• Title/Summary/Keyword: Temperature Controller

검색결과 721건 처리시간 0.028초

A robust controller design for rapid thermal processing in semiconductor manufacturing

  • Choi, Byung-Wook;Choi, Seong-Gyu;Kim, Dong-Sung;Park, Jae-Hong
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1995년도 Proceedings of the Korea Automation Control Conference, 10th (KACC); Seoul, Korea; 23-25 Oct. 1995
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    • pp.79-82
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    • 1995
  • The problem of temperature control for rapid thermal processing (RTP) in semiconductor manufacturing is discussed in this paper. Among sub=micron technologies for VLSI devices, reducing the junction depth of doped region is of great importance. This paper investigates existing methods for manufacturing wafers, focusing on the RPT which is considered to be good for formation of shallow junctions and performs the wafer fabrication operation in a single chamber of annealing, oxidation, chemical vapor deposition, etc., within a few minutes. In RTP for semiconductor manufacturing, accurate and uniform control of the wafer temperature is essential. In this paper, a robustr controller is designed using a recently developed optimization technique. The controller designed is then tested via computer simulation and compared with the other results.

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퍼지로직 기반 보안기능 통합형 능동 환기 시스템 (Fuzzy Logic Based Active Ventilation System with Security Function)

  • 정병찬;김훈모
    • 한국자동차공학회논문집
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    • 제14권3호
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    • pp.58-67
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    • 2006
  • In this paper, fuzzy logic based active ventilation system with security function is proposed and implemented. We can easily experience the situation that inner air is so hot to get start immediately after parking at summer day. Hot temperature is enough to explode a gas lighter or to suffocate a little chid. Proposed system has 1 blower and 2 axial fans to ventilate inner air. Based on the fuzzy logic, speed and direction of each fan are controlled. In addition to controlling fans, controller put down windows and adjust the periods of open time. In order to prevent the theft and security problems, IR sensors are used to detect objects. On detecting objects, controller put up windows. Experimental result shows that implemented system can be effectively ventilate inner air and reduce temperature. Proposed system can be applicable to commercial automobiles.

측정지연이 있는 ROT 공정의 외란제거를 위한 SPDR 제어기 설계 (SPDR Scheme for Disturbance Reduction in ROT Process with Measurement Delay)

  • 박철재
    • 제어로봇시스템학회논문지
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    • 제20권10호
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    • pp.1023-1029
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    • 2014
  • In this paper, we propose an SPDR (Smith Predictor for Disturbance Reduction) scheme to improve the temperature control by reduction of the disturbance in ROT process with measurement delay. The proposed controller is a combination of Astrom's modified Smith predictor with a disturbance reduction controller and a grey predictor. The grey prediction is used to calculate the inverse of the measurement delay and to predict future variations and tendencies of system output. The simulation results demonstrate the successful performance of the proposed disturbance reduction controller and enhance the robustness of the proposed control scheme.

공조 시스템용 DDC의 온라인 최적제어에 관한 연구

  • 안병천
    • 설비공학논문집
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    • 제13권11호
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    • pp.1072-1078
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    • 2001
  • The real time optimal control algorithm of the DDC controller for chilled water and supply air temperature set-point of heating, ventilating, air-conditioning and refrigeration systems has been researched for minimization of the total power which is consumed by the chiller, chilled water pump and air handing unit fan. The study has been done by using TRNSYS program in order to analyze the central cooling system in terms of the environmental variables such as indoor cooling lead and wet-bulb temperature. This optimal control alogorithm saves more energy and is suitable for real time on-line control in comparison with conventional method.

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Tread Mill용 BLDCM의 구동 특성 향상을 위한 제어시스템 (Control System for Tread Mill BLDCM Drive quality Elevation)

  • 이주현;이동희;안진우
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2004년도 하계학술대회 논문집 B
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    • pp.1019-1021
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    • 2004
  • BLDCM(Brushless D.C. Motor) is widely used for industrial application because of high efficiency and high power density. Especially, in servo system and home appliance. BLDCM is very useful due to high control performance and low acoustic noise. In this paper, 2.5HP rated BLDCM controller and drive was developed for tread mill application. The prototype BLDCM has 4 poles rotor and 24 slots stator. Ferrite was used as a rotor magnet due to the cost and temperature characteristic. For the stable operation of tread mill. over current and high temperature can be detected by the DSP controller. For the commutation signal, switching patterns from the sensorless circuit and hall sensor signal are used in the DSP controller.

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Self-Tuning PID Controller Based on PLC

  • Phonphithak, A.;Pannil, P.;Suesut, T.;Masuchun, R.;Julsereewong, P.
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2004년도 ICCAS
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    • pp.272-276
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    • 2004
  • The conventional PID (Proportional-Integral-Derivative) control technique is widely used for the process control in many industries since it is simple in structure and provides the good response. Nowadays, this control technique has been developed on the Programmable Logic Controller (PLC) to use for the process control loop. However, using this technique is difficult when tuning the PID parameters ($K_p$, $T_i$ and $T_d$) to achieve the best response. Moreover, trial-and-error procedure along with the operator experiences are required to obtain the best results when tuning the PID controller parameters. This paper proposes the self-tuning PID controller based on PLC for the process control in the industries. The proposed self-tuning PID controller uses the PLC-based PID structures to control the process production. The proposed PID tuning utilizes the PLC to synthesize and analyze controller parameter as well as to tune for appropriate parameters using Dahlin method and extrapolation. Experimental results using a self-tuning PID controller to control temperature of the oven show that the controller developed is capable of controlling the process very effectively and provides a good response.

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2-DOF PID Control for the Steam Temperature Control of Thermal Power Plant

  • Kim, Dong-Hwa;Hong, Won-Pyo;Jung, Chang-Gi;Lee, Seung-Hak
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2001년도 하계학술대회 논문집 D
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    • pp.2123-2125
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    • 2001
  • In thermal power plant, the efficiency of a combined power plant with a gas turbine increases, exceeding 50%, while the efficiency of traditional steam turbine plants is approximately 35% to 40%. Up to the present time, the PID controller has been used to operate this system. However, it is very difficult to achieve an optimal PID gain without any experience, since the gain of the PID controller has to be manually tuned by trial and error procedures. This paper focuses on the neural network tuning of the 2-DOF PID controller with a separated 2-DOF parameter (NN-Tuning 2-DOF PID controller), for optimal control of the Gun-san gas turbine generating plant in Seoul. Korea. In order to attain optimal control, transfer function and operating data from start-up, running, and stop procedures of the Gun-san gas turbine have been acquired, and a designed controller has been applied to this system. The results of the NN-Tuning 2-DOF PID are compared with the PID controller and the conventional 2-DOF PID controller tuned by the Ziegler-Nichols method through experimentation. The experimental results of the NN-Tuning 2-DOF PID controller represent a more satisfactory response than those of the previously-mentioned two controller.

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가스터빈 시스템을 위한 퍼지-PI 제어기의 설계 (Design of Fuzzy-PI Controllers for the Gas Turbine System)

  • 김종욱;김상우
    • 제어로봇시스템학회논문지
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    • 제6권11호
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    • pp.1013-1021
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    • 2000
  • This paper suggests fuzzy-PI controllers for a heavy-duty gas turbine. The fuzzy-PI controllers are designed to regulate rotor speed and exhaust temperature of the gas turbine. The controller gains are tuned by genetic algorithm(GA). This paper also proposes a new fitness function of GA using a desired output response. The suggested controller is compared with previous controllers via simulations and it is shown that the rotor speed variation of our controller is smaller than those of previous ones.

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보일러 증기발생기 수위 제어 시스템 설계에 관한 연구 (A study on the design of level control system for boiler drum)

  • 허성광;박익수;황재호;김은기
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1990년도 한국자동제어학술회의논문집(국내학술편); KOEX, Seoul; 26-27 Oct. 1990
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    • pp.85-89
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    • 1990
  • In this paper, the design of boiler drum level control system is important in power plant is studied. First of all, pressure compansation of level for boiler drum which is close tank with high temperature and pressure is designed. Physical penomena of drum level are analysed, controllers are designed, and simulation results are shown. Designed controller have a good performance compare with PI controller. Predictive controller of boiler drum level control system is proposed. It will be good system for boiler drum level control to reject the disturbance according to lead increase or decrease.

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저온냉장장치용 온도제어기의 원격 모니터링 시스템 개발 (Development of Remote Monitoring System of Temperature Controller for Cold-Storage)

  • 임대영;유영재;장영학;문채주
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 하계학술대회 논문집 D
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    • pp.2486-2488
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    • 2003
  • This paper describes a remote monitoring system of temperature controller for cold-storage, of farm produce. In the cold-storage, it is important that farm produces are fresh. Unfortunately, when an operator goes out from the cold-storage temperature change could be occurred due to the various reasons, for an example, a valve of cooler is broken. The temperature change results in a serious problem of the quality of farm produce. To prevent the problem, the operator has to look to the current state of the temperature of the cold-storage, even he is in long away. Thus, the monitoring system to show the temperature should be required to the operator who can move away. Therefore, this paper propose of the remote monitoring system of the temperature. The proposed system is expected to help the operator's facilities, and the management of farm produce.

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