• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.209-209
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• 1999

현재 magnetron sputter는 반도체, LCD 등을 포함하는 microelectronics 산업에서 박막형성을 위한 주요 장비로 널리 쓰이고 있으며, 소자의 고집적화 및 대형화 추세에 따라 그 이용가치는 더욱 증대되고 있다. 본 연구엣는 TFT-LCD용 Color Filter 제조시 ITO박막형성을 위해 사용하는 magnetron sputter 내부의 플라즈마 분포 및 ion kinetic energy에 대한 해석을 실시하였으며, ITO target의 erosion 형상의 원인을 실험결과와 비교하였다. Magnetron sputtering은 target에 가해지는 bias 전압(DC 혹은 RF)에 의해 target과 shield 혹은 target과 substrate 사이에서 생성될 수 잇는 플라즈마를 target 및 부분에 붙어있는 영구자석을 이용하여 target 근처에 집중시키고, target 표면과 플라즈마 사이의 전위차에 의해 가속된 이온들이 target 표면과 충돌하여 이차 전자방출을 일으킴과 동시에 target 표면에서 sputtering을 일으키고, 이들 sputtered 된 중성의 atom 들이 substrate로 날아가 박막을 형성하는 원리로 작동된다. 이때 target에서 방출되는 이차전자들은 영구자석에 의한 자기장 효과에 의해 target 근처에 갇히게 되어 중성 기체분자들과 이온화반응을 통해 플라즈마를 유지하고 그 밀도를 높혀주는 역할을 담당하게 된다. 즉 낮은 압력 및 bias 전압에서도 플라즈마 밀도를 높일수 있고 sputtering 공정이 가능한 장점을 가지고 있다. Magnetron sputtering 현상에 대한 시뮬레이션은 크게 magnetron discharge와 sputtering에 대한 해석 두가지로 나누어 볼 수 있는데, sputtering 현상 자체를 수치묘사할 수 있는 정량적인 모델은 아직까지 명확하게 정립되어 있지 않다. 따라서 본 연구에서는 magnetron plasma 자체에 대한 수치해석에 주안점을 두고 아울러 bulk plasma 영역에서 target으로 입사하는 이온들의 입사에너지 및 입사각도 등을 Monte Carlo 방법으로 추적하여 sputtering 현상을 유추해보았다. Sputtering 현상을 살펴보기 위해 magnetron sputter 내 플라즈마 밀도, 전자온도, 특히 target 및 substrate를 충돌하는 이온의 입사에너지 및 입사각 분포등을 계산하는데 hybrid 방법으로 시뮬레이션을 하였다. 즉 ion과 bulk electron에 대해서는 fluid 방식으로 접근하고, 이차전자 운동과 그로 인한 반응관계 및 target으로 입사하는 이온의 에너지와 입사각 분포는 Monte-Carlo 방법으로 처리하였다. 정지기장해석의 경우 상용 S/W인 Vector Fields를 사용하였다. 이를 통해 sputter 내 플라즈마 특성, target으로 입사하는 이온에너지 및 각 분포, 이들이 target erosion 형상에 미치는 영향을 살펴보았다. 또한 이들 결과로부터 간단한 sputtering 모델을 사용하여 target으로부터 sputter된 입자들이 substrate에 부착되는 현상을 Monte-Carlo 방법으로 추적하여 성막특성도 살펴보았다.

• Journal of Korean Society for Atmospheric Environment
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• v.21 no.3
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• pp.315-327
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• 2005

The total of 35 target VOCs (volatile organic compounds), which were included in the TO-14, was selected to develop a VOCs' source profile matrix of the Yeosu Petrochemical Complex and to test its collinearity by singular value decomposition(SVD) technique. The VOCs collected in canisters were sampled from 12 different sources such as 8 direct emission sources (refinery, painting, wastewater treatment plant, incinerator, petrochemical processing, oil storage, fertilizer plant, and iron mill) and 4 general area sources (gasoline vapor emission, graphic art activity, vehicle emission, and asphalt paving activity) in this study area, and then those samples were analyzed by GC/MS. Initially the resulting raw data for each profile were scaled and normalized through several data treatment steps, and then specific VOCs showing major weight fractions were intensively reviewed and compared by introducing many other related studies. Next, all of the source profiles were tested in terms of degree of collinearity by SVD technique. The study finally could provide a proper VOCs' source profile in the study area, which can give opportunities to apply various receptor models properly including chemical mass balance (CMB).

• Progress in Medical Physics
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• v.29 no.3
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• pp.92-100
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• 2018

The manufacturer of a linear accelerator (LINAC) has reported that the target melting phenomenon could be caused by a non-recommended output setting and the excessive use of monitor unit (MU) with intensity-modulated radiation therapy (IMRT). Due to these reasons, we observed an unexpected beam interruption during the treatment of a patient in our institution. The target status was inspected and a replacement of the target was determined. After the target replacement, the beam profile was adjusted to the machine commissioning beam data, and the absolute doses-to-water for 6 MV and 10 MV photon beams were calibrated according to American Association of Physicists in Medicine (AAPM) Task Group (TG)-51 protocol. To verify the beam data after target replacement, the beam flatness, symmetry, output factor, and percent depth dose (PDD) were measured and compared with the commissioning data. The difference between the referenced and measured data for flatness and symmetry exhibited a coincidence within 0.3% for both 6 MV and 10 MV, and the difference of the PDD at 10 cm depth ($PDD_{10}$) was also within 0.3% for both photon energies. Also, patient-specific quality assurances (QAs) were performed with gamma analysis using a 2-D diode and ion chamber array detector for eight patients. The average gamma passing rates for all patients for the relative dose distribution was $99.1%{\pm}1.0%$, and those for absolute dose distribution was $97.2%{\pm}2.7%$, which means the gamma analysis results were all clinically acceptable. In this study, we recommend that the beam characteristics, such as beam profile, depth dose, and output factors, should be examined. Further, patient-specific QAs should be performed to verify the changes in the overall beam delivery system when a target replacement is inevitable; although it is more important to check the beam output in a daily routine.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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• v.38 no.6
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• pp.543-551
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• 2020

In this paper, we introduce a method to improve the accuracy of the length estimation of targets using a radar. The HRRP (High Resolution Range Profile) obtained from a received radar signal represents the one-dimensional scattering characteristics of a target, and peaks of the HRRP means the scattering centers that strongly scatter electromagnetic waves. By using the extracted scattering centers, the downrange length of the target, which is the length in the RLOS (Radar Line of Sight), can be estimated, and the real length of the target should be estimated considering the angle between the target and the RLOS. In order to improve the accuracy of the length estimation, parametric estimation methods, which extract scattering centers more exactly than the method using the HRRP, can be used. The parametric estimation method is applied after the number of scattering centers is determined, and is thus greatly affected by the accuracy of the number of scattering centers. In this paper, in order to improve the accuracy of target length estimation, the number of scattering centers is estimated by using AIC (Akaike Information Criteria), MDL (Minimum Descriptive Length), and GLE (Gerschgorin Likelihood Estimators), which are the source number estimation methods based on information theoretic criteria. Using the ESPRIT algorithm as a parameter estimation method, a length estimation simulation was performed for simple target CAD models, and the GLE method represented excellent performance in estimating the number of scattering centers and estimating the target length.

• Journal of Institute of Control, Robotics and Systems
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• v.19 no.11
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• pp.968-973
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• 2013

In the transportation industry, especially in the shipbuilding process, 3D surface measurement of large-scale hull pieces is needed for fabrication and assembly. We suggest an efficient method for checking the shape of curved plates under the forming operation with short time by measuring 3D profiles along the multi lines of the target surface. For accurate profile reconstruction, 2D camera calibration and 3D calibration using gauge blocks were performed. The evaluation test shows that the measurement accuracy is within the boundary of tolerance required in the shipbuilding process.

• Journal of the Korea Society of Computer and Information
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• v.22 no.10
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• pp.27-34
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• 2017

In this paper, we propose a novel radiometric calibration method which can effectively compensate the nonlinearity of the detector for hyper-spectral camera. In general, the detector of hyper-spectral camera can produce nonlinear output depending on radiance and integral time. The conventional radiometric calibration methods extract the imprecise radiance profile from the spectral profile of the target due to this nonlinearity. In our proposed method, we use a quadratic equation instead of a linear equation to describe the relation between output of detector and radiance. Then, we use a fractional function to compensate variation of integration time. Thus, our proposed method can extract more precise spectral profile of radiance than conventional radiometric calibration method.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.27 no.2
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• pp.198-207
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• 2016

Bistatric radar can perform detection and identification for stealth targets that are rarely detected by the conventional monostatic radar. However, high resolution range profile(HRRP) generated from the received signal in the bistatic radar cannot show exact range information of the target because the bistatic geometry lead to the distortions of the bistatic HRRP. In addition, electromagnetic scattering mechanisms of the target are varied depending on the bistatic geometry. Thus, efficient database construction is a crucial factor to achieve successful classification capability in bistatic target identification. In this paper, a database construction method based on realistic flight scenarios of a target, which provides a reliable identification performance for the monostatic radar, is applied to bistatic target identification. Then, the capability and efficiency of the method is analyzed. Simulation results show that reliable identification performance can be achieved using the database construction based on the flight scenarios when the target is a considerable distance away from the bistatic radar.

• Asia-Pacific Journal of Business
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• v.13 no.3
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• pp.245-259
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• 2022

Purpose - Studies have been continuously carried out by researchers so far to clarify the factors influencing employee's incivility at work. However, the behavior of employees who are the target of incivility not much has been revealed which behavior affects the experience of incivility. Among them, it is interesting that the effect of OCB, a representative of employees' positive behavior in the workplace, on their experienced incivility has not been investigated. Therefore, this study attempted to clarify the relationship between OCB and experienced incivility that previous studies have not yet discovered. Design/methodology/approach - In the process, the concept of profile similarity was introduced and based on this, it was assumed that the OCB profile similarity between individual and colleagues, not the absolute level of OCB, would affect the experienced incivility and demonstrated this. The analysis was conducted by applying the survey data obtained from 205 employees to hierarchical regression analysis. Findings - As a result of the analysis, it was examined that the absolute OCB value used in previous studies did not significantly affect the experienced incivility, but the higher the similarity level, the less experienced incivility. The implications obtained based on this and future research directions are discussed together in the conclusion. Research implications or Originality - This study is the first one that considers OCB's profile similarity as a antecedent of experienced incivility. OCB profile similarity concept was only treated as a theoretical issue even in very early stage of OCB research stream, but this study examines the significant effect of OCB profile similarity. Moreover, behavioral antecedents of experienced incivility has not been identified well, but this study finds out that OCB can be a behavioral antecedent of experienced incivility.

• Journal of KIISE:Software and Applications
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• v.35 no.12
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• pp.705-715
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• 2008

Today raises its head on the issue of interoperability caused by the complexity of the embedded software and the diverse development environment about SUGV(Small Unmanned Ground Vehicle). So, we propose to adopt the original MDA mechanism for this heterogeneous embedded development. To solve this problem, we apply for developing SUGV with MDA(Model Driven Architecture) using the original UML profile mechanism. Through this method, it can be semi-automatically transformed into TSM(Target specific model) after modeling TIM(Target Independent Model). Then we can also automatically generate the heterogeneous source codes. Therefore it will be reduced the development cycle and effort of the heterogeneous systems. We verify the benefits of our proposed approach and the reliability through analyzing the generated codes.

• Proceedings of the KSME Conference
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• 2000.11a
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• pp.407-412
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• 2000

In this study, a research for process design in bending of structural frame of AA6061-T6 with rubber pad was conducted. In this process, the conventional lower die made of metal is replaced with a polyurethane pad, resulting in high flexibility during bending. Vulcanized polyurethane rubber with shore A hardness of 60 was used for the pad. Experiments on a newly developed bending machine were carried out by controlling the stroke of the roller and horizontal movement of roller pad lower die. From this, the relation between roller path and geometry of the materials bent was obtained for the process design of producing roof rail part of a passenger car and the experimental result was compared with the target profile. For more accurate process design, it is required to control the roller path interactively. Based on the experience in developing the prototype bending machine, it is construed that a fully automated bending system with rubber pad to produce various light-weight components for automotive body frames can be successfully developed.