• Title/Summary/Keyword: Temperature Lift

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Control of Nanospacing in TiO2 Nanowire Array Using Electron Beam Lithography

  • Yun, Young-Shik;Yeo, Jong-Souk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.430.1-430.1
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    • 2014
  • According to advanced nanotechnology in the field of biomedical engineering, many studies of the interaction between topography of surfaces and cellular responses have been focused on nanostructure. In order to investigate this interaction, it is essential to make well-controlled nanostructures. Electron beam lithography (EBL) have been considered the most typical processes to fabricate and control nano-scale patterns. In this work, $TiO_2$ nanowire array was fabricated with hybrid process (top-down and bottom-up processes). Nanodot arrays were patterned on the substrate by EBL process (top-down). In order to control the spacing between nanodots, we optimized the EBL process using Poly(methyl methacrylate) (PMMA) as an electron beam resist. Metal lift-off was used to transfer the spacing-controlled nanodots as a seed pattern of $TiO_2$ nanowire array. Au or Sn nanodots which play an important role for catalyst using Vapor-Liquid-Solid (VLS) method were patterned on the substrate through the lift-off process. Then, the sample was placed in the tube furnace and heated at the synthesis temperature. After heat treatment, $TiO_2$ nanowire array was fabricated from the nanodots through VLS method (bottom-up). These results of spacing-controlled nanowire arrays will be used to study the interaction between nanostructures and cellular responses in our next steps.

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High Quality Non-Transfer Single-Layer Graphene Process Grown Directly on Ti(10 nm)-Buffered Layer for Photo Lithography Process (포토 리소그래피 공정을 위한 Ti(10 nm)-Buffered층 위에 직접 성장된 고품질 무전사 단층 그래핀 공정)

  • Oh, Keo-Ryong;Han, Yire;Eom, Ji-Ho;Yoon, Soon-Gil
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.34 no.1
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    • pp.21-26
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    • 2021
  • Single-layer graphene is grown directly on Ti-buffered SiO2 at 100℃. As a result of the AFM measurement of the Ti buffer layer, the roughness of approximately 0.2 nm has been improved. Moreover, the Raman measurement of graphene grown on it shows that the D/G intensity ratio is extremely small, approximately 0.01, and there are no defects. In addition, the 2D/G intensity ratio had a value of approximately 2.1 for single-layer graphene. The sheet resistance is also 89 Ω/□, demonstrating excellent characteristics. The problem was solved by using graphene and a lift-off patterning method. Low-temperature direct-grown graphene does not deteriorate after the patterning process and can be used for device and micro-patterning research.

Capacitor Failure Detection Technique for Microgrid Power Converter (마이크로그리드 전력변환장치용 커패시터 고장 검출 기법)

  • Woo-Hyun Lee;Gyang-Cheol Song;Jun-Jae An;Seong-Mi Park;Sung-Jun Park
    • Journal of the Korean Society of Industry Convergence
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    • v.26 no.6_2
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    • pp.1117-1125
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    • 2023
  • The DC part of the DC microgrid power conversion system uses capacitors for buffers of charge and discharge energy for smoothing voltage and plays important roles such as high frequency component absorption, power balancing, and voltage ripple reduction. The capacitor uses an aluminum electrolytic capacitor, which has advantages of capacity, low price, and relatively fast charging/discharging characteristics. Aluminum electrolytic capacitors(AEC) have previous advantages, but over time, the capacity of the capacitors decreases due to deterioration and an increase in internal temperature, resulting in a decrease in use efficiency or an accident such as steam extraction due to electrolyte evaporation. It is necessary to take measures to prevent accidents because the failure diagnosis and detection of such capacitors are a very important part of the long-term operation, safety of use, and reliability of the power conversion system because the failure of the capacitor leads to not only a single problem but also a short circuit accident of the power conversion system.

The Study on Deposition and Characteristics of Pt-Co Alloy Thin Films for RTD Temperature Sensors (측온저항체 온도센서용 Pt-Co 합금박막의 증착과 특성에 관한 연구)

  • Chung, Gwiy-Sang;Noh, Sang-Soo
    • Journal of Sensor Science and Technology
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    • v.7 no.1
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    • pp.45-50
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    • 1998
  • Platinum-Cobalt alloy thin films were deposited on $Al_{2}O_{3}$ substrate by magnetron cosputtering for RTD temperature sensors. We made Pt-Co alloy resistance patterns on the $Al_{2}O_{3}$ substrate by lift-off method and investigated the physical and electrical characteristics of these films under various conditions, the input power, working vacuum, annealing temperature and time, and also after annealing these films. The resistivity and sheet resistivity of these films were decreased with increasing the annealing temperature. At input power of Pt : $4.4\;W/cm^{2}$, Co : $6.91\;W/cm^{2}$, working vacuum of 10 mTorr and annealing conditions of $800^{\circ}C$ and 60 min, the resistivity and sheet resistivity of Pt-Co thin films was $15{\mu}{\Omega}{\cdot}cm$ and $0.5{\Omega}/{\square}$, respectively and the TCR value of Pt-Co alloy thin films with thickness of $3000{\AA}$ were $3740ppm/^{\circ}C$ in the temperature range of $25{\sim}600^{\circ}C$. These results indicate that Pt-Co alloy thin films have potentiality for the RTD temperature sensors.

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Annealing Characteristics of Pt-Co Alloy thin Films for RTD Temperature Sensors (RTD용 Pt-Co 합금박막의 열처리 특성)

  • Hong, Seog-Woo;Seo, Jeong-Hwan;No, Sang-Soo;Chung, Gwiy-Sang
    • Proceedings of the KIEE Conference
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    • 1998.07d
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    • pp.1349-1351
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    • 1998
  • Platinum-Cobalt alloy thin films were deposited on $Al_2O_3$ substrates by r.f. cosputtering for RTD temperature sensors. We made Pt-Co alloy resistance patterns on the $Al_2O_3$ substrates by lift-off method and investigated the physical and electrical characteristics of these films under various conditions (the input power, working vacuum, annealing temperature, thickness of thin films) and also after annealing these films. At input power of Pt : $4.4 W/cm^2$. Co:6.91W/$cm^2$. working vacuum of 10 mTorr and annealing conditions of $1000^{\circ}C$ and 60 min, the resistivity and sheet resistivity of Pt-Co thin films was $15{\mu}{\Omega}{\cdot}cm$ and $0.5{\Omega}/{\square}$, respectively. The TCR value of Pt-Co alloy thin films was measured with various thickness of thin films and annealing conditions. The optimum TCR value is gained under conditions $3000{\AA}$ of thin films thickness and $1000^{\circ}C$ of annealing temperature. These results indicate that Pt-Co alloy thin films have potentiality for the high resolution RTD temperature sensors.

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The Study on Formation of Pt-Co Alloy Thin Films for RTD Temperature Sensors (측온저항체 온도센서용 Pt-Co 합금박막의 형성에 관한 연구)

  • Kim, Seo-Yeoun;Noh, Sang-Soo;Choi, Young-Kyu;Chung, Gwiy-Sang
    • Proceedings of the KIEE Conference
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    • 1997.07d
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    • pp.1485-1487
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    • 1997
  • Platinum-Cobalt alloy thin films were deposited on $Al_2O_3$ substrates by co sputtering for RTD temperature sensors. We made Pt-Co alloy resistance patterns on $Al_2O_3$ substrate by lift-off method and investigated the physical and electrical characteristics of these films under sputtering conditions (; the input power, working vacuum), annealing conditions (; temperature, time) and also after annealing these films. After the annealing treatment at $800^{\circ}C$ for 60min, the resistivity and sheet resistivity of Pt-Co thin films was $0.0302{\mu}{\Omega}{\cdot}cm$ and $0.1{\Omega}/{\square}$, respectively, and the TCR value of Pt-Co RTD was $3600ppm/^{\circ}C$ in the temperature range of $25{\sim}400^{\circ}C$. These results indicate that Pt-Co thin films have potential for the excellent RTD temperature sensors.

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The Effect of Aquapuncture Anesthesia by Acupoint Iniection with Ketamine Hydrochloride in Dogs (개에 있어서 염산케타민 혈위주사에 의한 약침마취의 효과)

  • 김덕환;이교영;조성환;신해청;조해운;이성호;이성옥;권건오;김인봉
    • Journal of Veterinary Clinics
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    • v.15 no.2
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    • pp.399-403
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    • 1998
  • To clarify the anesthetic effect of acupoint injection(aquapupuncture) using general anasthetics in dogs, 18 mongrel dogs were divided into control and two experimental groups(Tian-ping+Bai-hui : Tian-ping group and San-yang-luo+Gong-sun group : San -yang- lux group). Control group was intramuscularly injected with ketamine hydrochloride, 22 mg/ kg of body weight into the thigh and experimental groups were injected into each acupoint with half volume of dosage, respectively. Clinical findings(recumbency time, induction time of anesthesia, time of head lift and standing time) and changes of vital sign(temperature, heart rate and respiration rate) were investigates at pre-anesthesia, during anesthesia and poststanding, respectively. In recumbency time San-yang-luo groupui<0.05) and Tian-ping group (p<0.05) were faster than that of control, respectively and Tian-ping group was the fastest. In induction time of anesthesia San-yang-luo group was similar to that of control, however, Tian-ping group was faster than that of control(p

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A Simulation Study for Detailed Design of A-Mart Logistics Center for Low Temperature Products (A-마트 저온제품 종합물류센터 실시설계를 위한 시뮬레이션)

  • Jeon, Byoung-Hack;Jang, Seong-Young
    • Journal of the Korea Society for Simulation
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    • v.15 no.4
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    • pp.143-151
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    • 2006
  • This paper deals with the simulation model for design and operations of A-Mart logistic center for low temperature products. In developed simulation model, receiving docks, digital classification system (DCS), shipping docks, material handling devices and manual sorting stations are considered. Five types of cargo such as fruits, palletized fruits, delicatessen and fisheries, vegetables and refrigerated cargoes are considered. The simulation model and process animation are developed using the simulation package ARENA. Among various design and operation alternatives consisting of the number of workers of receiving dock, allocation of receiving docks by cargo types, DCS capacity, the number of folk-lift, the number of manual sorting operators and overall layout, the best alternatives of each subsystem are selected by simulation analysis. The major performance measures such as DCS throughput, utilization of operators at each station, receiving docks utilization and folk-lift utilization are considered for the alternative evaluation.

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Fabrication and Characteristics of Hot-film Air Flow Sensor for Automobile (자동차용 박막 히터형 공기유량센서의 제작 및 특성)

  • Kim, Hyung-Pyo;Park, Se-Kwang
    • Journal of Sensor Science and Technology
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    • v.8 no.5
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    • pp.394-399
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    • 1999
  • An automobile hot-film air flow sensor is deposited with platinum by sputtering method, patterned by photoresisted lift-off method, annealed in $1,000^{\circ}C$ and passivated with PI-2723. The TCR of the fabricated hot-film is about $3500\;ppm/^{\circ}C$. In the experiment, the output voltage of the sensor is in proportional to the fourth power root in the air mass flow range of 300 kg/h. The error in the full flow range is about ${\pm}0.7%$. In the range of air temperature of $-20^{\circ}C{\sim}120^{\circ}C$, the error is about ${\pm}1%$ that is ${\pm}2%$ lower than that of the reference sensor. Therefore, the fabricated hot-film air flow sensor satisfies the specification for automobile. Lower temperature error of the sensor provides to control the precise air/fuel ratio of automobile engine and results in improvement of a fuel mileage and the less amount of toxic gases emitted by automobile.

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Flow and Heat Transfer Characteristics of a Circular Cylinder with the Periodic Inlet Velocity (주기적인 입구 속도 변동에 따른 원관 주위 유동 및 열전달 특성)

  • Ha, Ji Soo
    • Journal of the Korean Institute of Gas
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    • v.23 no.3
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    • pp.27-32
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    • 2019
  • In this study, the vorticity distribution and the temperature distribution change around a circular cylinder were compared and analyzed with time for constant inlet velocity and periodic inlet velocity. Also, the frequency characteristics of the flow were analyzed by analyzing the time variation of lift and drag and their PSD(power spectral density). In the case of constant inlet velocity, the well known Karman vorticity distribution was shown, and vortices were alternately generated at the upper and lower sides of the circular cylinder. In case of periodic inlet velocity, it was observed that vortex occurred simultaneously in the upper and lower sides of the circular cylinder. In both cases, it was confirmed that the time dependent temperature distribution changes almost the same behavior as the vorticity distribution. For the constant inlet velocity, the vortex flow frequency is 31.15 Hz, and for the periodic inlet velocity, the vortex flow frequency is equal to the preriodic inlet velocity at 15.57 Hz. The mean surface Nusselt number was 99.6 for the constant inlet velocity and 110.7 for the periodic inlet velocity, which showed 11.1% increase in surface heat transfer.