• 제목/요약/키워드: Thermal evaporator

검색결과 282건 처리시간 0.026초

열증착법으로 제조된 니켈 모노실리사이드의 미세구조 연구 (A study of microstructure of Ni-monosilicide fabricated with a thermal evaporator)

  • 안영숙;송오성;양철웅
    • 한국표면공학회지
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    • 제32권6호
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    • pp.703-708
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    • 1999
  • Silicides have been used extensively in ULSI logic device fabrication as contact materials for the active areas as well as the poly- Si gates. NiSi is a promising candidate for submicron device application due to less volume expansion, low formation temperature, little silicon consumption, and large stable processing temperature window. In this report, the microstructure of nickel silicides fabricated with a thermal evaporator has been investigated. We observed systematic transformation of Ni silicides of $Ni_2$Si, NiSi, $NiSi_2$, as annealing temperature increases. All the silicides have been identified by a X-ray diffractometer (XRD). The cross-sectional microstructure of silicides was examined by a transmission electron microscope (TEM) equipped with a energy dispersive spectrometer(EDS). The surface roughness of silicides was measured by scanning probe microscope(SPM). Although we observed thin oxide layer existed at the $Ni/NiSi_{x}$ interface, we fabricated successfully $550\AA$-thick planar Ni-monosilicide at the temperature range of$ 400~700^{\circ}C$.

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접시형 증발부를 가진 회전형 히이트파이프의 실험적 연구 (An experimental study of the rotating heat pipe with a dished evaporator)

  • 권순석;장영석;유병욱
    • 태양에너지
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    • 제12권3호
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    • pp.116-125
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    • 1992
  • 증발부를 접시형으로 하고 응축부를 나선형 그루우브로 하는 히이트파이프에서 움직이지 않는 경우와 회전을 하는 경우 입 열량에 따라 벽면과 증기의 온도분포를 구하여 전열특성을 연구하였다. 본 연구에 사용된 히이트파이프는 단순 히이트파이프보다 우수한 전열특성을 가지며, 히이트파이프의 열전달은 입열량과 회전수가 증가하면 증가하였다.

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태양열 집열기용 열파이프의 구조와 작동 특성에 관한 연구 (A Study on Design and Performance of a Heat pipe for the application to Solar collector)

  • 임광빈;김철주;박이동;황영규;강환국
    • 한국에너지공학회:학술대회논문집
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    • 한국태양에너지학회, 한국에너지공학회 1993년도 춘계 공동학술발표회 초록집
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    • pp.70-78
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    • 1993
  • Heat pipes, applied to flat plate solar collectors, have a long and slender configuration with relatively low heat flux on the evaporator. Such a heat pipe has a tendency to build-up a liquid pool at the lower half of evaporator zone, and at this pool occurs such complicated phenomena of evaporation and fluid dynamics as superheat, sudden generation of bubble, its likely explosive growth process and flooding etc. In the present study, we tried to solve those problems by means of adjusting the two principle design parameters, liquid fill charge and wick length, using 4 heat pipes and 3 thermosyphons, with different values of parameter respectively. The corresponding results can be summarized as followings, - The thermal conductance of heat pipes was largely improved by el eliminating wick from adiabatic and condenser zone. - But on evaporator zone wick is inevitable to reduce behavior of the build -up of liquid pool , where arise diverse internal complex phenomena. - The liquid fill charge should have to be increased by 10∼20% more than the quantity to saturate the wick.

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Cold plate를 이용한 휴대용 컴퓨터 냉각 시스템의 열성능에 관한 연구 (A Study on Thermal Performance of Cooling System for a Laptop Computer Using a Cold Plate)

  • 박상희;조남해;최성대
    • 한국기계가공학회지
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    • 제8권4호
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    • pp.83-89
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    • 2009
  • This study investigates two-phase cooling system of close-loop by using FC-72 and PCM(Phase change material). The cooling system consists of evaporator, cold plate, micro pump, and condenser. The heat input on the performance of evaporator is appreciated by visualizing the boiling on the evaporator. The heat performance of cooling system is investigated to determine the effects of volume fill ratio change at working fluid, pump flow rate change, and volume fill ratio change at PCM in cold plate. Experimental results show the ideal condition when the volume ratio of working fluid, the pump flowing, and the volume ratio of PCM are 60%, 6ml/min, and 60% respectively.

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냉수공장에서 열전달을 고려한 응축기와 증발기의 물 압력강하 특성 (Characteristics of the Water Pressure Drop Considering Heat Transfer in the Evaporator and Condenser of a Water Chiller)

  • ;이근식
    • 대한기계학회논문집B
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    • 제35권12호
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    • pp.1293-1300
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    • 2011
  • 물 냉각기의 응축기와 증발기의 형상(길이, 관 직경, 관수, 통로 수)은 설비비용에 관련된 열전달 면적과 운전비용에 관련된 압력강하와의 조화로 결정될 수 있다. 물 냉각기 (냉동사이클)의 쉘-관 형상의 열교환기(응축기와 증발기)의 관 내부로 물이 통과할 때, 주어진 냉각부하와 요구조건을 만족하면서, 물 압력강하가 작은 설계조건에 초점을 맞추었다. 상업용 강화튜브의 사용과 상용 소프트웨어를 사용한 해석결과의 검증으로 실용성과 신뢰성 확보를 도모하였다. 해석결과, 관 통로 수를 적게, 관 직경을 크게, 관 수를 많게 선정하면, 관 길이를 짧게 하므로 물측 압력강하를 줄일 수 있었다. 그러나, 관수가 특정값보다 많을 때는 오히려 작은 관 직경을 사용하는 것이, 내부열저항의 감소로 인한 단위 길이 당 총열저항 감소 때문에, 관 길이를 짧게 하여 설비비용을 줄일 수 있었다.

암모니아-물 랭킨사이클의 증발기에서의 엑서지 및 엔트랜시 성능 특성 해석 (Performance Characteristics Analysis of Evaporator in Ammonia-Water Rankine Cycle Based on Exergy and Entransy)

  • 김경훈;정영관
    • 한국수소및신에너지학회논문집
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    • 제30권6호
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    • pp.621-628
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    • 2019
  • The use of the ammonia-water zeotropic mixture as a working fluid in the power generating system has been considered as a proven technology for efficient recovery of low-grade heat sources. This paper presents a thermodynamic performance analysis for ammonia-water evaporator using low-grade heat source, based on the exergy and entransy which has been recently introduced as a physical quantity to describe the heat transfer ability of an object. In the analysis, effects of the ammonia mass fraction and source temperature of the binary mixture are investigated on the system performance such as heat transfer, effectiveness, exergy destruction, entransy dissipation, and entransy dissipation based thermal resistance. The results show that the ammonia mass concentration and the source temperature have significant effects on the thermodynamic system performance of the ammonia-water evaporator.

직접접촉식 LNG기화기 응용을 위한 칼럼 열교환기 기포특성에 관한 연구 (The Characteristics of Bubbles in a Column Heat Exchanger for the Application of Direct Contact LNG Evaporator)

  • 김성종;한승탁;김종보
    • 설비공학논문집
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    • 제3권2호
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    • pp.142-151
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    • 1991
  • In the present investigation, it has been proposed to utilize a direct contact heat exchanger as an evaporator to solve the difficulties such as scaling, corrosion and law thermal efficiencies, associated with the conventional evaporator. Liquified nitrozen was utilized as a working fluid to investigate basic natures of bubble dynamics in the evaporator, and spray nozzles were adopted to inject liquified nitrozen into the spray column with varying flow rates of dispersed phase fluids. Experimentations were carried out in the range of $6.54{\times}10^{-4}kg/s$ - 0.030 kg/s for dispersed phase flow rates with one, three and five nozzle holes. Observing the bubble dynamics for the evaporator the feasibility of utilizing a direct contact heat exchanger as a LNG evaporator has been evaluated. The results show that no eruption phenomena was observed in the present investigation with $LN_2$ and the interface between $N_2$ bubbles and water was fully turbulent. It is believed that the high injection velocity of $LN_2$ through the spray nozzles provide good mixing effects for both heat and mass transfers between water and $N_2$ bubbles. Ice was formed on the surface of the spray nozzle for higher $LN_2$ flow rates. However, even in this case, it is observed that the ice was detached as soon as it was formed. Under the present experimental conditions, the shapes of $LN_2$ bubbles were in the spherical-cap region according to the Clift, Grace and Weber Graphs. The height of foam region caused by the breakup of larger bubbles keeps increasing with high injection velocities until it reaches it's maximum height.

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AMTEC의 소디움액체 순환윅에서 압력손실 및 열손실해석 (Analysis of Pressure Drop and Heat Loss in Liquid Sodium Circulation Wick of AMTEC)

  • 이기우;이욱현;이석호;이계복
    • 대한기계학회논문집B
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    • 제36권9호
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    • pp.953-960
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    • 2012
  • AMTEC기술은 열을 직접 전기로 변환시키는 기술로서 소디움을 작동유체로 사용하고 있으며, 작동유체의 순환은 모세관윅을 사용한다. 순환계통에는 증발부윅, 순환윅 및 응축부윅으로 구성되고, 각각의 윅은 소디움의 액체 또는 증기가 순환하면서 압력손실이 발생하므로 소디움의 순환을 위해서는 증발부윅의 모세관압력이 윅내의 총압력손실보다 커야만 한다. 본 연구에서는 100 watt급의 AMTEC시제품설계을 위해 소디움의 순환계통으로 구성되는 증발부윅, 순환윅 및 응축부윅에서의 압력손실과 증발부에서 응축부로의 열손실을 순환윅의 직경과 길이에 대해 분석하여 증발부윅의 소결입자 직경과 순환윅의 설계에 활용하코저 하였으며, 분석결과에서 순환계통의 총압력손실보다 큰 모세관압력을 위해서는 증발부윅의 소결입자크기는 10 ${\mu}m$이 적합한 결과를 얻었다.

상변화 물질을 조합한 히트파이프의 성능 특성에 관한 연구 (A Study on the Performance Characteristics of a Heat Pipe Combined with PCM)

  • 박영학;정의국;부준홍
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2007년도 춘계학술대회B
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    • pp.2119-2123
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    • 2007
  • This study deals with performance characteristics of heat pipe combined with a solid-liquid phase change material(PCM). The outer diameter of the heat pipe was 9.5 mm and the total length was 600 mm, where the evaporator, the adiabatic section and the condenser lengths were equally 200 mm. A paraffin wax having a melting point of 58.5$^{\circ}C$ was used as PCM. The paraffin container was attached to the adiabatic section of the heat pipe. The paraffin container had outer diameter of 18 mm, wall thickness of 1.2 mm and the total length of 100 mm. The heat pipe was tested with tilt angle of horizontal degree and favorite angle 10 degree, with evaporator lower position to provide stable operation of the heat pipe. Input thermal load was varied from 40 W, with increment of 40 W, to above 100 W until the maximum temperature of the heat pipe wall reached 200$^{\circ}C$. Test results of the PCM heat pipe were presented in comparison with conventional heat pipe of the same basic dimensions. The performance was analyzed in terms of temperature distribution, thermal resistance and heat transport capability.

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