• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.247-248
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• 2008

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.38 no.5
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• pp.17-17
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• 2001

고유전 (Ba, Sr)TiO₃ (BST) 박막을 이용한 DRAM storage capacitor의 저전계 영역에서의 전하손실을 발생시키는 커패시터의 누설전류는 유전완화전류와 진성 누설전류로 이루진다고 알려져 있다. 특히, 기가급 DRAM의 동작 전압(~IV)에서 유전완화전류가 진성 누설전류에 비해 훨씬 크기 때문에 이에 대한 심도 있는 연구가 필요하다. 본 연구에서는 thermally stimulated current (TSC) 측정법을 BST 박막에 처음으로 적용하여 트랩의 에너지 level 및 공정변화에 따른 트랩 밀도의 상대적 평가를 하였다. 그리고, 기존에 사용되던 전류-전압(I-V) 측정이나 전류-시간(I-t) 측정과 비교 및 분석함으로써 유전완화 전류의 원인을 규명하고 TSC 측정법의 신뢰성을 살펴보았다. 먼저 안정적인 TSC 측정을 위해 전계, 시간, 온도 및 승온속도에 따른 polarization condition을 알아보았다 이 조건을 이용한 TSC 측정으로부터 BST 박막에서의 트랩의 energy level이 0.20(±0.01) eV와 0.45(±0.02) eV임을 알 수 있었다. Rapid thermal annealing (RTA)을 이용한 후속 열처리에 따른 TSC 측정을 통하여 이 트랩들이 산소결핍(oxygen vacancy)에 기인함을 확인할 수 있었다. MIM BST 커패시터의 열처리에 대한 TSC 특성은 전류-전압(I-V) 및 전류-시간(I-t) 특성과 같은 경향성을 보인다. 이것은 TSC 측정이 BST 박막내의 트랩을 평가하는데 있어서 매우 효과적인 방법이라는 것을 보여준다.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.38 no.5
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• pp.329-337
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• 2001

It has been known that the leakage current in the low field region consists of the dielectric relaxation current and intrinsic leakage current, which cause the charge loss in dynamic random access memory (DRAM) storage capacitor using (Ba,Sr)TiO$_{3}$ (BST) thin film. Especially, the dielectric relaxation current should be seriously considered since its magnitude is much larger than that of the intrinsic leakage current in giga-bit DRAM operation voltage (~IY). In this study, thermally stimulated current (TSC) measurement was at first applied to investigate the activation energy of traps and relative evaluation of the density of traps according to process change. And, through comparing TSC to early methods of I-V or I-t measurement and analyzing, we identify the origin of the dielectric relaxation current and investigate the reliability of TSC measurement. First, the polarization condition such as electric field, time, temperature and heating rate was investigated for reliable TSC measurement. From the TSC measurement, the energy level of traps in the BST thin film has been investigated and evaluated to be 0.20($\pm$0.01) eV and 0.45($\pm$0.02) eV. Based on the TSC measurement results before and after rapid thermal annealing (RTA) process, oxygen vacancy is concluded to be the origin of the traps. TSC characteristics with thermal annealing in the MIM BST capacitor have shown the same trends with the current-voltage (I-V) and current-time (I-t) characteristics. This means that the TSC measurement is one of the effective methods to characterize the traps in the BST thin film.

• Proceedings of the Korean Society of Computer Information Conference
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• 2012.07a
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• pp.421-422
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• 2012

본 연구에서는 코로나 대전된 고분자의 열자격전류(Thermally Stimulated Current; 이하 TSC) 데이터를 기반으로 코로나 대전 과정을 유한요소법(Finite Element Method; 이하 FEM)을 이용하여 시뮬레이션하였다. $DC -5{\sim}-8[kV]$의 고전압을 고분자에 인가하여 형성시킨 일렉트렛트를 온도 범위 $-100{\sim}+200[^{\circ}C]$에서 얻은 TSC 데이터의 대전 과정을 조사하기 위하여 FEM으로 시뮬레이션을 수행하여 공간에서 코로나 대전 과정을 추정하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.09a
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• pp.47-51
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• 2001

The electrical degradation phenomena of epoxy composites to be used as a molding material for transformers were studied. The electrets were first manufactured by applying high voltages to five kinds of specimens given a mixing rate, and then TSC(Thermally Stimulated Current) values at the temperature range of $-160\sim200[^{\circ}C]$ were measured from a series of experiments. The behaviour of carrier and its origin in epoxy composites were examined, respectively, And various effects of electrical degradation on epoxy composites were also discussed in this study.

• 전기의세계
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• v.27 no.3
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• pp.31-35
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• 1978

In this paper, in order to clarify the mature of traps in polymer, the thermally stimulated current (TSC) measurements were mad on high density polyethylene by changing the condition of the high-field treatment such as the strength of the field (Fe), the treatment time (te) and the heating rate (.betha.). In addition, the TSC measured from the HDPE was compared with that from LDPE having different crystallinity. The obtained results can suggest that the trapping proceeds during the high-field treatment and the trap associated with the peak P$_{2}$ may have the closed relation to drystallinity and the release of trapped charge is enhanced by the molecular motion.

• 전기의세계
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• v.30 no.8
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• pp.517-524
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• 1981

Thermally stimulated currents have been obtained from five kinds of polymer electrets. The peak current (I$_{m}$) and the peak temperature (T$_{m}$) of the TSC, particularly at PET thermoelectret, were found to depend on the forming field and the forming temperature. From these experimental results, the TSC spectra can be easily explained by the consideration of the disorientation of dipoles related with glass transition temperature. The obtained results can suggest that the forming field and the forming temperature plays an essential role for charge stability in PET thermoelectrets.ets.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.39 no.4
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• pp.357-363
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• 1990

A thermally stimulated current measurement using a temperature gradient (TG-TSC) has been applied to the study of dipolar depolarization in polymers. It has been clarified that theoretical analysis of TG-TSC in the initial rise region corresponds with the experimental results. We conclude that the experimental results on a cross-linked polyethy-lene (XLPE) film can be explained using the above relation and that the charasteristics obtained from the above theoretical analysis can be used for ascertaining the presence of a constant temperature gradient in a film.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.05b
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• pp.123-126
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• 2005

In this study, the Thermally Stimulated Current(TSC) of corona charged PTFE is studied and the simulation of corona charging process is also calculated by Finite Element Method. The electrets which were formed by applying high voltages (DC ${\pm}5{\sim}{\pm}8$ [kV]) to PTFE, are used to measure TSC in the temperature range of $-100{\sim}+200$ [$^{\circ}C$] and then the Finite Element Method is performed to examine corona charging process using a obtained physical constants. As a result. it is confirmed that the charging negative corona is profitable as the applications are manufactured, because the time constant of negative corona is much larger than it of positive corona. And it is attempted to estimate the corona charging process in space using simulation.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1719-1721
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• 1996

This paper describes the thermally stimulated current(TSC) of PAAS spin coated film and the electrical properties of pre TSC measurement and after TSC test specimens. The TSC measurement were performed from room temperature to about $280^{\circ}C$ and the temperature was increased by $5^{\circ}C/min$ automatically. It shows that two peaks of TSC are observed at about $50^{\circ}C$ and about $160^{\circ}C$. Result of this measurement indicate that one peak; $50^{\circ}C$ is from alkyl group; other peak at $160^{\circ}C$ is due to alkyl and C-O group of PAAS. Addition to larger peak at about $160^{\circ}C$ is due to dipolemoment of PAAS film. This result is proved by DSC measurement of PAAS film. The electrical properties of pre and after TSC were measured by currant-voltage(l-V) characteristics. The current-voltage characteristics after TSC specimens are increased the conductivity. The electrical properties of pre-after TSC measurement specimen is in the middle of imidization of PAAS. Because of this result a thermal imidization was performed at $300^{\circ}C$ for 1 hour.