• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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• pp.136-136
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• 2003

In fiber optic networks, system size and cost can be significantly reduced by development of optical components through planar optical waveguides. One important step to realize the compact optical devices is to develop planar optical amplifier to compensate the losses in splitter or other components. Planar amplifier provides optical gain in devices less than tens of centimeters long, as opposed to fiber amplifiers with lengths of typically tens of meters. To achieve the same amount of gain between the planar and fiber optical amplifier, much higher Er doping levels responsible for the gain than in the fiber amplifier are required due to the reduced path length. These doping must be done without the loss of homogeniety to minimize Er ion-ion interactions which reduce gain by co-operative upconversion. Sol-gel process has become a feasible method to allow the incorporation of Er ion concentrations higher than conventional glass melting methods. In this work, Er-doped $SiO_2$-A1$_2$ $O_3$ films were prepared by two different method via sol -Eel process. Tetraethylorthosilicate(TEOS)/aluminum secondary butoxide [Al (OC$_4$ $H_{9}$)$_3$], methacryloxypropylcnethoxysaane(MPTS)/aluminum secondary butofde [Al(OC$_4$ $H_{9}$)$_3$] systems were used as starting materials for hosting Er ions. Er-doped $SiO_2$-A1$_2$ $O_3$ films obtahed after heat-treating, coatings on Si substrate were characterized by X-ray din action, FT-IR, and N-IR fluorescence spectroscopy. The luminescence properties for two different processing procedure will be compared and discussed from peak intensity and life time.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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• pp.132-132
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• 2003

Second-order nonlinear optical(NLO) materials have been extensively studied for applications in photonic devices, such as frequency doubling and electro-optical(EO) modulation, because of their large optical nonlinearity, excellent processibility, low dielectric constant, and high laser damage thresholds. The poling behaviour of NLO chromophore in organic/inorganic matrixes showed the randomization of poled NLO chromophore in the absence of poling Held. The liquid crystal molecules in a droplet showed a long-range orientational order along a director. Therefore, liquid crystal effects on poling behaviour of NLO chromophore dispersed in organically modified inorganic sol-gel materials were investigated. Using sol-gel process for the development of NLO material has received increasing attention, Organically modifked inorganic NLO sol-Eel materials are obtained via incorporation of the organic NLO active chromophore into an alkoxysilane based inorganic network. One of the most important thing in this works was that tetraethoxysilane(TEOS) and methyltrimathoxysilane(HTMS) were used as precursor followed by hydrolysis and condensation without using any acidic catalyst during the process. The NLO chromophores in the liquid crystal nanodomains were well mixed with I/O hybrid matrix, deposited on transparent ITO-coated glasses. The poling behaviour of liquid crystal effects of NLO chromophore dispersed in I/O hybrid matrix were investigated by UV-vis spectroscopy. Size distribution and morphology of the NLO chromophores doped in the liquid crystal nanodomains dispersed in I/O hybrid matrix were investigated by SEM.

• 센서학회지
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• 제28권6호
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• pp.366-370
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• 2019

In this study, we have successfully fabricated a highly conductive transparent electrode using Ag nanowires, based on piezoelectric polyvinylidene difluoride (PVDF) film, that can be applied as transparent and flexible speakers. The structural morphology of the Ag nanowires was confirmed by a detailed scanning electron microscopy. Ultraviolet-visible spectroscopy demonstrated that the transparent electrode fabricated by the Ag nanowires exhibited a transmittance of above 70%. The transparent electrode also showed very low sheet resistance with high flexibility. We have further developed an anti-oxidation coating layer by using a tetraethyl orthosilicate-poly trimethyloxyphenylsilane (TEOS-PTMS) slurry technique. It was confirmed that the transmittance and sheet resistance of the antioxidant film depends critically on the humidity of the film surface. We believe such Ag nanowire electrodes are a very promising next-generation transparent electrode technology that can be used in future flexible and transparent devices.

• 한국염색가공학회:학술대회논문집
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• 한국염색가공학회 2012년도 제46차 학술발표회
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• pp.109-109
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• 2012

아라미드 섬유는 태양광의 직사광선에 계속 노출될 경우 120주 경과 후에는 강도가 3분의 1로 떨어지는 단점이 있다. 이와 같은 단점을 보완하기 위해 나노 크기의 금속산화물인 $TiO_2$ 졸-겔 나노합성법을 이용하여 나노졸을 제조하고 이를 직물에 함침하는 공정을 통하여 아라미드 섬유의 내광성 증진에 대해 연구하였다. TTIP, TEOS 등의 금속전구체를 이용하여 구형의 나노졸 합성에 의한 $TiO_2$ 나노졸을 수분산형태의 졸로서 섬유가공 공정상에 접목하였다. 제조된 나노크기의 $TiO_2$ 입자분포와 크기, 미세구조 및 결정상을 알아보기 위해 입도분포분석기, TEM, XRD를 이용하였다. $TiO_2$ 나노졸을 함침한 아라미드 직물은 내광성은 24, 48, 96시간 동안 Xenon-arc 광조사한 후, 물성변화를 분석하였다. 나노졸 합성시 반응물의 농도 및 용액의 pH 조건에 따른 나노졸의 미세구조를 TEM을 이용하여 관찰한 결과, 반응물의 농도에 따라 평균입도는 313.7nm, 500.5nm, 840.3nm, 1002nm로 커졌다. 하지만, 반응물의 농도가 증가할수록 시간이 지남에 따라 입자들이 층 분리 현상이 관찰되었으며, 단분산된 나노졸 입자를 제조하기 위해서는 TTIP의 투입량을 0.67mole(200ml)로 유지하였다. 또한 이를 아라미드 직물에 함침하여 광조사 시간에 따른 아라미드 섬유의 물리적 특성의 변화를 분석하였다.

• 방사성폐기물학회지
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• 제9권1호
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• pp.1-11
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• 2011

에멀션 기반의 계면활성제를 이용한 주형합성법을 이용하여 산촉매로서 염산과 실리카의 전구체인 테트라에톡시실란을 사용함으로써 메조다공성 실리카 마이크로스피어를 합성하였다. 테트라에톡시실란의 농도 증가에 의해 구형의 입자 형태가 파괴되었고, 기공구조도 크게 변하였다. 산촉매 농도 증가에 의한 구형의 입자형태 파괴 현상은 적었지만 상대적으로 작은 크기의 구형의 마이크로입자가 더 많이 생성되었다. 하지만, 산성조건에서 입자들 간의 강한 응집현상이 나타남에 따라 낱개의 분리되어 있는 단일입자를 얻기 위해서는 초음파 등의 후처리 과정이 필요하였다.

• Korean Chemical Engineering Research
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• 제48권3호
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• pp.332-336
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• 2010

이미다졸염 형태의 이온성 액체를 구조유도체를 사용하지 않고 솔-젤 법으로 무정형 실리카에 담지시켜 고정화된 이온성 액체 촉매를 제조하였다. 이 촉매를 에틸렌카보네이트와 메탄올과의 에스테르 교환반응에 의한 디메틸카보네이트(DMC)의 합성 반응에 사용한 결과 우수한 촉매 활성을 나타내었다. DMC 합성 반응을 두 단계의 반응식으로 가정한 모델을 설정하여 반응온도와 촉매량을 변화시켜 실험한 결과와 비교한 속도론적 연구에서 실험 결과가 반응모델에 잘 일치하는 것을 알 수 있었다. 이로부터 계산한 유사 활성화 에너지 값은 67.4 kJ/mol 이었다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 춘계학술발표대회
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• pp.34.2-34.2
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• 2011

The demand for Ru has been increasing in the electronic, chemical and semiconductor industry. Chemical mechanical planarization (CMP) is one of the fabrication processes for electrode formation and barrier layer removal. The abrasive particles can be easily contaminated on the top surface during the CMP process. This can induce adverse effects on subsequent patterning and film deposition processes. In this study, a post Ru CMP cleaning solution was formulated by using sodium periodate as an etchant and citric acid to modify the zeta potential of alumina particles and Ru surfaces. Ru film (150 nm thickness) was deposited on tetraethylorthosilicate (TEOS) films by the atomic layer deposition method. Ru wafers were cut into $2.0{\times}2.0$ cm pieces for the surface analysis and used for estimating PRE. A laser zeta potential analyzer (LEZA-600, Otsuka Electronics Co., Japan) was used to obtain the zeta potentials of alumina particles and the Ru surface. A contact angle analyzer (Phoenix 300, SEO, Korea) was used to measure the contact angle of the Ru surface. The adhesion force between an alumina particle and Ru wafer surface was measured by an atomic force microscope (AFM, XE-100, Park Systems, Korea). In a solution with citric acid, the zeta potential of the alumina surface was changed to a negative value due to the adsorption of negative citrate ions. However, the hydrous Ru oxide, which has positive surface charge, could be formed on Ru surface in citric acid solution at pH 6 and 8. At pH 6 and 8, relatively low particle removal efficiency was observed in citric acid solution due to the attractive force between the Ru surface and particles. At pH 10, the lowest adhesion force and highest cleaning efficiency were measured due to the repulsive force between the contaminated alumina particle and the Ru surface. The highest PRE was achieved in citric acid solution with NaIO4 below 0.01 M at pH 10.

• 한국재료학회지
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• 제21권4호
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• pp.236-241
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• 2011

Polysilazane and silazane-based precursor films were deposited on stacked TiN/Ti/TEOS/Si-substrate by spin-coating, then annealed at $150{\sim}400^{\circ}C$, integrated further to form the top electrode and pad, and finally characterized. The precursor solutions were composed of 20% perhydro-polysilazane ($SiH_2NH$)n, and 20% hydropolymethyl silazane ($SiHCH_3NH$)n in dibutyl ether. Annealing of the precursor films led to the compositional change of the two chemicals into silicon (di)oxides, which was confirmed by Fourier transform infrared spectroscopy (FTIR) spectra. It is thought that the different results that were obtained originated from the fact that the two precursors, despite having the same synthetic route and annealing conditions, had different chemical properties. Electrical measurement indicated that under 0.6MV/cm, a larger capacitance of $2.776{\times}10^{-11}$ F and a lower leakage current of 0.4 pA were obtained from the polysilazane-based dielectric films, as compared to $9.457{\times}10^{-12}$ F and 2.4 pA from the silazane-based film, thus producing a higher dielectric constant of 5.48 compared to 3.96. FTIR indicated that these superior electrical properties are directly correlated to the amount of Si-O bonds and the improved chemical bonding structures of the spin-on dielectric films, which were derived from a precursor without C. The chemical properties of the precursor films affected both the formation and the electrical properties of the spin-on dielectric film.

• 한국세라믹학회지
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• 제54권1호
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• pp.49-54
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• 2017

In this study, based on hydrolysis and condensation via $St{\ddot{o}}ber$ process of sol-gel method, synthesis of mono-dispersed silica nanoparticles was carried out with hydrophilic solvent. This operation was expected to be a more simplified process than that with organic solvent. Based on the sol-gel method, which involves simply controlling the particle size, the particle size of the synthesized silica specimens were ranged from 30 to 300 nm by controlling the composition of tetraethylorthosilicate (TEOS), DI water and ammonia solution, and by varying the stirring speeds while maintaining a fixed amount of ethanol. Increasing the content of DI water and decreasing the content of ammonia caused the particle size to decrease, while controlling the stirring speed at a high level of RPMs enabled a decrease of the particle size. X-ray diffraction (XRD) and Fourier transform infrared spectroscopy (FT-IR) were utilized to investigate the success factors for synthesizing process; Field emission scanning electron microscopy (FE-SEM) was used to study the effects of the size and morphology of the synthesized particles. To analyze the dispersion properties, zeta potential and particle size distribution (PSD) analyses were utilized.

• 한국결정성장학회지
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• 제26권6호
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• pp.220-224
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• 2016

초음파 스프레이를 이용하여 유리기판 위에 반사방지 박막이 제조되었다. GPTMS와 TEOS는 솔-젤 하이브리드 코팅 용액을 제조하기 위하여 사용되었다. 반사방지막의 코팅 두께를 제어하기 위하여 스프레이 노즐의 이동속도는 15~25 mm/s로 변경되었다. 스프레이 노즐의 이동속도가 증가 됨에 따라 반사방지막의 두께는 138 nm에서 86 nm로 감소되었다. 20 mm/s의 노즐 이동속도에 의해 제조된 반사방지막의 굴절률은 약 1.31, 막의 두께는 104 nm이며, 380 nm에서 780 nm의 가시광 영역에서의 평균 반사율은 0.75 %, 투과율은 94 %로 측정되었다.