• 한국진공학회지
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• 제19권2호
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• pp.155-160
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• 2010

상변화 메모리 소자 제작 공정의 단위 스텝인 최종 열처리의 온도가 상변화 메모리 소자 특성에 미치는 영향을 고찰하였다. $Ge_2Sb_2Te_5$ (GST) 박막을 활성 물질로 하는 기공(pore) 구조의 단위 상변화 메모리 소자를 제작하고, $160^{\circ}C$에서 $300^{\circ}C$까지의 온도 범위에서 최종 열처리를 실시하였다. 상변화 메모리 소자의 SET 저항에서 RESET 저항으로의 셀 저항 변화 양상은 최종 열처리 온도에 따라 큰 차이를 나타내었다. 정상적인 상변화 메모리 동작 특성을 얻을 수 있는 임계 열처리 온도가 존재하며, 열처리 온도가 그 온도에 비해 상대적으로 높거나 낮은 경우에는 소자가 오동작하거나 불안정하게 동작하는 것을 확인하였다. 이러한 열처리 온도의 효과는 열에너지에 따른 상부전극-GST 박막-발열층 다층 구조의 열적 안정성과 밀접한 관련이 있는 것으로 보인다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2001년도 추계학술발표회 초록집
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• pp.35-35
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• 2001

agnesium Oxide (MgO) with a NaCI structure is well known to exhibit high secondary electron emission, excellent high temperature chemical stability, high thermal conductance and electrical insulating properties. For these reason MgO films have been widely used for a buffer layer of high $T_c$ superconducting and a protective layer for AC-plasma display panels to improve discharge characteristics and panel lifetime. Up to now MgO films have been synthesized by lE-beam evaporation, Molecular Beam Epitaxy (MBE) and Metalorganic Chemical Vapor Deposition (MOCVD), however there have been some limitations such as low film density and micro-cracks in films. Therefore magnetron sputtering process were emerged as predominant method to synthesis high density MgO films. In previous works, we designed and manufactured unbalanced magnetron source with high power density for the deposition of high quality MgO films. The magnetron discharges were sustained at the pressure of O.lmtorr with power density of $110W/\textrm{cm}^2$ and the maximum deposition rate was measured at $2.8\mu\textrm{m}/min$ for Cu films. In this study, the syntheses of MgO films were carried out by unbalanced magnetron sputtering with various $O_2$ partial pressure and specially target power densities, duty cycles and frequency using pulsed DC power supply. And also we investigated the plasma states with various $O_2$ partial pressure and pulsed DC conditions by Optical Emission Spectroscopy (OES). In order to confirm the relationships between plasma states and film properties such as microstructure and secondary electron emission coefficient were analyzed by X-Ray Diffraction(XRD), Transmission Electron Microscopy(TEM) and ${\gamma}-Focused$ Ion Beam (${\gamma}-FIB$).

• 폴리머
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• 제24권3호
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• pp.299-305
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• 2000

고온에서 열적 안정성이 우수한 hybrid 세라믹 전구체를 합성하기 위하여 polycarbosilane (PCS)의 화학적 개질에 의해 Si-O-Ti-C 구조를 갖는 세라믹 전구체를 합성하였다. 합성한 공중합체의 FT-IR 스펙트럼 결과 2893, 1092t 609$cm^{-1}$ / 부근에서 피크변화를 나타났으며, $^1$H-NMR 스펙트럼의 $\delta$=3.8, 2.0, 0.6 ppm 부근에서 특성피크가 나타나는 것을 확인함으로써 전구체 합성을 확인하였다. 초기 열분해 온도와 열분해 전환율 변화를 알아보기 위한 열중량 분석 (TGA) 결과 열분해 초기 온도가 30$0^{\circ}C$로 낮아졌으며 열분해 전환율도 74 wt%로 순수한 PCS에 비해 10 wt%가 증가함을 보였다. 또한 150$0^{\circ}C$까지 열분해시킨 후 X-선 회절분석 결과 2$\theta$=35.7, 42.2, 61.0$^{\circ}$에서 결정성 피크로 $\beta$-SiC의 전환을 확인하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.285-285
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• 2013

Recently, hexagonal boron nitride (h-BN), which is III-V compound of boron and nitride by strong covalent sp2 bonds has gained great interests as a 2 dimensional insulating material since it has honeycomb structure with like graphene with very small lattice mismatch (1.7%). Unlike graphene that is semi-metallic, h-BN has large band gap up to 6 eV while providing outstanding properties such as high thermal conductivity, mechanical strength, and good chemical stability. Because of these excellent properties, hBN can potentially be used for variety of applications such as dielectric layer, deep UV optoelectronic device, and protective transparent substrate. Low pressure and atmospheric pressure chemical vapor deposition (LPCVD and APCVD) methods have been investigated to synthesize h-BN by using ammonia borane as a precursor. Ammonia borane decomposes to polyiminoborane (BHNH), hydrogen, and borazine. The produced borazine gas is a key material that is a used for the synthesis of h-BN, therefore controlling the condition of decomposed products from ammonia borane is very important. In this paper, we optimize the decomposition of ammonia borane by investigating temperature, amount of precursor, and other parameters to fabricate high quality monolayer h-BN. Synthesized h-BN is characterized by Raman spectroscopy and its absorbance is measured with UV spectrophotometer. Topological variations of the samples are analyzed by atomic force microscopy. Scanning electron microscopy and Scanning transmission Electron microscopy are used for imaging and analysis of structures and surface morphologies.

• 한국ITS학회 논문지
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• 제7권5호
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• pp.97-105
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• 2008

반도체 공정의 미세화 및 마이크로 시스템 기술의 발전 그리고 소형 무선PAN 및 이동통신 장치들의 급증으로 인하여 전자부품들의 소형화와 직접화에 대한 요구가 지속적으로 증가되고 있다. 본 연구에서는 휴대형 무선PAN 및 이동통신용 전자회로 설계에 다양한 목적으로 널리 사용되고 있는 기저대역의 수동소자들 중 미세 커패시터의 안정성과 전기적 특성을 확보하기 위하여, 유전체인 AIN을 사용하여 MIM구조로 제작된 미세 박막 커패시터 소자의 전기적인 특성을 분석하고 기저대역에서의 성능을 평가한다. 또한 제작된 미세 박막형 커패시터의 용량제어 방법을 제시함으로서 기저대역에서 범용으로 사용할 수 있는 미세 박막 커패시터의 모델을 제시하고자 한다. 또한, 주파수 대역에 따른 MIM구조의 AIN 커패시터 특성을 분석함으로서 향후 임베디드 소자와 집적화를 위한 고정밀의 미세수동 소자로서의 활용방안을 제시하고자한다.

• Biomaterials and Biomechanics in Bioengineering
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• 제2권2호
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• pp.97-109
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• 2015

A series of amphiphilic graft copolymers were synthesized by varying the number of graft chains and graft chain lengths. The polarity of the hydrophobic graft chain on the copolymers was varied their solution properties. The glass transition temperature of the copolymers was in the low-temperature region, because of the amorphous nature of poly (trimethylene carbonate) (PTMC). The surface morphology of the lyophilized colloid gel had a bundle structure, which was derived from the combination of poly(N-hydroxyethylacrylamide)( poly(HEAA)) and PTMC. The solution properties were evaluated using dynamic light scattering and fluorescence measurements. The particle size of the graft copolymers was about 30-300 nm. The graft copolymers with a higher number of repeating units attributed to the TMC (trimethylene carbonate) component and with a lower macromonomer ratio showed high thermal stability. The critical association concentration was estimated to be between $2.2{\times}10^{-3}$ and $8.9{\times}10^{-2}mg/mL$, using the pyrene-based fluorescence probe technique. These results showed that the hydrophobic chain of the graft copolymer having a long PTMC segment had a low polarity, dependent on the number of repeating units of TMC and the macromonomer composition ratio. These results demonstrated that a higher number of repeating units of TMC, with a lower macromonomer composition, was preferable for molecular encapsulation.

• Journal of Microbiology and Biotechnology
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• 제29권9호
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• pp.1375-1382
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• 2019

Phenylalanine hydroxylase from Chromobacterium violaceum (CvPAH) is a monomeric enzyme that converts phenylalanine to tyrosine. It shares high amino acid identity and similar structure with a subunit of human phenylalanine hydroxylase that is a tetramer, resulting in the latent application in medications. In this study, semirational design was applied to CvPAH to improve the catalytic ability based on molecular dynamics simulation analyses. Four N-terminal truncated variants and one single point variant were constructed and characterized. The D267P variant showed a 2.1-fold increased thermal stability compared to the wild type, but lower specific activity was noted compared with the wild type. The specific activity of all truncated variants was a greater than 25% increase compared to the wild type, and these variants showed similar or slightly decreased thermostability with the exception of the $N-{\Delta}9$ variant. Notably, the $N-{\Delta}9$ variant exhibited a 1.2-fold increased specific activity, a 1.3-fold increased thermostability and considerably increased catalytic activity under the neutral environment compared with the wild type. These properties of the $N-{\Delta}9$ variant could advance medical and pharmaceutical applications of CvPAH. Our findings indicate that the N-terminus might modulate substrate binding, and are directives for further modification and functional research of PAH and other enzymes.

• Bulletin of the Korean Chemical Society
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• 제15권5호
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• pp.341-346
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• 1994

The frameworks of $(Cu(NH_3)_3OH^+)_x(NH_4^+)_{12-x}-A{\cdot} zH_2O$ which were prepared by the ion-exchange of zeolite A with ammoniac cupric nitrate solution are more stable than those of $Cu_xNa_{12-2x} -A$ obtained by the ion exchange with aqueous cupric nitrate solution are more stable than those of $Cu_xNa_{12-2x} -A$ obtained by the ion exchange with aqueous cupric nitrate solution. An energetic calculation was made on the relatively stable $(CuOH^+)_2(NH_4^+)_{10}-A{\cdot} 2H_2O$ prepared by the partial evacuation of $(Cu(NH_3)_3OH^+)_2(NH_4^+)_{10}-A{\cdot} zH_2O$. The mean stabilization energies of water, OH-, and $NH_4^+$ ions are -30.23 kcal/mol, -60.24 kcal/mol, and -16.65 kcal/mol, respectively. The results of calculation were discussed in terms of framework stability. The $(Cu(NH_3)_3OH^+)_2(NH_4^+)_{10}-A{\cdot} zH_2O$ zeolite shows two step deammoniation reactions. The first deammoniation around 210 $^{\circ}$C (third DSC peak) was attributed to the decomposition of $[Cu(NH_3)_3OH^+]$ ion and the second one around 380 $^{\circ}$C (fourth DSC peak) was ascribed to the decomposition of $NH_4^+$ ion. The activation energies of the first and second deammoniation reactions were 99.75 kJ/mol and 176.57 kJ/mol, respectively.

• Korean Journal of Chemical Engineering
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• 제35권11호
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• pp.2207-2219
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• 2018

Activated carbon (AC) was synthesized from Phoenix dactylifera stones and then modified by $CoFe_2O_4$ magnetic nanocomposite for use as a Cr(VI) adsorbent. Both $AC/CoFe_2O_4$ composite and AC were fully characterized by FTIR, SEM, XRD, TEM, TGA, and VSM techniques. Based on the surface analyses, the addition of $CoFe_2O_4$ nanoparticles had a significant effect on the thermal stability and crystalline structure of AC. Factors affecting chromium removal efficiency like pH, dosage, contact time, temperature, and initial Cr(VI) concentration were investigated. The best pH was found 2 and 3 for Cr adsorption by AC and $AC/CoFe_2O_4$ composite, respectively. The presence of ion sulfate had a greater effect on the chromium sorption efficiency than nitrate and chlorine ions. The results illustrated that both adsorbents can be used up to seven times to adsorb chromium. The adsorption process was examined by three isothermal models, and Freundlich was chosen as the best one. The experimental data were well fitted by pseudo-second-order kinetic model. The half-life ($t_{1/2}$) of hexavalent chromium using AC and $AC/CoFe_2O_4$ magnetic composite was obtained as 5.18 min and 1.52 min, respectively. Cr(VI) adsorption by AC and $AC/CoFe_2O_4$ magnetic composite was spontaneous and exothermic. In general, our study showed that the composition of $CoFe_2O_4$ magnetic nanoparticles with AC can increase the adsorption capacity of AC from 36 mg/L to 70 mg/L.

• Composites Research
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• 제33권6호
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• pp.395-400
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• 2020

본 연구에서는 카본나노튜브(CNT) 면상발열체에 preceramic polymer 중 하나인 실세스퀴아잔을 코팅하여 고온에서 안정적인 발열이 가능한 CNT/SiCN 복합체 시트를 제조하였다. 제조된 복합체 필름은 FE-SEM을 통해 실세스퀴아잔이 CNT 면상발열체의 표면을 모두 코팅한 것을 확인하였다. 또한 800℃의 열처리를 통해 실세 스퀴아잔이 SiCN 세라믹으로 전환되어도 표면의 결함이 발견되지 않고 온전한 구조를 유지하는 것을 확인하였다. CNT/SiCN 복합체 시트는 질소와 공기 분위기 모두에서 기존의 CNT 시트보다도 높은 열적 안정성을 확보할 수 있었다. 마지막으로 제조된 CNT/SiCN 복합체 필름은 대기 중에서 700℃ 이상의 온도로 발열이 가능하였고 발열 후 온도를 식히고 재발열 또한 성공적으로 이루어졌다.