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High rate deposition of poly-si thin films using new magnetron sputtering source

  • Boo, Jin-Hyo;Park, Heon-Kyu;Nam, Kyung-Hoon;Han, Jeon-Geon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.186-186
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    • 2000
  • After LeComber et al. reported the first amorphous hydrogenated silicon (a-Si: H) TFT, many laboratories started the development of an active matrix LCDs using a-Si:H TFTs formed on glass substrate. With increasing the display area and pixel density of TFT-LCD, however, high mobility TFTs are required for pixel driver of TF-LCD in order to shorten the charging time of the pixel electrodes. The most important of these drawbacks is a-Si's electron mobiliy, which is the speed at which electrons can move through each transistor. The problem of low carier mobility for the a-Si:H TFTs can be overcome by introducing polycrystalline silicon (poly-Si) thin film instead of a-Si:H as a semiconductor layer of TFTs. Therefore, poly-Si has gained increasing interest and has been investigated by many researchers. Recnetly, fabrication of such poly-Si TFT-LCD panels with VGA pixel size and monolithic drivers has been reported, . Especially, fabricating poly-Si TFTs at a temperature mach lower than the strain point of glass is needed in order to have high mobility TFTs on large-size glass substrate, and the monolithic drivers will reduce the cost of TFT-LCDs. The conventional methods to fabricate poly-Si films are low pressure chemical vapor deposition (LPCVD0 as well as solid phase crystallization (SPC), pulsed rapid thermal annealing(PRTA), and eximer laser annealing (ELA). However, these methods have some disadvantages such as high deposition temperature over $600^{\circ}C$, small grain size (<50nm), poor crystallinity, and high grain boundary states. Therefore the low temperature and large area processes using a cheap glass substrate are impossible because of high temperature process. In this study, therefore, we have deposited poly-Si thin films on si(100) and glass substrates at growth temperature of below 40$0^{\circ}C$ using newly developed high rate magnetron sputtering method. To improve the sputtering yield and the growth rate, a high power (10~30 W/cm2) sputtering source with unbalanced magnetron and Si ion extraction grid was designed and constructed based on the results of computer simulation. The maximum deposition rate could be reached to be 0.35$\mu$m/min due to a high ion bombardment. This is 5 times higher than that of conventional sputtering method, and the sputtering yield was also increased up to 80%. The best film was obtained on Si(100) using Si ion extraction grid under 9.0$\times$10-3Torr of working pressure and 11 W/cm2 of the target power density. The electron mobility of the poly-si film grown on Si(100) at 40$0^{\circ}C$ with ion extraction grid shows 96 cm2/V sec. During sputtering, moreover, the characteristics of si source were also analyzed with in situ Langmuir probe method and optical emission spectroscopy.

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The Effects of Alcohol on Psychomotor Skill and Driving Behaviors (알코올이 정신운동 및 운전행태에 미치는 영향)

  • Ryu, Jun Beom;Shin, Yong Kyun;Lee, Won Young
    • Journal of Korean Society of Transportation
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    • v.30 no.6
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    • pp.27-36
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    • 2012
  • In Korea, 28,641 cases of traffic accidents were caused by drunk driving in 2010. These statistics accounted for 12.62% of total number of traffic accidents. Moreover, the percentages of deaths and injuries from them were nearly 15% of those from whole traffic accidents. While police has emphasized enforcement efforts in order to reduce drunk driving, culture generous to drunk driving in addition to the absence of an appropriate intervention system for habitual drunk drivers have contributed to the increasing number of the drunk driving accidents in Korea. This study examined specific behavioral changes in drunk driving by comparing drivers' behavior pattern in non-alcoholic condition to those in alcoholic condition, using a psychomotor test and a driving simulator. In the psychomotor test measuring participants' reactions to the target stimulus, it was revealed that participants' correct responses were decreased, false responses were increased, and no responses also were increased after drinking. Furthermore, in the driving simulator performance after drinking, not only driving speed was faster but also the deviation of an accelerator pedal pressure and of the vehicle's lateral position were much increased. These results indicated that alcohol consumption would impair visio-cognitive ability and deteriorate driving safety. Finally, the implications and limitations of our findings and suggestions for the future research were discussed.

Study on Signal Processing in Eddy Current Testing for Defects in Spline Gear (스플라인 기어부 결함의 와전류검사 신호처리에 관한 연구)

  • Lee, Jae Ho;Park, Tae Sung;Park, Ik Keun
    • Journal of the Korean Society for Nondestructive Testing
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    • v.36 no.3
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    • pp.195-201
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    • 2016
  • Eddy current testing (ECT) is commonly applied for the inspection of automated production lines of metallic products, because it has a high inspection speed and a reasonable price. When ECT is applied for the inspection of a metallic object having an uneven target surface, such as the spline gear of a spline shaft, it is difficult to distinguish between the original signal obtained from the sensor and the signal generated by a defect because of the relatively large surface signals having similar frequency distributions. To facilitate the detection of defect signals from the spline gear, implementation of high-order filters is essential, so that the fault signals can be distinguished from the surrounding noise signals, and simultaneously, the pass-band of the filter can be adjusted according to the status of each production line and the object to be inspected. We will examine the infinite impulse filters (IIR filters) available for implementing an advanced filter for ECT, and attempt to detect the flaw signals through optimization of system design parameters for detecting the signals at the system level.

VANET Privacy Assurance Architecture Design (VANET 프라이버시 보장 아키텍처 설계)

  • Park, Su-min;Hong, Man-pyo;Shon, Tae-shik;Kwak, Jin
    • Journal of Internet Computing and Services
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    • v.17 no.6
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    • pp.81-91
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    • 2016
  • VANET is one of the most developed technologies many people have considered a technology for the next generation. It basically utilizes the wireless technology and it can be used for measuring the speed of the vehicle, the location and even traffic control. With sharing those information, VANET can offer Cooperative ITS which can make a solution for a variety of traffic issues. In this way, safety for drivers, efficiency and mobility can be increased with VANET but data between vehicles or between vehicle and infrastructure are included with private information. Therefore alternatives are necessary to secure privacy. If there is no alternative for privacy, it can not only cause some problems about identification information but also it allows attackers to get location tracking and makes a target. Besides, people's lives or property can be dangerous because of sending wrong information or forgery. In addition to this, it is possible to be information stealing by attacker's impersonation or private information exposure through eavesdropping in communication environment. Therefore, in this paper we propose Privacy Assurance Architecture for VANET to ensure privacy from these threats.

RADIOPACITY OF CAD/CAM CERAMICS (CAD/CAM용 도재의 방사선 불투과성에 관한 연구)

  • Lee, Jong-Hyeok;Choi, Han-Seuk;Um, Chung-Moon
    • Restorative Dentistry and Endodontics
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    • v.23 no.1
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    • pp.357-365
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    • 1998
  • 목적: 치과용 수복재료의 방사선 불투과성은 매우 다양하다. 따라서 다양한 수복재료의 방사선 불투과성을 인지하여 치질과 비교하면 이차우식의 진단에 도움이 될 수 있다. 도재의 방사선 불투과성에 따라 적절한 luting cement의 선택이 가농해진다. 수복재료의 방사선 불투과성은 알루미늄 step wedge 의 후경과 방사선 불투과성과의 상관관계 의해 측정된다. 본 연구의 목적은 CAD/CAM용 도재와 이틀의 접착에 쓰이는 접착재료의 방사선 불투과성을 조사해 적절한 재료의 선택과 이차우식 진단의 효율결정에 도움이 되게 하는데 있다. 방법: 본 실험에서는 CAD/CAM용 도재인 Vita MarkII, Dicor MGC와 이의 접착에 사용되는 Z-100, 그리고 luting cement인 Duo cement, Scotchbond resin cement를 사용해 방사선 불투과성을 측정하였다. 시편 제작을 위해 도재를 저속절단기로 두께 2mm, 3mm로 절단하였으며 Z-100과 cement시편은 두께 2mm와 3mm, 직경 7.0mm의 금속 주형을 제작한 후 재료를 양쪽 면에 유리판을 대고 조임쇠로 압접하였으며 광조사기를 사용하여 각 재료마다 두 가지 두께로 10개씩 100개의 시편을 제작하였다. 치질의 시편을 얻기 위해 교정 목적으로 최근에 발거된 정상적인 상악 소구치를 저속 절단기를 사용하여 협설측 교두정을 기준 삼아 2mm, 3mm 두께로 절단하였으며 방사선 불투과성의 기준을 위해 12개의 step으로 구성된 12mm두께의 aluminum step wedge를 사용하였다. Kodak E-Speed occlusal film에 aluminum step wedge와 시편들을 위치시킨 후 70kVp, 7mA, 2.16mm aluminum filtration으로 고정된 dental X-ray unit을 사용하여 target과 film 사이의 거리는 25cm, 노출시간은 0.2초로 하여 방사선 촬영을 한 다음, 현상된 방사선 사진상에 나타난 방사선 불투과성을 X-rite 301 densitometer를 이용하여 측정한 값들의 평균을 냈다. 얻어진 결과는 one-way ANOVA Duncan test(P<0.01)로 검증하였다. 결론: 1. Dicor MGC의 방사선 불투과성은 법랑질보다 약간 높게 나타났다.(P<0.01) 2. Vita Mark Il는 상아질보다 낮은 방사선 불투과성을 보였다.(P<0.01) 3. Z-100과 Luting cement들의 방사선 불투과성은 법랑질보다 높았다. Duo cement가 방사선 불투과성이 가장 높았고 그 다음이 Z-100, 그리고 Scotchbond resin cement 순이었다. 4. Z-100과 2종류의 방사선 불투과성 luting cement들은 Vita Mark II 와 같이 사용하면 2차우식 진단에 도움이 된다.

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Application and Utilization of Environmental DNA Technology for Biodiversity in Water Ecosystems (수생태계 생물다양성 연구를 위한 환경유전자(environmental DNA) 기술의 적용과 활용)

  • Kwak, Ihn-Sil;Park, Young-Seuk;Chang, Kwang-Hyeon
    • Korean Journal of Ecology and Environment
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    • v.54 no.3
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    • pp.151-155
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    • 2021
  • The application of environmental DNA in the domestic ecosystem is also accelerating, but the processing and analysis of the produced data is limited, and doubts are raised about the reliability of the analyzed and produced biological taxa identification data, and the sample medium (target sample, water, air, sediment, Gastric contents, feces, etc.) and quantification and improvement of analysis methods are also needed. Therefore, in order to secure the reliability and accuracy of biodiversity research using the environmental DNA of the domestic ecosystem, it is a process of actively using the database accumulated through ecological taxonomy and undergoing verification procedures, and experts verifying the resolution of the data increased by gene sequence analysis. This is absolutely necessary. Environmental DNA research cannot be solved only by applying molecular biology technology, and interdisciplinary research cooperation such as ecology-taxa identification-genetics-informatics is important to secure the reliability of the produced data, and researchers dealing with various media can approach it together. It is an area in desperate need of an information sharing platform that can do this, and the speed of development will proceed rapidly, and the accumulated data is expected to grow as big data within a few years.

Analysis for Applicability of Differential Evolution Algorithm to Geotechnical Engineering Field (지반공학 분야에 대한 차분진화 알고리즘 적용성 분석)

  • An, Joon-Sang;Kang, Kyung-Nam;Kim, San-Ha;Song, Ki-Il
    • Journal of the Korean Geotechnical Society
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    • v.35 no.4
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    • pp.27-35
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    • 2019
  • This study confirmed the applicability to the field of geotechnical engineering for relatively complicated space and many target design variables in back analysis. The Sharan's equation and the Blum's method were used for the tunnel field and the retaining wall as a model for the multi-variate problem of geotechnical engineering. Optimization methods are generally divided into a deterministic method and a stochastic method. In this study, Simulated Annealing Method (SA) was selected as a deterministic method and Differential Evolution Algorithm (DEA) and Particle Swarm Optimization Method (PSO) were selected as stochastic methods. The three selected optimization methods were compared by applying a multi-variate model. The problem of deterministic method has been confirmed in the multi-variate back analysis of geotechnical engineering, and the superiority of DEA can be confirmed. DEA showed an average error rate of 3.12% for Sharan's solution and 2.23% for Blum's problem. The iteration number of DEA was confirmed to be smaller than the other two optimization methods. SA was confirmed to be 117.39~167.13 times higher than DEA and PSO was confirmed to be 2.43~6.91 times higher than DEA. Applying a DEA to the multi-variate back analysis of geotechnical problems can be expected to improve computational speed and accuracy.

A Study on the the Follow-up Analysis and the Characteristics of Exhaust Gas by Standard Mode of Chassis Dynamometer of Gasoline (가솔린 차량의 차대동력계 표준모드 별 추종성 분석 및 배출가스 특성에 관한 연구)

  • Seo, Dong Choon;Park, Sung-Young
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.20 no.9
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    • pp.29-34
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    • 2019
  • In this study, a gasoline test vehicle was evaluated for drive quality in emissions and fuel economy tests. The measurement results were compared with the manufacturer's suggested values to evaluate whether the tolerance ranges (fuel efficiency -5%, greenhouse gas +5%) were exceeded. We carried out tests with test subjects based on the SAE J2951 evaluation method. The test vehicle was a 2L gasoline vehicle. The drive following performance was found to increase under deliberate driving conditions and decreased in smooth driving conditions. As a result of the analysis of the drive following performance, the closer the value is to 1, the more accurate the driving is. (-) indicates harsh conditions, and (+) indicates gentle conditions. The basic data on the driver following between testers was obtained by analysis of the tests. The fuel efficiency correlation with the drive following performance within the target speed range of the fuel consumption mode. In the future, these measurement results can serve as key data for securing an exhaust gas database and fuel efficiency system for each measurement mode.

Analytical Research on Dynamic Behavior of Steel Composite Lower Railway Bridge (강합성 하로 철도교의 동적거동에 대한 해석적 연구)

  • Jeong, Young-Do;Koh, Hyo-In;Kang, Yun-Suk;Eom, Gi-Ha;Yi, Seong-Tae
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.23 no.1
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    • pp.27-35
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    • 2019
  • The existing middle-long span railway bridge has been mainly applied to steel box girder bridges. However, the steel box girder bridges have disadvantages in securing the space under the bridge, and the main girder is made of a thin plate box shape, resulting in a ringing noise due to the vibration. Many complaints about noise have been raised. For this reason, there is a need for the development of long railway bridges that can replace steel box girder bridges. In this paper, the characteristics of the steel composite railway bridge currently developed were introduced and a time history analysis was conducted using MIDAS Civil reflecting the speed of KTX load for 40m and 50m bridges. In addition, from the analysis results, the dynamic behavior of target bridges were verified and it was examined whether they meet the dynamic performance criteria proposed in the railway design standards. As a result, all of the bridges under review satisfied the dynamic safety criteria, however, in case of 40m of span, the vertical acceleration value was very large. In order to solve this problem, authors proposed the improvement plan and corrected the cross section to confirm that the vertical acceleration decreased.

Unsupervised Non-rigid Registration Network for 3D Brain MR images (3차원 뇌 자기공명 영상의 비지도 학습 기반 비강체 정합 네트워크)

  • Oh, Donggeon;Kim, Bohyoung;Lee, Jeongjin;Shin, Yeong-Gil
    • The Journal of Korean Institute of Next Generation Computing
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    • v.15 no.5
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    • pp.64-74
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    • 2019
  • Although a non-rigid registration has high demands in clinical practice, it has a high computational complexity and it is very difficult for ensuring the accuracy and robustness of registration. This study proposes a method of applying a non-rigid registration to 3D magnetic resonance images of brain in an unsupervised learning environment by using a deep-learning network. A feature vector between two images is produced through the network by receiving both images from two different patients as inputs and it transforms the target image to match the source image by creating a displacement vector field. The network is designed based on a U-Net shape so that feature vectors that consider all global and local differences between two images can be constructed when performing the registration. As a regularization term is added to a loss function, a transformation result similar to that of a real brain movement can be obtained after the application of trilinear interpolation. This method enables a non-rigid registration with a single-pass deformation by only receiving two arbitrary images as inputs through an unsupervised learning. Therefore, it can perform faster than other non-learning-based registration methods that require iterative optimization processes. Our experiment was performed with 3D magnetic resonance images of 50 human brains, and the measurement result of the dice similarity coefficient confirmed an approximately 16% similarity improvement by using our method after the registration. It also showed a similar performance compared with the non-learning-based method, with about 10,000 times speed increase. The proposed method can be used for non-rigid registration of various kinds of medical image data.