2합성)

  • 황성식;박상환;한재호;한경섭;김태우
    • Journal of the Korean Ceramic Society
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    • v.40 no.1
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    • pp.87-92
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    • 2003
  • $Ti_3AlC_2$was synthesized from TiCx and Al powder as a starting materials at the temperature range between$800^{circ}C;and;1500^{\circ}C$. The vacuum sintering and hot pressing methods were imployed to synthesize$Ti_3AlC_2$. The high purity$Ti_3AlC_2$was synthesized using TiCx and Al powder as starting materials without formation of Ti-Al intermetallic compound and Al-C compound.$Ti_2$AlC and$Ti_3AlC_2$were preferentially synthesized at$800^{\circ}C$and above$1200^{\circ}C$, respectively.$Ti_2$AlC formed at low temperature was transformed to$Ti_3AlC_2$by further reaction with TiC. In this study, the synthesis mechanism for$Ti_3AlC_2$was proposed. The synthesized$Ti_3AlC_2$showed the nano laminating structure consisting of$Ti_3AlC_2$crystal with the thickness of 45~120 nm.

Study on refining and melting of sponge Ti and Ti-6Al-4V alloy by electron beam melting (전자선 용해법에 의한 sponge Ti 및 Ti-6Al-4V 합금의 정련 및 용해에 관한 연구)

  • 김휘준;백홍구;윤우영;이진형;강춘식
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.7 no.2
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    • pp.224-234
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    • 1997
  • In order to make high purity materials including low contents of interstitial impurities, 70 ㎾ electron beam melter was manufactured. The sponge Ti and Ti-6Al-4V alloy were required and melted by electron beam melter. Based on the experimental results of sponge Ti refining by electron beam melting, the purity of Ti was increased for 180 seconds but thereafter did not significantly vary. In addition, it was found that with number of melting, the purity of Ti did and vary but the yield of Ti was decreased. As a results of Ti refining, high purity Ti of 3N (99.9 wt%) could be obtained including interstitial impurities with total contents of which were maximum 900 ppm. From the experimental results of Ti-6Al-4V alloy electron beam melting, the amounts of Al loss could be estimated through thermodynamic data calculated from the regular solution model and the model of solute removal kinetics and the alloy composition calculated from the models was in accord with the experimental composition of the alloy, It took 10 minutes to make Ti-29Al-4V alloy calculated from the model into Ti-6Al-4V alloy and the composition of Ti-6Al-4V alloy was very homogeneous.

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Solid Solution Phenomena of Al+Al3Ti Alloy and Al+10wt.%Ti Alloy using Mechanical Alloying Process (기계적 합금화법에 의해 제조된 Al+Al3Ti합금 및 Al+10wt.%Ti합금의 고용현상)

  • Kim, Hye-Sung;Lee, Jung-Ill;Kim, Gyeung-Ho;Kum, Dong-Wha;Shur, Dong-Soo
    • Journal of the Korean Society for Heat Treatment
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    • v.9 no.2
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    • pp.121-129
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    • 1996
  • The solubility of Ti in Al matrix was determined by X-ray diffraction method on two different mechanical alloying systems, i.e Al+$Al_3Ti$ and Al+Ti alloys. Starting powder compositions of two systems were chosen for final volume fraction of $Al_3Ti$ phase being 25%. The solubility of Ti in ${\alpha}$-Al was estimated by the lattice parameter measurement of Al. For Al+$Al_3Ti$ mixture, it appeared that some of $Al_3Ti$ particles decomposed during milling and maximum solubility of Ti in Al was about 0.99%. The majority of $Al_3Ti$ particles were dispersed uniformly in Al matrix, having approximate size of 100~200 nm. On the other hand, higher Ti solubility of 1.24 wt.% was found in Al+Ti system, with starting composition of Al+10 wt.%Ti. After 15 hours of milling, Ti phase was identified as 20 nm sized particles embedded in Al matrix. The annealing of mechanically alloyed powders from Al+$Al_3Ti$ and Al+10 wt.%Ti systems was followed in the temperature range of 200 to $600^{\circ}C$ to study thermal stability of supersaturated solution of Al(Ti). After annealing, the lattice parameter of Al reverted back to that of pure Al, and the peak intensity ratio of $Al_3Ti$/Al was increased more than the original value before annealing. These results suggest that Ti dissolve into alpha-Al solutions during milling, and by annealing, $Do_{22}-Al_3Ti$ phase forms from Al(Ti) solution.

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Study on Sintering Properties of $TiB_2-TiC$ Composite by Self-Propagating High Temperature Synthesis Method (SHS법에 의한 $TiB_2-TiC$ 복합체의 소결특성에 관한 연구)

  • 이형복;조덕호;장준원
    • Journal of the Korean Ceramic Society
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    • v.29 no.7
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    • pp.577-585
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    • 1992
  • TiB2 and TiC were prepared from the mixture of metal titanium, boron and graphite powders in Argon atmosphere by Self-propagating High-temperature Synthesis method. The sintered properties of TiB2-TiC composite as a function of TiC content and sintering temperature were investigated in TiB2 matrix. The sintered properties were the most excellent at 10 wt% TiC content in TiB2-TiC composite. The relative density, M.O.R strength, hardness and fracture toughness of TiB2-10 wt% TiC composite sintered at 190$0^{\circ}C$ for 90 min by hot-pressing under the pressure of 30 MPa were 98.6%, 634 MPa, 2128.1 kg/$\textrm{mm}^2$ and 4.09 MN/m3/2, respectively.

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Reaction Mechanism on the Synthesis of $SrTiO_3$ by Direct Wet Process ($SrTiO_3$ 습식 직접 합성 반응기구에 관한 연구)

  • 이경희;이병하;김대웅
    • Journal of the Korean Ceramic Society
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    • v.23 no.6
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    • pp.45-51
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    • 1986
  • $SrTiO_3$ reaction mechanism formed from $TiCl_4$ and $SrCl_2$ solution by direct-wet-process was studied. Through this study it is identified that crystalline $SrTiO_3$ is formed above pH 13.8 amorphous $SrTiO_3$ above pH7 and crystallization temperature of amorphous $SrTiO_3$ is at 37$0^{\circ}C$. the final products are composed of 60% crystalline $SrTiO_3$ and 40% amorphous $SrTiO_3$ The amorphous $SrTiO_3$ is identified with the IR absorption spectrum of Sr-Ti-O by FT-IR spectrometer. Under pH 7 gelationus metatitanate (H2TiO3) is formed from TiCl4 but above pH7 the activity by the formation of metatitnic acid ion $[TiO_3]^{2-}$ is so high that $SrTiO_3$is formed more easily through the reaction with $Sr^{2+}$.

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In situ Epitaxial Growth of the $TiSi_2$ on si(111)-7$\times$7 Substrate by Codeposition (동시증착에 의한 Si(111)-7$\times$7 기판 위에 $TiSi_2$ 에피택셜 성장)

  • 최치규;류재연;오상식;염병렬;박형호;조경익;이정용;김건호
    • Journal of the Korean Vacuum Society
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    • v.3 no.4
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    • pp.405-413
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    • 1994
  • 초고진공에서 기판 Si(111)-7$\times$7 위에 Ti:Si 또는 1:2의 조성비로 Ti와 Si을 동시증착한 후 in situ 열처리하여 TiSi2 박막을 에피택셜 성장시켰다 XRD와 XPS 분석결과 동시증착된 혼합 층에서 C49-TiSi2 박막의 성장은 핵형성에 의함을 확인하였으며 양질의 C49-TiSi2 박막은 Ti를 증착한후 Ti와 Si를 동시 증착한 (Ti+2Si)/(Ti)/Si(111)-7$\times$7구조의 시료를 초고진공에서 50$0^{\circ}C$에서 열처리하여 얻을수 있었다. 형성된 C49-TiSi2/Si(111)의 계면은 깨끗하였고 HRTEM 분석 결과 C49-TiSi2\ulcornerSi(111)의 계면은 약 10。 의 편의를 가지면서 TiSi2[211]∥Si[110] TiSi2(031)/Si(111) 의 정합성을 가졌으며 시료의 전 영 역에 에피택셜 성장되었다.

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Effect for Alloy Addition(Ta, Zr, Sn) on Mechanical Properties and Corrosion Resistance of cp-Ti for Dental Implants (인공치근용 cp-Ti에 첨가원소(Ta, Zr, Sn)가 기계적 특성 및 내식성에 미치는 영향)

  • Park, H.B.
    • Journal of Technologic Dentistry
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    • v.21 no.1
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    • pp.43-53
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    • 1999
  • The mechannical properties and corrosion resistance of alloy added commercially pure titanium for dental implants have been investigated. Ti, To-65Zr, Ti-10.1Ta and Ti-17Sn alloys were melthed in arc furnace and the corrosion resistance of Ti alloys was evaluated by anodic polarization test. The microstructure and mechanical properties of Ti alloy were analysed by optical micrograph. hardness tester and instron. In isothermal test, Ti-10.1Ta and Ti-17Sn alloys exhibited the best oxidation resistance below $1100^{\circ}C$. Ti65Zr, Ti-10.1Ta and Ti-17Sn alloys showed better rockwell hardness compared with commercially pure. Ti As the result of the anodic polarization test in 5%HCl, it 5%HCl, it was known knows that Ti-65Zr, alloy showed a rapid decrease in current density at higher potenial in comparision with other Ti alloys.

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A Study on the Silicidation of Thick Co/Ti Bilayer (두꺼운 이중층 Co/Ti 막의 실리사이드화에 관한 연구)

  • 이병욱;권영재;이종무;김영욱
    • Journal of the Korean Ceramic Society
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    • v.33 no.9
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    • pp.1012-1018
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    • 1996
  • To investigate the final structures and reactions of silicides a somewhat thick Ti monolayer Co monolayer and Co/Ti bilayer films were deposited on single Si(100) wafer by electron beam evaporation followed by heat treatment using RTA system in N2 ambient. TiO2 film formed between Ti and TiSi2 layers due to oxgen or moisture in the Ti monolayer sample. The final layer structure obtained after the silicidation heat-treatment of the Co/Ti bilayer sample turned out to be TiSi2/CoSi2/Ti-Co-Si alloy/CoSi2/Si sbustrate. This implies that imperfect layer inversion occurred due to the formation of Ti-Co-Si intermediate phase.

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Wear Characteristics of Coated $Si_3N_4$-TiC Ceramic Tool (Coated $Si_3N_4$-TiC Ceramic 공구의 마모 특성)

  • 김동원;권오관;이준근;천성순
    • Tribology and Lubricants
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    • v.4 no.2
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    • pp.44-51
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    • 1988
  • Titanium carbide(TiC), Titanium nitride(TiN), and Titanium carbonnitride(Ti(C,N)) films were deposited on $Si_3N_4$-TiC composite cutting tools by chemical vapor deposition(CVD) using $TiCl_4-CH_4-H_2$, $TiCl_4-N_2-H_2$, and $TiCl_4-CH_4-N_2-H_2$ gas mixtures, respectively. The experimental results indicate that TiC coatings compared with TiN coatings on $Si_3N_4$ -TiC ceramic have an improved microstructural property, good thermal shock resistance, and good interfacial bonding. However TiN coatings compared with TiC coatings have a low friction coefficient with steel and good chemical stability. It is found by cutting test that coated insert compared with $Si_3N_4$-TiC ceramic have a superior flank and crater wear resistance. And multilayer coating compared with monolayer coating shows a improved wear resistance.