• 제목/요약/키워드: Thermal Control System

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고속 열처리 시스템에서 웨이퍼 상의 다중점 계측에 의한 온도 분포 추정 기법 연구 (A Prediction Method of Temperature Distribution on the Wafer in a Rapid Thermal Process System with Multipoint Sensing)

  • 심영태;이석주;민병조;조영조;김학배
    • 대한전기학회논문지:시스템및제어부문D
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    • 제49권2호
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    • pp.62-67
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    • 2000
  • The uniformity of temperature on a wafer is one of the most important parameters to control the RTP (Rapid Thermal Process) with proper input signals. Since it is impossible to achieve the uniformity of temperature without exact estimation of temperature at all points on the wafer, the difficulty of understanding internal dynamics and structural complexities of the RTP is a primary obstacle to accurately measure the distributed temperatures on the wafer. Furthermore, it is also hard to accomplish desirable estimation because only few pyrometers have been commonly available in the general equipments. In the paper, a thermal model based on the chamber geometry of the AST SHS200 RTP system is developed to effectively control the thermal uniformity on the wafer. First of all, the estimation method of one-point measurement is developed, which is properly extended to the case of multi-point measurements. This thermal model is validated through certain simulation and experiments. The work can be usefully contributed to building a run-by-run or a real-time controls of the RTP.

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태양열 시스템의 제어조건에 따른 난방 및 급탕 실증연구 (Demonstration study on Heating and Hot water According to Control Condition of Solar System)

  • 곽희열;김정배;주홍진;김종보
    • 한국태양에너지학회 논문집
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    • 제26권4호
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    • pp.119-126
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    • 2006
  • This study describes thermal performance of heating and cooling demonstration system using ETSC(Evacuated tubular solar collector) installed at Seo-gu art center of Kwangju. For demonstration study, a reading room with about $350m^2$ was heated and cooled using that system. The demonstration system was consisted of ETSCs, storage tank, hot water supply tank, subsidiary boiler, and subsidiary tank. From January to March in 2006, demonstration test were performed with 4 control mode to find the optimum control condition for solar thermal system. After experiments and analysis, this study found that solar thermal system of control mode IV was corresponded to 78% for the hot water supply and 49% for space heating.

태양열 시스템의 제어조건에 따른 난방 및 급탕 실증연구 (Demonstration study on Heating and Hot water According to Control Condition of Solar System)

  • 주홍진;곽희열;김정배;김종보
    • 대한설비공학회:학술대회논문집
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    • 대한설비공학회 2006년도 하계학술발표대회 논문집
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    • pp.832-837
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    • 2006
  • This study describes thermal performance of heating and cooling demonstration system using ETSC(Evacuated tubular solar collector) installed at Seo-gu art center of Kwangju. For demonstration study, a reading room with about $331m^2$ was heated and cooled using that system. The demonstration system was consisted of ETSCs, storage tank, hot water supply tank, subsidiary boiler, and subsidiary tank. From January to March in 2006, demonstration test were performed with 4 control mode to find the optimum control condition for solar thermal system. After experiments and analysis, this study found that solar thermal system of control mode IV was corresponded to 78% for the hot water supply and 49% for space heating.

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복사난방패널 방열량실험의 제어오차요인 분석 (Analysis of Control Error Factors of a Thermal Output Experiment for Radiant Heating Panels)

  • 신대욱
    • 토지주택연구
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    • 제9권4호
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    • pp.33-42
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    • 2018
  • As a radiant heating panel gets more popularity, the need to study on evaluation method of thermal output of the panel also becomes increasing. Generally, the chamber using method is applied to evaluate the thermal output through an experiment. However, the chamber using method cannot be used due to the limitations on space and cost. EN1264 addresses the test equipment to evaluate the thermal output by using simpler experimental setup, and introduces application method in detail. However, there is not enough description of control methods to meet the experiment condition, and it is difficult to meet this when practical experiment. Therefore, this paper analysed the control error factors of when the thermal output experiment is performed. When EN1264 method is applied to evaluate the thermal output of the radiant floor heating panel, the error factor which is caused by the characteristic of test equipment cannot be removed by the control methods of chamber using method. In addition, the error factor can be occurred at the element which is located out of the control system. These possible error factors are defined as the characteristic error factors.

연료전지 자동차용 전자 제어식 $CO_2$ 냉방 시스템의 성능 특성에 관한 연구 (Studies on the Performance Characteristics of an Electronically Controlled $CO_2$ Air Conditioning System for Fuel Cell Electric Vehicles)

  • 김성철;이동혁;이호성;원종필;이대웅;이원석
    • 한국자동차공학회논문집
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    • 제16권2호
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    • pp.150-157
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    • 2008
  • The main objective of this paper is to investigate the performance characteristics of a $CO_2$ air conditioning system for fuel cell electric vehicles (FCEV). The present air conditioning system for FCEV uses the electrically driven compressor and electrically controlled expansion valve for $CO_2$ as a working fluid. The experimental work has been done with various operating conditions, which are quite matching the actual vehicle's driving conditions such as different compressor speed and high pressure to identify the characteristics of the system. Experimental results show that the cooling capacity and coefficient of performance (COP) were up to 6.3kW and 2.5, respectively. This paper also deals with the development of optimum high pressure control algorithm for the transcritical $CO_2$ cycle to achieve the maximum COP.

Heating and Cooling System for Utilization of Surplus Air Thermal Energy in Greenhouse and its Control Logic

  • Yang, Seung-Hwan;Lee, Chun-Gu;Lee, Won-Kyu;Ashtiani, Alireza Araghi;Kim, Joon-Yong;Lee, Sang-Deok;Rhee, Joong-Yong
    • Journal of Biosystems Engineering
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    • 제37권1호
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    • pp.19-27
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    • 2012
  • Purpose: Utilizing air thermal energy during over-heated time in the greenhouse is a necessary component to save greenhouse heating costs for nighttime. However, there is no practical way to implement the related principles. Methods: In this study, a heating and cooling system which utilizes the surplus air thermal energy in a greenhouse was developed. Available air thermal energy and heating load for this experimental glasshouse were estimated based on temperature conditions of the plant growth and weather data. Results: Estimated values were 400 MJ/day for maximum surplus air thermal energy and 340 MJ/day for maximum heating energy which were target values of the design as well. The system consists of a heat pump, fan-coil units and heat storage tanks which are divided into low and high temperature tanks. Moreover, a new control logic was developed for surplus air thermal energy utilization. Conclusions: This paper explains the details of conceptual design process of the system. Results of test operations showed that the developed system performed the recovery and supply of the thermal energy according to design purposes.

Veritrek 소프트웨어를 활용한 그라파이트시트 기반 극저온 냉각기 열 제어 시스템 최적설계 (Optimal Design of Graphite Sheet based Cryogenic Cooler Thermal Control System using Veritrek Software)

  • 채봉건;김혜인;오현웅
    • 항공우주시스템공학회지
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    • 제18권2호
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    • pp.71-78
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    • 2024
  • 초기 열설계 과정의 경우 복잡한 궤도 열 환경 조건에서 다양한 설계 변수에 따른 열적 영향성 판단을 해야 하므로, 열 설계/분석에 많은 시간이 소요된다. 따라서, 초기 설계 단계에서 시간을 효율적으로 단축시키기 위해서는 최적의 설계 변수 도출과 이에 따른 온도 예측이 신속히 이루어져야 한다. 상기 문제점에 기인하여 차수축소모델을 활용한 최적 설계 전문 소프트웨어인 Veritrek이 2018년에 출시되었다. 본 논문에서는 Veritrek 소프트웨어를 활용하여 그라파이트시트 기반 냉각기 열 제어 시스템에 대해 차수축소모델 구축과 민감도 분석, 최적 설계 분석을 수행하여 냉각기의 허용온도를 만족할 수 있는 그라파이트시트의 적층 수, 방열판 면적 및 두께에 대한 최적설계 수치를 도출하였다.

기력발전소 터빈조속기 제어로직 개선에 의한 발전기 부하추종성 향상 (계통주파수저하방지) (Load Following Operation Improvement by Governor Control Logic Modification of Thermal Power Plant (System Frequency Drop Prevention))

  • 이종하;김태웅
    • 전력전자학회논문지
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    • 제11권4호
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    • pp.302-306
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    • 2006
  • 기력발전소의 부하추종성능의 향상은 계통의 전력품질에 지대한 영향을 미치기 때문에 이를 위해서는 먼저 보일러, 터빈, 조속기 시스템과 제어알고리즘에 대한 분석이 필히 선행되어야 한다. 기력발전설비는 다양한 제어가구들 에 의해 운영되고 있고 조속기가 고장 난 경우에는 문제를 해결하는데 많은 시간이 필요하여 발전설비를 정지하지 않고서는 메커니즘 정비가 불가능하다. 계획되지 않은 발전시스템의 정지는 전력발전의 감소로 인해 경제적인 문제뿐만 아니라 전력공급의 차질에 지대한 지장을 주기 때문에 충분히 고려할 사항이다. 본 논문에서는 표준석탄화력 500MW 발전설비 ( 삼천포화력발전소 )에 있어서 계통주파수가 과다하게 장시간 저하될 경우에 기력발전기 제어특성이 나빠져 발전기의 출력이 저하되는 데 이에 대한 현상을 추이분석과 함께 제어로직의 분석 및 개선을 통해 계통 주파수가 저하되는 것을 방지하였고 이에 대한 사례를 소개한다.

열해석에 의한 인공위성 추진시스템 열설계 (Thermal Design for Satellite Propulsion System by Thermal Analysis)

  • 한조영;김정수;이승우
    • 대한기계학회논문집B
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    • 제27권1호
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    • pp.117-124
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    • 2003
  • Thermal design fur satellite propulsion system has been performed. Overall design requirements and the constitution for propulsion system is described. To meet the thermal design requirements, both a primary and a redundant heater circuit, each with two thermostats placed in series, will protect each hydrazine-wetted components, even if one heater circuit fails to operate. Heater power is turned off if any one of these thermostats is opened at its higher setpoint. Thus, even if one thermostat is failed closed, the second thermostat will turn off the heater. All such components shall be insulated with MLI. Propulsion heater sizing based on the constant worst cold case condition is conducted through thermal analysis. All heaters selected fur propulsion components operate to prevent propellant freezing satisfying the thermal requirements for the propulsion subsystem over the worst case average voltage, i.e. 25 volts.

Effect of Supply and Return Locations of a Floor-Supply Cooling System on Thermal Comfort

  • Kim, Young-Il;Kim, Jo-Seph;Yoo, Ho-Seon
    • International Journal of Air-Conditioning and Refrigeration
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    • 제9권4호
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    • pp.37-46
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    • 2001
  • This study numerically investigates thermal comfort of a space cooled by a floor-supply air-conditioning system, in which three different combinations of supply and return locations, one floor-supply/ceiling-return and two floor-supply/floor-return, are treated. A complementary experiment is performed to validate the present numerical analysis, and the prediction agrees favorably with the measured data. In the numerical procedure, a simplified model mimicking the inlet flow through a diffuser is developed for efficient simulations. The calculated results show that the ceiling-return type is far better in terms of thermal comfort than the floor-return ones within the extent of this study, which seems to be caused by effective vertical penetration of the supply air against natural convection. It is also revealed that the arrangement of port locations in the floor-supply/floor-return system has insignificant effect on the cooling performance. For selecting a proper system, other characteristics including the heating performance should be accounted for simultaneously with the present considerations.

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