• 제목/요약/키워드: Thermal-structure Stability

검색결과 650건 처리시간 0.03초

Improvement of Thermal Stability of Nickel Silicide Using Co-sputtering of Ni and Ti for Nano-Scale CMOS Technology

  • Li, Meng;Oh, Sung-Kwen;Shin, Hong-Sik;Lee, Hi-Deok
    • JSTS:Journal of Semiconductor Technology and Science
    • /
    • 제13권3호
    • /
    • pp.252-258
    • /
    • 2013
  • In this paper, a thermally stable nickel silicide technology using the co-sputtering of nickel and titanium atoms capped with TiN layer is proposed for nano-scale metal oxide semiconductor field effect transistor (MOSFET) applications. The effects of the incorporation of titanium ingredient in the co-sputtered Ni layer are characterized as a function of Ti sputtering power. The difference between the one-step rapid thermal process (RTP) and two-step RTP for the silicidation process has also been studied. It is shown that a certain proportion of titanium incorporation with two-step RTP has the best thermal stability for this structure.

폴리올 에스테르의 합성 및 열 안정성 (Synthesis and Thermal Stability of Polyol Esters)

  • 정근우;백진욱;김영운;서인옥;한정식
    • Tribology and Lubricants
    • /
    • 제18권5호
    • /
    • pp.319-323
    • /
    • 2002
  • Polyol esters were synthesized by condensation reaction of polyols (PE and DiPE) and linear acids such as valeric acid, caproic acid, heptylic acid and caprylic acid. The structures of polyol esters were confirmed by gas chromatography. Hot tube test was used test was used to measure thermal stability of polyol esters and its thermal properties depended on the structure of acid moiety contained in polyol esters.

Structural and Thermal Analysis and Membrane Characteristics of Phosphoric Acid-doped Polybenzimidazole/Strontium Titanate Composite Membranes for HT-PEMFC Applications

  • Selvakumar, Kanakaraj;Kim, Ae Rhan;Prabhu, Manimuthu Ramesh;Yoo, Dong Jin
    • Composites Research
    • /
    • 제34권6호
    • /
    • pp.373-379
    • /
    • 2021
  • A series of novel PBI/SrTiO3 nanocomposite membranes composed of polybenzimidazole (PBI) and strontium titanate (SrTiO3) with a perovskite structure were fabricated with various concentrations of SrTiO3 through a solution casting method. Various characterization techniques such as proton nuclear magnetic resonance, thermogravimetric analysis, atomic force microscopy (AFM) and AC impedance spectroscopy were used to investigate the chemical structure, thermal, phosphate absorption and morphological properties, and proton conductivity of the fabricated nanocomposite membranes. The optimized PBI/SrTiO3-8 polymer nanocomposite membrane containing 8wt% of SrTiO3 showed a higher proton conductivity of 7.95 × 10-2 S/cm at 160℃ compared to other nanocomposite membranes. The PBI/SrTiO3-8 composite membrane also showed higher thermal stability compared to pristine PBI. In addition, the roughness change of the polymer composite membrane was also investigated by AFM. Based on these results, nanocomposite membranes based on perovskite structures are expected to be considered as potential candidates for high-temperature PEM fuel cell applications.

Co/내열금속/다결정 Si 구조의 실리사이드화와 열적안정성 (Silicidation and Thermal Stability of the So/refreactory Metal Bilayer on the Doped Polycrystalline Si Substrate)

  • 권영재;이종무
    • 한국세라믹학회지
    • /
    • 제36권6호
    • /
    • pp.604-610
    • /
    • 1999
  • Silicide layer structures and morphology degradation of the surface and interface of the silicide layers for he Co/refractory metal bilayer sputter-deposited on the P-doped polycrystalline Si substrate and subjected to rapid thermal annealing were investigated and compared with those on the single Si substrate. The CoSi-CoSi2 phase transition temperature is lower an morphology degradation of the silcide layer occurs more severely for the Co/refractorymetal bilayer on the P-doped polycrystalline Si substrate than on the single Si substrate. Also the final layer structure and the morphology of the films after silicidation annealing was found to depend strongly upon the interlayer metal. The layer structure after silicidation annealing of Co/Hf/doped-poly Si is Co-Hf alloy/polycrystalline CoSi2/poly Si substrate while that of Co/Nb is polycrystalline CoSi2/NbSi2/polycrystalline CoSi2/poly Si.

  • PDF

Kinetics 수정에 의한 실리사이드의 열적 안정성 향상에 대한 연구 (Thermal stability enhancement of silicide by kinetic modifications)

  • 남형진
    • 한국산학기술학회논문지
    • /
    • 제8권5호
    • /
    • pp.1042-1046
    • /
    • 2007
  • 본 연구에서는 제 3의 화학 원소 첨가에 의한 코발트 실리사이드와 니켈 실리사이드의 열적 안정성 향상 메카니즘을 조사하였다. 즉, Co-Si 시스템에 텅스텐을 첨가하는 경우 CoSi의 heat of formation이 증가하는 것으로 관찰되었다. 이러한 증가는 시스템 에너지 감속 속도의 최대화로 대변되는 실리사이드 형성 kinetics가 선호하는 glass의 형성을 억제하는 것으로 밝혀졌다. 이 경우 CoSi와 실리콘 기판 사이의 계면에 형성되는 다결정 구조는 glass의 self-diffusion보다 확산계수가 훨씬 작아 상 변이를 위해서는 보다 높은 열에너지를 요구하게 되어 궁극적으로 CoSi의 열적 안정성이 향상되는 것을 알 수 있었다.

  • PDF

리튬 2차 전지용 Li[Co0.1Ni0.15Li0.2Mn0.55]O2 양극물질의 안정성 고찰 (Stability of Li[Co0.1Ni0.15Li0.2Mn0.55]O2 Cathode Material for Lithium Secondary Battery)

  • 박용준
    • 한국전기전자재료학회논문지
    • /
    • 제20권5호
    • /
    • pp.443-449
    • /
    • 2007
  • The structural and thermal stability of $Li[Co_{0.1}Ni_{0.15}Li_{0.2}Mn_{0.55}]O_2$ electrode during cycling process was studied. The sample was prepared by simple combustion method. Although there were irreversible changes on the initial cycle, O3 stacking for $Li[Co_{0.1}Ni_{0.15}Li_{0.2}Mn_{0.55}]O_2$ structure was retained during the first and subsequent cycling process. Impedance of the test cell was decreased after the first charge-discharge process, which would be of benefit to intercalation and deintercalation of lithium ion on subsequent cycling. As expected, cycling test for 75 times increased impedance of the cell a little, instead, thermal stability of $Li[Co_{0.1}Ni_{0.15}Li_{0.2}Mn_{0.55}]O_2$ was improved. Moreover, based on DSC analysis, the initial exothermic peak was shifted to high temperature range and the amount of heat was also decreased after cycling test, which displayed that thermal stability was not deteriorated during cycling.

Synthesis and Thermal Properties of Poly(cyclohexylene dimethylene terephthalate-co-butylene terephthalate

  • Lee, Sang-Won;Wansoo Huh;Hong, Yoo-Seok;Lee, Kyung-Mi
    • Macromolecular Research
    • /
    • 제8권6호
    • /
    • pp.261-267
    • /
    • 2000
  • It is well known that poly(cyclohexylene dimethylene terephthalate) (PCT) is used as the engineering plastics with high melting temperature and fast crystallization rate compared with poly(butylene terephthalate)(PBT). However, poor thermal stability of PCT has limited its practical application due to the drastic decrease of molecular weight during the processing temperature. In order to improve the thermal stability of PCT homopolymer, the copolymer of PCT and PBT was synthesized and the thermal properties of the copolymer have been studied. P(CT/BT) copolymer was obtained by condensation polymerization of DMT, CHDM, and 1,4-butanediol. The chemical structure and composition of the copolymer was investigated by FTIR and NMR analysis. The thermal behavior of copolymer was studied using DSC and it was found that the crystallization-melting behavior of the copolymer was observed for the whole composition range. TGA analysis exhibited that P(CT/BT) copolymer is more stable at the initial stage of thermal decomposition compared with PCT and PBT homopolymers.

  • PDF

NiSi에의 Co 치환에 대한 ab-initio 계산 (Ab-initio calculation on Co substitution into NiSi)

  • 김영철;서화일
    • 한국재료학회지
    • /
    • 제17권7호
    • /
    • pp.358-360
    • /
    • 2007
  • Cobalt subtitution on NiSi is investigated by using an ab-initio calculation. Firstly, a relaxed NiSi structure is calculated and the calculated lattice parameters are compared with experimentally determined lattice parameters. The calculated values are smaller than the experimental values by about 2%. As the calculation is based on 0 K, and the experimental measurement is performed at room temperature, those values are in good agreement. Next, a Co atom substitutes a Ni and Si site, respectively, to evaluate the preferable site between them. Co prefers Ni site to Si site. The calculated total energy also indicates that the Co substitution to Ni site stabilizes the NiSi structure. Therefore, the thermal stability of NiSi with Co addition can be achieved by the structure stabilization of NiSi by Co substitution into Ni site of NiSi.

Fe-Ti합금계에서의 충상공정조직의 열적안정성 (Thermal Stability of Lamellar Eutectic Structure in Fe-Ti Alloy)

  • 위명용;하세베 미츠히로
    • 열처리공학회지
    • /
    • 제10권2호
    • /
    • pp.121-127
    • /
    • 1997
  • In order to elucidate thermal stability of Fe-$Fe_2Ti$ eutectic structure, the initial several structures have been investigated in the changes of coarsening and spheroidization during prolonged annealing under the eutectic temperature. The results are as follows: 1) The rate constant of coarsening and spheroidization was formulated as $S^{-n}-S_0^{-n}=k{\cdot}t$, where S is the total area of the interface between ${\alpha}$ and C($Fe_2Ti$) per unit volume, $S_0$ is initial value and k is the rate constant. 2) The coarsening and spheroidization mechanism was described by Ostwald ripening and controlled by diffusion of Ti-atom in ${\alpha}$-phase. 3) The spheroidization rate constant in eutectic lamellar structures was depended upon annealing temperature and showed the Arrhenius relation. The activation energy for spheroidization of lamellar structure was 365 kJ/mole.

  • PDF

대형 레이더 기계구조부 개발 절차 (Development Process of Mechanical Structure for a Large Radar)

  • 신동준;이종학;강영식
    • 한국군사과학기술학회지
    • /
    • 제20권1호
    • /
    • pp.1-11
    • /
    • 2017
  • In this paper, design requirements of the large radar were investigated, and development was performed through the analysis and design. Large radar should be designed by bearing the 75 knot wind force and $20kg/m^2$ ice mass as operating conditions in order to meet structural stability, and driving torque and bearing load were calculated for securing the driving stability. Thermal dissipation analysis was performed considering TRM and DC-DC Converter's limitation temperature by $50^{\circ}C$ ambient temperature condition in order to attain thermal stability, and PSD and shock analysis were carried out by using MIL-STD-810G vibration and shock specification in order to transport and installation of the large radar. As a result, all components of large radar could secure the structural stability more than 2.8 factor of safety, and driving stability was also secured with adequate bearing fatigue life. Thermal stability was attained by allowable max temperature 88.7 C of the TRM, and structural stability for transportation and installation of the large radar was also secured more than 5 factor of safety. After it was transported and installed to the radar site, operating capability was finally verified by rotating the large radar.