• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.404-405
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• 2008

In this work, we investigated the effect of the functionalized SWNT-polymer composites for increasing sensitivity and imparting selectivity to nanotube sensors. To do this, CNT -based gas sensors were fabricated with two types of dispersed SWNT solution involving different polymer resin of TEOS (Tetraethyl orthosilicate) or MTMS (Methyl trimethoxysilane) which is blended to adhere to substrate well. As the surfaces of TEOS and MTMS surrounding SWNTs remain functionalized to -OH and $-CH_3$ groups respectively after hardening, gas adsorption will be affected differently according to the type of gases. In the experiment, we examined the response of electrical conductance for alcohol vapour gas. As the result, the conductance in the sensors using TEOS decreased considerably while that of MTMS was nearly invariable.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.11a
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• pp.295-296
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• 2005

Poly-Silicon Thin Film Transistor 응용을 위한 $SiO_2$ 박막 성장에 관한 연구로서 기존의 ICP-CVD를 이용한 실험에서 $SiH_4$ 가스대신 유기 사일렌 반응물질인 TEOS(TetraethylOrthosilicate) Source를 이용하여 APCVD 법으로 성장시켰다. $SiO_2$ 박막은 반도체 및 디스플레이 분야에서 필드산화막, 보호막, 게이트 절연막 등으로 사용되며, 이러한 산화막 증착을 TEOS를 이용하였고, 빠른 증착과 더 좋은 특성을 갖는 박막 형성을 위하여 $O_2$ 반응가스를 이용하였고, Ellipsometor, XPS 등을 이용하여 계면 특성 분석을 하였다.

• Journal of Industrial Technology
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• v.23 no.A
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• pp.175-179
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• 2003

A study on the particle growth in $TEOS/O_2$ plasma was performed by observing the particle size and its morphology by TEM. The qualitative chemical analysis of particles was also determined by the EDS (Energy Dispersive X-Ray Spectrometer). The effects of process variables such as the plasma on-time and bubbler temperature on the particle growth were investigated. The particle size becomes larger as the plasma on-time because of the longer coagulation, and also as the bubbler temperature increases because of the faster coagulation between particles.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 1999.11a
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• pp.139-142
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• 1999

• Korean Journal of Materials Research
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• v.5 no.1
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• pp.55-62
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• 1995

Cordierite powders were prepared by a controlled hydrolysis of metal alkoxides with ethanol and distilled water. HC1 was used as a catalyst. The amount of HCI catalyst used was in range of 0.1-0. 5mol per lmol of TEOS. Effects of HC1 catalyst on the characteristics of cordierite powder were examined. $\alpha$-Cordierite powder prepared with HCI/TEOS mol ratio of O.lmol/mol was crystallized at $1050^{\circ}C$. On the other hand, $\alpha$-cordierite powders prepared with HCI/TEOS rnol ratio of 0.3 and 0.5rnol/mol were crystallized at $950^{\circ}C$. Spinel( mA120a) phase remained up to $1300^{\circ}C$ in the cordierite powder prepared with HCI/TEOS rnol ratio of 0.lrnolirnol. On the contrary, spinel phase was absent, and mordierite was the only phase remalned at $1300^{\circ}C$ in the cordierite powder prepared with HCI/TEOS mol ratio of 0.3 and O:5mol/mol.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.124-124
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• 2011

This study investigated the interaction of varied plasma power with ultralow-k toluene-tetraethoxysilane (TEOS) hybrid plasma polymer thin films, as well as changing electrical and mechanical properties. The hybrid thin films were deposited on silicon(100) substrates by plasma enhanced chemical vapor deposition (PECVD) system. Toluene and tetraethoxysilane were utilized as organic and inorganic precursors. In order to compare the electrical and the mechanical properties, we grew the hybrid thin films under various conditions such as rf power of plasma, bubbling ratio of TEOS to toluene, and post annealing temperature. The hybrid plasma polymer thin films were characterized by Fourier transform infrared (FT-IR) spectroscopy, atomic force microscopy (AFM), nanoindenter, I-V curves, and capacitance. Also, the hybrid thin films were analyzed by using ellipsometry. The refractive indices varied with the RF power, the bubbling ratio of TEOS to toluene, and the annealing temperature. To analyze their trends of electrical and mechanical properties, the thin films were grown under conditions of various rf powers. The IR spectra showed them to have completely different chemical functionalities from the liquid toluene and TEOS precursors. Also, The SiO peak intensity increased with increasing TEOS bubbling ratio, and the -OH and the CO peak intensities decreased with increasing annealing temperature. The AFM images showed changing of surface roughness that depended on different deposition rf powers. An nanoindenter was used to measure the hardness and Young' modulus and showed that both these values increased as the deposition RF power increased; these values also changed with the bubbling ratio of TEOS to toluene and with the annealing temperature. From the field emission scanning electron microscopy (FE-SEM) results, the thickness of the thin films was determined before and after the annealing, with the thickness shrinkage (%) being measured by using SEM cross-sectional images.

• Korean Membrane Journal
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• v.3 no.1
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• pp.69-74
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• 2001

Films of TiO$_2$/SiO$_2$ were deposited on the inner surface of the porous glass support tubes by decomposition of tetraisopropyl titanate (TIPT) and tetraethyl orthosilicate (TEOS) at atmospheric pressure. Dense and hydrogen -permselective membranes were formed at 400-600$\^{C}$. The permeation rates of H$_2$ through the membrane at 600$\^{C}$ were 0.2-0.4 ㎤(STP)/min-㎠ atm and H$_2$:N$_2$permeation ratios were above 1000. The permeation properties of the membranes were investigated at various deposition temperatures and TIPT/TEOS concentrations. Decomposition of TIPT alone at temperatures above 400$\^{C}$ produced porous crystalline TiO$_2$ films and they were not H7-selective. Decomposition of TEOS produced H$_2$-permeable SiO$_2$ films at 400-600$\^{C}$ but film deposition rate was very low. Addition of TIFT to the TEOS stream significantly accelerated the deposition rate and produced highly H$_2$-selective films. Increasing the TIPT/TEOS concentration ratio increased the deposition rate. The TiO$_2$/SiO$_2$ membranes formed at 600 $\^{C}$ have the permeation properties comparable to those of SiO$_2$ membranes produced from TEOS.

• Korean Chemical Engineering Research
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• v.57 no.1
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• pp.124-132
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• 2019

Water-repellent coating solutions were synthesized by hydrolysis and polycondensation reactions with water using tetraethoxysilane (TEOS) and chlorotrimethylsilane (CTMS) as precursors. The solutions were coated on a PMMA sheet and thermally cured to prepare non-fluorinated water-repellent coating films. Coating films were characterized by water contact angles, UV-Vis transmittance and surface morphology. The contact angle of coating films prepared by varying the molar ratio of CTMS/TEOS to 0.6~1.0 exhibited a maximum value of $107^{\circ}$ when the CTMS/TEOS molar ratio was 0.8. The coating films showed a high transmittance over the visible range up to 90% when the CTMS/TEOS molar ratios were 0.6~0.8. However, when the molar ratios of CTMS/TEOS were 0.9~1.0, the transmittance of coating films was lower than 70% due to an uneven shape of the rough surface.

• Journal of Conservation Science
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• v.27 no.2
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• pp.201-209
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• 2011

While consolidants based on tetraethoxysilane (TEOS) have been widely used for the consolidation of decaying stone heritages, TEOS-based consolidants suffer from practical drawbacks, such as crack formation of the gel during the drying phase due to the developed capillary force. We have prepared new TEOS-based consolidants containing flexible (3-glycidoxypropyl) trimethoxysilane (GPTMS) in order to reduce capillary force development during gel drying. In this study, we have prepared TEOS/GPTMS-based consolidants containing ETEOS in order to improve the surface hydrophobisity. The physical properties of the TEOS/GPTMS/ETEOS solution with different hydrolysis were compared with those of the commercial products Wacker OH$^{(R)}$. The contact angle of the surface increased with the addition of the ETEOS, which is higher than that of Wacker OH$^{(R)}$. The sol-gel mechanism was manipulated by the degree of hydrolysis as well as the amount of ETEOS. The properties and the applicability of the developed consolidants for the decayed Korean granites are also investigated.

• Membrane Journal
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• v.20 no.4
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• pp.278-289
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• 2010

A series of composite membranes based on sulfonated poly(arylene ether sulfone) (SPAES) were prepared via addition of tetraethyl orthosilicate (TEOS) and solution casting method. The morphological structure, water uptake, proton conductivity of the resulting composite membranes were extensively investigated as function of the content of TEOS. By the sol-gel reaction, TEOS molecules were not completely converted to $SiO_2$ particles, but formed only oligomer-type. Also, EDS confirms that the resulting silicon dioxide was homogeneously distributed in the composite membranes. As the content of TEOS increased, the prepared membranes increased water uptake and proton conductivity at high temperature and low relative humidity condition. In particular, considerably high proton conductivity (0.015 S/cm) at $120^{\circ}C$ and 48%RH was demonstrated in the composite membrane containing 200% TEOS, which is 10 times greater than that of unmodified SPAES membrane. Also, the composite membranes were found to have enhanced thermal stability compared to the unmodified membrane.