• Title/Summary/Keyword: Thermal calculation

검색결과 796건 처리시간 0.041초

고속 열처리공정 시스템에서의 웨이퍼 상의 온도분포 추정 (Estimation of Temperature Distribution on Wafer Surface in Rapid Thermal Processing Systems)

  • 이석주;심영태;고택범;우광방
    • 제어로봇시스템학회논문지
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    • 제5권4호
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    • pp.481-488
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    • 1999
  • A thermal model based on the chamber geometry of the industry-standard AST SHS200MA rapid thermal processing system has been developed for the study of thermal uniformity and process repeatability thermal model combines radiation energy transfer directly from the tungsten-halogen lamps and the steady-state thermal conducting equations. Because of the difficulties of solving partial differential equation, calculation of wafer temperature was performed by using finite-difference approximation. The proposed thermal model was verified via titanium silicidation experiments. As a result, we can conclude that the thermal model show good estimation of wafer surface temperature distribution.

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효율적 수치해석기법을 이용한 반도체 페키지의 열방출 해석 (Efficient Approach to Thermal Modeling for IC Packages)

  • Seung Mo Kim;Choon Heung Lee
    • 마이크로전자및패키징학회지
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    • 제6권2호
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    • pp.31-36
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    • 1999
  • An efficient method for thermal modeling of QFP is Proposed. Thermal measurement data are given to verify the method. In parallel with the experiment, an exact full 3-D model calculation is also provided. One fonds that there is an excellent agreement between validation data and the efficient model data.

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Thermal Shock Resistance of $Al_{2}O_{3}$- and Fe-$Al_{2}TiO_{5}$-based Castable Refractories

  • Liu, T.;Latella, B.A.;Bendeich, P.
    • The Korean Journal of Ceramics
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    • 제4권4호
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    • pp.345-351
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    • 1998
  • Thermal shock resistance of $Al_2O_3$- and Fe-$Al_2TiO_5$-based Castable Refractories was studied using a central heating technique. Ring type specimens, 10mm thick and 20 and 100mm inner and outer diameters, respectively, were rapidly heated on the internal surface of the centre hole using a high power electrical heating element. The temperature field was measured experimentally and modelled using finite element analysis (FEA). The thermal stress field was also modelled using FEA. A radial notch was introduced to the ring specimens to enable calculation of the thermal stress intensity factors (SIF). A special LVDT device was incorporated in the thermal shock tester to monitor crack mouth opening displacement (COD). The thermal shock fracture initiation and crack propagation behaviour of the castable refractories were ascertained using the COD measurements and the fracture mechanics analysis data.

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Thermal Fluid Mixing Behavior during Medium Break LOCA in Evaluation of Pressurized Thermal Shock

  • Jung, Jae-Won;Bang, Young-Seok;Seul, Kwang-Won;Kim, Hho-Jung
    • 한국원자력학회:학술대회논문집
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    • 한국원자력학회 1998년도 춘계학술발표회논문집(1)
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    • pp.635-640
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    • 1998
  • Thermal fluid mixing behavior during a postulated medium-size hot leg break loss of coolant accident is analyzed for the international comparative assessment study on pressurized thermal shock (PTS-ICAS) proposed by OECD-NEA. The applicability of RELAP5 code to analyze thermal fluid mixing behavior is evaluated through a simple modeling relevant to the problem constraints. Based on the calculation result, the onset of Thermal stratification is investigated using Theofanous's empirical correlation. Sensitivity calculations using a fine node model and crossflow model are also performed to evaluate the modeling capability on multi-dimensional characteristics related to thermal fluid mixing.

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수치해석에 의한 국부냉방시스템의 온열환경 및 쾌적성 분석 (Numerical Analysis of Thermal Environments and Comfort for Local Air Conditioning System)

  • 엄태인;경남호;신기식
    • 설비공학논문집
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    • 제15권4호
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    • pp.318-328
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    • 2003
  • Numerical simulation using computational fluid dynamics (CFD) is performed to calculate the velocities and temperature profiles of air in adjacent to a worker within the individual local air conditioning system. The calculation domain is the space of ㄴ between walls and a worker in the climate room. The fresh air is supplied from the three different inlets located on the right, left and center wall in the climate room. In this study, the calculated data of velocities and temperature profiles of air in the nearest the skin of a worker are used to calculate the PMV (Predicted Mean Vote) for evaluation of thermal comfort of a worker in the local air conditioning system. Because the data of veto-cities temperature profiles of air in adjacent to a worker and the PMV of a worker are the design parameters of the local air conditioning system. The results of calculation show that the fresh air velocity and injection position are closely related to the PMV value. In individual air condition system of ㄴ, the appropriate PMV are obtained when the fresh air velocity and position are 1.0 m/s, throat of a worker and are 1.5 m/s, head of a worker, respectively. The method of numerical calculation is effective to obtain the optimum velocity and position of the fresh air for optimum the PMV and energy saving in individual local air conditioning system.

건물에너지 해석을 위한 간이열부하 해석프로그램 개발에 관한 연구 (A Study on Development of Simplified Thermal Load Calculation Program for Building Energy Analysis)

  • 강윤석;엄미은;임병찬;박종일
    • 대한설비공학회:학술대회논문집
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    • 대한설비공학회 2008년도 하계학술발표대회 논문집
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    • pp.72-77
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    • 2008
  • About 25% of overall energy use of Korea had been spent in buildings. It is crucial to acknowledge the importance of saving energy in buildings. In order to save energy, it is important to predict accurate energy use. There are numerous energy simulation program that predicts both energy load and energy use. The problem of the energy simulation program is that it holds too many input variables, and it needs experts to model a building. So, our purpose of this study is to develop the simplified thermal load calculation program for building energy analysis which eliminates coordinates of building components instead of using full coordinates by using DOE2. Since the engine of the program is DOE2, we verified the validity of S-DOE by comparing peak heating & cooling load results and annual energy use results. The results shows that there are little difference between VisualDOE and S-DOE. Also it showed that S-DOE took less time to input variables than VisualDOE. These results reveals that the application of S-DOE is possible to accurately predict energy load and energy use of the building and still have strong point that it takes less time to analyse building energy.

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Prediction of the effective thermal conductivity of microsphere insulation

  • Jin, Lingxue;Park, Jiho;Lee, Cheonkyu;Seo, Mansu;Jeong, Sangkwon
    • 한국초전도ㆍ저온공학회논문지
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    • 제16권1호
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    • pp.36-41
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    • 2014
  • Since glass microsphere has high crush strength, low density and small particle size, it becomes alternative thermal insulation material for cryogenic systems, such as storage and transportation tank for cryogenic fluids. Although many experiments have been performed to verify the effective thermal conductivity of microsphere, prediction by calculation is still inaccurate due to the complicated geometries, including wide range of powder diameter distribution and different pore sizes. The accurate effective thermal conductivity model for microsphere is discussed in this paper. There are four mechanisms which contribute to the heat transfer of the evacuated powder: gaseous conduction ($k_g$), solid conduction ($k_s$), radiation ($k_r$) and thermal contact ($k_c$). Among these components, $k_g$ and $k_s$ were calculated by Zehner and Schlunder model (1970). Other component values for $k_c$ and $k_r$, which were obtained from experimental data under high vacuum conditions were added. In this research paper, the geometry of microsphere was simplified as a homogeneous solid sphere. The calculation results were compared with previous experimental data by R. Wawryk (1988), H. S. Kim (2010) and the experiment of this paper to show good agreement within error of 46%, 4.6% and 17 % for each result.

Calculation of thermal neutron scattering data of MgF2 and its effect on beam shaping assembly for BNCT

  • Jiaqi Hu;Zhaopeng Qiao;Lunhe Fan;Yongqiang Tang;Liangzhi Cao;Tiejun Zu;Qingming He;Zhifeng Li;Sheng Wang
    • Nuclear Engineering and Technology
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    • 제55권4호
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    • pp.1280-1286
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    • 2023
  • MgF2 as a moderator material has been extensively used in the beam shaping assembly (BSA) that plays an important role in the boron neutron capture therapy (BNCT). Regarded as important for applications, the thermal neutron scattering data of MgF2 were calculated, based on the phonon expansion model. The structural properties of MgF2 were researched by the VASP code based on the ab-initio methods. The PHONOPY code was employed to calculate the phonon density of states. Furthermore, the NJOY code was used to calculate the thermal neutron scattering data of MgF2. The calculated inelastic cross sections plus absorption cross sections are in agreement with the available experimental data. The neutron transport in the BSA has been simulated by using a hybrid Monte-Carlo-Deterministic code NECP-MCX. The results indicated that compared with the calculation of the free gas model, the thermal neutron flux and epithermal neutron flux at the BSA exit port calculated by using the thermal neutron scattering data of MgF2 were reduced by 27.7% and 8.2%, respectively.

Research on Thermal Refocusing System of High-resolution Space Camera

  • Li, Weiyan;Lv, Qunbo;Wang, Jianwei;Zhao, Na;Tan, Zheng;Pei, Linlin
    • Current Optics and Photonics
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    • 제6권1호
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    • pp.69-78
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    • 2022
  • A high-resolution camera is a precise optical system. Its vibrations during transportation and launch, together with changes in temperature and gravity field in orbit, lead to different degrees of defocus of the camera. Thermal refocusing is one of the solutions to the problems related to in-orbit defocusing, but there are few relevant thermal refocusing mathematical models for systematic analysis and research. Therefore, to further research thermal refocusing systems by using the development of a high-resolution micro-nano satellite (CX6-02) super-resolution camera as an example, we established a thermal refocusing mathematical model based on the thermal elasticity theory on the basis of the secondary mirror position. The detailed design of the thermal refocusing system was carried out under the guidance of the mathematical model. Through optical-mechanical-thermal integration analysis and Zernike polynomial calculation, we found that the data error obtained was about 1%, and deformation in the secondary mirror surface conformed to the optical index, indicating the accuracy and reliability of the thermal refocusing mathematical model. In the final ground test, the thermal vacuum experimental verification data and in-orbit imaging results showed that the thermal refocusing system is consistent with the experimental data, and the performance is stable, which provides theoretical and technical support for the future development of a thermal refocusing space camera.