• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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• pp.59-63
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• 2002

This paper reports on the fabrication process and characteristics of a ceramic thin-film pressure sensor based on Ta-N strain-gauges for harsh environment applications. The Ta-N thin-film strain-gauges are sputter-deposited on a thermally oxidized micromachined Si diaphragms with buried cavities for overpressure tolerance. The proposed device takes advantage of the good mechanical properties of single-crystalline Si as a diaphragm fabricated by SDB and electrochemical etch-stop technology, and in order to extend the temperature range, it has relatively higher resistance, stability and gauge factor of Ta-N thin-films more than other gauges. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.21 ~ 1.097 mV/V.kgf/$\textrm{cm}^2$ in temperature ranges of 25~ $200^{\circ}C$ and a maximum non-linearity is 0.43 %FS.

• Journal of Magnetics
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• 제22권1호
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• pp.7-13
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• 2017

The magnetoresistance (MR) properties of antiferromagnetic (AFM) IrMn based giant magnetoresistance-spin valve (GMR-SV) was investigated in view point of the artificial rotation effect of ferromagnetic (FM) layer in the plane induced by an applied field during the post annealing temperature. The MR curves measured with an azimuthal angle region of ${\phi}=0^{\circ}-360^{\circ}$ are depended on the annealing temperature and the magnetization easy axis of two free NiFe layers and two pinned NiFe layers in dual-type GMR-SV film. Especially, the annealing temperature and sample rotation angle(${\theta}$ ) maintained to the magnetic sensitivity (MS) of 1.4 %/Oe with an isotropic region angle of $110^{\circ}$ are $100^{\circ}C$ and $90^{\circ}$, respectively.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 춘계합동학술대회 논문집
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• pp.192-196
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• 2002

This paper describes on the fabrication and characteristics of a metal thin-film pressure sensor based on Cr strain-gauges for harsh environment applications. The Cr thin-film strain-gauges are sputter-deposited onto a micromachined Si diaphragms with buried cavity for overpressure protectors. The proposed device takes advantages of the good mechanical properties of single-crystalline Si as diaphragms fabricated by SDB and electrochemical etch-stop technology, and in order to extend the operating temperature range, it incorporates relatively the high resistance, stability and gauge factor of Cr thin-films. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.097~1.21 $mV/V{\cdot}kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS.

• 한국전기전자재료학회논문지
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• 제22권2호
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• pp.151-157
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• 2009

This paper reports the resistance change of conductive carbon nanotube (CNT) thin-films according to the temperature variation. Resistance of conductive CNT thin-films intrinsically has good thermal sensitivity, but shows environmental dependency. In order to reduce environmental effects, we spin-coated polydimethylsiloxane (PDMS) on the conductive CNT thin-films. We observed that conductive CNT thin-films with a PDMS encapsulation layer showed little environmental dependency, but more linear and stable temperature dependencies. If proper encapsulation is provided, conductive CNT thin-films can be used for temperature sensor applications.

• Journal of the Optical Society of Korea
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• 제17권4호
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• pp.300-304
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• 2013

Novel breakthrough random-hole optical fibers (RHOFs) are fabricated in a draw tower facility, by tapering an optical fiber preform packed with a silica powder mixture capable of producing air holes in situ at the high temperature of tens of hundreds in degrees Celsius. Structural and propagation characteristics of the porous RHOF are explained briefly. Experimental investigations of the invented RHOF are performed for pressure sensor applications. Remarkable results are obtained for the RHOF with desirable pressure sensitivity independent of temperature, as is required for harsh conditions as in oil reservoirs.

• 대한기계학회논문집A
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• 제28권6호
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• pp.670-676
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• 2004

Most metallic materials and alloys show rate independence or negative rate sensitivity in some temperature region when dynamic strain aging occurs. It is generally recognized that negative rate sensitivity is an essential feature of dynamic strain aging that can depend on strain and/or strain rate. The unified viscoplasticity theory based on overstress is applied to reproduce a change of rate sensitivity type that depends on strain or strain rate. This is accomplished through the introduction of a single new term in the growth law of the equilibrium stress, which is a tensor valued state variable of the model. It is also shown that the new term can be used to reproduce a dramatic increase of rate sensitivity in dynamic plasticity.

• E2M - 전기 전자와 첨단 소재
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• 제9권8호
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• pp.819-824
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• 1996

We have investigated the temperature dependence of CO gas sensitivity for ZnO and ZnO-CuO thick films at 200 ppm CO gas, where those films were prepared by thermal transformation. The ZnO thick film shows the maximum sensitivity of -4 at >$300^{\circ}C$ On the other hand, ZnO-CuO(more than 1mol%) thick film shows that the maximum sensitivity reduced to less than 1.5. The decrease in sensitivity of CO gas with increasing the CuO contents is due to the decrease of the oxygen absorption in thick films.

• E2M - 전기 전자와 첨단 소재
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• 제9권9호
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• pp.925-932
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• 1996

Using the d.c. 2-probe method, we have examined the temperature dependence of CO gas sensitivity of pure ZnO and ZnO CuO thick films prepared by the acqueous precipitation. At 200ppm CO gas, pure ZnO thick film shows the maximum sensitivity of -6.5 at 300.deg. C. On the other hand, the maximum sensitivity of 1-5 mol% and 10-15 mol% CuO added ZnO thick films are 2.8-2.5 and 1.6, respectively. Therefore, the sensitivity of pure ZnO thick film is about three times larger than those of ZnO-CuO thick films. We suggest that the promotion of maximum sensitivity is caused by low packing and the increase of chemical adsorptions for $O_{2}$ gas.

• 한국감성과학회:학술대회논문집
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• 한국감성과학회 2003년도 춘계학술대회 논문집
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• pp.41-46
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• 2003

In recently, Is inhabiting more than 70％ indoors during a day in case of company employee and ordinary people which is looking at usual business. Therefore Thermal comfort of human body about indoor temperature and air flow acting very heftily. When intestine temperature is fallen for external low temperature and air flow in winter in case enter into heated room feel comfort by effect of temperature and feel comfort or discomfort by room heating condition gradually. Therefore it is important that grasp thermal comfort about temperature and air flow in heating to keep continuous comfort in indoor dwelling. Temperature and thermal comfort factor of emotion ＆ sensitivity image exert fair effect since heating middle although thermal comfort change greatly effect on sensation about temperature at actuality heating early. Need much study yet in vantage point of emotion ＆ sensitivity although much study were held about thermal and comfort sensibility and when heat in existing research until now. Therefore this study is targeting that evaluate thermal comfort through introduction of estimation method by emotion ＆ sensibility image real and synthetic sensibility about thermal environment that is becoming winter heating.

• 한국광학회지
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• 제8권5호
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• pp.415-419
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• 1997

광섬유 격자는 외부의 가해진 물리량에 대해 선형적인 응답을 하며, 광섬유 격자의 파장 인코딩 특성으로 인해 S/N비가 높은 신호 처리를 할 수 있는 장점이 있다. 본 논문에서는 편광 유지 광섬유 격자를 이용한 압력 센서에 관한 실험을 수행하였다. 편광 유지 광섬유 격자는 위상 마스크를 이용하여 Bow-Tie형 광섬유에 형성시켰는데, 편광 유지 광섬유는 두 개의 고유 편광 축을 가지므로 두 개의 브래그 peak을 가진다. 종방향 스트레인과 온도 변화에 따른 두 개의 브래그 파장 변화를 측정한 결과 각각 1.2 pm/.mu..epsilon.의 종방향 스트레인에 대한 파장 민감도와 11.4 pm/.deg. C의 온도에 대한 파장 민감도가 관측되어, 단일 모드 광섬유 격자의 보고된 값과 거의 일치하였다. 반면에 편광 유지 광섬유 격자에 횡방향 스트레스를 가하면 두 브래그 파장사이의 간격이 변화함을 관측하였고, 두 브래그 파장 간격에 대하여는 14.6 pm/N의 횡방향 스트레스에 대한 파장 민감도를 얻었다. 편광 유지 광섬유 격자 센서는 온도의 변화에 무관한 횡방향 스트레스 즉, 압력센서로 이용할 수 있음을 보였다.