• 전자공학회논문지A
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• 제29A권7호
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• pp.73-81
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• 1992

We have investigated the thermal reaction property and the oxygen behavior of TiN/Ti/Si structure after different hear treatments using x-ray photoelectron spectroscopy and cross-sectional transmission electron microscopy measurements. During the heat treatment in N$_2$ amibient, the considerable amount of oxygen atoms incorporates into TiN/Ti/Si Structures. It is found that oxygen atoms pile up at the top surface of TiN and TiN/Ti interface, forming a compound of TiO$_2$ above $600^{\circ}C$. Inside the TiN film, the oxygen content increases as the annealing temperature increases, mostly TiO and Ti$_2$O$_3$ rather than thermodynamically stable TiO$_2$. Above the annealing temperature of 55$0^{\circ}C$, the TiSi$_2$ formation has initiated. One thing to note is that a severe blistering is observed in the sample annealed at $600^{\circ}C$, due to (1) the difference of thermal expansion coefficient between TiN and Si` (2) the compressive stress induced by the volume reduction caused by the Ti-Silicide grain while elevating temperatures.

• 한국세라믹학회지
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• 제40권1호
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• pp.87-92
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• 2003

출발 물질로 TiCx(x=0.67)와 Al 분말을 사용하여 800~150$0^{\circ}C$ 온도 구간에서 상압 또는 가압 반응으로 Ti$_3$AlC$_2$를 합성하였다. 출발 물질로 TiCx(x=0.67)와 Al 분말을 사용한 반응 합성에서는 Ti-Al intermetallic compound 또는 Al-C compound와 같은 중간 형성물은 형성되지 않았으며 Ti$_3$AlC$_2$을 합성할 수 있었다. TiCx(x=0.67)와 용융 Al의 직접 반응으로 80$0^{\circ}C$에서는 Ti$_2$AlC 상이 합성되었으며, 1200~150$0^{\circ}C$ 반응온도 구간에서는 Ti$_3$AlC$_2$ 상이 우선적으로 합성되었다. 저온에서 합성된 Ti$_2$AlC 상은 고온에서 TiC와 반응으로 Ti$_3$AlC$_2$ 상으로 합성되었다. 본 연구에서는 출발 물질로 TiCx와 Al을 사용한 Ti$_3$AlC$_2$ 상의 합성기구를 제시하였다. 합성된 Ti$_3$AlC$_2$의 미세구조는 Ti$_3$AlC$_2$ 상으로 이루어진 결정립이 45~120nm크기로 적층된 구조를 갖는다.

• 한국결정성장학회지
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• 제7권2호
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• pp.224-234
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• 1997

적은 양의 침입형 불순물을 함유한 고순도 재료를 제조하기 위해 70 ㎾ 걸자 빔용해기를 제작하였으며 이를 이용해서 sponge Ti와 Ti-6Al-4V 합금을 용융시켰다. 전자 빔 용해법을 이용해 정련된 sponge Ti에 대한 실험 결과를 바탕으로 초기 용해 180초 동안에는 Ti의 순도가 증가하였지만 그 이후로는 크게 변화지 않는 것을 알 수 있었다. 그리고 Ti의 정련 결과, 침입형 불순물과 금속 불순물의 양을 포함한 전체 불순물의 양이 900 ppm인 고순도(99.9 wt%)의 Ti를 얻었다. Ti-6Al-4V 합금의 전자 빔 용해에 대한 실험 결과로부터 손실되는 Al의 양은 열역학적 데이터, regular solution model 그리고 model of solute removal kinetics를 통해서 판단할 수 있음을 알 수 있었으며, 이 모델들로부터 계산된 합금 조성과 실험을 통해서 구한 합금 조성이 일치하였다. 그리고 Ti-6Al-4V 합금의 조성은 매우 균일하였으며 이것은 EPMA line scanning을 통해서 확인하였다.

• 열처리공학회지
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• 제9권2호
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• pp.121-129
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• 1996

The solubility of Ti in Al matrix was determined by X-ray diffraction method on two different mechanical alloying systems, i.e Al+$Al_3Ti$ and Al+Ti alloys. Starting powder compositions of two systems were chosen for final volume fraction of $Al_3Ti$ phase being 25%. The solubility of Ti in ${\alpha}$-Al was estimated by the lattice parameter measurement of Al. For Al+$Al_3Ti$ mixture, it appeared that some of $Al_3Ti$ particles decomposed during milling and maximum solubility of Ti in Al was about 0.99%. The majority of $Al_3Ti$ particles were dispersed uniformly in Al matrix, having approximate size of 100~200 nm. On the other hand, higher Ti solubility of 1.24 wt.% was found in Al+Ti system, with starting composition of Al+10 wt.%Ti. After 15 hours of milling, Ti phase was identified as 20 nm sized particles embedded in Al matrix. The annealing of mechanically alloyed powders from Al+$Al_3Ti$ and Al+10 wt.%Ti systems was followed in the temperature range of 200 to $600^{\circ}C$ to study thermal stability of supersaturated solution of Al(Ti). After annealing, the lattice parameter of Al reverted back to that of pure Al, and the peak intensity ratio of $Al_3Ti$/Al was increased more than the original value before annealing. These results suggest that Ti dissolve into alpha-Al solutions during milling, and by annealing, $Do_{22}-Al_3Ti$ phase forms from Al(Ti) solution.

• 한국세라믹학회지
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• 제29권7호
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• pp.577-585
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• 1992

TiB2 and TiC were prepared from the mixture of metal titanium, boron and graphite powders in Argon atmosphere by Self-propagating High-temperature Synthesis method. The sintered properties of TiB2-TiC composite as a function of TiC content and sintering temperature were investigated in TiB2 matrix. The sintered properties were the most excellent at 10 wt% TiC content in TiB2-TiC composite. The relative density, M.O.R strength, hardness and fracture toughness of TiB2-10 wt% TiC composite sintered at 190$0^{\circ}C$ for 90 min by hot-pressing under the pressure of 30 MPa were 98.6%, 634 MPa, 2128.1 kg/$\textrm{mm}^2$ and 4.09 MN/m3/2, respectively.

• 한국세라믹학회지
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• 제23권6호
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• pp.45-51
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• 1986

$SrTiO_3$ reaction mechanism formed from $TiCl_4$ and $SrCl_2$ solution by direct-wet-process was studied. Through this study it is identified that crystalline $SrTiO_3$ is formed above pH 13.8 amorphous $SrTiO_3$ above pH7 and crystallization temperature of amorphous $SrTiO_3$ is at 37$0^{\circ}C$. the final products are composed of 60% crystalline $SrTiO_3$ and 40% amorphous $SrTiO_3$ The amorphous $SrTiO_3$ is identified with the IR absorption spectrum of Sr-Ti-O by FT-IR spectrometer. Under pH 7 gelationus metatitanate (H2TiO3) is formed from TiCl4 but above pH7 the activity by the formation of metatitnic acid ion $[TiO_3]^{2-}$ is so high that $SrTiO_3$is formed more easily through the reaction with $Sr^{2+}$.

• 한국진공학회지
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• 제3권4호
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• pp.405-413
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• 1994

초고진공에서 기판 Si(111)-7$\times$7 위에 Ti:Si 또는 1:2의 조성비로 Ti와 Si을 동시증착한 후 in situ 열처리하여 TiSi2 박막을 에피택셜 성장시켰다 XRD와 XPS 분석결과 동시증착된 혼합 층에서 C49-TiSi2 박막의 성장은 핵형성에 의함을 확인하였으며 양질의 C49-TiSi2 박막은 Ti를 증착한후 Ti와 Si를 동시 증착한 (Ti+2Si)/(Ti)/Si(111)-7$\times$7구조의 시료를 초고진공에서 50$0^{\circ}C$에서 열처리하여 얻을수 있었다. 형성된 C49-TiSi2/Si(111)의 계면은 깨끗하였고 HRTEM 분석 결과 C49-TiSi2\ulcornerSi(111)의 계면은 약 10。 의 편의를 가지면서 TiSi2[211]∥Si[110] TiSi2(031)/Si(111) 의 정합성을 가졌으며 시료의 전 영 역에 에피택셜 성장되었다.

• 대한치과기공학회지
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• 제21권1호
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• pp.43-53
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• 1999

The mechannical properties and corrosion resistance of alloy added commercially pure titanium for dental implants have been investigated. Ti, To-65Zr, Ti-10.1Ta and Ti-17Sn alloys were melthed in arc furnace and the corrosion resistance of Ti alloys was evaluated by anodic polarization test. The microstructure and mechanical properties of Ti alloy were analysed by optical micrograph. hardness tester and instron. In isothermal test, Ti-10.1Ta and Ti-17Sn alloys exhibited the best oxidation resistance below $1100^{\circ}C$. Ti65Zr, Ti-10.1Ta and Ti-17Sn alloys showed better rockwell hardness compared with commercially pure. Ti As the result of the anodic polarization test in 5%HCl, it 5%HCl, it was known knows that Ti-65Zr, alloy showed a rapid decrease in current density at higher potenial in comparision with other Ti alloys.

• 한국세라믹학회지
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• 제33권9호
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• pp.1012-1018
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• 1996

To investigate the final structures and reactions of silicides a somewhat thick Ti monolayer Co monolayer and Co/Ti bilayer films were deposited on single Si(100) wafer by electron beam evaporation followed by heat treatment using RTA system in N2 ambient. TiO2 film formed between Ti and TiSi2 layers due to oxgen or moisture in the Ti monolayer sample. The final layer structure obtained after the silicidation heat-treatment of the Co/Ti bilayer sample turned out to be TiSi2/CoSi2/Ti-Co-Si alloy/CoSi2/Si sbustrate. This implies that imperfect layer inversion occurred due to the formation of Ti-Co-Si intermediate phase.

• Tribology and Lubricants
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• 제4권2호
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• pp.44-51
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• 1988

Titanium carbide(TiC), Titanium nitride(TiN), and Titanium carbonnitride(Ti(C,N)) films were deposited on $Si_3N_4$-TiC composite cutting tools by chemical vapor deposition(CVD) using $TiCl_4-CH_4-H_2$, $TiCl_4-N_2-H_2$, and $TiCl_4-CH_4-N_2-H_2$ gas mixtures, respectively. The experimental results indicate that TiC coatings compared with TiN coatings on $Si_3N_4$ -TiC ceramic have an improved microstructural property, good thermal shock resistance, and good interfacial bonding. However TiN coatings compared with TiC coatings have a low friction coefficient with steel and good chemical stability. It is found by cutting test that coated insert compared with $Si_3N_4$-TiC ceramic have a superior flank and crater wear resistance. And multilayer coating compared with monolayer coating shows a improved wear resistance.