• Journal of Sensor Science and Technology
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• v.3 no.1
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• pp.12-18
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• 1994

In this study, we fabricated and characterized a calorimetric-type flow sensing element using a micromachined silicon substrate. The cooling and heating effects resulted from the gas flow were measured by two temperature sensors located at both sides of the heating resistor, and the insulator diaphragm was employed as a substrate in order to improve thermal isolation. The sensor generated $0{\sim}378.4mV$ output signal under 10V bridge-applied voltage when the nitrogen gas was passed on the sensor surface having a mass flow rate of $0{\sim}0.25grs/min$, and reached to the stable operating condition within 10 seconds.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.4 no.2
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• pp.63-70
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• 2003

In this paper, an MFC (Mass Flow Controller) which is widely used in many semiconductor manufacturing processes for controlling the mass flow rate of a gas is designed and implemented using the PIC 16F876 of Microchip, Inc. The MFC implemented in this thesis has the form of hybrid-type, i.e., the mixed-type of the analog-type MFC, which has many problems such as low accurary, and digital-type MFC, which use an expensive DSP (Digital Signal Processor) and an ADC (Analog to Digital Convertor) with high precision. The MFC is consists of the sensor unit, the control unit and the actuator unit, and it has used the automatic calibration algorithm and the reference table method for the improvement of the performance.

• Proceedings of the Korean Geotechical Society Conference
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• 2006.03a
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• pp.75-85
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• 2006

In recent geotechnical engineering, geothermal approach has been on the horizon to deal with geoenvironmental issues, freezing and thawing problems, and seepage phenomenon in dams and embankments. In this study, geothermal characteristic through inner body of dams and its influence on the seepage flow were experimented by lab test and field instrumentation. Also, one of up-to-date temperature monitoring technique, called as multi-channel thermal line sensing, was evaluated its availability. As a result of lab test, it is found that the seepage flow has influence on the geothermal characteristic and a potential of finding phreatic line and seepage fluctuation could be possible by continuous temperature monitoring using thermal line sensing skills. These kine of geothermal information could be available to the modelling of water geo-structure interaction. Out of short-term field tests, clear water table and temperature distribution of a dam were easily found through temperature monitoring in holes located near a reservoir and holes within a depth of constant temperature layer. However, it is also found that the geothermal flow and finding seepage line could not be easily understandable through multi-channel temperature monitoring because of the existence of constant temperature field, thermal conductivity of soils and rocks, and unsaturated characteristics of geo-material. In this case, long-term geothermal monitoring is recommended to find sudden fluctuation of seepage line and amount of leakage.

• Progress in Superconductivity
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• v.14 no.2
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• pp.87-91
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• 2012

Metallic magnetic calorimeters (MMCs) are one of the most competitive low temperature detector (LTD) readout sensors. They have the advantages of high time resolution, no heat dissipation, and a wide range of operating temperature. We apply MMCs to our neutrinoless double beta decay ($0v{\beta}{\beta}$) search experiment. A $CaMoO_4$ crystal was employed as both a source of $0v{\beta}{\beta}$ and an energy absorber. The crystal was thermally connected to a MMC sensor. We set a simple thermal model for this detector and measured pulse shapes are compared with a numerical solution of the thermal model.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.23 no.12
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• pp.201-209
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• 2009

In power plant operations, sensor values often exhibit erroneous values due to their failures or the intrusions of various noises. However, most of the power plant monitoring and fault diagnosis systems perform their tasks based on the assumptions that the collected sensor values are correct all the times. These assumptions, which are not valid, often lead to serious consequences such as power plant trips. In this paper, we propose a power plant sensor value validation technique that can utilize the relationships existing among the sensor values as the sensor redundancy. The proposed technique is applied to the flow meters installed along boiler feed water systems of a typical tubular type boiler thermal power plant and shows a good potential of future applications.

• Journal of Ocean Engineering and Technology
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• v.29 no.2
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• pp.169-174
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• 2015

This paper addresses experimental methodologies to measure the temperature-dependent thermal conductivity of the insulation materials popularly used for LNG cargo containment systems. The measurement techniques considered in this paper are the guarded hot plate (GHP) method and heat flow method (HFM). The former is based on the power supplied to the hot plate to keep the temperature constant, and the latter is based on a direct heat flux measurement. In order to improve the accuracy of the HFM, the thermal conductivity obtained by GHP was cross-compared with the HFM results, and a calibration factor was derived. It was found that the thermal conductivities measured by the two methods corresponded well under room temperature, but the deviation tended to slightly increase as the temperature decreased. Because of the easy installation and operability of HFM, it can be used to measure thermal conductivity in a large scale mock-up test or unit insulation panel test, where the GHP method is difficult to apply.

• Transactions on Electrical and Electronic Materials
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• v.8 no.4
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• pp.161-165
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• 2007

In this work, Ni thin films with different thickness from $1,523{\AA}\;to\;9,827{\AA}$ were deposited for the application of micro thermal flow sensors by a magnetron sputtering and oxidized through annealing at $450^{\circ}C$ with increasing annealing time. The initial variation of resistivity decreased radically with increasing films thickness, then gradually stabilizes as the thickness increases. The resistivity of Ni thin films with $3,075{\AA}$ increased suddenly with increasing annealing time at $450{\circ}C$, then gradually stabilizes as the thickness increases after the annealing time 9 h. In case of $3,075{\AA}\;and\;9,827{\AA}$ films, the average of TCR values, measured for the operating temperature range of $0^{\circ}C\;to\;180^{\circ}C$, were $2,413.1ppm/^{\circ}C\;and\;4,438.5ppm/^{\circ}C$, respectively. Because of their high resistivity and very linear TCR, Ni oxide thin films are superior to pure Ni and Pt thin films for flow and temperature sensor applications.

• Journal of Sensor Science and Technology
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• v.8 no.5
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• pp.400-406
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• 1999

Piezoresistive flow sensors with four different types of microbeam structures were fabricated using (100), n/$n^+$/n three-layer silicon wafer and their characteristics were investigated. Piezoresistors were formed through boron diffusion and its values were about $1\;k{\Omega}$. Three-dimensional silicon microbeams were constructed by porous silicon micromachining and curled microbeams were fabricated by the difference in the thermal expansion coefficient between silicon and metal. The output response of the fabricated sensor was evaluated through half- bridge. The output voltage increased with increasing length of microbeam at the same flow velocity, while the detectable measurement range extended with decreasing length of microbeam. The output voltage of the fabricated sensors were increased with quotient of 3.2 of the flow rate since the stress of the beam versus the gas flow showed non-linear characteristics.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.138-143
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• 2005

The important problem in the high speed spindles is to reduce and minimize the thermal effect by the motor and ball bearings. Thermal characteristics according to the bearing preload and hollow shaft cooling are studied for the spindle with the oil mist lubrication and high frequency motor. Temperature distribution and thermal deformation according to the spindle speed, preload and flow rate are measured by thermocouple and gap sensor. Temperature distribution and thermal deformation are analyzed by using the finite element method. The results of analysis are compared with the measured data. This paper show that the suitable preload and hollow shaft cooling are very effective to minimize the thermal effect by the motor and ball bearings. This study indicates that temperature distribution and thermal deformation of the high speed spindle system can be estimated reasonably by using the three dimensional model through the finite element method and supports thermal optimization and more effective cooling method.

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2000.05a
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• pp.52-59
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• 2000

Experimental studies were performed to improve the THC emission characteristics by optimizing the flow in the exhaust manifold and CCC in a SI engine. For this purpose the flow characteristics in the exhaust manifold and CCC were measured by using LDV technique under various engine conditions, Referring to these data a new type exhaust manifold was designed to improve the cold-start emission characteristics and the response characteristics of {{{{ OMICRON _2}}}} sensor by optimizing the flow pattern and reducing the thermal inertia of the exhaust manifold system. It was found through the vehicle emission tests that the emission characteristics of THC of the new type exhaust manifold was improved by 12% through the optimizing the flow pattern in the exhaust manifold.