• Journal of Sensor Science and Technology
• /
• v.31 no.6
• /
• pp.366-370
• /
• 2022

A 12 ㎛ pixel-sized 360 × 240 microbolometer focal plane array (MBFPA) was fabricated using a complementary metaloxide-semiconductor (CMOS)-compatible process. To release the MBFPA membrane, an amorphous carbon layer (ACL) processed at a low temperature (<400 ℃) was deposited as a sacrificial layer. The thermal time constant of the MBFPA was improved by using serpentine legs and controlling the thickness of the SiNx layers at 110, 130, and 150 nm on the membrane, with response times of 6.13, 6.28, and 7.48 msec, respectively. Boron-doped amorphous Si (a-Si), which exhibits a high-temperature coefficient of resistance (TCR) and CMOS compatibility, was deposited on top of the membrane as an IR absorption layer to provide heat energy transformation. The structural stability of the thin SiNx membrane and serpentine legs was observed using field-emission scanning electron microscopy (FE-SEM). The fabrication yield was evaluated by measuring the resistance of a representative pixel in the array, which was in the range of 0.8-1.2 Mohm (as designed). The yields for SiNx thicknesses of SiNx at 110, 130, and 150 nm were 75, 86, and 86%, respectively.

• Journal of the Korean Ceramic Society
• /
• v.25 no.6
• /
• pp.639-644
• /
• 1988

The physical and dielectric properties of complex perovskite compound Sr(Mg1/3Nb1/3)O3-Ba(Mg1/3Nb2/3)O3-Ba(Mg1/3Ta2/3)O3(BMT) system were investigated as a function of composition. As the mole ratio of BMN was increased, lattice parameter ratio c/a was slightly increased, and density was increased in SMN-BMN system. However, in BMN-BMT system, lattice parameter ratio c/a and density were decreased with increasing the mole ratio of BMN. Dielectric constant, dielectric loss at $25^{\circ}C$ and 100kHz, and temperature coefficient of resonant frequency, the dependence of temperature in capacitance were increased with increasing the mole ratio of BMN in SMN-BMN-BMT system. These result can be explained according to the degree of order=disorder and dielectric constant.

• Journal of the Korean Ceramic Society
• /
• v.46 no.2
• /
• pp.131-136
• /
• 2009

Radio frequency (RF) plasma treatment is studied for the size reduction and the spheroidization of coarse particles to change them into nano-sized powders of spherical shape in MLCC fields. The uni-nanoadditives manufactured by RF plasma processing for high dispersion have been investigated for the effect on core-shell structure in dielectrics of MLCC. Microstructures have been characterized using scanning electron microscope (SEM), transmission electron microscope (TEM) and Electron Probe Micro Analyzer (EPMA). We compared the distribution of core-shell grains between specimens manufactured using uni-nanoadditive and using mixed additive. In addition, the uniformity of rare earth elements in the core-shell structured grains was analyzed. It was shown, from TEM observations, that the sintered specimen manufactured using uni-nanoadditives had more dense small grains with well-developed core-shell structure than the specimen using mixed additives, which had a homogeneous microstructure without abnormal grain growth and shows broad temperature coefficient of capacitance (TCC) curves in all temperature ranges because of well dispersed additives.

• Journal of the Korean Institute of Telematics and Electronics D
• /
• v.35D no.9
• /
• pp.77-86
• /
• 1998

A two-chip humidity sensor system has been developed which consists of a capacitive sense element die and a CMOS interface chip. The sense element was fabricated using thin polyimide films on (100) silicon substrate and showed excellent linearity(0.72%FS), low hysteresis (<3%) and low temperature coefficient(-0.0285 ~-0.0542pF/K) over a wide range of relative humidity and temperature. The capacitance-relative humidity characteristic exhibited a drift of 2~3% after 9 weeks of exposure to 4$0^{\circ}C$/90%RH. The signal-conditioning circuitry was fabricated using an 1.2- ${\mu}{\textrm}{m}$, one poly double metal CMOS process. The measured output voltage of the sensor system was directly proportional to relative humidity and showed good agreement with theory.

• Journal of the Korean Ceramic Society
• /
• v.48 no.4
• /
• pp.323-327
• /
• 2011

The effects of $Dy_2O_3$ and $Er_2O_3$ co-doping on electrical properties and temperature stability of barium titanate ($BaTiO_3$) ceramics were investigated in terms of microstructure and structural analysis. The dielectric constant and the insulation resistance (IR) of 0.7 mol% $Dy_2O_3$ and 0.3 mol% $Er_2O_3$ co-doped dielectrics had about 60% and 20% higher than the values of undoped one, respectively, and the temperature coefficient of capacitance (TCC) met the X7R specification. The addition of $Dy_2O_3$ contributed to electrical properties caused by increase of tetragonality; however, preferential diffusion of $Dy^{3+}$ ions toward A site in $BaTiO_3$ grain exhibited an adverse effect on temperature stability by grain growth. On the other hand, The $Er_2O_3$ addition in $BaTiO_3$ could affect the TCC behavior and the IR with suppression of grain growth caused by reinforcement of grain boundary and electrical compensation. Therefore, the enhanced electrical properties and temperature stability through the co-doping could be deduced from the increase of tetragonality and the suppression of grain growth.

• Journal of Biomedical Engineering Research
• /
• v.29 no.6
• /
• pp.493-501
• /
• 2008

In this paper, a novel system is proposed to measure skin hydration using the susceptance method. This system largely consists of a low-voltage(${\pm}2.6$ V) driven circuit and minimized electrodes of size($5{\times}5mm^2$). To evaluate the accuracy of the novel system in measuring skin hydration, skin hydration values from 105 subjects are measured by the proposed system. The measurements are then compared to those obtained by the golden reference device based on the capacitance method in terms of Intraclass Correlation Coefficient(ICC) and correlation coefficient. All measurements are performed on 7 sites, which are forehead, Crow's foot, cheek, chin, volar forearm, dorsal forearm, and back of the hand, in a room where the temperature and humidity are maintained at an uniform level of $22{\pm}2^{\circ}C$ and $50{\pm}5%$, respectively. ICC values are above 0.9(p=0.001), signifying that the skin hydration values measured by the two methods show a good level of reliability. Correlation coefficient between the two methods is also 0.562(p=0.001). Based on these results, it is expected that the proposed system may be applicable in a variety of clinical or cosmetic areas.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.20 no.1
• /
• pp.21-24
• /
• 2010

The effects of mole ratio(A/B) m and Ti-ion on the dielectric properties and microstructure of the microwave dielectric ceramics $(Ca_{0.7}Sr_{0.3})_m(Ti_yZr_{1-y})O_3$ were investigated. Ti ions substituted on Zr-sites in these modified $CaZrO_3$ composition strongly affect the sintering density and microstructure of the fired ceramic body. With increasing the amount of Ti substituted on Zr-sites, the sintered density rapidly increased and the dense microstructure was obtained for the compositions having mole ratio of 1.01, whereas the sintered density and microstructure are nearly constant with the content of Ti-ion for the compositions having mole ratio of 0.99. With increasing the content of Ti ion, the curve of TCC (Temperature Coefficient of Capacitance) as a function of temperature rotated clockwise and satisfied the COG characteristics for both of compositions with mole ratio of 0.99 and 1.01. The content of Ti ion seems to be more effective than mole with respect to the controlling of firing and TCC.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.9 no.5
• /
• pp.498-503
• /
• 1999

La-doped $BaTiO_3$ ceramics were prepared from BaTiO(C_2O_4)_2\;{\cdot}\;XH_2O(BTO)$, which was synthesized by homogeneous precipitation using dimethyl oxalate. The electrical properties of La-doped $BaTiO_3$ were investigated with variation of La-contents and particle size. It was found that a large PTCR (positive temperature coefficient of resistivity) effect was appeared in the conditions at the 0.6 mol% of La-content and at small particle size of BTO as 1.0$\mu\textrm{m}$. The plot of temperature vs. 1/$\varepsilon_m$(T) above Curie temperature $(T_c)$ was agreed with Curie-Weiss law. The potential barrier calculated from measured resistance and capacitance of specimen, also gave higher value at small particle size of BTO as 1.0 $\mu\textrm{m}$ and at La-content of 0.6 mol%.

• Advances in nano research
• /
• v.5 no.1
• /
• pp.27-34
• /
• 2017

One of the methods of removing cyanide from wastewater is surface adsorption. We simulated the removal of cyanide from a synthetic wastewater in the presence of Titanium dioxide nano-particles absorbent uses VISUAL MINTEQ 3.1 software. Our aim was to determine the factors affecting the adsorption of cyanide from synthetic wastewater applying simulation. Synthetic wastewater with a concentration of 100 mg/l of potassium cyanide was used for simulation. The amount of titanium dioxide was 1 g/l under the temperature of $25^{\circ}C$. The simulation was performed using an adsorption model of Freundlich and constant capacitance model. The results of simulation indicated that three factors including pH, nanoparticles of titanium dioxide and the primary concentration of cyanide affect the adsorption level of cyanide. The simulation and experimental results had a good agreement. Also by increasing the pH level of adsorption increases 11 units and then almost did not change. An increase in cyanide concentration, the adsorption level was decreased. In simulation process, rising the concentrations of titanium dioxide nanoparticles to 1 g/l, the rate of adsorption was increased and afterward no any change was observed. In all cases, the coefficient of determination between the experimental data and simulation data was above 0.9.

• Proceedings of the KIEE Conference
• /
• 2000.07c
• /
• pp.1661-1663
• /
• 2000

This study was to measure the dielectric characteristics of 0.05Pb($Al_{0.5}Nb_{0.5}$)-0.95Pb($Zr_{0.52}Ti_{0.48})O_3$[PAN-PZT] system ceramics according to the variation of $Cr_{2}O_3$, $Fe_{2}O_3$ addition amount. 0.0$\sim$1.2[wt%] and according to sintering temperature after creating the specimens with a general sintering way. The results of this study were summarized as follows : the dielectric constant at 20[$^{\circ}C$] reduced dy increasing additive on the whole. The dielectric loss was minimum value of 12.77[%], sintered at 1200[$^{\circ}C$], dopped with $Cr_{2}O_3$ 0.3[wt%] and minimum value of 10.89[%], sintered at 1200[$^{\circ}C$], dopped with $Fe_{2}O_3$ 0.6[wt%]. The variation rate of dielectric constant according to the change of frequency was decreased slowly by increasing frequency. The temperature coefficient of capacitance turned out increasing the stability of the temperature, decreased $Cr_{2}O_3$ 0.3wt% showed its minimum value 0.59[%/$^{\circ}C$], the maximum value 0.9[%/$^{\circ}C$] with $Cr_{2}O_3$ 3wt%.