• 한국정밀공학회지
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• 제22권7호
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• pp.79-87
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• 2005

This paper summarizes the work on the development of a simulation program for modelling the process of machining quasi-three dimensional shape with the excimer laser beam on a constantly moving polymers. Relatively simple masks of rectangle, triangle and half circle shape are considered. The etching depth is calculated by considering the number of laser pulses irradiated on the specimen surface. It was found that similar shapes as experimental results can be obtained by choosing suitable parameters of moving velocity, moving distance and mask sizes.

• 전자공학회논문지A
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• 제32A권8호
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• pp.107-118
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• 1995

Three-dimensional simulator for thermal oxidation process is developed. The simulator is consisted by two individual module, one is analytic-model module and the other is numerical-model module. The analytic-model which uses simple complementary-error function guarantees fast calculation in prediction of multi-dimensional oxidation process. The numerical-model which is based on boundary element method (BEM), has a good accuracy and suitable for various process conditions. The results of this study show that oxide growth is retarded at the corner of hole structure and enhanced at the corner of island structure. These effects are reson of different distribution of oxidant diffusion and mask stress. The utility of models and simulator developed in this study is demonstrated by using it to predict not only traditional shape of LOCOS but also process effects in small geometry.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.503-507
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• 2002

Mask manufacturing is a high COC and COO process in developing of semiconductor devices, because of the mass production tool with high resolution. Direct writing has been thought to be one of the patterning method to cope with development or small-lot production of the device. This study focused on the development of the direct, mastless patterning process using stereolithography tool for the easy and convenient application to micro and miso scale products. Experiments are utilized by three dimensional CAD/CAM as a mask and photo-curable resin as a photo-resist in a conventional stereo-lithography apparatus. Results show that the resolution of the pattern was achieved about 300 micron because of complexity of SLA apparatus settings, inspite of 100 micro of inherent resolution. This paper concludes that photo resist and laser spot diameter should be adjusted to get finer patterns and the proposed method is significantly feasible to mastless and low cost patterning with micro and miso scale.

• 한국정보통신학회논문지
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• 제18권12호
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• pp.3055-3062
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• 2014

동적 마스크를 사용하는 3D 집적영상 기술은 공간에 고해상도의 3D 영상을 디스플레이할 수 있다. 본 논문에서는 동적 마스크를 사용한 새로운 3D/2D 변환 집적영상 디스플레이 시스템을 제안한다. 제안하는 방법에 대하여 2개의 LCD 패널을 통하여 보여지는 영상에 따른 3D 모드, 2D모드 그리고 3D/2D 혼합 모드의 동작원리를 설명한다. 3D모드에서는 요소영상과 마스크 영상이 표시되고, 2D 모드에서는 광원영상과 2D 영상이 표시된다. 그리고 3D/2D 혼합모드에서는 영역별로 2D와 3D가 분리되어 동시에 디스플레이 된다. 제안한 방법의 유용함을 보이기 위해서 기초적인 실험을 수행하고 그 결과를 보고한다.

• 한국컴퓨터정보학회논문지
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• 제27권10호
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• pp.185-193
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• 2022

본 연구는 성인 여성의 얼굴 유형에 적합한 마스크 패턴 개발을 위하여 시판되고 있는 다회용 마스크 패턴을 비교·분석하고자 하였다. 이를 통해 마스크 패턴 개발 및 생산업체에 필요한 자료를 제공하고자 하였다. 시판 다회용 마스크 패턴의 치수 및 형태를 비교한 결과, 성인용으로 제작된 L사이즈 마스크임에도 불구하고 치수에 있어서 큰 차이를 나타냈다. 가상착의에 대한 외관평가 결과 정면의 앞중심선의 수직, 마스크의 윗부분 감쌈과 여유, 코높이, 마스크 아랫부분의 감쌈과 여유에서 디자인별로 유의미한 차이가 있었다. 측면도 얼굴 옆부분의 감쌈, 옆부분의 여유, 끈 간격과 길이에서 유의미한 차이를 나타냈다. 외관평가 결과, 마스크4가 가장 좋은 평가를 받았다. 마스크 패턴의 형태는 코 아랫부분에 크게 다트가 있어 얼굴의 입체적인 형태를 커버할 수 있도록 되어 있으나 마스크에 따라 곡선의 정도와 각도에 차이를 나타냈다. 마스크 상부와 마스크 하부, 볼 부분은 밀착되지만, 코와 입 부분에는 여유가 있는 마스크 패턴의 평가가 높았다. 마스크 패턴은 얼굴형 및 치수에 대한 분석을 통해 마스크 상부길이와 하부길이, 코 높이에 따른 마스크 다트량의 설정이 이루어져야 할 것으로 생각된다.

• 한국정밀공학회지
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• 제14권9호
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• pp.22-29
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• 1997

This paper describes a three dimensional profile measurement method for sheet metal products which have flexible and porous sculptured surfaces. Shadow masks are used as measuring objects for practical implementation or this study. The shadow masks are located inside the fluorescent glasses of monitors for televisions or computers and used to prevent electron guns from interfering between pixels. Three dimen- sional surface profiles are measured by adopting a software autofocusing technique to capture focused images. The experimental results show that the method is very effecive and suitable for sheet meal prod- ucts with flexible and porous surfaces.

• 대한기계학회논문집A
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• 제20권10호
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• pp.3113-3125
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• 1996

The objective of this study is to develop novel method named mechanical and chemical machining technique, which is capable of producing three dimensional patterns of few micrometers in dimension on a silicon wafer without the use of a mask. The strategy is to impart mechanical energy along the path of the pattern to be fabricated on a single crystal silicon by way on introdusing frictional interaction under controlled conditions. Then, the surface is preferentially etched to reveal the areas that have been mechanically energized. Upon completion of the etching process, the three dimensional pattern is produced on the silicon surface. Experiments have been conducted to identify the optimal tool material, geometery, as well as fabrication condition. The new technique introduced in this paper is significantly simpler than the conventional method which require sophisticated equipment and much time.

• 한국기계가공학회지
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• 제13권2호
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• pp.41-48
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• 2014

Direct writing(DW) is a method of patterning materials to a substrate directly, without a mask. It can use a variety of materials and be applied to various fields. Among DW systems, the flow-based type, using a syringe pump and nozzle, is simpler than other types. Furthermore, the range of materials is exceptionally wide. In additive processes, a three dimensional structure is made of stacking layer. Each layer is made of several lines. In this regard, good surface roughness of fabricated layers is essential to three dimensional fabrication. The surface roughness of any fabricated layer tends to change with the dispensing pattern. When multiple layers fabricated by a nozzle dispensing system are stacked, control of the nozzle position from the substrate is important in order to avoid interference between the nozzle and the fabricated layer. In this study, a fluid direct writing system for three dimensional structure fabrication was developed. Experimentsto control the position of the nozzle from substrate were conducted in order to examine the characteristics of the material used in this system.

• 대한치과교정학회지
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• 제54권2호
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• pp.108-116
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• 2024

Objective: A three-dimensional-printed individual titanium plate was applied for maxillary protraction to eliminate side effects and obtain the maximum skeletal effect. This study aimed to explore the stress distribution characteristics of sutures during maxillary protraction using individual titanium plates in various directions and locations. Methods: A protraction force of 500 g per side was applied at forward and downward angles between 0° and 60° with respect to the Frankfort horizontal plane, after which the titanium plate was moved 2 and 4 mm upward and downward, respectively. Changes in sutures with multiple protraction directions and various miniplate heights were quantified to analyze their impact on the maxillofacial bone. Results: Protraction angle of 0-30° with respect to the Frankfort horizontal plane exhibited a tendency for counterclockwise rotation in the maxilla. At a 40° protraction angle, translational motion was observed in the maxilla, whereas protraction angles of 50-60° tended to induce clockwise rotation in the maxilla. Enhanced protraction efficiency at the lower edge of the pyriform aperture was associated with increased height of individual titanium plates. Conclusions: Various protraction directions are suitable for patients with different types of vertical bone surfaces. Furthermore, when the titanium plate was positioned lower, the protraction force exhibited an increase.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.67-68
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• 2002

The properties and mechanism of silicon protuberance and groove processing by diamond tip sliding using atomic force microscope (AFM) in atmosphere were studied. To control the height of protuberance and the depth of groove, the processed height and depth depended on load and diamond tip radius were evaluated. Nanoprotuberances and grooves were fabricated on a silicon surface by approximately 100-nm-radius diamond tip sliding using an atomic force microscope in atmosphere. To clarify the mechanical and chemical properties of these parts processed, changes in the protuberance and groove profiles due to additional diamond tip sliding and potassium hydroxide (KOH) solution etching were evaluated. Processed protuberances were negligibly removed, and processed grooves were easily removed by additional diamond tip sliding. The KOH solution selectively etched the unprocessed silicon area. while the protuberances, grooves and flat surfaces processed by diamond tip sliding were negligibly etched. Three-dimensional nanofabrication is performed in this study by utilizing these mechanic-chemically processed parts as protective etching mask for KOH solution etching.