• Membrane Journal
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• v.24 no.6
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• pp.491-497
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• 2014

PTMSP-silica composite membranes were prepared by addition of 0, 15, 20, and 30 wt% TEOS (tetraethoxysilane), TMOS (tetramethoxysilane), MTMOS (methyltrimethoxysilane), and PTMOS (phenyltrimethoxysilane) contents to PTMSP using sol-gel process. The gas permeability of the composite membranes for $H_2$, $N_2$ and ideal selectivity for $H_2$ over $N_2$ were investigated as a function of alkoxysilane content. The permeabilities for $H_2$ and $N_2$ increased in the range of alkoxysilane contents 0~20 wt%, however decrease the range of 20~30 wt%. The ideal selectivities for $H_2$ over $N_2$ decreased in the range of TEOS and PTMOS contents 0~15 wt%, but increased in the range of 15~30 wt%. When compared to the upper bound of Robeson, PTMSP-silica composite membranes with TEOS content of 30 wt%, MTMOS content of 20 wt% and PTMOS content of 30 wt% turned out to be a simultaneous improvement in ideal selectivity and permeability.

• Proceedings of the KIEE Conference
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• 1998.07g
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• pp.2536-2538
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• 1998

This paper investigates the residual stress of tetraethoxysilane (TEOS) and 7wt% phosphosilicate glass (PSG), which are commonly used as a sacrificial layer or etch mask in the fabrication of microelectromechanical systems (MEMS). In order to measure residual stress, $2{\mu}m$ thick TEOS and PSG stress measurement structures are fabricated. Polysilicon is used as the sacrificial layer. First the residual stress of an as-deposited 7wt% PSG flim and TEOS film are measured to be-0.3115% and -0.435%, respectively, which are quite large. These films are annealed from $500^{\circ}C$ to $800^{\circ}C$. Annealing has the effects of reducing residual stress. In the case of the 7wt% PSG film, the residual stress becomes +0.00715% after annealing at $625^{\circ}C$ for 150 minutes. In the case of TEOS film, the residual stress reduces to -0.2134% after same condition. Incidentally, this condition is the same condition for depositing a $2{\mu}m$ thick polysilicon at $625^{\circ}C$ at our low pressure chemical vapor deposition (LPCVD) furnace.

• Membrane and Water Treatment
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• v.14 no.2
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• pp.85-93
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• 2023

Membrane separation is widely used for several applications such as water treatment, membrane reactors and climate change. Cross-linked organic-inorganic hybrid polyvinylidene fluoride (PVDF) / Tetraethyl orthosilicate (TEOS) was adopted for the preparation of optimized hollow membrane (HFM) for membrane distillation or other low pressure separators for mechanical properties and permeability under varying pretreatment schemes. HFMs were prepared on semi-pilot membrane fabrication system. Novel adopted post-treatment schemes involved soaking in glycerol, magnesium sulphate (MgSO₄), sodium hypochlorite (NaOCl), and isopropanol for different durations. All fibers were characterized for morphology using a scanning electron microscope (SEM), surface roughness using atomic force microscope (AFM), elemental composition by examining Energy Dispersive Spectroscopy (EDS), water contact angle (CA°) and porosity. The performance of the fibers was evaluated for pure water permeation flux (PWF). Post-treatment with MgSO₄ gave the highest both tensile modulus and flux. Assessment of properties and performance revealed comparable results with other organic-inorganic separators, HF or flat. In spite of few reported data on post treatment using MgSO₄ in presence of TEOS, this proves the potential of low cost treatment without negative impact on other membrane properties. The flux is also comparable with hypochlorite which manifests substantial precaution requirements in actual industrial use.The relatively high values of flux/bar for sample treated with TEOS, post treated with MgSO₄ and hypochlorite are 88 and 82 LMH/bar respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.164-164
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• 2012

저진공 (＞100 mTorr)에서 냉음극 변압기 전원 소스를 이용하여 플라즈마를 발생시키는 시스템을 개발하였다. 또한 이 장치를 이용하여 Tetraethylorthosilicate (TEOS)를 기화시켜 이산화규소 ($SiO_2$) 박막 증착 기술을 연구하였다. 공정 압력은 400~1,000 mT이었다. 증착된 박막의 박막 두께, 굴절률 등의 측정을 실시하였다. 결과를 요약하면, 플라즈마 공정 압력이 증가함에 따라 박막 증착 속도는 약 200~300 A/min이었다. 또한 전압이 1,100에서 2,100 V로 증가함에 따라 산화막의 증착 속도는 약 300에서 40 nm/min으로 증가하였다. TEOS만을 사용하였을 때 굴절률은 약 1.5~1.6정도였다. 그러나 TEOS에 산소를 추가하면 자연 산화막의 굴절률인 1.46을 쉽게 얻을 수 있었다. 초기 연구 결과를 정리하면 냉음극 변압기 플라즈마 장치는 향후 실용적인 산화막 플라즈마 증착 연구 장치로 사용될 수 있을 것으로 생각된다.

• Journal of the Korean Ceramic Society
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• v.35 no.9
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• pp.958-968
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• 1998

Porous silica ceramics were prepared using DCCA(Drying Control Chemical Additives) Such as uncharged polymer(Polyethylene glycol) and protein (Lipase) under H2O/Low-grade TEOS=10 C2H5OH/Low-grade TEOS=1 HC1/Low=grade TEOS=0.01 After Plain which doesn't added DCCA and samples of 11 sorts which varied molecular weight of PEG(Mw=600, 1000, 2000) quantity of Lipase and concentration of wat-er were synthesized gellation time and thermal analysis were investigated. After heat-treated at 600, cry-stal structures analyses of SiO2 polymer and characteristics of pores were investigated. Gellation time was retarded about 2-6 times as compared with plain resulting in addition of DCCA and crystal structures ex-hibited amorphous state. Moreover as increase of water a short gellation time was obtained. The samples added PEG showed increase of specific surface areas up to 20-40% and had micropores while those of Lipase were decreased about 90% and showed broad pore size distribution.

• Journal of Sensor Science and Technology
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• v.21 no.4
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• pp.311-317
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• 2012

Disposable amperometric screen-printed biosensor strips have been fabricated by a sol-gel encapsulation for the analysis of glucose. The glucose oxidase(GOx) is entrapped in the gel matrix through sol-gel transition of tetraethoxysliane(TEOS). The biosensor is fabricated by GOx containing thin film of TEOS gel on the surface of screen-printed carbon electrode(SPCE). The GOx-containing thin film of TEOS gel offers a one-step modification process on the surface of SPCE. The optimum conditions for glucose determination have been characterized with respect to the applied potential, enzyme loading ratio, and pH. The linear range and detection limit of glucose detection were from 2.0 mM to 16.0 mM and 0.25 mM, respectively.

• Journal of Electrical Engineering and Technology
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• v.11 no.2
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• pp.455-462
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• 2016

The electron transport coefficients in not only pure atoms and molecules but also in the binary gas mixtures are necessary, especially on understanding quantitatively plasma phenomena and ionized gases. Electron transport coefficients (electron drift velocity, density-normalized longitudinal diffusion coefficient, and density-normalized effective ionization coefficient) in binary mixtures of TEOS gas with buffer gases such as Kr, Xe, He, and Ne gases, therefore, was analyzed and calculated by a two-term approximation of the Boltzmann equation in the E/N range (ratio of the electric field E to the neutral number density N) of 0.1 - 1000 Td (1 Td = 10⁻¹⁷ V.cm²). These binary gas mixtures can be considered to use as the silicon sources in many industrial applications depending on mixture ratio and particular application of gas, especially on plasma assisted thin-film deposition.

• Macromolecular Research
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• v.13 no.2
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• pp.96-101
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• 2005

Thin-film humidity sensors were prepared using inorganic/organic hybrid polyelectrolytes, which were prepared from the sol-gel reaction of copolymers of [2-(methacryloyloxy)ethyl]dimethylpropylammonium bromide (MEPAB), n-butyl methacrylate (BMA), and 3-(trimethoxysilyl)propyl methacrylate (TSPM) with tetraethyl ortho-silicate (TEOS). The humidity-sensitive polyelectrolytes were composed of the copolymers having the following mole ratios of MEPAB, BMA, and TSPM: 60/30/10, 55/30/15, and 50/30/20. We found that the impedance varied with the content of MEPAB or TEOS; it ranged from $10^{7} to 10^{3}\Omega$ between 20 and $95\%$ relative humidity, which is the range required for a humidity sensor operating at ambient humidity. In addition we investigated a number of characteristics of these humidity sensors, such as their hysteresis, response time, temperature dependence, frequency dependence, water durability, and long-term stability.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.13 no.2
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• pp.73-78
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• 2003

The influence of calcination temperature on the pore structure of freeze dried silica gel derived from tetraethyl orthosilicate (TEOS) was investigated using $N_2$adsorption and mercury intrusion techniques. Freeze dried material contained not only 4-6 nm sized mesopores and 6-10 $\mu\textrm{m}$ sized macropores, but minor micropores. The change of pore structure due to the increase of calcination temperature was dependant upon the degree of densification.

• Proceedings of the KIEE Conference
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• 1998.07d
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• pp.1327-1329
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• 1998

It is very important to select superior inter-layer PMD(Pre Metal Dielectric) materials which can act as penetration barrier to various impurities created by CMP processes. In this paper, hot carrier degradation and device characteristics were studied with material variation of PMD-1 layers, which were split by LP-TEOS, SR-Oxide, PE-Oxynitride, PE-Nitride, PE-TEOS films. It was observed that the oxynitride and nitride using plasma was greatly decreased in hot carrier effect in comparison with silicon oxide. Consequently, silicon oxide turned out to be a better PMD-1 material than PE-oxynitride and PE-nitride. Also, LP-TEOS film was the best PMD-1 material Among the silicon oxides.