• Title/Summary/Keyword: Thin section

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The Dry Etching of TiN Thin Films Using Inductively Coupled CF4/Ar Plasma

  • Woo, Jong-Chang;Choi, Chang-Auck;Joo, Young-Hee;Kim, Han-Soo;Kim, Chang-Il
    • Transactions on Electrical and Electronic Materials
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    • v.14 no.2
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    • pp.67-70
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    • 2013
  • In this study, we changed the input parameters (gas mixing ratio, RF power, DC bias voltage, and process pressure), and then monitored the effect on TiN etch rate and selectivity with $SiO_2$. When the RF power, DC-bias voltage, and process pressure were fixed at 700 W, - 150 V, and 15 mTorr, the etch rate of TiN increased with increasing $CF_4$ content from 0 to 20 % in $CF_4$/Ar plasma. The TiN etch rate reached maximum at 20% $CF_4$ addition. As RF power, DC bias voltage, and process pressure increased, all ranges of etch rates for TiN thin films showed increasing trends. The analysis of x-ray photoelectron spectroscopy (XPS) was carried out to investigate the chemical reactions between the surfaces of TiN and etch species. Based on experimental data, ion-assisted chemical etching was proposed as the main etch mechanism for TiN thin films in $CF_4$/Ar plasma.

Research on axial bearing capacity of cold-formed thin-walled steel built-up column with 12-limb-section

  • Wentao Qiao;Yuhuan Wang;Ruifeng Li;Dong Wang;Haiying Zhang
    • Steel and Composite Structures
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    • v.47 no.3
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    • pp.437-450
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    • 2023
  • A half open cross section built-up column, namely cold-formed thin-walled steel built-up column with 12-limbsection (CTSBC-12) is put forward. To deeply reveal the mechanical behaviors of CTSBC-12 under axial compression and put forward its calculation formula of axial bearing capacity, based on the previous axial compression experimental research, the finite element analysis (FEA) is conducted on 9 CTSBC-12 specimens, and then the variable parameter analysis is carried out. The results show the FEA is in good agreement with the experimental research, the ultimate bearing capacity error is within 10%. When the slenderness ratio is more than 96.54, the ultimate bearing capacity of CTSBC-12 decreases rapidly, and the failure mode changes from local buckling to global buckling. With the local buckling failure mode unchanged, the ultimate bearing capacity decreases gradually as the ratio of web height to thickness increases. Three methods are used for calculating the ultimate bearing capacity, the direct strength method of AISI S100-2007 gives result of ultimate axial load which is closest to the test and FEA results. But for simplicity and practicality, a simplified axial bearing capacity formula is proposed, which has better calculation accuracy with the slenderness ratio changing from 30 to 100.

Simulations of PEC columns with equivalent steel section under gravity loading

  • Begum, Mahbuba;Ghosh, Debaroti
    • Steel and Composite Structures
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    • v.16 no.3
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    • pp.305-323
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    • 2014
  • This paper presents numerical simulations of partially encased composite columns (PEC) with equivalent steel sections. The composite section of PEC column consists of thin walled welded H- shaped steel section with transverse links provided at regular intervals between the flanges. Concrete is poured in the space between the flanges and the web plate. Most of the structural analysis and design software do not handle such composite members due to highly nonlinear material behavior of concrete as well as due to the complex interfacial behaviour of steel and concrete. In this paper an attempt has been made to replace the steel concrete composite section by an equivalent steel section which can be easily incorporated in the design and analysis software. The methodology used for the formulation of the equivalent steel section is described briefly in the paper. Finite element analysis is conducted using the equivalent steel section of partially encased composite columns tested under concentric gravity loading. The reference test columns are obtained from the literature, encompassing a variety of geometric and material properties. The finite element simulations of the composite columns with equivalent steel sections are found to predict the experimental behaviour of partially encased composite columns with very good accuracy.

A Study on Transmuted Impurity Atoms Formed in Neutron-Irradiated ZnO Thin Films (중성자 조사한 ZnO 박막에 생성된 핵전환 불순물들에 대한 연구)

  • Kim, Sang-Sik;Seon, Gyu-Tae;Park, Gwang-Su;Im, Gi-Ju;Seong, Man-Yeong;Lee, Bu-Hyeong;Jo, Un-Gap;Han, Hyeon-Su
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.51 no.7
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    • pp.298-304
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    • 2002
  • Transmuted impurity atoms formed in neutron-irradiated ZnO thin films were theoretically identified first and then experimentally confirmed by photoluminescence (PL). ZnO thin films grown by plasma-assisted molecular beam epitaxy were irradiated by neutron beam at room temperature. The ZnO films consist of eight constituent (Zn and O) isotropes, of which four are transmutable by neutron-irradiation; $^{64}$ , $^{68}$ Zn, $^{70}$ Zn and $^{18}$ O were expected to transmute into $^{65}$ Cu, $^{69}$ Ga, $^{71}$ Ga, and $^{19}$ F, respectively. The concentrations of these transmuted atoms were estimated in this study by considering natural abundance, neutron fluence and neutron cross section. The neutron-irradiated ZnO thin films were characterized by PL. In the PL spectra of the ZnO thin films, the Cu-related PL peaks were seen, but the Ga- or F-associated PL peaks were absent. This observation confirmed the existence of $^{65}$ Cu in the ZnO, but it could not do the formation of the other two. In this paper, the emission mechanism of Cu impurities is described and the reason for the absence of the Ga- or F-associated PL peaks is discussed as well.

Aerodynamic admittances of bridge deck sections: Issues and wind field dependence

  • Zhang, Zhitian;Zhang, Weifeng;Ge, Yaojun
    • Wind and Structures
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    • v.25 no.3
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    • pp.283-299
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    • 2017
  • Two types of aerodynamic admittance function (AAF) that have been adopted in bridge aerodynamics are addressed. The first type is based on a group of supposed relations between flutter derivatives and AAFs. In so doing, the aero-elastic properties of a section could be used to determine AAFs. It is found that the supposed relations hold only for cases when the gust frequencies are within a very low range. Predominant frequencies of long-span bridges are, however, far away from this range. In this sense, the AAFs determined this way are of little practical significance. Another type of AAFs is based on the relation between the Theodorsen circulation function and the Sears function, which holds for thin airfoil theories. It is found, however, that an obvious illogicality exists in this methodology either. In this article, a viewpoint is put forward that AAFs of bluff bridge deck sections are inherently dependent on oncoming turbulent properties. This kind of dependence is investigated with a thin plate and a double-girder bluff section via computational fluid dynamics method. Two types of wind fluctuations are used for identification of AAFs. One is turbulent wind flow while the other is harmonic. The numerical results indicate that AAFs of the thin plate agree well with the Sears AAF, and show no obvious dependence on the oncoming wind fields. In contrast, for the case of bluff double-girder section, AAFs identified from the turbulent and harmonic flows of different amplitudes differ among each other, exhibiting obvious dependence on the oncoming wind field properties.

Optimal Section Design for Metal Press Door Impact Beam Development by 3-Point Bending Analysis (3점 굽힘 하중 해석을 통한 금속 판재형 도어 임팩트 단면형상 최적설계)

  • Kim, Sun-Yong
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.20 no.7
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    • pp.166-172
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    • 2019
  • A case study was performed in order to develop well-designed of thin plate door impact beam. The conventional impact beam was consisted of steel-pipe welded two brackets on the both side, which causes low productivity and high cost. In order to overcome those disadvantage, it is necessary to develop a new type of door impact; thin plate impact beam. The thin plate impact beam was not needed a welding procedure, which can lead low cost and high productivity. In order to maximally resist from an external force, the cross-section design should be well designed. 6 different cross-section design were proposed based on engineer's experience. Three point bending test was simulated those 6 different impact beam and compared the reaction forces. Among them, one case was chosen and redesigned for detail design.

Influence of Corner Rounding on Local Buckling Strength in Square Sectioned Steel Column (사각단면 강기둥 모서리 곡률의 국부좌굴 강도에 대한 영향 평가)

  • Han Keum Ho;Kim Ki Un;Kim Jong Heon;Kang Young Jong
    • Proceedings of the KSR Conference
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    • 2004.06a
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    • pp.1096-1101
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    • 2004
  • Generally, the buckling of thin-walled structures has studied for rectangular sections or circular sections. Rectangular sections have small stiffness and circular sections have large stiffness when they are compared with rectangular sections for local buckling. But both of them have similar stiffness to column buckling. Therefore in this paper, we are going to analyze the local buckling for the box section with rounded comer and compare with rectangular section. Also we confirm that the rounded comer section has larger local buckling strength than rectangular section.

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A Simple Mixed-Based Approach for Thin-Walled Composite Blades with Two-Cell Sections

  • Jung Sung Nam;Park Il-Ju
    • Journal of Mechanical Science and Technology
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    • v.19 no.11
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    • pp.2016-2024
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    • 2005
  • In this work, a mixed beam approach that combines both the stiffness and the flexibility methods has been performed to analyze the coupled composite blades with closed, two-cell cross-sections. The Reissner's semi-complementary energy functional is used to derive the beam force-displacement relations. Only the membrane part of the shell wall is taken into account to make the analysis simple and also to deliver a clear picture of the mixed method. All the cross section stiffness coefficients as well as the distribution of shear across the section are evaluated in a closed-form through the beam formulation. The theory is validated against experimental test data, detailed finite element analysis results, and other analytical results for coupled composite blades with a two-cell airfoil section. Despite the simple kinematic model adopted in the theory, an accuracy comparable to that of two-dimensional finite element analysis has been obtained for cases considered in this study.