Proceedings of the International Microelectronics And Packaging Society Conference (한국마이크로전자및패키징학회:학술대회논문집)
- 1999.11a
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- Pages.139-142
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- 1999
Characterization of Perfluoropolymer Thin Films on TEOS Deposited by Thermal Evaporation
TEOS 산화막 위에 기상증착을 통해 성장된 불화유기박막의 특성평가
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