• 제목/요약/키워드: The Institute of Mechanical Institute

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Silicon/Pad Pressure Measurements During Chemical Mechanical Polishing

  • Danyluk, Steven;Ng, Gary;Yoon, In-Ho;Higgs, Fred;Zhou, Chun-Hong
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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    • pp.433-434
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    • 2002
  • Chemical mechanical polishing refers to a process by which silicon and partially-processed integrated circuits (IC's) built on silicon substrates are polished to produce planar surfaces for the continued manufacturing of IC's. Chemical mechanical polishing is done by pressing the silicon wafer, face down, onto a rotating platen that is covered by a rough polyurethane pad. During rotation, the pad is flooded with a slurry that contains nanoscale particles. The pad deforms and the roughness of the surface entrains the slurry into the interface. The asperities contact the wafer and the surface is polished in a three-body abrasion process. The contact of the wafer with the 'soft' pad produces a unique elastohydrodynamic situation in which a suction force is imposed at the interface. This added force is non-uniform and can be on the order of the applied pressure on the wafer. We have measured the magnitude and spatial distribution of this suction force. This force will be described within the context of a model of the sliding of hard surfaces on soft substrates.

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선박발전기용 디지털 AVR 개발 (Development of the Digital AVR for Ship Generator)

  • 김태완;김승환;이수병;송석현;이선재;김명찬;이상동
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 하계학술대회 논문집 B
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    • pp.828-830
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    • 2003
  • AVR은 동기발전기의 출력전압을 부하변동에 관계없이 일정하게 제어하며 발전기 및 시스템 보호를 위한 각 종 제어 알고리즘을 구비하고 있다. 종래의 아나로그타입 AVR은 제어설정이 불편하고 제어신뢰성이 떨어지기 때문에 점차 디지털 타입으로 교체되고 있다. 본 연구는 선박발전기에 적용하기 위한 디지털 AVR 개발에 관한 것이다. TI사의 TMS320LF2407 CPU를 사용하여 제어 H/W를 개발했으며, 과여자/저여자제어, Droop제어, 무부하/역률제어 등 다양한 제어기능을 S/W로 구비하여 부하에 따른 적용의 유연성을 높였다. 그리고 전력회로는 IGBT를 사용하여 고속 스위칭 제어함으로써 SCR 방식에 비해 제어 속응성을 개선하였다. 개발 된 제품은 AVR, 직류전원공급장치 및 부하나 계통의 사고시 보호를 위한 전류부스트(CBS)기능을 포함하고 있다.

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친환경 송전급 변압기 개발을 위한 식물성절연유 절연성능 분석 연구 (Study of Analysis on Dielectric Strength of Vegetable Oil for Development of Eco-friendly Transmission Transformer)

  • 김용한;석복렬;이찬주;강형구;김준연;오훈;김동해
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2008년도 제39회 하계학술대회
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    • pp.1195-1196
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    • 2008
  • 최근, 친환경 물질이면서 광유에 비하여 발화점이 높은 식물성절연유에 대한 관심이 고조되고 있으며 식물성절연유변압기의 사용이 미주 등 해외시장에서 급격하게 증가되고 있다. 본 연구에서는 송전급 식물성절연유변압기 개발을 위하여 액체절연 매질의 고전압 시험법을 검토하고 전극 간 이격 거리에 따른 절연파괴 시험을 통하여 식물성절연유의 절연성능을 평가하였다. Weibull 분포와 전계해석을 이용하여 2% 절연파괴전압을 산출하고 전계분포를 계산하여 기존의 변압기 절연매질인 광유와 비교하였다. 본 연구 결과는 향후 식물성 절연유변압기 제작에 필요한 설계 자료로 활용될 것이다.

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EFFECT OF SURFACE ROUGHNESS ON ADHESIVE STRENGTH OF HEAT-RESISTANT ADHESIVE RTV88

  • Cho, Tae-Min;Choo, Yeon-Seok;Lee, Min-Jung;Oh, Hyeon-Cheol;Lee, Byung-Chai;Park, Tae-Hak;Shin, Young-Sug
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2008년도 추계학술대회A
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    • pp.115-120
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    • 2008
  • In this study, effects of surface roughness on adhesive strength of heat-resistant adhesive RTV88 were examined. Sandblast was used to generate rough surfaces on aluminum adherends, and then tensile-shear tests of Al/RTV88 single lap joints were performed. The shear strength was shown to be affected by the surface roughness. Effective area, peel failure area, and cohesive failure area were introduced to explain the effects of surface roughness on the adhesive strength. An empirical relation for the failure force was proposed based on these parameters and verified by the test results.

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THE ACTUALITY AND EXPECTATION OF APPLICATION OF PRECISION FORGING IN CHINA

  • Tan Xie;Zhe Wei;Xiaoguang Zhang;Zhiping Zhong
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2003년도 The 8th Asian Symposium on Precision Forging ASPF
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    • pp.1-9
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    • 2003
  • The precision forging developed very fast in recent years due to the development of the automobile industry in China. Several actual examples are given to show this development and the direction of the precision forging in China should move forward is pointed out.

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The Study of the Stray Load Loss and Mechanical Loss of Three Phase Induction Motor considering Experimental Results

  • Kim, Dong-Jun;Choi, Jae-Hak;Chun, Yon-Do;Koo, Dae-Hyun;Han, Pil-Wan
    • Journal of Electrical Engineering and Technology
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    • 제9권1호
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    • pp.121-126
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    • 2014
  • The accurate determination of induction motor efficiency depends on the estimation of the five losses of stator and rotor copper loss, iron loss, mechanical loss and stray load loss. As the mechanical and stray load losses are not calculated by electro-magnetic analysis, the values of these two losses are very important in induction motor design. In this paper, the values of mechanical loss and stray load loss are proposed through investigating testing data from commercial products of three phase induction motors under 37kW. If the values of this paper are applied to motor design, the accuracy of design and analysis can be improved. The losses of motors are obtained by using load and no-load test results following IEC 60034-2-1 standard.

Nonlinear deflection responses of layered composite structure using uncertain fuzzified elastic properties

  • Patle, B.K.;Hirwani, Chetan K.;Panda, Subrata Kumar;Katariya, Pankaj V.;Dewangan, Hukum Chand;Sharma, Nitin
    • Steel and Composite Structures
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    • 제35권6호
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    • pp.753-763
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    • 2020
  • In this article, the influence of fuzzified uncertain composite elastic properties on non-linear deformation behaviour of the composite structure is investigated under external mechanical loadings (uniform and sinusoidal distributed loading) including the different end boundaries. In this regard, the composite model has been derived considering the fuzzified elastic properties (through a triangular fuzzy function, α cut) and the large geometrical distortion (Green-Lagrange strain) in the framework of the higher-order mid-plane kinematics. The results are obtained using the fuzzified nonlinear finite element model via in-house developed computer code (MATLAB). Initially, the model accuracy has been established and explored later to show the dominating elastic parameter affect the deflection due to the inclusion of fuzzified properties by solving a set of new numerical examples.

Fabrication of Circular Diaphragm for Piezoelectric Acoustic Devices

  • Lee, Woon-Seob;Kim, Yong-Chul;Lee, Jin-Seung;Lee, Seok-Woo;Lee, Seung-S.
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제5권1호
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    • pp.52-57
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    • 2005
  • This paper describes a fabrication method of a circular diaphragm using boron etching stop method. It will be applied to acoustic transducers such as microphones or microspeakers and so on. The sensitivity is expected to be increased with the circular diaphragm through the simulation results to compare with a general rectangular diaphragm. The borondoped layer which is doped with solid source is sufficient for achieving an etching stop in 20 wt% TMAH, and the thickness is about $7.4{\mu}m$. The diameter of the circular silicon nitride diaphragm was measured to be 2 mm with $1{\mu}m$ thickness. The fabrication of piezoelectric acoustic devices was completed.