• Title/Summary/Keyword: Target material

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Evaluation of the Cu Target Fabricated by the SPS Technique and its Sputtered Film (방전플라즈마 소결법에 의해 제조된 Cu 타겟과 스퍼터링 박막의 특성평가)

  • Hyun, Hye Young;Kim, Min Jung;Yoo, Jung Ho;Yang, Jun-Mo;Oh, Ik Hyun;Lee, Seung Min;Oh, Yong Jun
    • Korean Journal of Metals and Materials
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    • v.49 no.3
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    • pp.250-255
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    • 2011
  • The basic properties and electrical characteristics of sputtering films deposited with a commercial cast target and Spark Plasma Sintering (SPS) were compared and analyzed. From the results, the Cu film prepared heating $60^{\circ}C/min$ (SPS process) showed a similar specific resistance compared to the commercial cast Cu film. Also, auording to the results of XRD, SIMS, and TEM. There was not much difference in the crystal structure and impurities between the two films. Consequently, the SPS Cu target was found to have quite similar properties with the commercial one and it is expected to be applied in futare research to the metal wiring material for semiconductor/display devices.

The effect of laser energy on the preparation of iron oxide by a pulsed laser ablation in ethanol

  • Maneeratanasarn, P.;Khai, T.V.;Choi, B.G.;Shim, K.B.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.22 no.3
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    • pp.134-138
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    • 2012
  • Recently the preparation magnetic nanoparticles by a pulsed laser ablation in liquid has gained much attention because it is easy to control experimental parameters. Iron oxide magnetic nanoparticles have been prepared by a pulsed laser ablation of ${\alpha}-Fe_2O_3$ target in ethanol at different magnitude of laser energy of 1, 20, 40 and 80 mJ/pulse. It revealed that particle size increases with increasing laser energy. It could be concluded that 40 mJ/pulse is an optimum laser energy for the preparation of iron oxide nanoparticles with uniform size distribution. The nanoparticles are homogeneously dispersed in ethanol and their stability maintained for several months.

A Real Time Integrated Dispatching Logic for Semiconductor Material Flow Control Considering Multi-load Automated Material Handling System (반도체 물류 제어 시스템을 위한 반송장비의 다중적재를 고려한 실시간 통합 디스패칭 로직)

  • Suh, Jungdae;Faaland, Bruce
    • Journal of Korean Institute of Industrial Engineers
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    • v.34 no.3
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    • pp.296-307
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    • 2008
  • A semiconductor production system has sophisticated manufacturing operations and needs high capital investment for its expensive equipment, which warrants efficient real-time flow control for wafers. In the bay, we consider material handling equipment that can handle multiple carriers of wafers. The dispatching logic first determines the transportation time of each carrier to its destination by each unit of transportation equipment and uses this information to determine the destination machine and target carrier. When there is no available buffer space at the machine tool, the logic allows carriers to stay at the buffer of a machine tool and determine the delay time, which is used to determine the destination of carriers in URL. A simulation study shows this dispatching logic performs better than the procedure currently in use to reduce the mean flow time and average WIP of wafers and increase efficiency of material handling equipment.

The anchorage-slip effect on direct displacement-based design of R/C bridge piers for limiting material strains

  • Mergos, P.E.
    • Computers and Concrete
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    • v.11 no.6
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    • pp.493-513
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    • 2013
  • Direct displacement-based design (DDBD) represents an innovative philosophy for seismic design of structures. When structural considerations are more critical, DDBD design should be carried on the basis of limiting material strains since structural damage is always strain related. In this case, the outcome of DDBD is strongly influenced by the displacement demand of the structural element for the target limit strains. Experimental studies have shown that anchorage slip may contribute significantly to the total displacement capacity of R/C column elements. However, in the previous studies, anchorage slip effect is either ignored or lumped into flexural deformations by applying the equivalent strain penetration length. In the light of the above, an attempt is made in this paper to include explicitly anchorage slip effect in DDBD of R/C column elements. For this purpose, a new computer program named RCCOLA-DBD is developed for the DDBD of single R/C elements for limiting material strains. By applying this program, more than 300 parametric designs are conducted to investigate the influence of anchorage slip effect as well as of numerous other parameters on the seismic design of R/C members according to this methodology.

The study on the development of directional coupler of DCS band using a Low Temperature Co-fire dielectric material (저온 소성 유전체 재료를 이용한 DCS 대역 방향성 결합기 개발에 관한 연구)

  • Lee, J.K.;Yoo, Joshua;Kim, Erick;Lee, W.S.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.317-320
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    • 2003
  • Nowadays, the study on the ceramic components and modules used in telecommunication system is being performed. Coupler is a microwave passive component used for power coupling or dividing and directional coupler is designed to be possible optional dividing percentage. In our research, We developed 14dB and 19dB directional couplers of DCS band. The good characteristics, the target insertion loss and high isolation, of couplers is obtained by LTCC processing using a ceramic material.

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The study on the development of directional coupler of EGSM band using a Low Temperature Co-fire dielectric material (저온 소성 유전체 재료를 이용한 EGSM 대역 directional coupler 개발에 관한 연구)

  • Yoo, Joshua;Kim, Erick;Lee, W.S.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.288-291
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    • 2003
  • Nowadays, the study on the ceramic components and modules used in telecommunication system is being performed. Coupler is a microwave passive component used for power coupling or dividing and directional coupler is designed to be possible optional dividing percentage. In our research, We developed 14dB and 19dB directional couplers of EGSM band. The good characteristics, the target insertion loss and high isolation, of couplers is obtained by LTCC processing using a ceramic material.

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Effect of Heat Treatment Environment on the Properties of Cold Sprayed Cu-15 at.%Ga Coating Material for Sputtering Target (스퍼터링 타겟용 저온 분사 Cu-15 at.%Ga 코팅 소재의 특성에 미치는 열처리 분위기의 영향)

  • Choi, Byung-Chul;Park, Dong-Yong;Kim, Hyung-Jun;Oh, Ik-Hyun;Lee, Kee-Ahn
    • Journal of Powder Materials
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    • v.18 no.6
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    • pp.552-561
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    • 2011
  • This study attempted to manufacture a Cu-15 at.%Ga coating layer via the cold spray process and investigated the effect of heat treatment environment on the properties of cold sprayed coating material. Three kinds of heat treatment environments, $5%H_2$+argon, pure argon, and vacuum were used in this study. Annealing treatments were conducted at $200{\sim}800^{\circ}C$/1 hr. With the cold sprayed coating layer, pure ${\alpha}$-Cu and small amounts of $Ga_2O_3$ were detected in the XRD, EDS, EPMA analyses. Porosity significantly decreased and hardness also decreased with increasing annealing temperature. The inhomogeneous dendritic microstructure of cold sprayed coating material changed to the homogeneous and dense one (microstructural evolution) with annealing heat treatment. Oxides near the interface of particles could be reduced by heat treatment especially in vacuum and argon environments. Vacuum environment during heat treatment was suggested to be most effective one to improve the densification and purification properties of cold sprayed Cu-15 at.%Ga coating material.

Numerical Analysis of Deformation Characteristics in the Double-Layer Liner According to Explosive Material Distribution (이중층 라이너에서 폭발 재료 분포에 따른 변형 특성 수치해석)

  • Mun, Sang Ho;Kim, See Jo;Lee, Chang Hee;Lee, Seong
    • Journal of the Korea Institute of Military Science and Technology
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    • v.19 no.5
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    • pp.618-628
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    • 2016
  • The development of new concepts of liners is required in order to effectively neutralize the enemy's attack power concealed in the armored vehicles. A multiple-layer liner is one of possibilities and has a mechanism for explosion after penetrating the target which is known as "Behind Armor Effect." The multiple-layer explosive liner should have sufficient kinetic energy to penetrate the protective structure and explosive material react after target penetration. With this in mind, double-layer liner materials were obtained by cold spray coating methods and these material properties were experimentally characterized and used in this simulation for double-layer liners. In this study, numerical simulations in the three different layer types, i.e., single, A/B, A/B/A in terms of the layer location were verified in terms of finite element mesh sizes and numerical results for the jet tip velocity, kinetic energy, and the corresponding jet deformation characteristics were analysed in detail depending on the structure of layer types.

A Study of Thermal Performance for Lever Type CO Micro Gas Sensor (레버형 CO 마이크로 가스센서의 열적성능에 관한 연구)

  • Joo, Young-Cheol;Im, Jun-Hyoung
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.6 no.4
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    • pp.325-330
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    • 2005
  • A lever type CO micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material, $SnO_2$, to a target temperature, a micro heater was built on the gas sensor. The heater and electrodes were hanged on the air as a bridge type to minimize the heat loss to the silicon base. The sensing material laid on the heater and electrodes and did not contact with the silicons base. The temperature distribution of micro gas sensor was analyzed by a CFD program, FLUENT. The results showed that the temperature of silicon wafer base was almost similar to that of the room temperature, which indicates that the heat generated at the micro heater heated up effectively the sensing material. The required electric current of micro heater to heat up the sensing material to the target temperature could be predicted.

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Adaptive Window-based Detection of Narcotics and Explosives using IMS Signals in Cargo Containers (화물 컨테이너 내 IMS 신호를 이용한 적응 윈도우 기반 마약 및 폭발물 검출)

  • Ju, Heesong;Kim, Donghyun;Cho, Sungyoon;Park, Kyungwon;Kim, Yangsub;Jeon, Wongi;Kwon, Kiwon
    • Journal of Internet Computing and Services
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    • v.23 no.3
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    • pp.57-65
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    • 2022
  • International attempts to smuggle narcotics and explosives using ship or aircraft cargoes are on the rise. With the recent increase in the number of detection cases of narcotics and explosives in Korea, it is important to detect dangerous material (narcotics and explosives) through container searches at ports and airports, which are the main routes. This paper proposes a technique to detect dangerous material in cargo containers using the sampled output signal of ion mobility spectroscopy (IMS). The proposed technique estimates parameters such as a threshold, a window length, and a noise level for ion detection of the target dangerous material by using known materials in the initialization stage. The estimated parameters are used to detect the ions of the dangerous target material inside the containers. The proposed technique can be applied when the peak value of the IMS signal and the ion mobility are varying due to container environments.