• Title/Summary/Keyword: Temperature Sensor Array

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Vacuum Packaging of MEMS (Microelectromechanical System) Devices using LTCC (Low Temperature Co-fired Ceramic) Technology (LTCC 기술을 이용한 MEMS 소자 진공 패키징)

  • 전종인;최혜정;김광성;이영범;김무영;임채임;황건탁;문제도;최원재
    • Journal of the Microelectronics and Packaging Society
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    • v.10 no.1
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    • pp.31-38
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    • 2003
  • In the current electronic technology atmosphere, MEMS (Microelectromechanical System) technology is regarded as one of promising device manufacturing technologies to realize market-demanding device properties. In the packaging of MEMS devices, the packaged structure must maintain hermeticity to protect the devices from a hostile atmosphere during their operations. For such MEMS device vacuum packaging, we introduce the LTCC (Low temperature Cofired Ceramic) packaging technology, in which embedded passive components such as resistors, capacitors and inductors can be realized inside the package. The technology has also the advantages of the shortened length of inner and surface traces, reduced signal delay time due to the multilayer structure and cost reduction by more simplified packaging processes owing to the realization of embedded passives which in turn enhances the electrical performance and increases the reliability of the packages. In this paper, the leakage rate of the LTCC package having several interfaces was measured and the possibility of LTCC technology application to MEMS devices vacuum packaging was investigated and it was verified that improved hermetic sealing can be achieved for various model structures having different types of interfaces (leak rate: stacked via; $4.1{\pm}1.11{\times}10^{-12}$/ Torrl/sec, LTCC/AgPd/solder/Cu-tube; $3.4{\pm}0.33{\times}10^{-12}$/ Torrl/sec). In real application of the LTCC technology, the technology can be successfully applied to the vacuum packaging of the Infrared Sensor Array and the images of light-up lamp through the sensor way in LTCC package structure was presented.

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Vapor Recognition Using Image Matching of Micro-Array Sensor Response from Portable Electronic Nose (휴대용 전자 후각 장치에서 다채널 마이크로 센서 신호의 영상 정합을 이용한 가스 인식)

  • Yang, Yoon-Seok
    • Journal of the Institute of Electronics Engineers of Korea SC
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    • v.48 no.2
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    • pp.64-70
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    • 2011
  • Portable artificial electronic nose (E-nose) system suffers from noisy fluctuation in surroundings such as temperature, vapor concentration, and gas flow, because its measuring condition is not controled precisely as in the laboratory. It is important to develop a simple and robust vapor recognition technique applicable to this uncontrolled measurement, especially for the portable measuring and diagnostic system which are expanding its area with the improvements in micro bio sensor technology. This study used a PDA-based portable E-nose to collect the uncontrolled vapor measurement signals, and applied the image matching algorithm developed in the previous study on the measured signal to verify its robustness and improved accuracy in portable vapor recognition. The results showed not only its consistent performance under noisy fluctuation in the portable measurement signal, but also an advanced recognition accuracy for 2 similar vapor species which have been hard to discriminate with the conventional maximum sensitivity feature extraction method. The proposed method can be easily applied to the data processing of the ubiquitous sensor network (USN) which are usually exposed to various operating conditions. Furthermore, it will greatly help to realize portable medical diagnostic and environment monitoring system with its robust performance and high accuracy.

Detection Method for Bean Cotyledon Locations under Vinyl Mulch Using Multiple Infrared Sensors

  • Lee, Kyou-Seung;Cho, Yong-jin;Lee, Dong-Hoon
    • Journal of Biosystems Engineering
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    • v.41 no.3
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    • pp.263-272
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    • 2016
  • Purpose: Pulse crop damage due to wild birds is a serious problem, to the extent that the rate of damage during the period of time between seeding and the stage of cotyledon reaches 45.4% on average. This study investigated a method of fundamentally blocking birds from eating crops by conducting vinyl mulching after seeding and identifying the growing locations for beans to perform punching. Methods: Infrared (IR) sensors that could measure the temperature without contact were used to recognize the locations of soybean cotyledons below vinyl mulch. To expand the measurable range, 10 IR sensors were arranged in a linear array. A sliding mechanical device was used to reconstruct the two-dimensional spatial variance information of targets. Spatial interpolation was applied to the two-dimensional temperature distribution information measured in real time to improve the resolution of the bean coleoptile locations. The temperature distributions above the vinyl mulch for five species of soybeans over a period of six days from the appearance of the cotyledon stage were analyzed. Results: During the experimental period, cases where bean cotyledons did and did not come into contact with the bottom of the vinyl mulch were both observed, and depended on the degree of growth of the bean cotyledons. Although the locations of bean cotyledons could be estimated through temperature distribution analyses in cases where they came into contact with the bottom of the vinyl mulch, this estimation showed somewhat large errors according to the time that had passed after the cotyledon stage. The detection results were similar for similar types of crops. Thus, this method could be applied to crops with similar growth patterns. According to the results of 360 experiments that were conducted (five species of bean ${\times}$ six days ${\times}$ four speed levels ${\times}$ three repetitions), the location detection performance had an accuracy of 36.9%, and the range of location errors was 0-4.9 cm (RMSE = 3.1 cm). During a period of 3-5 days after the cotyledon stage, the location detection performance had an accuracy of 59% (RMSE = 3.9 cm). Conclusions: In the present study, to fundamentally solve the problem of damage to beans from birds in the early stage after seeding, a working method was proposed in which punching is carried out after seeding, thereby breaking away from the existing method in which seeding is carried out after punching. Methods for the accurate detection of soybean growing locations were studied to allow punching to promote the continuous growth of soybeans that had reached the cotyledon stage. Through experiments using multiple IR sensors and a sliding mechanical device, it was found that the locations of the crop could be partially identified 3-5 days after reaching the cotyledon stage regardless of the kind of pulse crop. It can be concluded that additional studies of robust detection methods considering environmental factors and factors for crop growth are necessary.

Nitrogen Monoxide Gas Sensing Properties of CuO Nanorods Synthesized by a Hydrothermal Method (수열합성법으로 합성된 산화구리 나노막대의 일산화질소 가스 감지 특성)

  • Park, Soo-Jeong;Kim, Hyojin;Kim, Dojin
    • Korean Journal of Materials Research
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    • v.24 no.1
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    • pp.19-24
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    • 2014
  • We report the nitrogen monoxide (NO) gas sensing properties of p-type CuO-nanorod-based gas sensors. We synthesized the p-type CuO nanorods with breadth of about 30 nm and length of about 330 nm by a hydrothermal method using an as-deposited CuO seed layer prepared on a $Si/SiO_2$ substrate by the sputtering method. We fabricated polycrystalline CuO nanorod arrays at $80^{\circ}C$ under the hydrothermal condition of 1:1 morality ratio between copper nitrate trihydrate [$Cu(NO_2)_2{\cdot}3H_2O$] and hexamethylenetetramine ($C_6H_{12}N_4$). Structural characterizations revealed that we prepared the pure CuO nanorod array of a monoclinic crystalline structure without any obvious formation of secondary phase. It was found from the gas sensing measurements that the p-type CuO nanorod gas sensors exhibited a maximum sensitivity to NO gas in dry air at an operating temperature as low as $200^{\circ}C$. We also found that these CuO nanorod gas sensors showed reversible and reliable electrical response to NO gas at a range of operating temperatures. These results would indicate some potential applications of the p-type semiconductor CuO nanorods as promising sensing materials for gas sensors, including various types of p-n junction gas sensors.

Delayed Mode Quality Control of Argo Data and Its Verification in the Pacific Ocean (태평양 Argo 자료의 지연모드 품질관리 및 검증연구)

  • Yang, Joon-Yong;Kang, Seong-Yun;Go, Woo-Jin;Suh, Young-Sang;Seo, Jang-Won;Suk, Moon-Sik
    • Journal of Environmental Science International
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    • v.17 no.12
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    • pp.1353-1361
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    • 2008
  • Quality control of Argo(Array for Real-time Geostrophic Oceanography) data is crucial by reason that salinity measurements are liable to experience some drift and offset due to biofouling, contamination of sensor and wash-out of biocide. The automated Argo real-time quality control has a limit of sorting data quality, so that WJO program is adopted as standardized method of Argo delayed mode quality control (DMQc) in the world that is a precise quality control method. We conducted DMQC on pressure, temperature and salinity measured by Argo floats in the Pacific Ocean including expert evaluation. Particularly, salinity data were corrected using WJO program. 4 salinity profiles of Argo delayed mode were compared with nearby in situ CTD data and other Argo data in deep layer where oceanographic conditions are stable in time and space. The differences of both salinities were lower than target accuracy of Argo. As compared with the difference of salinities before DMQC, those after DMQC decreased by 60-80 percent. Quality of delayed mode salinity data seemed to be improved correcting salinity data suggested by WJO program.

The design of a scintillation system based on SiPMs integrated with gain correction functionality

  • Lin, Zhenhua;Hautefeuille, Benoit;Jung, Sung-Hee;Moon, Jinho;Park, Jang-Guen
    • Nuclear Engineering and Technology
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    • v.52 no.1
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    • pp.164-169
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    • 2020
  • Use of SiPM has been considered as an alternative to PMT, because of its compact size, low-operating voltage, non-sensitive to electromagnetic, low costs and so on. The main limitation for the use of SiPM is due to its small sensitive area compared to PMT that limits the light collection, and therefore the sensor energy resolution. In this article we studied the effect of increasing the number of SiPM by connecting them in parallel to increase the active detection area. This allowed us to compare the different energy resolution measurements. 137Cs has been selected as reference to study the energy resolution for 662 keV gamma-rays. Another investigation was to compare the minimum detectable gamma energy under various SiPM configurations. It has been found that the use of 4 SiPM arrays can greatly improve the energy resolution up to 4% than only one SiPM array, meanwhile use of more than 2 SiPM arrays does not increase the energy resolution significantly. Thus we can conclude that for a large area of cylindrical scintillator (3 × 3 inches), the use of SiPMs are limited to a certain number or certai active area depending on the commercial SiPMs, and its cost should be less than traditional PMT for the cost-effective and compact size considerations. It is well known that the gain of SiPM varies with temperature. In this article, we also calibrated gain to guarantee the same position of photoelectric peak in response of different temperatures.

Fabrication and Characteristics of Infrared Photodiode Using Insb Wafer with p-i-n Structure (p-i-n 구조의 InSb 웨이퍼를 이용한 적외선 광다이오드의 제조 및 그 특성)

  • Cho, Jun-Young;Kim, Jong-Seok;Son, Seung-Hyun;Lee, Jong-Hyun;Choi, Sie-Young
    • Journal of Sensor Science and Technology
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    • v.8 no.3
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    • pp.239-246
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    • 1999
  • A highly sensitive photovoltaic infrared photodiode was fabricated for detecting infrared light in $3{\sim}5\;{\mu}m$ wavelength range on InSb wafer with p-i-n structure grown by MOCVD. Silicon dioxide($SiO_2$) insulating films for the junction interface and surface of photodiode were prepared using RPCVD because InSb has low melting point and evaporation temperature. After formation of In ohmic contacts by thermal evaporation, the electrical properties of the photodiode were characterized in dark state at 77K. A product of zero-bias resistance and area($R_0A$) showed $1.56{\times}10^6\;{\Omega}{\cdot}cm^2$ that satisfied BLIP(background limited infrared photodetector) condition. When the photodiode was tested under infrared light, the normalized detectivity of about $10^{11}\;cm{\cdot}Hz^{1/2}{\cdot}W^{-1}$ was obtained. we successfully fabricated a unit cell with InSb IR array with good quantum efficiency and high detectivity.

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Characteristics of the Buttock Interface Pressure According to Wheelchair Propulsion Speed and Various Back Reclined Seating Position (휠체어 추진속도 및 등받이 경사각도에 따른 둔부 압력 변화 특성)

  • Kwon, Hyuk-Cheol;Kong, Jin-Yong
    • Physical Therapy Korea
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    • v.12 no.2
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    • pp.1-10
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    • 2005
  • Pressure ulcers are serious complications of tissue damage that can develop in patients with diminished pain sensation and diminished mobility. Pressure ulcers can result in irreversible tissue damage caused by ischemia resulting from external loading. There are many intrinsic and extrinsic contributors to the problem, including interface tissue pressure, shear, temperature, moisture, hygiene, nutrition, tissue tolerance, sensory and motor dysfunction, disease and infection, posture, and body support systems. The purposes of this study were to investigate the relationship between buttock interface pressure and seating position, wheelchair propulsion speed. Seated-interface pressure was measured using the Force Sensing Array pressure mapping system. Twenty subjects propelled wheelchair handrim on a motor-driven treadmill at different velocities (40, 60, 80 m/min) and seating position used recline ($100^{\circ}$, $110^{\circ}$, $120^{\circ}$) with a wheelchair simulator. Interface pressure consists of average (mean of the pressure sensor values) and maximum pressure (highest individual sensor value). The results of this study were as follows; No significant correlation in maximum/average pressure was found between a static position and a 40 m/min wheelchair propulsion (p>.05). However, a significant increase in maximum/average pressure were identified between conditions of a static position and 60 m/min, and 80 m/min wheelchair propulsion (p<.05). No significant correlation in maximum pressure were found between a $90^{\circ}$ recline (neutral position) and a $100^{\circ}$, $110^{\circ}$, or $120^{\circ}$ recline of the wheelchair back (p>.05). No significant difference in average pressure was found between conditions of a $90^{\circ}$ recline and both a $100^{\circ}$ and $110^{\circ}$ recline of wheelchair back. However, a significant reduction in average pressure was identified between conditions of a $90^{\circ}$ and $120^{\circ}$ recline of wheelchair back (p<.05). This study has shown some interesting results that reclining the seat by $120^{\circ}$ reduced average interface pressure, including the reduction or prevention in edema. And interface pressure was greater during dynamic wheelchair propulsion compared with static seating. Therefore, the optimal seating position and seating system ought to provide postural control and pressure relief. We need an education on optimal seating position and a suitable propulsion speeds for wheelchair users.

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The fabrication and sensing characteristics of conducting polymer sensors for Measurement of VOCs (Volatile organic compounds) gas (휘발성 유기 화합물 가스 측정을 위한 전도성 고분자 센서의 제조(製造) 및 감응(感應) 특성(特性))

  • Paik, J.H.;Hwang, H.R.;Roh, J.G.;Huh, J.S.;Lee, D.D.;Lim, J.O.;Byun, H.G.
    • Journal of Sensor Science and Technology
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    • v.10 no.2
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    • pp.125-133
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    • 2001
  • Conducting polymer sensors show high sensitivity when exposed to volatile organic compounds gases at room temperature. The 8 sensor array using by polypyrrole and polyaniline has been fabricated by chemical polymerization for measuring sensing characteristics of VOCs gases. Conducting polymer was polymerized by using distilled pyrrole, aniline as a monomer and ammonium persulfate (APS) as an oxidant and dodecylbenzene sulfonic acid (DBSA) as a dopant. Dedoped film was synthesized by reverse voltage and redoped film was synthesized by using 1-octanesulfonic acid sodium salt as another dopant in electrochemical cell. The sensitivity and reversibility were influenced by doping, dedoping, redoping and thickness for the polypyrrole and polyaniline. We investigated the relation between the structure of conducting polymer and sensitivity of these sensors through the analysis of scanning electron microscope (SEM), scanning probe microscope (SPM) and $\alpha$-step.

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Development of Biotelemetry Method by Combining the SSBL Method and the Pinger Synchronizing Method (1) - Design and production of system - (SSBL 방식과 핑거동기 방식을 조합한 바이오텔레메터리 방식의 개발 (1) -시스템의 설계 및 제작 -)

  • 박주삼;고탁창언
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.39 no.3
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    • pp.218-229
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    • 2003
  • A new biotelemetry method that the installation and the treatment of equipment is convenient and the instantaneously detailed location of the fish attached the pinger is able to track comparatively easily was developed. The receiving system in this biotelemetry method was advanced for track the detailed behavior of the fish by the miniature tracking pinger, because it was a burden to fish to add the pinger with the water temperature and the pressure sensor. By combining of the super short base line (SSBL) method to detect the direction of pinger and the pinger synchronizing method to measure the range from receiving transducer to pinger, the three dimensional locations of fish to the receiving transducer is gotten instantaneously. The receiving system is devised to realize the high precision or wide detection range by application of the basic design method for receiving system of biotelemetry developed by the present authors and the hydrophone array configuration. The measurement distance error in the pinger synchronizing method is minimized through the correction of which the deviation of transmission pluse period of pinger is caused by changing water temperature. A prototype system which is able to track the instantaneously detailed location of the fish by the SSBL and pinger synchronizing biotelemetry (SPB) method was produced.