• Title/Summary/Keyword: Thin film evaporation

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Electrical Characteristics of Solution Processed DAL TFT with Various Mol concentration of Front channel

  • Kim, Hyunki;Choi, Byoungdeog
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.211.2-211.2
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    • 2015
  • In order to investigate the effect of front channel in DAL (dual active layer) TFT (thin film transistor), we successfully fabricated DAL TFT composed of ITZO and IGZO as active layer using the solution process. In this structure, ITZO and IGZO active layer were used as front and back channel, respectively. The front channel was changed from 0.05 to 0.2 M at fixed 0.3 M IGZO of back channel. When the mol concentration of front channel was increased, the threshold voltage (VTH) was increased from 2.0 to -11.9 V and off current also was increased from 10-12 to 10-11. This phenomenon is due to increasing the carrier concentration by increasing the volume of the front channel. The saturation mobility of DAL TFT with 0.05, 0.1, and 0.2 M ITZO were 0.45, 4.3, and $0.65cm2/V{\cdot}s$. Even though 0.2 M ITZO has higher carrier concentration than 0.05 and 0.1 M ITZO, the 0.1 M ITZO/0.3 M IGZO DAL TFT has the highest saturation mobility. This is due to channel defect such as pores and pin-holes. These defect sites were created during deposition process by solvent evaporation. Due to these defect sites, the 0.1 M ITZO/0.3 M IGZO DAL TFT shows the higher saturation mobility than that of DAL TFT with front channel of 0.2 M ITZO.

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Optical Characteristics of ZnS/CaF2/ZnS/Cu with Different Optical Thickness of CaF2 Layer (CaF2 두께 변화에 따른 ZnS/CaF2/ZnS/Cu 다층 박막의 광특성)

  • Kim, Jun-Sik;Jang, Gun-Eik
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.7
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    • pp.584-588
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    • 2009
  • Layered ZnS/$CaF_2$/ZnS/Cu film was deposited on glass substrate by using evaporation method. ZnS and $CaF_2$ were chosen as high and low refractive materials. Cu was used as mid-reflective layer. Reflectance with different optical thickness of $CaF_2$ ranging from $0.25{\lambda}\;to\;0.5{\lambda}$ were systematically investigated by using spectrophotometer. In order to expect the experimental results, the simulation program, the Essential Macleod Program(EMP) was adopted and compared with the experimental data. Based on the results taken by spectrophotometer, the ZnS/$CaF_2$/ZnS/Cu multi-layered thin film show the maximum reflectance of 80% at 625nm $(0.25{\lambda}\;in\;CaF_2)$ and 42% at 660nm $(0.5{\lambda}\;in\;CaF_2)$ respectively. As compared with the experimental results and simulation data, it was confirmed the experimental data is well matched with the EMP data.

Dye-sensitized solar cells by structure control of $TiO_2$ thin-film layer (박막형 $TiO_2$ 전극구조 제어를 이용한 염료감응형 태양전지)

  • Kim, Hyun-su;Lee, Jin-kyu;Oh, Jae-kyung;Park, Kyung-won
    • 한국신재생에너지학회:학술대회논문집
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    • 2009.06a
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    • pp.118-120
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    • 2009
  • 태양전지는 무한한 차세대 청정에너지로 주목을 받으며 그 개발의 필요성이 높아지고 있다. 이중 염료 감응형 태양전지(Dye-Sensitized Solar Cells, DSSC)는 낮은 제조 단가와 높은 효율로 기존의 Si 태양전지를 대체할 새로운 방법으로 연구되고 있다. 염료감응태양전지에 사용되는 $TiO_2$는 광촉매 성질 및 전자 전도성이 좋으며, 무독성에 가격이 저렴하여 다양한 분야에서 현재 많이 연구되고 있는 재료이다. 많이 사용되어지는 TiO2의 표면적은 염료의 흡착에 관여하므로 표면적의 제어는 매우 중요한 요소이다. $TiO_2$를 기판에 증착하는 방법으로는 Electrophoretic deposition, Chemical bath deposition, RF Margnetron sputtering, Electron-beam evaporation 등이 있으며 본 실험에서는 RF Magnetron sputtering을 사용하여 기판에 증착시키는 방법으로 구조를 제어하고자 한다. 이렇게 제조된 $TiO_2$ 박막을 SEM(Scanning Electron Microscopy)과 Solar simulator를 이용하여 표면형상과 Photocurrent-voltage curve를 분석하였다. 이것을 토대로 제조된 $TiO_2$박막의 구조가 염료감응태양전지에 미치는 영향을 연구해보고자 한다.

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Catalytic combustion type hydrogen micro gas sensor using thin film heater and nano crystalline SnO2 (나노 결정 SnO2와 백금 박막히터를 이용한 접촉연소식 마이크로 가스센서의 감응특성 연구)

  • Han, Sang-Do;Hong, Dae-Ung;Han, Chi-Hwan;Chun, Il-Soo
    • Journal of Sensor Science and Technology
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    • v.17 no.3
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    • pp.178-182
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    • 2008
  • Planar type micro catalytic combustible gas sensor was developed by using nano crystalline $SnO_2$ Pt thin film as micro heater was deposited by thermal evaporation method on the alumina substrate. The thickness of the Pt heater was around 160 nm. The sensor showed high reliability with prominent selectivity against various gases(Co, $C_3H_8,\;CH_4$) at low operating temperature($156^{\circ}C$). The sensor with nano crystalline $SnO_2$ showed higher sensitivity than that without nano crystalline $SnO_2$. This can be explained by more active adsorption and oxidation of hydrogen by nano crystalline $SnO_2$ particles. The present planar-type catalytic combustible hydrogen sensor with nano crystalline $SnO_2$ is a good candidate for detection of hydrogen leaks.

The Effect of Surface Plasmon on Internal Photoemission Measured on Ag/$TiO_2$ Nanodiodes

  • Lee, Hyosun;Lee, Young Keun;Park, Jeong Young
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.662-662
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    • 2013
  • Over the last several decades, innovative light-harvesting devices have evolved to achieve high efficiency in solar energy transfer. Research on the mechanisms for plasmon resonance is very desirable to overcome the conventional efficiency limits of photovoltaics. The influence of localized surface plasmon resonance on hot electron flow at a metal-semiconductor interface was observed with a Schottky diode composed of a thin silver layer on $TiO_2$. The photocurrent is generated by absorption of photons when electrons have enough energy to travel over the Schottky barrier and into the titanium oxide conduction band. The correlation between the hot electrons and the surface plasmon is confirmed by matching the range of peaks between the incident photons to current conversion efficiency (IPCE, flux of collected electrons per flux of incident photons) and UV-Vis spectra. The photocurrent measured on Ag/$TiO_2$ exhibited surface plasmon peaks; whereas, in contrast to the Au/$TiO_2$, a continuous Au thin film doesn't exhibit surface plasmon peaks. We modified the thickness and morphology of a continuous Ag layer by electron beam evaporation deposition and heating under gas conditions and found that the morphological change and thickness of the Ag film are key factors in controlling the peak position of light absorption.

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Organic Thin Film Transistors for Liquid Crystal Display Fabricated with Poly 3-Hexylthiophene Active Channel Layer and NiOx Electrodes

  • Oh, Yong-Cheul
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.19 no.12
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    • pp.1140-1143
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    • 2006
  • We report on the fabrication of P3HT-based thin-film transistors (TFTs) for liquid crystal display that consist of $NiO_x$, poly-vinyl phenol (PVP), and Ni for the source-drain (S/D) electrodes, gate dielectric layer, and gate electrode, respectively The $NiO_x$ S/D electrodes of which the work function is well matched to that of P3HT are deposited on a P3HT channel by electron-beam evaporation of NiO powder. The maximum saturation current of our P3HT-based TFT is about $15{\mu}A$ at a gate bias of -30 V showing a high field effect mobility of $0.079cm^2/Vs$ in the dark, and the on/off current ratio of our TFT is about $10^5$. It is concluded that jointly adopting $NiO_x$ for the S/D electrodes and PVP for gate dielectric realizes a high-quality P3HT-based TFT.

ELECTRICAL CHARACTERISTICS OF PENTACENE THIN FILM TRANSISTORS WITH STACKED AND SURFACE-TREATED GATE INSULATORS (러빙 처리된 표면의 적층 절연막을 가지는 Pentacene TFT의 전기적 특성)

  • Kang, Chang-Heon;Lee, Jong-Hyuk;Park, Jae-Hoon;Choi, Jong-Sun
    • Proceedings of the KIEE Conference
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    • 2002.07c
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    • pp.1546-1548
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    • 2002
  • In this paper, the electrical characteristics of pentacene thin film transistors(TFTs) with stacked and surface-treated gate insulators have been investigated. The semiconductor layer of pentacene was thermally evaporated onto the stacked gate insulators. For the gate insulating materials. PVP(PolyvinylPhenol) and polystyrene were spin-coated with two different stacking orders, PVP-polystyrene and polystyrene-PVP. Rapid solvent evaporation during the spin-coating processes of these insulating layers produces non-equilibrium phase morphologies accompanied by surface undulations on gate insulator interfaces. This non-equilibrium phase morphology affects the growth mode of the subsequent pentacene layer. Therefore, in order to smoothen the gate dielectric surfaces, gate dielectric surfaces were rubbed laterally along the direction from the drain to the source TFTs with with stacked and surface-treated gate insulators have provided improved operational characteristics.

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A New Xenon Plasma Flat Fluorescent Lamp Enhanced with MgO Nano-Crystals for Liquid Crystal Display Applications

  • Lee, Yang-Kyu;Heo, Seung-Taek;Lee, You-Kook;Lee, Dong-Gu
    • Transactions on Electrical and Electronic Materials
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    • v.11 no.4
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    • pp.186-189
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    • 2010
  • Nano-sized MgO single crystal powders have recently been reported to emit ultraviolet by stimulation of electrons in a vacuum. In this study, nanocrystalline MgO powders were applied to a xenon plasma flat fluorescent lamp (FFL) for a liquid crystal display backlight to improve its emission efficiency through the extra ultraviolet from the nano-MgO crystals. For comparison, a MgO nano-thin film was applied directly on the phosphors inside a lamp panel through e-beam evaporation. Adding MgO nano-crystal powders to the phosphors improved the luminance and efficiency of FFLs by around 20% and MgO nano-crystal coverage of 40% of the phosphor provided the best FFL emission characteristics; however, application of MgO thin film to the phosphors degraded the emission characteristics, even compared to FFLs without MgO. This was due to insufficient ultraviolet stimulation of the phosphors and the crystallinity and low secondary electron coefficient of the MgO.

Surface Discharge Characteristics of New Flat Fluorescent Lamp Enhanced by MgO Nano-Crystals

  • Lee, Yang-Kyu;Heo, Seung-Taek;Lee, You-Kook;Lee, Dong-Gu
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.687-690
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    • 2009
  • It has been recently reported that nano-sized MgO single crystal powders emit ultraviolet by stimulation of electrons under vacuum condition. Therefore, in this study, nano-crystalline MgO powders were applied to a xenon plasma flat fluorescent lamp for LCD backlight to improve emission efficiency of the lamp by help of extra ultraviolet from nano-MgO. For comparison with nano-crystalline MgO powders, MgO nano-thin film was applied directly on phosphors inside a lamp panel through e-beam evaporation The luminance and efficiency of FFL with an addition of MgO nano-crystal powders on phosphors were improved by around 20%. Application of MgO thin film to phosphors worsened the emission characteristics of FFLs, even rather than FFL without MgO. The reason came from insufficient stimulation of phosphors by UV, crystallinity of MgO, and low secondary electron coefficient.

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Optical and Electrical Properties of Thin Film Electroluminescent Devices with SrS:Cu, Ag Phosphor Layer

  • Chang, Ho-Jung;Park, Jun-Seo;Chang, Young-Chul
    • Journal of the Microelectronics and Packaging Society
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    • v.9 no.1
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    • pp.29-33
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    • 2002
  • The SrS:Cu, Ag thin film electroluminescient devices were fabricated on $AlTiO_3$/ITO/glass substrates by electron-beam evaporation. The emission spectrum of the device was about 460 nm with $\chi$=0.20, y=0.29 in the CIE color coordinator. It was found that the emission spectrum was saturated to pure blue color when Ag sensitizer was doped in SrS:CuCl phosphors. The luminance of the device was increased by increasing the sulfur pressure. The measured luminance was saturated with 430 cd/$m^2$at the applied voltage of 90 V and the maximum luminance was 580 cd/$m^2$at 110V. The polarization charge and conduction charge of the devices were found to be found to be about $3.5\mu$C/$\textrm{cm}^2$ and $7.4\mu$C/$\textrm{cm}^2$, respectively.

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