Structural Study of Interface Layers in Tetragonal-NiSi (010)/Si using Density Functional Theory (밀도범함수를 이용한 정방정계-NiSi (010)/Si 계면 층의 구조 연구)
-
- Journal of the Korean Institute of Electrical and Electronic Material Engineers
- /
- v.22 no.5
- /
- pp.377-381
- /
- 2009