• 제목/요약/키워드: Thick films

검색결과 946건 처리시간 0.03초

조성 변화의 영향에 따른 BSCT 후막의 구조적 특성과 초전 특성 (Influence of composition variation on structural and pyroelectrical properties of BSCT thick films)

  • 노현지;이성갑;이영희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.246-247
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    • 2007
  • (Ba,Sr,Ca)$TiO_3$ powders, which were prepared by sol-gel method using a solution of Ba-acetate, Sr-acetate and Ca-acetate and Ti iso-propoxide, were mixed with organic vehicle and the BSCT thick films were fabricated by the screen-printing techniques on high purity alumina substrates. The structural and dielectric properties were investigated for various $Dy_2O_3$ doping contents. As a result of thermal analysis, the exothermic peak was observed at around $670^{\circ}C$ due to the formation of the polycrystalline perovskite phase. All BSCT thick films, sintered at $1420^{\circ}C$ for 2h, showed the typical XRD patterns of perovskite polycrystalline structure and no pyrochlore phase was observed. The average grain size of the specimens decreased with.

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분위기 소결한 PZT 후막의 구조적 특성 (Structural Properties of PZT Thick Films Fabricated by the Atmospheric Sintering)

  • 이성갑;심영재;이영희;배선기
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.313-314
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    • 2005
  • $PbTiO_3$ and PZT(52/48) powders, prepared by the sol-gel method, were mixed with an organic vehicle and the PT/PZT(52/40) heterolayered thick films were fabricated by the screen-printing method on Pt/$Al_2O_3$ substrates. The structural properties such as DTA, X-ray diffraction and microstructure, were examined as a amount of the PbO-$PbF_2$ flux. In the X-ray diffraction analysis, PZT(52/48) thick films showed a perovskite polycrystalline structure without a pyrochlore phase.

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소결조건에 따른 $Pb(Zr_xTi_{1-x})O_3$ 이종층 후막의 유전특성 (Dielectric Properties of $Pb(Zr_xTi_{1-x})O_3$ Heterolayered Thick Films with Variation of Sintering Conditions)

  • 이성갑;이종덕;박상만
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.359-360
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    • 2005
  • PZT(20/80) and PZT(80/20) powders, prepared by the sol-gel method, were mixed with an organic vehicle and the PZT(20/80)/PZT(80/20) heterolayered thick films were fabricated by the screen-printing method on Pt/$Al_2O_3$ substrates. The structural properties such as DTA, X-ray diffraction and microstructure, were examined as a amount of the excess PbO. In the DTA analysis, the formation of the polycrystalline perovskite phase was observed at around $880^{\circ}C$. The average thickness of the PZT heterolayered thick films was approximately $80{\mu}m$.

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신 재생 에너지 저장용 초전도 세라믹 합성 (Fabrication Technology of High Tc Superconducting Thick Films for Renewed Electric Power Energy)

  • 이상헌
    • 전기학회논문지
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    • 제56권1호
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    • pp.128-131
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    • 2007
  • YBaCuO superconducting ceramic thick films were fabricated by chemical process. YBaCuO films have been successfully grown on $SrTiO_3$ substrates without a template layer. The films show poor or non superconductivity although they have excellent crystalline properties. ion channeling measurement made it clear that the strain in the films due to strong chemical bonding between the substrate and epilayer remains, resulting in the poor superconductivity. The X ray diffraction pattern of the YBaCuO thick films contained 90K phase. The self template method have resolved this problem. We obtained high-Jc as-grown YBaCuO on $SrTiO_3$ (100).

Cu-free 전구체를 이용하여 구리 기판 위에 ${Bi_2}{Sr_2}{CaCu_2}{O_8}$ 초전도 후막의 제조 및 특성 (Fabricatiion and Characterization of ${Bi_2}{Sr_2}{CaCu_2}{O_8}$ Superconductor Thick Films on Cu Substrates using Cu-free Precursors)

  • 한상철;김상준;한영희;성태현;한병성
    • 한국전기전자재료학회논문지
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    • 제13권4호
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    • pp.349-358
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    • 2000
  • Fabrication and Characterization of Bi$_{2}$/Sr$_{2}$/CaCu$_{2}$/O$_{8}$(Bi2212) superconductor thick films were fabricated successfully on C tapes by liquid reaction between Cu-free precursors of Bi$_{x}$/SrCaO/$_{y}$(x=1.2-2) and Cu tapes. Cu-free Bi-Sr-Ca-O powder mixtures were screen-printed on Cu tapes and heat-treated at 850-87$0^{\circ}C$ for several minutes in air oxygen nitrogen and low oxygen pressure. In order to obtain the optimum heat-treatment condition we studied the effect of the precursor composition the printing thickness and the heat-treatment atmosphere on the superconducting properties of Bi2212 films and the reaction mechanism. Microstructures and phases of thick films were analyzed by films and the reaction mechanism. Microstructures and phases of thick films were analyzed by optical microscope and XRD. The electric properties of superonducting films were examined by the four probe method. At heat-treatment temperature the thick films were in a partially molten state by liquid reaction between CuO of the oxidized copper tape and the precursors which were printed on Cu tapes. During the heat-treatment procedure Bi2212 superconducting particle nucleate and grow in preferred orientations.ons.s.

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Effect of Heat Treatment on the Morphology and Transparency of Thick Inorganic-Organic Hybrid Films Prepared by the Electrophoretic Sol-Gel Deposition of Polyphenylsilsesquioxane Particles

  • Hasegawa, Koichi;Katagiri, Kiyofumi;Matsuda, Astunori;Tatsumisago, Masahiro;Minami, Tsutomu
    • The Korean Journal of Ceramics
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    • 제6권1호
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    • pp.15-20
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    • 2000
  • Thick inorganic-organic hybrid films were prepared on ITO-coated glass substrates by the electrophoretic sol-gel deposition of polyphenylsilsesquioxane particles. The morphology of the deposited films changed from the aggregate of the spherical particles to monolith by heat treatment at temperatures higher than $200^{\circ}C$. Transparency of the films was significantly improved accompanied by the morphological change of the particles. The degree of the morphological change was governed by two factors; maximum heat treatment temperature and heating rate. Transparent thick films of ca. 3$\mu\textrm{m}$ in thickness were obtained only by heat treatment at $400^{\circ}C$ for 2h with rapid heating from room temperature to $400^{\circ}C$. These films obtained were strongly adhered to the ITO-coated glass substrates and has a very smooth surface.

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$Dy_2O_3$$BaTiO_3$계 강유전체 후막의 유전특성 (Dielectric Properties of $BaTiO_3$ System Ferroelectric Thick Films Doped with $Dy_2O_3$)

  • 노현지;윤상은;박상만;안병립;이성갑
    • 전기학회논문지
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    • 제56권9호
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    • pp.1609-1613
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    • 2007
  • (Ba,Sr,Ca)$TiO_3$ powders, which were prepared by sol-gel method using a solution of Ba-, Sr- and Ca-acetate and Ti iso-propoxide, were mixed with organic vehicle and the BSCT thick films were fabricated by the screen-printing techniques on high purity alumina substrates. The structural and dielectirc properties were investigated for various $Dy_2O_3$ doping contents. As a result of thermal analysis, the exothermic peak was observed at around 670^{\circ}C $ due to the formation of the polycrystalline perovskite phase. All BSCT thick films, sintered at $1420^{\circ}C$ for 2h, showed the typical XRD patterns of perovskite polycrystalline structure and no pyrochlore phase was observed. The average grain size of the specimens decreased with increasing amount of $Dy_2O_3$. The average grain size and thickness of the BSCT specimens doped with 0.1 mol% $Dy_2O_3$ were approximately $1.9{\mu}m$ and $70{\mu}m$, respectively. The relative dielectric constant decreased and dielectric loss increased with increasing amount of $Dy_2O_3$, the values of the BSCT thick films doped with 0.1 mol% $Dy_2O_3$ were 3697 and 0.4% at 1 kHz, respectively. The leakage current densities in all BSCT thick films were less than $10^{-9}A/cm^2$ at the applied electric field range of 0-20 kV/cm.

승화법에 의한 GaN 후막성장시 공정변수의 영향 (The effect of the processing parameters on the growth of GaN thick films by a sublimation technique)

  • 노정현;박용주;이태경;심광보
    • 한국결정성장학회지
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    • 제13권5호
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    • pp.235-240
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    • 2003
  • 대면적 GaN 기판재료의 개발은 GaN 계열의 응용 가능성을 확대하기 위한 중요한 과제중 하나이다. 이러한 가능성을 조사하고자 본 연구에서는 seed 기판으로 MOCVD-GaN 박막과 소스 물질로서 상업용 GaN 분말을 이용하여 승화법에 의해 GaN 후막 성장을 시도하였다. 일정한 $N_2$ gas와 $NH_3$ gas 유량으로 성장실의 압력을 대기압으로 유지할 때 후막성장에 대한 승화소스물질과 seed 기판 사이의 거리, 상ㆍ하부 히터의 온도, 성장시간 등의 영향들을 연구하였다. 성장된 GaN후막은 SEM 및 XRD등을 이용하여 후막성장 형태 및 구조를 관찰하였고 상온에서 PL특성측정을 통하여 후막의 광학적인 밴드갭 및 결함 등을 조사하였다. 이로부터 양호한 GaN 후막성장에 필요한 공정요소로서 소스와 seed 기판 간 거리, 상ㆍ하부 히터의 온도 및 성장시간 등의 조건들을 정할 수 있었다.

스크린 프린트된 후막의 Impedance Spectroscopy 특성 분석 (Impedance Spectroscopy Analysis of the Screen Printed Thick Films)

  • 함용수;문상호;남송민;이영희;고중혁;정순종;김민수;조경호
    • 한국전기전자재료학회논문지
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    • 제23권6호
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    • pp.477-480
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    • 2010
  • In this study, we fabricate 3 wt% $Li_2CO_3$ doped $(Ba,Sr)TiO_3$ thick films on the Ag/Pd bottom electrode printed $Al_2O_3$ substrates for the LTCCs (low temperature co-fired ceramics) applications. From the X-ray diffraction analysis, 3 wt% $Li_2CO_3$ doped BST thick films on the Ag/Pd printed $Al_2O_3$ substrates, which sintered at $900^{\circ}C$, showed perovskite structure without any pyro phase. The dielectric properties of 3 wt% $Li_2CO_3$ doped BST thick films are measured from 1 kHz to 1 MHz. To investigate the electrical properties of 3 wt% $Li_2CO_3$ doped BST thick films, we employ the impedance spectroscopy. The complex impedance of 3 wt% $Li_2CO_3$ doped BST thick films are measured from 20 Hz to 1 MHz at the various temperatures.

소결 조건이 스크린 인쇄법으로 제조한 PZT계 후막의 물성에 미치는 영향 (Effect of Sintering Conditions on Properties of PZT-based Thick Films Prepared by Screen Printing)

  • 이봉연;천채일;김정석;김준철;방규석;이형규
    • 한국세라믹학회지
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    • 제38권10호
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    • pp.948-952
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    • 2001
  • 스크린 인쇄법으로 알루미나 기판 위에 PZT 후막을 제조하였으며, 공기 또는 Pb 분위기의 $750{\sim}1050^{\circ}C$에서 1시간 동안 소결하여 소결 조건이 후막의 물성에 미치는 영향을 조사하였다. 공기 중에서 $950^{\circ}C$ 이상의 온도로 소결한 PZT 후막에는 파이로클로 상이 제 2상으로 존재하고 있었으며, Pb분위기에서 소결한 PZT 후막이 공기 중에서 소결한 후막보다 치밀한 미세구조와 큰 유전상수 그리고 잘 발달된 P-E 이력특성을 보였다. $900^{\circ}C$의 Pb 분위기에서 소결한 PZT 후막은 잘 포화된 전형적인 강유전 P-E 이력곡선 모양을 보였으며, 잔류분극과 항전계가 각각 $29.8{\mu}C/cm^2$, 48.4 kV/cm이었다.

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