• 센서학회지
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• 제31권6호
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• pp.366-370
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• 2022

A 12 ㎛ pixel-sized 360 × 240 microbolometer focal plane array (MBFPA) was fabricated using a complementary metaloxide-semiconductor (CMOS)-compatible process. To release the MBFPA membrane, an amorphous carbon layer (ACL) processed at a low temperature (<400 ℃) was deposited as a sacrificial layer. The thermal time constant of the MBFPA was improved by using serpentine legs and controlling the thickness of the SiNx layers at 110, 130, and 150 nm on the membrane, with response times of 6.13, 6.28, and 7.48 msec, respectively. Boron-doped amorphous Si (a-Si), which exhibits a high-temperature coefficient of resistance (TCR) and CMOS compatibility, was deposited on top of the membrane as an IR absorption layer to provide heat energy transformation. The structural stability of the thin SiNx membrane and serpentine legs was observed using field-emission scanning electron microscopy (FE-SEM). The fabrication yield was evaluated by measuring the resistance of a representative pixel in the array, which was in the range of 0.8-1.2 Mohm (as designed). The yields for SiNx thicknesses of SiNx at 110, 130, and 150 nm were 75, 86, and 86%, respectively.

• 한국세라믹학회지
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• 제25권6호
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• pp.639-644
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• 1988

The physical and dielectric properties of complex perovskite compound Sr(Mg1/3Nb1/3)O3-Ba(Mg1/3Nb2/3)O3-Ba(Mg1/3Ta2/3)O3(BMT) system were investigated as a function of composition. As the mole ratio of BMN was increased, lattice parameter ratio c/a was slightly increased, and density was increased in SMN-BMN system. However, in BMN-BMT system, lattice parameter ratio c/a and density were decreased with increasing the mole ratio of BMN. Dielectric constant, dielectric loss at $25^{\circ}C$ and 100kHz, and temperature coefficient of resonant frequency, the dependence of temperature in capacitance were increased with increasing the mole ratio of BMN in SMN-BMN-BMT system. These result can be explained according to the degree of order=disorder and dielectric constant.

• 한국세라믹학회지
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• 제46권2호
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• pp.131-136
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• 2009

Radio frequency (RF) plasma treatment is studied for the size reduction and the spheroidization of coarse particles to change them into nano-sized powders of spherical shape in MLCC fields. The uni-nanoadditives manufactured by RF plasma processing for high dispersion have been investigated for the effect on core-shell structure in dielectrics of MLCC. Microstructures have been characterized using scanning electron microscope (SEM), transmission electron microscope (TEM) and Electron Probe Micro Analyzer (EPMA). We compared the distribution of core-shell grains between specimens manufactured using uni-nanoadditive and using mixed additive. In addition, the uniformity of rare earth elements in the core-shell structured grains was analyzed. It was shown, from TEM observations, that the sintered specimen manufactured using uni-nanoadditives had more dense small grains with well-developed core-shell structure than the specimen using mixed additives, which had a homogeneous microstructure without abnormal grain growth and shows broad temperature coefficient of capacitance (TCC) curves in all temperature ranges because of well dispersed additives.

• 전자공학회논문지D
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• 제35D권9호
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• pp.77-86
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• 1998

본 논문에서는 정전용량형 센서 칩과 CMOS 인터페이스 칩으로 구성된 투 칩 집적화 습도 센서를 개발하였다. (100) 실리콘 기판위에 폴리이미드 박막을 이용해서 제작된 습도 센서 칩은 넓은 습도 및 온도 범위에 걸쳐 우수한 직선성(0.72%FS), 낮은 히스테리시스(<3%), 작은 온도계수(-0.0285∼-0.0542 pF/K)를 나타내었다. 40℃/90%RH에서 9주동안 방치한 후 측정된 정전용량은 약 2∼3% 변하였다. 신호처리 회로는 1.2-㎛, one poly double metal CMOS 공정으로 제작하였다. 측정된 센서 출력 전압은 상대습도에 비례해서 변하였으며, 이론치와 잘 일치하였다.

• 한국세라믹학회지
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• 제48권4호
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• pp.323-327
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• 2011

The effects of $Dy_2O_3$ and $Er_2O_3$ co-doping on electrical properties and temperature stability of barium titanate ($BaTiO_3$) ceramics were investigated in terms of microstructure and structural analysis. The dielectric constant and the insulation resistance (IR) of 0.7 mol% $Dy_2O_3$ and 0.3 mol% $Er_2O_3$ co-doped dielectrics had about 60% and 20% higher than the values of undoped one, respectively, and the temperature coefficient of capacitance (TCC) met the X7R specification. The addition of $Dy_2O_3$ contributed to electrical properties caused by increase of tetragonality; however, preferential diffusion of $Dy^{3+}$ ions toward A site in $BaTiO_3$ grain exhibited an adverse effect on temperature stability by grain growth. On the other hand, The $Er_2O_3$ addition in $BaTiO_3$ could affect the TCC behavior and the IR with suppression of grain growth caused by reinforcement of grain boundary and electrical compensation. Therefore, the enhanced electrical properties and temperature stability through the co-doping could be deduced from the increase of tetragonality and the suppression of grain growth.

• 대한의용생체공학회:의공학회지
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• 제29권6호
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• pp.493-501
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• 2008

In this paper, a novel system is proposed to measure skin hydration using the susceptance method. This system largely consists of a low-voltage(${\pm}2.6$ V) driven circuit and minimized electrodes of size($5{\times}5mm^2$). To evaluate the accuracy of the novel system in measuring skin hydration, skin hydration values from 105 subjects are measured by the proposed system. The measurements are then compared to those obtained by the golden reference device based on the capacitance method in terms of Intraclass Correlation Coefficient(ICC) and correlation coefficient. All measurements are performed on 7 sites, which are forehead, Crow's foot, cheek, chin, volar forearm, dorsal forearm, and back of the hand, in a room where the temperature and humidity are maintained at an uniform level of $22{\pm}2^{\circ}C$ and $50{\pm}5%$, respectively. ICC values are above 0.9(p=0.001), signifying that the skin hydration values measured by the two methods show a good level of reliability. Correlation coefficient between the two methods is also 0.562(p=0.001). Based on these results, it is expected that the proposed system may be applicable in a variety of clinical or cosmetic areas.

• 한국결정성장학회지
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• 제20권1호
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• pp.21-24
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• 2010

고주파 유전체 세라믹 $(Ca_{0.7}Sr_{0.3})_m(Ti_yZr_{1-y})O_3$ 의 미세구조 및 전기적 특성에 대한 Ti 이온 및 몰비의 영향을 조사하였다. $CaZrO_3$의 Zr 위치에 Ti 이온의 치환은 세라믹 소체의 소결밀도 및 미세구조에 큰 영향을 미친다. Zr 위치에 Ti 이온의 치환량 증가에 따라, 소결밀도는 급격히 증가하고, 몰비 m=1.01에서 치밀한 미세조직이 얻어졌다. 한편, 몰비 m=0.99 조성에 대해서는 Ti 치환량이 증가하여도 소결밀도 및 미세구조는 거의 변화가 없이 일정하였다. Ti 치환량 증가에 따라 TCC (temperature coeITicient of capacitance) 곡선은 시계방향으로 회전하여 몰비 m=0.99, 1.01 조성에 대해 COG 특성을 만족하였다. $CaZrO_3$의 TCC 및 소결특성 제어를 위해서는 Ti 치환량이 몰비보다는 효과적임을 보여준다.

• 한국결정성장학회지
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• 제9권5호
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• pp.498-503
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• 1999

La가 혼입된 $BaTiO_3$를 균일침전법으로 제조하여 La의 혼입량 및 입자의 크기 변화에 따른 전기적 특성을 관찰하였다. 온도변화에 따른 저항을 측정한 결과 란탄의 농도가 0.6 mol%일 때 그리고 입자의 크기가 1.0 $\mu\textrm{m}$으로 작을 때 가장 큰 PTCR 효과를 나타내었다. 상전이온도($(T_c)$) 이상에서 온도와 1/$\varepsilon_m$(T)의 관계를 나타낸 도시에 의하면 유전상수의 변화가 Curie-weiss 법칙에 잘 다름을 알 수 있었다. 측정한 비저항과 유전상수로부터 계산한 전위장벽의 높이도 란탄의 농도가 0.6 mol%일 때 입자의 크기가 1.0$\mu\textrm{m}$으로 작을 때 가장 큰 전위장벽을 나타내었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 하계학술대회 논문집 C
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• pp.1661-1663
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• 2000

This study was to measure the dielectric characteristics of 0.05Pb($Al_{0.5}Nb_{0.5}$)-0.95Pb($Zr_{0.52}Ti_{0.48})O_3$[PAN-PZT] system ceramics according to the variation of $Cr_{2}O_3$, $Fe_{2}O_3$ addition amount. 0.0$\sim$1.2[wt%] and according to sintering temperature after creating the specimens with a general sintering way. The results of this study were summarized as follows : the dielectric constant at 20[$^{\circ}C$] reduced dy increasing additive on the whole. The dielectric loss was minimum value of 12.77[%], sintered at 1200[$^{\circ}C$], dopped with $Cr_{2}O_3$ 0.3[wt%] and minimum value of 10.89[%], sintered at 1200[$^{\circ}C$], dopped with $Fe_{2}O_3$ 0.6[wt%]. The variation rate of dielectric constant according to the change of frequency was decreased slowly by increasing frequency. The temperature coefficient of capacitance turned out increasing the stability of the temperature, decreased $Cr_{2}O_3$ 0.3wt% showed its minimum value 0.59[%/$^{\circ}C$], the maximum value 0.9[%/$^{\circ}C$] with $Cr_{2}O_3$ 3wt%.

• Advances in nano research
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• 제5권1호
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• pp.27-34
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• 2017

One of the methods of removing cyanide from wastewater is surface adsorption. We simulated the removal of cyanide from a synthetic wastewater in the presence of Titanium dioxide nano-particles absorbent uses VISUAL MINTEQ 3.1 software. Our aim was to determine the factors affecting the adsorption of cyanide from synthetic wastewater applying simulation. Synthetic wastewater with a concentration of 100 mg/l of potassium cyanide was used for simulation. The amount of titanium dioxide was 1 g/l under the temperature of $25^{\circ}C$. The simulation was performed using an adsorption model of Freundlich and constant capacitance model. The results of simulation indicated that three factors including pH, nanoparticles of titanium dioxide and the primary concentration of cyanide affect the adsorption level of cyanide. The simulation and experimental results had a good agreement. Also by increasing the pH level of adsorption increases 11 units and then almost did not change. An increase in cyanide concentration, the adsorption level was decreased. In simulation process, rising the concentrations of titanium dioxide nanoparticles to 1 g/l, the rate of adsorption was increased and afterward no any change was observed. In all cases, the coefficient of determination between the experimental data and simulation data was above 0.9.