• Journal of the Korean Ceramic Society
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• v.44 no.3 s.298
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• pp.162-168
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• 2007

Silica wet gels were prepared ken water glass ($29\;wt%\;SiO_{2}$) by using Amberlite as a ion exchange resin. After washing in distilled water, the wet gels were further aged in a solution of TEOS/EtOH to strengthen of 3-dimensional network structure. As increase TEOS content in aging solution, BET surface area and porosity of the ambient dried silica aerogels were significantly decreased, and average pore diameter was also decreased 30 nm to -10 nm. Also, higher density and compressive strength were obtained in case of higher TEOS content. This is due to precipitation of $SiO_{2}$ nano particles by TEOS. Hence, TEOS addition plays an important role of both strengthening and stiffness of silica wet gel network. By adding over 30 vol% TEOS, a crack-free monolithic silica aerogel tiles were obtained and its density, compressive strength, and thermal conductivity were shown $0.232g/cm^{3}$, 7.3 MPa, and 0.029 W/mk, respectivly.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.14 no.5
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• pp.2529-2535
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• 2013

Sol-gel method was utilized to prepare SPEEK/PWA electrolyte composite membranes. TEOS was used as a precursor and phosphotungstic acid(PWA) as a catalyst for the sol-gel reaction. It was observed through FE-SEM analysis that the PWA and silica nanoparticles were uniformly dispersed into the polymer matrix. The water uptake of SPEEK/PWA/silica composite membranes was less affected by TEOS concentration at higher TEOS contents, while the water uptake decreased as TEOS concentration increased at lower TEOS contents. The proton conductivity of the composite membranes showed similar trend as the water uptake of the composite membranes. The methanol permeability of SPEEK/PWA/silica composite membranes decreased as TEOS concentration increased.

• Journal of the Korean Ceramic Society
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• v.31 no.2
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• pp.206-212
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• 1994

Effects of the film deposition process parameters on the properties such as deposition rate, etch rate, refractive index, stress and step coverage of plasma enhanced chemical vapor deposited (PECVD) tetraethylorthosilicate glass (TEOS) SiO2 film were investigated and analysed using SEM, FTIR and SIMS techniques. Increasing TEOS flow or decreasing O2 flow increased the deposition rate and the compressive stress of the oxide film but produced a less denser film. The deposition rate decreased owing to the decrease in the sticking coefficient of the TEOS and the O2 molecules onto the substrate Si with increasing the substrate temperature. Increasing the substrate temperature produced a denser film with a lower etch rate and the higher refractive index by lowering SiOH and moisture contents. Increasing the rf power increases the ion bombardment energy. This increase in energy, in turn, increases the deposition rate and tends to make the film denser. No appreciable changes were found in the deposition rate but the refractive index and the stress of the film decreased with increasing the deposition pressure. The carbon content in the plasma TEOS CVD oxide film prepared under our standard deposition conditions were very low according to the SIMS analysis results.

• Proceedings of the KSME Conference
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• 2000.04b
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• pp.404-409
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• 2000

Growth characteristics of silica particles have been studied experimentally using in situ sampling technique from $H_2/O_2TEOS$ diffusion flame with carefully devised sampling probe. Verification of sampling result was done through new method and effects of flame condition and TEOS flow rate on growth characteristics of silica particles were investigated. By comparing particles sampled by thermophoretic sampling in flame with those by collector sampling after probe, particles do not change before and after probe sampling, which was clearly proved from the fact that the result of TEM image analysis makes good agreement with that of SMPS measurement. As flame temperature increases, the effect of coalescence or sintering becomes important mechanism during growth of silica particles, resulting in canceling the effect of coagulation, which makes mean diameter of silica particles increase slowly. With increase in TEOS flow rate, the number concentration of generated silica particle increases but residence time of particles in flame decreases. As a result, there exists upper limit to which the diameter of silica particle increases under same flame condition.

• Korean Journal of Materials Research
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• v.9 no.2
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• pp.144-148
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• 1999

We have studied the deposition characteristics of thick silicon dioxide film on Si substrate by $O_3$/TEOS APCVD(Atmospheric Pressure Chemical Vapor Deposition). The effect of deposition parameters such as the distance between showerhead and substrate, deposition temperature, TEOS flow rate and $O_3$/TEOS ratio on deposition rate, surface morphology, and properties of films as investigated. As deposition temperature increased, deposition rate decreased but the surface morphology and adhesion of film to substrate improved. As the distance between showerhead and substrate decreased, the deposition rate increased. Etching rate using the BOE increased as TEOS flow rate increased, but was independent of$ O_3$/TEOS ratio. Deposition rate of $5\mu\textrm{m}$/hour was obtained under the condition that the distance between showerhead and substrate was 5mm and the deposition temperature was $370^{\circ}C$.

• Journal of the Korean Applied Science and Technology
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• v.33 no.3
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• pp.483-491
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• 2016

Even though the antifogging property of nanosilica coated glass surface is highly increased due to the hydrophilic hydroxyl groups on nanosilica surface, the durability of this property on outdoor glass was diminished rapidly after rain washing. In addition the topology of nanosilica coated glass surface plays very important roles to control an light transmittance or antireflection property. To improve these coating durability and characteristics a hydrophilic nanosilica coating on glass was prepared by coating with 1.5 wt% of nanosilica (Ludox) suspension in the presence of hydrolyzed tetraethylorthosilicate (TEOS). The optimum hydrolysis condition of TEOS in acidic or basic aqueous solution was also examined by contact angle measurement. The final transparent hydrophilic coating layer coated with nanosilica-TEOS in acidic condition (pH=4) showed much improved durability of hydrophilic surface as well as higher visible light transmittance than original uncoated glass by 2 % point.

• Polymer(Korea)
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• v.25 no.6
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• pp.866-875
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• 2001

In this work, thermal decomposition mechanism based on kinetic parameters and thermal stability of carbon fiber-reinforced carbon matrix composites (C/C composites), have been studied under high temperature oxidative conditions with addition of tetra-ethylorthosilicate (TEOS) as an oxidation inhibitor. Thermogravimetric analysis (TGA) was executed to evaluate the thermal decomposition mechanism and thermal stability of C/C composites in the temperature range of 30 ～ $850^{\circ}C$. As a result, the kinetic parameters of the composites impregnated with TEOS, i.e., activation energy for thermal decomposition ($E_d$), order of reaction (n) , and pre-exponential factor (A) were evaluated as 136 kJ/mol, 0, and 2.3$\times$$10^9s^{-1}$, respectively. Especially, the IPDT and $E_d$ of C/C composites impregnated with TEOS were improved largely compared with the composites impregnated without TEOS, due to the formation of $SiO_2$ on composite surfaces, resulting in interrupting the oxygen attack to carbon active site in the composites.

• Korean Chemical Engineering Research
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• v.56 no.3
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• pp.327-334
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• 2018

Water-repellent coating solutions were prepared by sol-gel method using tetraethoxysilane (TEOS) and methyltrimethoxysilane (MTMS) as precursors. The solutions were spin-coated on a cold-rolled steel sheet and thermally cured to prepare a non-fluorine water-repellent coating films. The effects of molar ratios of MTMS/TEOS, water concentration and ammonia concentration on the hydrophobic properties of the coating films were studied. The contact angle of water on coating films prepared by varying the molar ratio of MTMS/TEOS to 1~20 showed a maximum value of $108^{\circ}$ when the MTMS/TEOS molar ratio was 10. With increasing water content, the coating films showed the larger contact angles and the better the water repellency. As the amount of ammonia added was increased, the contact angles of coating films were increased, showing the better the water repellency. It is considered that the larger the amount of ammonia added, the larger the size of the silica particles generated, which increases the surface roughness of the silica particles, thereby increasing the water repellency.

• Journal of the Korean institute of surface engineering
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• v.51 no.2
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• pp.110-115
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• 2018

The Na low temperature gettering in $SiO_2/PSG/SiO_2/Al-1%Si$ and $SiO_2/TEOS/SiO_2/Al-1%Si$ multilevel thin films was investigated using dynamic SIMS(secondary ion mass spectrometry) analysis. DC magnetron sputter, APCVD and PECVD techniques were utilized for the deposition of Al-1%Si thin films, $SiO_2/PSG/SiO_2$ and $SiO_2/TEOS/SiO_2$ passivations, respectively. Heat treatment was carried out at $300^{\circ}C$ for 5 h in air. SIMS depth profiling was used to determine the distribution of Na, Al, Si and other elements throughout the $SiO_2/PSG/SiO_2/Al-1%Si$ and $SiO_2/TEOS/SiO_2/Al-1%Si$ multilevel thin films. XPS was used to analyze chemical states of Si and O elements in $SiO_2$ passivation layers. Na peaks were observed throughout the $PSG/SiO_2$ and $TEOS/SiO_2$ passivation layers on the Al-1%Si thin films and especially at the interfaces. Na low temperature gettering in $SiO_2/PSG/SiO_2/Al-1%Si$ and $SiO_2/TEOS/SiO_2/Al-1%Si$ multilevel thin films is considered to be caused by a segregation type of gettering.

• Korean Chemical Engineering Research
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• v.49 no.4
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• pp.460-464
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• 2011

Poly(ether-block-amide)(PEBA, $PEBAX^{TM}$) resin is a thermoplastic elastomer combining linear chains of hard-rigid polyamide block interspaced soft-flexible polyether block. It was believed that the hard polyamide block provides the mechanical strength and permeation selectivity, whereas gas transport occurs primarily through the soft polyether block. The objective of this work was to investigate the gas permeation properties of carbon dioxide and methane for $PEBAX^{TM}$-1657 membrane and compare with those obtained for other grade of $PEBAX^{TM}$, $PEBAX^{TM}$-2533. And the organic/inorganic hybrid membranes were prepared using $PEBAX^{TM}$ and TEOS(tetraethoxysilane) by sol-gel process, and gas permeation properties were studied. $PEBAX^{TM}$-2533 membrane exhibited higher gas permeability coefficients than $PEBAX^{TM}$-1657 membrane. This was explained by the increase of chain mobility. The permeability coefficients for $PEBAX^{TM}$/TEOS hybrid membranes were higher than pure $PEBAX^{TM}$ membranes. This results were explained by the reduction of crystallinity of polyamide block by the introduction of TEOS. Ideal separation factor of hybrid membranes does not change much. This might be due to the increase of solubility selectivity.