• Title/Summary/Keyword: Thermal Estimation

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An Efficient Thermal Stress Estimation Using Block Adaptive Filtering

  • Tai, Ming-Lang
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.1269-1271
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    • 2009
  • We had proposed fast thermal stress estimation methodology for the components on system board when the system is stationary within specific ambient air temperature. Now, we will propose one efficient thermal stress estimation methodology, block adaptive filtering methodology, for the FPD electronic system board which is enclosed by mechanical cover.

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A Prediction Method of Temperature Distribution on the Wafer in a Rapid Thermal Process System with Multipoint Sensing (고속 열처리 시스템에서 웨이퍼 상의 다중점 계측에 의한 온도 분포 추정 기법 연구)

  • Sim, Yeong-Tae;Lee, Seok-Ju;Min, Byeong-Jo;Jo, Yeong-Jo;Kim, Hak-Bae
    • The Transactions of the Korean Institute of Electrical Engineers D
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    • v.49 no.2
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    • pp.62-67
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    • 2000
  • The uniformity of temperature on a wafer is one of the most important parameters to control the RTP (Rapid Thermal Process) with proper input signals. Since it is impossible to achieve the uniformity of temperature without exact estimation of temperature at all points on the wafer, the difficulty of understanding internal dynamics and structural complexities of the RTP is a primary obstacle to accurately measure the distributed temperatures on the wafer. Furthermore, it is also hard to accomplish desirable estimation because only few pyrometers have been commonly available in the general equipments. In the paper, a thermal model based on the chamber geometry of the AST SHS200 RTP system is developed to effectively control the thermal uniformity on the wafer. First of all, the estimation method of one-point measurement is developed, which is properly extended to the case of multi-point measurements. This thermal model is validated through certain simulation and experiments. The work can be usefully contributed to building a run-by-run or a real-time controls of the RTP.

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Inverse Estimation of Thermal Properties for APC-2 Composite (역열전도 기법을 이요한 복잡재료의 열물성치의 산정)

  • Jeong, Beop-Seong;Kim, Seon-Gyeong;Kim, Hui-Jun;Lee, U-Il
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.25 no.5
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    • pp.673-679
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    • 2001
  • The objective of this work is to estimate the temperature dependent thermal properties of the APC-2 composite using a inverse parameter estimation technique. The present inverse method features the estimation of the thermal conductivity and the volumetric heat capacity, which are dependent on the temperature inside the composite. Furthermore, the thermal conductivity is directionally dependent because of the aniosotropy of the composite. An on-line temperature measurement system with a suitable method of heating is built. A composite slab is fabricated using thermoplastic prepreg for the investigation. The corresponding computer code for evaluating the thermal properties inversely using the temperature reading transmitted from the measurement system is developed. The parameterized form is used for the rapid and stable estimation. The modified Newtons method is adopted for the solution technique of the inverse analysis. The estimated results are compared with the measured data from a previous study for the verification.

The estimation of thermal diffusivity using NPE method (비선형 매개변수 추정법을 이용한 열확산계수의 측정)

  • 임동주;배신철
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.14 no.6
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    • pp.1679-1688
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    • 1990
  • The method of nonlinear parameter estimation(NPE), which is a statistical and an inverse method, is used to estimate the thermal diffusivity of the porous insulation material. In order to apply the NPE method for measuring the thermal diffusivity, and algorithm for programing suitable to IBM personal computer is established, and is studied the statistical treatment of experimental data and theory of estimation. The experimental data obtained by discrete measurement using a constant heat flux technique are used to find the boundary conditions, initial conditions, and the thermal diffusivity, and then the final values are compared with the values obtained by some different methods. The results are presented as follows:(1) NPE method is used to establish the estimation of the thermal diffusivity and compared results with experimental output shows, that this method can be applicable to define the thermal diffusivity without considering hear flux types. (2) Because of all of the temperatures obtained by the discrete measurement on each steps of time are used to estimate the thermal diffusivity. Although some error in the temperature measurements of temperature are included in estimating process, its influences on the final value are minimzed in NPE method. (3) NPE method can reduce the experimental time including the time of data collecting in a few minutes and can take smaller specimen compared with steady state method. If the tube-type furnace is used, also the adjusting time of surrounding temperature can be reduced.

A Prediction Method of Temperature Distribution on the Wafer for Real-Time Control in a Rapid Thermal Process System (실시간 제어를 위한 고속 열처리 공정에서 웨어퍼 온도 분포 추정 기법)

  • Sim, Yeong-Tae;Yi, Seok-Joo;Kim, Hagbae
    • Journal of Institute of Control, Robotics and Systems
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    • v.6 no.9
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    • pp.831-835
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    • 2000
  • The uniformity of themperature on a wafer is a wafer is one the most important parameters to conterol the RTF(Rapid Thermal Process) with proper input signals. It is impossible to achieve the uniformity of temperature without the exact estimation of temperature ar all points on the wafer. There fore, it is difficult to understand the internal dynamics as well as the structural complexities of the RTP, which is aprimary obstacle to measure the distributed temperatures on the wafer accurately. Furthermore, it is also hard to accomplish desirable estimation because only a few pyrometers are available in the general equipments. In the paper, a thermal model based on the chamber grometry of the AST SHS200 RTP system is developed to effectively control the thermal uniformity on the wafer. First of all, the estimation method of one-point measurement is developed, which is properly extended to the case of multi-point measurements. This thermal model is validated through simulation and experiments. The proposed work can be utilized to building a run-by -run or a real-time control of the RTP.

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Estimation of Temperature Distribution on Wafer Surface in Rapid Thermal Processing Systems (고속 열처리공정 시스템에서의 웨이퍼 상의 온도분포 추정)

  • Yi, Seok-Joo;Sim, Young-Tae;Koh, Taek-Beom;Woo, Kwang-Bang
    • Journal of Institute of Control, Robotics and Systems
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    • v.5 no.4
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    • pp.481-488
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    • 1999
  • A thermal model based on the chamber geometry of the industry-standard AST SHS200MA rapid thermal processing system has been developed for the study of thermal uniformity and process repeatability thermal model combines radiation energy transfer directly from the tungsten-halogen lamps and the steady-state thermal conducting equations. Because of the difficulties of solving partial differential equation, calculation of wafer temperature was performed by using finite-difference approximation. The proposed thermal model was verified via titanium silicidation experiments. As a result, we can conclude that the thermal model show good estimation of wafer surface temperature distribution.

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V-Factor Estimation Under Thermal and Mechanical Stress for Circumferentially Cracked Cylinder (열하중 및 기계하중이 작용하는 원주 방향 균열 배관에 대한 V-계수 평가)

  • Song, Tae-Kwang;Oh, Chang-Kyun;Kim, Yun-Jae
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.32 no.12
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    • pp.1123-1131
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    • 2008
  • This paper provides V-factor estimation under combined mechanical and thermal load for circumferential cracks. Results are based on finite element analyses and effect of types and magnitudes of the thermal stress, crack geometry, the loading mode and plastic strain hardening on variations of the V-factor are investigated. The results of finite element analyses are compared with R6 values. As a result, it is shown that R6 gives generally conservative results. The conservatism is especially increased for the combination of large mechanical and thermal load. As a result, new estimation method which uses failure assessment line in R6 is proposed for V-factor and gives less conservative results.

Photoacoustic Determination of Thermophysical Properties of Thin Metallic Plates by Using Parameter Estimation (광음향학적 방법에 의한 얇은 금속판의 열물성 측정)

  • 김석원
    • Korean Journal of Optics and Photonics
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    • v.2 no.4
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    • pp.219-226
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    • 1991
  • The phase and the amplitude of the photoacoustic signal were measured as a function of chopping frequency for several kinds of widely used thin metallic plates (stainless steel 304, brass, aluminum and copper) attached to plexiglass backing. The experimental data have been analyzed systematically by parameter estimation technique based on the two-layer model developed from Rosencwaig-Gersho (R-G) theory. Using this analysis, the values of thermal diffusivity and thermal effusivity of the materials have been determined.

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A Study on the Thermal Effects Measurement and Uncertainty Estimation for High Precision Machine Tools (고정밀 공작기계의 열적효과 측정 및 불확도 추정에 관한 연구)

  • Son, Deok-Soo;Kim, Sang-Hwa;Park, Il-Hwan
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.12 no.2
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    • pp.107-113
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    • 2013
  • When the main spindle of high precision machine tools are run many hours, heat is generated in bearing parts of the inside of the spindle. Also, headstock is appeared distortion by inside and outside temperature difference of a machine. This paper studies method to measure behavior of machine tool about these thermal effects. In addition, it estimates measurement uncertainty factors which can be appeared in thermal effects measurement. Finding the factor of thermal affect measurement is important for estimation of measurement uncertainty. This paper measures thermal effects of high precision machine tools and evaluates the important factors of uncertainty.

A Study of Borehole Thermal Behavior with 1-Dimensional Model;Field Test Analysis included (1차원 모델에 의한 보어홀 열거동 해석 및 현지측정)

  • Kim, Dae-Ki;Woo, Joung-Son;Ro, Jeong-Geun;Lee, Se-Kyoun
    • 한국신재생에너지학회:학술대회논문집
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    • 2007.11a
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    • pp.550-554
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    • 2007
  • A one-dimensional heat transfer model coupled with parameter estimation is developed in this study to predict the effective thermal conductivities of soil formation and borehole resistances from in situ field test data. In this application a new method of using initial ignoring time(IIT) obtained from error estimation is tried and turned out to be successful in determining soil thermal conductivities. The validity of this model is accomplished through comparison of the predicted temperature profiles of the model with the data from laboratory scale experimental setting. Eleven test boreholes were constructed in Ochang, Chungcheong Buk Do, and thermal response test was carried out with each borehole. The results of the in situ tests were analyzed with our 1-D numerical model and compared with the results of line source method. The comparison shows that the thermal properties from line source method is a little lower (${\sim}95%$)than those from numerical method. The reason of such result seems to be the lower thermal conductivity of grout material, which is not counted in line source method.

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