• 제목/요약/키워드: Thin disk

검색결과 189건 처리시간 0.028초

스핀 코팅에서의 액막의 흐름 (The Flow of a Liquid Film on Spin Coating)

  • 김태성
    • 한국분무공학회지
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    • 제18권3호
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    • pp.146-154
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    • 2013
  • The flow of a liquid film on spin coating is investigated in the case that the fixed volume of a liquid is placed on the center of a stationary disk. Thin film equations that are well approximated when the characteristic length in the vertical direction is much smaller than that in the radial direction (${\varepsilon}{\ll}1$) and have already been proposed in the work of T.-S. Kim & M.-U. Kim (2009), are used. The differential equation that governs the free surface of a liquid when ${\varepsilon}{\ll}1$ and ${\varepsilon}Re{\ll}1$ is also derived. The basic flow is analyzed using the thin film equations and their results are compared to the results of Navier-Stokes equations.

초경합금 기판 위에 성장된 다이아몬드 박막의 내마모 특성 (Wear behaviors of diamond thin films deposited on WC-Co substrate)

  • 김대일;이상희;윤종현;김병수;이철화;이덕출;박종관;박상현
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 추계학술대회 논문집
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    • pp.398-401
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    • 1999
  • We prepared diamond thin films on WC-Co substrate in a mixtured $H_2-CH_4-O_2$, gas, using 13.%MHz RF PACVD. Scanning electron microscopy, X-ray diffraction and Rarnan spectroscopy were used to analyze the characteristics of thin film, and tribometer of ball-on-disk type were used to test the wear resistance between thin film and substrate. The good diamond quality and wear resistance was appeared with cemented tungsten carbide substrate treated with oxygen plasma.

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Enhanced effect of magnetic anisotropy on patterned Fe-Al-O thin films

  • N.D. Ha;Kim, Hyun-Bin;Park, Bum-Chan;Kim, C.G.;Kim, C.O.
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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    • pp.239-239
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    • 2003
  • As a result of the recent miniaturization and enhancement in the performance of thin film inductors and thin film transformers, there are increased demands for the thin films with a high magnetic permeability in the high frequency range, a high saturation magnetization, a high electrical resistivity, and a low coercive force. In order to improve high frequency properties, we will investigate anisotropy field by shape and size of pattern. The Fe-Al-O thin films of 16mm diameter and 1$\mu\textrm{m}$ thickness were deposited on Si wafer, using RE magnetron reactive sputtering technique with the mixture of argon and oxygen gases. The fabricating conditions are obtained in the working partial pressure of 2m Torr, O$_2$ partial Pressure of 5%, Input power of 400w, and Al pellets on an Fe disk with purity of 99.9%. For continuous thin film is the 4Ms of 19.4kG, H$\sub$c/ of 0.6Oe, H$\sub$k/ of 6.0Oe and effective permeability of 2500 up to 100MHz. In this work, we expect to enhanced effect of magnetic anisotropy on patterned of Fe-Al-O thin films.

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Laser patterning된 DLC 박막의 Tribology 특성연구 (A Study on Tribology Characteristics of Laser Patterned DLC Thin Films)

  • 이지석;김동준;신동철;김태규
    • 열처리공학회지
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    • 제33권1호
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    • pp.25-32
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    • 2020
  • In this study, the tribology of laser patterned DLC thin film was studied. DLC thin films were coated by RF-PECVD to improve the durability of tungsten carbide (WC) materials. DLC thin films have high hardness and low friction characteristics. Dot and line patterning was processed on the surface of DLC thin film with femtosecond laser, and the coefficient of friction was improved. As a result of ball on disk abrasion test, the hardness and friction coefficient of DLC thin films were much better than that of WC material. The friction coefficient of DLC thin film with dot patterning and line patterning showed better results. The excellent performance of the laser patterned DLC coating is appeared to reduce the coefficient of friction due to the reduction of surface contact area.

원판형 이상체에 의한 자력 및 자력 변화율 텐서 반응식 (Closed-form Expressions of Magnetic Field and Magnetic Gradient Tensor due to a Circular Disk)

  • 임형래
    • 지구물리와물리탐사
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    • 제25권1호
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    • pp.38-43
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    • 2022
  • 화산의 화도나 불발탄과 같이 축 대칭을 갖지만 단면의 반지름이 변하는 경우 대칭축에 수직인 얇은 원판들의 반응을 더하여 모델링하는 것이 효율적이다. 이런 모양의 이상체에 대한 자력 및 자력 변화율 텐서 모델링을 위해서는 얇은 원판에 대한 해석해가 필수적이다. 따라서 이 논문에서는 원판형 이상체에 대한 벡터 자력과 자력 변화율 텐서 반응식을 유도하였다. 벡터 자력은 중력 변화율 텐서를 자력으로 변환하는 포아송 관계식을 이용하여 원판형 이상체의 기존 중력 변화율 텐서로부터 유도하였다. 자력 변화율 텐서는 직교 좌표계의 미분 관계식을 원통 좌표계로 미분 관계식으로 변환한 후 벡터 자력을 미분하여 유도하였다. 벡터 자력과 자력 변화율 텐서는 원판형 이상체의 축 대칭성을 이용한 립쉬츠-한켈(Lipschitz-Hankel) 적분을 기반으로 구하였다.

R.F. Sputtering 방법에 의한 상변화형 광디스크의 $(ZnS)_{1-x}(SiO_2)_x$ 보호막 형성에 미치는 전극거리의 영향 (The Effects of Electrode Distance on the Formation of $(ZnS)_{1-x}(SiO_2)_x$ Protective Films in Phase Change Optical Disk by R.F. Sputtering Method)

  • 이준호;김도훈
    • 한국재료학회지
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    • 제9권12호
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    • pp.1245-1251
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    • 1999
  • 상변화형 광디스크는 직접 반복기록에 의한 고속기록, 고밀도화가 가능하고 높은 전송속도, 재생신호의 C/N (carrier to noise) 비가 좋은 장점을 가지고 있으나 반복되는 열에너지에 의한 디스크의 변형과 소거도의 저하, 기록 반복성의 저하가 문제가 된다. 이러한 반복성의 저하를 개선하기 위해 적절한 디스크의 구조와 기록막의 상하부에 유전체 보호막인 ZnS-$SiO_2$ 박막층을 삽입하였다. 박막 제조시 많은 실험변수의 제어를 위해 다꾸찌 방법을 통하여 타겟 R.F. Power 200W, 기판 R.F. Power 20W, 아르곤 압력 4mTorr, 전극거리 6cm의 최적조건을 얻을수 있었다. TEM과 XRD분석 결과, 전극거리가 가까워질수록 높은 증착속도로 인하여 미세한 조직구조를 가지고 있으며, 일정거리 이상 가까워지면 막의 morphology에 나쁜 영향을 끼침을 알 수 있었다. 이러한 막의 morphology의 영향으로 투과율이 감소하는 것을 확인할 수 있었다. AFM과 SEM분석에서는 전극거리가 가까워질수록 높은 증착속도로 인하여 morphology에 나쁜 영향을 끼치고 있음을 확인할 수 있었다. 최적조건에서 증착한 박막은 우수한 morphology를 가진 초미세구조의 치밀하고 결함이 없는 박막이었다. 이 박막은 상변화형 광디스크에서 열적 변형을 억제하고, 열전도를 감소시켜 우수한 유전체 보호피막의 역할을 할 수 있다. 그리고, 전극거리가 ZnS결정립의 크기와 증착속도, morphology에 미치는 영향에 대해 고찰하였다.

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초정밀 부품의 내구성 향상을 위한 질화붕소 박막의 마멸 특성에 관한 연구 (Wear characteristics of boron nitride thin film for durability improvement of ultra- precision component)

  • 구경진;황병하;;김대은;백홍구
    • 정보저장시스템학회논문집
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    • 제3권3호
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    • pp.129-134
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    • 2007
  • Boron nitride (BN) is a highly attractive material for wear resistant applications of mechanical components. BN is super hard and it is the second hardest of all known materials. It also has a high thermal stability, high abrasive wear resistance, and in contrast to diamond, BN does not react with ferrous materials. The motivation of this work is to investigate the tribological properties of BN for potential applications in ultra-precision components for data storage, printing, and other precision devices. In this work, the wear characteristics of BN thin films deposited on DLC or Ti buffer layer with silicon substrate using RF-magnetron sputtering technique were analyzed. Wear tests were conducted by using a pin-on-disk type tester and the wear tracks were measured with a surface profiler. Experimental results showed that wear characteristics were dependent on the sputtering conditions and buffer layer. Particularly, BN coated on DLC layer showed better wear resistant behavior. The range of the wear rates for the BN films tested in this work was about 20 to $100{\mu}m^3$/cycle.

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초정밀 시스템의 내구성 향상을 위한 다이아몬드상 탄소 박막의 마멸특성에 관한 연구 (Wear Characteristics of Diamond-Like Carbon Thin Film for Durability Enhancement of Ultra-precision Systems)

  • 박관우;나종주;김대은
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2004년도 추계학술대회 논문집
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    • pp.467-470
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    • 2004
  • Diamond-Like Carbon (DLC) thin film is a semiconductor with high mechanical hardness, low friction coefficient, high chemical inertness, and optical transparency. DLC thin films have widespread applications as protective coatings and solid lubricant coatings in areas such as Hard Disk Drive (HDD) and Micro-Electro-Mechanical-Systems (MEMS). In this work, the wear characteristics of DLC thin films deposited on silicon substrates using a DC-magnetron sputtering system were analyzed. The wear tracks were measured with an Atomic Force Microscope (AFM). To identify the sp2 and sp3 hybridization of carbon bonds and other bonds Raman spectroscopy was used. The structural information of DLC thin films was obtained with Fourier transform infrared spectroscopy and wear tests were conducted by using a micro-pin-on-reciprocator tester. Results showed that the wear characteristics were dependent on the sputtering conditions. The wear rate could be correlated with the bonding state of the DLC thin film.

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