• Title/Summary/Keyword: Temperature Estimation

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A Prediction Method of Temperature Distribution on the Wafer for Real-Time Control in a Rapid Thermal Process System (실시간 제어를 위한 고속 열처리 공정에서 웨어퍼 온도 분포 추정 기법)

  • Sim, Yeong-Tae;Yi, Seok-Joo;Kim, Hagbae
    • Journal of Institute of Control, Robotics and Systems
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    • v.6 no.9
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    • pp.831-835
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    • 2000
  • The uniformity of themperature on a wafer is a wafer is one the most important parameters to conterol the RTF(Rapid Thermal Process) with proper input signals. It is impossible to achieve the uniformity of temperature without the exact estimation of temperature ar all points on the wafer. There fore, it is difficult to understand the internal dynamics as well as the structural complexities of the RTP, which is aprimary obstacle to measure the distributed temperatures on the wafer accurately. Furthermore, it is also hard to accomplish desirable estimation because only a few pyrometers are available in the general equipments. In the paper, a thermal model based on the chamber grometry of the AST SHS200 RTP system is developed to effectively control the thermal uniformity on the wafer. First of all, the estimation method of one-point measurement is developed, which is properly extended to the case of multi-point measurements. This thermal model is validated through simulation and experiments. The proposed work can be utilized to building a run-by -run or a real-time control of the RTP.

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Analysis of Thermal Behavior and Temperature Estimation by using an Observer in Drilling Processes (드릴링 공정의 열거동 해석과 관측기를 이용한 온도 추정법)

  • Kim, Tae-Hoon;Chung, Sung-Chong
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.27 no.9
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    • pp.1499-1507
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    • 2003
  • Physical importance of cutting temperatures has long been recognized. Cutting temperatures have strongly influenced both the tool life and the metallurgical state of machined surfaces. Temperatures in drilling processes are particularly important, because chips remain in contact with the tool for a relatively long time in a hole. Tool temperatures tend to be higher in drilling processes than in other in machining processes. This paper concerns with modeling of thermal behaviors in drilling processes as well as estimation of the cutting temperature distribution based on remote temperature measurements. One- and two-dimensional estimation problems are proposed to analyze drilling temperatures. The proposed thermal models are compared with solutions of finite element methods. Observer algorithms are developed to solve inverse heat conduction problems. In order to apply the estimation of cutting temperatures, approximation methods are proposed by using the solution of the finite element method. In two-dimensional analysis, a moving heat source according to feedrate of the drilling process is regarded as a fixed heat source with respect to the drilling location. Simulation results confirm the application of the proposed methods.

A Study on Unified Vector Control of Induction Motor (유도전동기의 통일적 벡터제어에 관한 연구)

  • Kim, Y.D.;Lee, D.C.
    • Journal of Power System Engineering
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    • v.5 no.3
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    • pp.95-103
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    • 2001
  • This study is applied to common induction motor, and vector control is realized by using an indirect type of induction motor which has a simple composition. In this study extended Kalman filter is used from control theoretical viewpoint, and primary resistance and secondary resistance which change according to the temperature of motor are simultaneously estimated. This paper aims to research an indirect vector control in which the secondary resistance obtained from this estimation is consistent with secondary flux. This estimation is made by on-line estimation, but on-line estimation is difficult because extended Kalman filter takes long time in computation time. So off-line estimation was made on the assumption that the variation of temperature in motor is slow temporally.

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Hot Leg Temperature Uncertainty due to Thermal Stratification

  • Jang, Ho-Cheol;Ju, Kyong-In;Kim, Young-Bo;Sul, Young-Sil;Cheong, Jong-Sik
    • Proceedings of the Korean Nuclear Society Conference
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    • 1996.05b
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    • pp.29-35
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    • 1996
  • For the Reactor Coolant System(RCS) flow rate measurement by the secondary calorimetric heat balance method, the coolant temperature of the hot leg is needed. Several Resistance Temperature Detectors(RTD) are installed in the hot leg to measure the temperature, but the average value of RTDs does not correctly represent the energy-averaged(bulk) temperature because of the thermal stratification phenomenon. Therefore some correction is introduced to predict the bulk temperature, but the correction inevitably contains uncertainty because the stratification is not defined well quantitatively yet. Therefore a large uncertainty for the correction has been used for the conservative estimation. But unrealistically large uncertainty causes degradation of the measurement method and yields difficulty to meet the acceptance criterion in start-up flow measurement test. In this paper, an analytical estimation is made on the correction and the related uncertainty using the measured hot leg velocity profile of System 80 reactor flow model test and the measured temperatures of YGN 3&4 and PVNGS 1&2 start-up tests. The results reveal that the magnitude of the correction uncertainty is much smaller than that used in the previous design. Therefore, the confidence on the flow rate measurement method can be improved and the difficulty in start-up flow measurement test can be lessened if the smaller correction uncertainty obtained through this estimation is applied.

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Compensation of Temperature Characteristics for Capacitance Estimation of DC-link Capacitors (직류링크 커패시터의 용량 추정시 온도특성 보정)

  • Pu, Xingsi;Kim, Kyung-Hyun;Lee, Dong-Choon;Lee, Kyo-Beum;Kim, Jang-Mok
    • The Transactions of the Korean Institute of Power Electronics
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    • v.15 no.5
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    • pp.387-393
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    • 2010
  • This paper proposes a correction method of capacitance estimation considering the temperature effect for the DC-link capacitor banks in three-phase AC/DC/AC PWM converters. At first, operating temperature of the capacitors is detected and capacitance variation is corrected due to the temperature effect. Thermisters are used for sensing the temperature and voltage variation across the thermister is exploited to identify the capacitance change. The validity of the proposed method has been verified by experimental results.

A Study on the Real-Time Estimation of Thermal Displacement for a Ball Screw (실시간 볼 스크류 열변형 추정에 관한 연구)

  • 김수광;류승호;조동우
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1995.04b
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    • pp.88-93
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    • 1995
  • The ball screw preloaded for high nigidity and accuracy increases frictional resistance, therefore, its temperature and positioning error rise. In this paper, 2 diamensional temperature distributions of a ball screw with preload are analyzed according to the rotational speeds and stop times by a finite element method. The theremal behaviors of a ball screw are measured to examine the analyzed datum. The examined results show that the trends of temperature rising and axial distributions in steady state are nearly extimate but the temperature low. The differences of temperature ate seems to be caused by not exact heat transfer coefficients. More than an hour is consumed for calculation by FEM. So the modified lumped method for the real-time estimation of the thermal distribution is proposed. The estimated temperature of a ball serw by the modified lumped method is more exactly estimated than by FEM, nd that method takes less than several millisec. Moreover it can be used to estimate heat transfer coefficients.

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Comparative Study of Estimation Methods of the Endpoint Temperature in Basic Oxygen Furnace Steelmaking Process with Selection of Input Parameters

  • Park, Tae Chang;Kim, Beom Seok;Kim, Tae Young;Jin, Il Bong;Yeo, Yeong Koo
    • Korean Journal of Metals and Materials
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    • v.56 no.11
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    • pp.813-821
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    • 2018
  • The basic oxygen furnace (BOF) steelmaking process in the steel industry is highly complicated, and subject to variations in raw material composition. During the BOF steelmaking process, it is essential to maintain the carbon content and the endpoint temperature at their set points in the liquid steel. This paper presents intelligent models used to estimate the endpoint temperature in the basic oxygen furnace (BOF) steelmaking process. An artificial neural network (ANN) model and a least-squares support vector machine (LSSVM) model are proposed and their estimation performance compared. The classical partial least-squares (PLS) method was also compared with the others. Results of the estimations using the ANN, LSSVM and PLS models were compared with the operation data, and the root-mean square error (RMSE) for each model was calculated to evaluate estimation performance. The RMSE of the LSSVM model 15.91, which turned out to be the best estimation. RMSE values for the ANN and PLS models were 17.24 and 21.31, respectively, indicating their relative estimation performance. The essential input parameters used in the models can be selected by sensitivity analysis. The RMSE for each model was calculated again after a sequential input selection process was used to remove insignificant input parameters. The RMSE of the LSSVM was then 13.21, which is better than the previous RMSE with all 16 parameters. The results show that LSSVM model using 13 input parameters can be utilized to calculate the required values for oxygen volume and coolant needed to optimally adjust the steel target temperature.

Estimation of small pan evaporation using temperature data (기온자료를 이용한 소형증발접시 증발량 산정)

  • Rim, Chang-Soo
    • Journal of Korea Water Resources Association
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    • v.50 no.1
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    • pp.37-53
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    • 2017
  • Pan evaporation has been used as an indirect method for the estimation of reservoir evaporation. Therefore, in this study, pan evaporation estimation equations using only temperature data were suggested in the case that available meteorological data is limited. A formula for estimating the pan evaporation were suggested by comparing estimated pan evaporation with measured pan evaporation in 12 study areas in Korea. The suggested pan evaporation equations were verified in 44 study areas by comparing not only with temperature-based equations but also with equations using other meteorological data (temperature, wind speed, relative humidity, and sunshine duration). The study results indicate that the suggested equations in this study provide much better pan evaporation estimates, compared with other temperature-based equations. Overall, the suggested equations provide appropriate pan evaporation estimates in most of 56 study areas. Therefore, the suggested equations using only temperature data in this study are considered appropriate for the estimation of pan evaporation in Korea especially in the case that available meteorological data is limited. In the future, using the air temperature and pan evaporation data measured at the reservoir, further research is needed to examine the applicability of suggested equations for the estimation of reservoir evaporation.

Real-time estimation of Temperature Distribution of a Ball Screw System Using Modal Analysis and Observer (모드해석과 관측기에 의한 볼스크류 온도분포의 실시간 예측)

  • 김태훈
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2000.04a
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    • pp.635-640
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    • 2000
  • Thermal deformation of machine tools can be evaluated from the analysis of the whole temperature field. However, it is extremely inefficient and impossible to acquire the whole temperature field by measuring temperatures of every point. So, a temperature estimator, which can estimate the whole temperature field from the temperatures of just a few points, is required. In this paper, 1-dimensional heat transfer problem is modeled with modal analysis and state space equations. and then state observer is designed to estimate the intensity of heat source and the whole temperature field in real-time. The reliability of this estimator is verified by making a comparison between solutions by the proposed method and the exact solutions of examples. The proposed method is applied to the estimation of temperature distribution in a ball screw system.

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Effect of Environmental Conditions on Estimation of Ambient Temperature for Minimum Postmortem Interval (PMI) in Korea (사후 경과시간 추정을 위한 현장 대기온도 예측에 국내 환경 조건이 미치는 영향)

  • Jeong, Su Jin;Park, Ji Eun;Lee, Hyo Jung;Park, Seong Hwan;Shin, Sang Eon;Lee, Jae Won
    • Journal of Science Criminal Investigation
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    • v.11 no.3
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    • pp.178-185
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    • 2017
  • It is one of the most important factors to statistical estimation of ambient temperature for accumulated degree day (ADD) and minimum postmortem interval (PMI) in the incident scene. Until now, we applied the temperature of the nearest weather stations, adjusted temperature, or estimated the temperature by the linear regression analysis to estimate the temperature of the incident site. At this time, the estimated temperature may be changed according to the method of temperature estimation. And The accuracy of the estimated value may also vary depending on the environmental factors such as capacity, wind speed, humidity, and rainfall, which may affect measurement conditions and temperature. Therefore, we studied the effect of various environmental factors and measurement conditions for ambient temperature in Korea.