• Title/Summary/Keyword: Thermal coefficient of resistance

Search Result 309, Processing Time 0.029 seconds

Design and Fabrication of Silicon Flow Sensor For Detecting Air Flow (유속 감지를 위한 실리콘 유량센서의 설계 및 제작)

  • 이영주;전국진;부종욱;김성태
    • Journal of the Korean Institute of Telematics and Electronics A
    • /
    • v.31A no.5
    • /
    • pp.113-120
    • /
    • 1994
  • Silicon flow sensor that can detect the velocity and direction of air flow was designed and fabricated by integrated circuit process and bulk micromachining technique. The flow sensor consists of three-layered dielectric diaphragm, a heater at the center of the diaphragm, and four thermopiles surrounding the heater at each side of diaphragm as sensing elements. This diaphragm structure contributes to improve the sensitivity of the sensor due to excellent thermal isolation property of dielectric materials and their tiny thickness. The flow sensor has good axial symmetry to sense 2-D air flow with the optimized sensing position in the proposed structure. The sensor is fabricated using CMOS compatible process followed by the anisotropic etching of silicon in KOH and EDP solutions to form I$\mu$ m thick dielectric diaphragm as the last step. TCR(Temperature Coefficient of Resistance) of the heater of the fabricated sensors was measured to calculate the operating temperature of the heater and the output voltage of the sensor with respect to flow velocity was also measured. The TCR of the polysilicon heater resistor is 697ppm/K, and the operating temperature of the heater is 331$^{\circ}C$ when the applied voltage is 5V. Measured sensitivity of the sensor is 18.7mV/(m/s)$^{1/2}$ for the flow velocity of smaller than 10m/s.

  • PDF

Characteristics of tantalum nitride thin film resistors deposited on $SiO_2/Si$ substrate using D.C-magnetron sputtering

  • Cuong, Nguyen Duy;Phuong, Nguyen Mai;Kim, Dong-Jin;Kang, Byoung-Don;Kim, Chang-Soo;Yoon, Soon-Gil
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2005.07a
    • /
    • pp.64-65
    • /
    • 2005
  • The structural and electrical properties of the films are investigated as a function of nitrogen/argon ratio at room temperature and at various deposition temperatures. The phase changes as $Ta_2N$ or TaN in the films were observed as nitrogen/argon ratio increases from 3% to 25%. The phase changes were associated with a change in the resistivity and TCR (temperature coefficient of resistance) of the films. TCR values of the films deposited at room temperature and different nitrogen contents were negative, and strongly decreased with the increase in nitrogen/argon ratio. The Ta2N films deposited at nitrogen/argon ratio of 3% show improved TCR values and thermal stability with increasing deposition temperature. The $Ta_2N$ films grown at nitrogen/argon ratio of 3% and the temperature of $200^{\circ}C$ showed a TCR value of -47 $ppm/^{\circ}C$, which is close to near-zero TCR in the range of deposition temperature.

  • PDF

Active Metal Brazing Applied to Joining of ZrO2-Ti Alloy (ZrO2-Ti합금의 활성금속 브레이징)

  • Kee, Se-Ho;Park, Sang-Yoon;Jung, Jae-Pil;Kim, Won-Joong
    • Journal of Welding and Joining
    • /
    • v.30 no.3
    • /
    • pp.38-43
    • /
    • 2012
  • In this study, active metal brazing methods for $ZrO_2$ and Ti alloy were discussed. To get a successful metal-ceramic bonding, various factors (melting temperature, corrosion, sag resistance, thermal expansion coefficient etc. of base materilas and filler metal) should be considered. Moreover, in order to clarify bonding between the metal and ceramic, the mechanism of the interfacial structure of the joints should be identified. The driving force for the formation of metal and ceramic interfaces is the reduction of the free energy which occurs when their contact becomes complete. Interfacial bonding depends on the material combinations and the bonding processes. This study describes the bonding between ceramic and metal in an active metal brazing.

Fabrication of Hypereutectic Spray-formed Al-Si Alloy and Its Deformation Behavior (분무성형을 통한 과공정 Aㅣ-Si 합금 제조 및 기계적 특성)

  • Ha T. K.;Kim J.;Park W. J.;Lee E. S.;Ahn S.;Chang Y. W.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
    • /
    • 2001.05a
    • /
    • pp.20-23
    • /
    • 2001
  • Hypereutectic Al-25Si alloy, which is expected to be applied to the cylinder-liner-part of the engine-block of an automobile due to its excellent wear resistance, low density and low thermal expansion coefficient, has been fabricated through a spray forming process. The obtained microstructure of the hypereutectic Al-25Si alloy appeared to consist of Al matrix and equiaxed Si particles of average diameter of 5-7 mm. To characterize the deformation behavior of this alloy, a series of load relaxation and compression tests have been conducted at temperatures ranging from RT to $500^{\circ}C$. The strain rate sensitivity parameter (m) of this alloy has been found to be very low (0.1) below $400^{\circ}C$ and reached maximum value of about 0.2 at $500^{\circ}C$. During the deformation above $300^{\circ}C$ in compression, strain softening has been observed. The diagram of extrusion pressure vs. ram-speed has been constructed. The extrusion has been successfully conducted at the temperatures of $300^{\circ}C$ and above with the ratio of area reduction of 28 and 40 in this study.

  • PDF

Experimental Study to Investigate the Factors Affecting Durability of Spalled Cement Concrete Pavements (스폴링이 발생한 콘크리트 포장의 내구성 영향인자 조사를 위한 실험적 연구)

  • Yoo, Tae Seok;Ryu, SungWoo;Kim, Jin Cheol
    • International Journal of Highway Engineering
    • /
    • v.20 no.2
    • /
    • pp.27-34
    • /
    • 2018
  • PURPOSES : It is necessary to prevent premature failure of concrete pavements caused by durability problems. The purpose of this study was to find factors affecting the durability of concrete pavements, and suggest improvement methods for existing concrete mix design. METHODS : Factors influencing durability were derived from laboratory test data for common field failure conditions and main properties of concrete cores taken from the field. The improvement of concrete properties was investigated by evaluating the performance of existing and proposed mix proportion designs and curing methods. RESULTS : The compressive strength and the absorbing performance of the low Blaine cement and the high-strength mixture were better than those of the Type I cement. Wet curing showed better compressive strength, elastic modulus, coefficient of thermal expansion, and absorption performance than air curing or compound curing. As a result of comparing concrete cores collected in the field, the sections with good durability showed good performance in terms of resistance to chloride ion penetration, absorption, and initial absorption rate. CONCLUSIONS : The absorption performance was considered as a possible foactor affecting durability of cement concrete pavements as a result of field core tests. In order to improve the durability of the pavement concrete, it is necessary to improve the existing mixtures and curing methods.

Research on Performance of LSM Coating on Interconnect Materials for SOFCs

  • Zhai, Huijuan;Guan, Wanbing;Li, Zhi;Xu, Cheng;Wang, Wei Guo
    • Journal of the Korean Ceramic Society
    • /
    • v.45 no.12
    • /
    • pp.777-781
    • /
    • 2008
  • Experiments were conducted using SUS430 and Crofer 22 APU steels coated by LSM using plasma spray and slurry spray methods, respectively. High-temperature conductivity and oxidation resistance were investigated. For comparison, SUS430 and Crofer 22 APU without LSM coating were also investigated and coefficient of thermal expansion (CTE) was measured. The results show that the materials without LSM coating exhibit almost the same CTE as YSZ electrolyte in a range of temperatures of $550{\sim}850^{\circ}C$. When coated with LSM, the oxidation rate of the steels decreases by $30{\sim}40%$ using slurry spray and by $10{\sim}30%$ using plasma spray whereas the steels using plasma spray have a better high-temperature conductivity than the steels using slurry spray. It is thus concluded that the LSM coating has a limited effect on increasing high-temperature conductivity while it can effectively reduce the oxidation of the steels.

Study on the Capillary Limitation in Copper-Water Heat Pipes with Screen Wicks

  • Park, Ki-Ho;Lee, Ki-Woo;Noh, Seung-Yong;Rhi, Seok-Ho;Yoo, Seong-Yeon
    • International Journal of Air-Conditioning and Refrigeration
    • /
    • v.12 no.1
    • /
    • pp.21-29
    • /
    • 2004
  • This paper is to study the heat transfer performance of the copper-water heat pipe with screen wicks. Recently, the semiconductor capacity of an electronic unit becomes larger, but its size becomes much smaller. As a result, a high- performance cooling system is needed. Experimental variables are inclination angles, temperatures of cooling waters and the mesh number of screen wicks. The distilled water was used as a working fluid. Based on the experimental results, when the copper-water heat pipe of 6mm diameter is used at the top heat mode, the heat transfer performance of 100 mesh 2 layers heat pipe is better than that of 150 and 200 mesh. The thermal resistance of the two layers with the 100-mesh screen was 0.7-$0.8^{\circ}C$/W.

Deformation Behavior of Spray-formed Hypereutectic Al-Si Alloys (분무성형을 통해 제조된 과공정 Al-Si 합금의 기계적 특성)

  • Park W. J.;Ha T. K.;Ahn S.;Chang Y. W.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
    • /
    • 2001.10a
    • /
    • pp.285-288
    • /
    • 2001
  • Hypereutectic Al-25Si-X alloys, expected to be applied to the cylinder-liner-part of the engine-block of an automobile due to the excellent wear resistance, low density and low thermal expansion coefficient has been fabricated through a spray forming process. The obtained microstructure of the hypereutectic Al-25Si-X alloy appeared to consist of Al matrix and equiaxed Si particles of average diameter of $5-7{\mu}m$. To characterize the deformation behavior of this alloy, a series of load relaxation and compression tests have been conducted at temperatures ranging from RT to $500^{\circ}C$. The strain rate sensitivity parameter (m) of this alloy has been found to be very low (0.1) below foot and reached 0.2 at $500^{\circ}C$. During the deformation above 300'c in compression, strain softening has been observed. The diagram of extrusion pressure vs. ram-speed has been constructed, providing the extrusion condition of Al-25Si-X alloys.

  • PDF

Characterization of Subsurface Damage in Si3N4 Ceramics with Static and Dynamic Indentation

  • Kim, Jong-Ho;Kim, Young-Gu;Kim, Do-Kyung
    • Journal of the Korean Ceramic Society
    • /
    • v.42 no.8 s.279
    • /
    • pp.537-541
    • /
    • 2005
  • Silicon nitride is one of the most successful engineering ceramics, owing to a favorable combination of properties, including high strength, high hardness, low thermal expansion coefficient, and high fracture toughness. However, the impact damage behavior of $Si_3N_4$ ceramics has not been widely characterized. In this study, sphere and explosive indentations were used to characterize the static and dynamic damage behavior of $Si_3N_4$ ceramics with different microstructures. Three grades of $Si_3N_4$ with different grain size and shape, fine-equiaxed, medium, and coarse-elongated, were prepared. In order to observe the subsurface damaged zone, a bonded-interface technique was adopted. Subsurface damage evolution of the specimens was then characterized extensively using optical and electron microscopy. It was found that the damage response depends strongly on the microstructure of the ceramics, particularly on the glassy grain boundary phase. In the case of static indentation, examination of subsurface damage revealed competition between brittle and ductile damage modes. In contrast to static indentation results, dynamic indentation induces a massive subsurface yield zone that contains severe micro-failures. In this study, it is suggested that the weak glassy grain boundary phase plays an important role in the resistance to dynamic fracture.

Phase formation and microstructural characteristics of ytterbium silicates coatings fabricated by plasma spraying with Ar/He gas compositions for environmental barrier coating applications (플라즈마용사로 증착된 환경차폐코팅 이터븀 실리케이트의 Ar/He 가스 조성에 따른 상형성 및 미세구조 특성)

  • Choi, Jae-Hyeong;Kim, Seongwon;Kim, Ji-Yoo;Moon, Hung Soo
    • Journal of the Korean institute of surface engineering
    • /
    • v.55 no.6
    • /
    • pp.376-382
    • /
    • 2022
  • Yb2Si2O7 has a coefficient of thermal expansion similar to that of the base material of SiC and has excellent corrosion resistance in a high-temperature oxidizing atmosphere including water vapor, so it is being studied as one of the materials for environmental barrier coatings (EBCs). In this study, Yb2Si2O7 powder granule is deposited using atmospheric plasma spraying (APS) with different Ar/He ratios. Phase formation and microstructural characteristics are investigated with the coated specimens. In the coating layer, the crystallinity decreased, and the amorphous content increased from an increase in the ratio of Ar. In addition, the various types of particles involved by local volatilization of Si according to the Ar/He ratios were identified.