• Transactions on Electrical and Electronic Materials
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• 제18권2호
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• pp.74-77
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• 2017

In this work, we investigated the etching characteristics of TaNO thin films and the selectivity of TaNO to $SiO_2$ in an $O_2$/CF4/Ar inductively coupled plasma (ICP) system. The maximum etch rate of TaNO thin film was 297.1 nm/min at a gas mixing ratio of O2/CF4/Ar (6:16:4 sccm). At the same time, the etch rate was measured as a function of the etching parameters, such as the RF power, DC-bias voltage, and process pressure. X-ray photoelectron spectroscopy analysis showed the efficient destruction of the oxide bonds by the ion bombardment, as well as the accumulation of low volatile reaction products on the etched surface. Based on these data, the ion-assisted chemical reaction was proposed as the main etch mechanism for the $CF_4$-containing plasmas.

• 한국자기학회지
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• 제3권1호
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• pp.41-47
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• 1993

Co-Cr계 수직자기기록매체에서 비교적 낮은 기판온도에서 높은 보자력을 얻기위하여 제 3원소로서 Ta의 첨가효과에 대하여 연구하였다. Cr함량이 17-21 at.%로 다른 Co-Cr 계에 Ta함량을 3.2 at.%까지 첨가시켜서 여러조성의 Co-Cr-Ta 박막을 제조하고, 자기적 성질 및 미세구조를 조사하였다. Ta첨가로 인한 수직보자력의 향상효과는 Cr함량이 낮은 박막의 경우에 컸으며, 특히 기판온도가 $100^{\circ}C$인 경우 그 향상효과가 더욱 뚜렷하였다. Ta의 첨가로 인한 수직보자력 향상은 결정립 미세화나, c-축 배향성향상에 의한 것이기 보다는 비강자성원소의 편석이 심화됨에 기인하는 것으로 판단된다.

• 한국광물학회지
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• 제26권4호
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• pp.245-262
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• 2013

통가열도 내 우리나라 해저열수광상 독점 탐사지역에 위치하는 5개 해저화산(TA12, TA19, TA22, TA25, TA26) 주변 표층 퇴적물의 열수변질 여부를 규명하고, 열수변질 특성을 확인하기 위하여 각 해저화산에서 채취된 29개의 표층 퇴적물에 대해 미량 원소와 희토류 원소 분석을 실시하였다. 분석 결과 TA12, TA19, TA22 해저화산에서는 열수에 의한 퇴적물의 변질작용이 없거나 매우 적은 것으로 나타났으며, TA25와 TA26 해저화산의 일부 지역은 현재에도 열수의 영향을 받고 있는 것으로 나타났다. 열수의 영향이 있는 해저화산 사이에도 부화된 미량 원소의 종류에 차이가 있는데, TA25 해저화산의 경우 주로 Ni, Cu, Sn, Zn, Pb, Cr, Cd, Sb, W, Ba, Ta, Rb, Sr, As가, TA26 해저화산에서는 주로 Cu, Sn, Zn, Pb, Cd, Sb, Ba, Rb, Sr이 부화되어 있다. 미량 원소의 부화가 확인된 지역은 희토류 원소의 부화도 관찰된다. 상부지각 희토류 원소 농도로 표준화된 희토류 원소의 분포형태는 가벼운 희토류 원소(LREE)가 매우 낮고 중간 희토류 원소(MREE)에서 무거운 희토류 원소(HREE)로 갈수록 증가하는 형태를 보이며, TA25와 TA26 해저화산의 일부 정점에서 Eu의 부화가 확인된다. 또한 TA26 해저화산의 일부 정점에서 Ce이 부화가 관찰되었는데, 이는 주변지역에서 채취된 열수 내 희토류 원소의 높은 Ce분포형태와 매우 유사하다. 또한 TA25와 TA26 해저화산은 부화된 원소의 특징이 다르게 나타나는데, TA25 해저화산에서는 Cu를 포함한 미량 원소가, TA26 해저화산에서는 Ce와 Eu를 포함한 희토류 원소가 우세하게 부화되어 있는 것으로 나타났다. 조사결과 나타난 각 해저화산 표층 퇴적물 내 부화된 미량 원소 및 희토류 원소의 종류와 농도는 차후 통가열도 지역의 열수광상 탐사시에 지역적인 열수변질의 지시자로써 유용하게 활용될 것으로 판단된다.

• 한방재활의학과학회지
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• 제19권2호
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• pp.227-239
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• 2009

Objectives : The purpose of this study is to investigate the relation of Ferguson's angle, Lumbar lordotic angle, Lumbar IVD angle in traffic accident patients. Methods : Total patients were classified into TA(traffic accident) inpatients and non-TA(lumbago) inpatients. We analyzed the characteristics of each group Ferguson's angle, Lumbar lordotic angle, L4-5 IVD angle, L5-S1 IVD angle on X-ray film. Results : 1. Ferguson's angle and Lumbar lordotic angle were smaller than normal range. Non-TA group's angles were smaller than TA group's angles. 2. L4-5 IVD angle of female showed smaller than that of male in TA groups. The older age was, the smaller L4-5 IVD angle was at non-TA groups. 3. L5-S1 IVD angle of female showed smaller than that of male in total groups. The older age was, the smaller L5-S1 IVD angle was at non-TA groups. 4. Ferguson's angle, Lumbar lordotic angle, Lumbar IVD angle were related with direct proportion in total groups. 5. Non-TA groups showed more effective VAS variation than TA groups. Conclusions : Lumbar angles were intimately related with each others. And lumbar angles have an effect on curative value.

• Journal of Periodontal and Implant Science
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• 제38권4호
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• pp.595-602
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• 2008

Purpose: Ti-6Al-4V alloy is widely used as an implant material because of its good biocompatibility and good mechanical property compared with commercial pure titanium. Otherwise, toxicity of aluminum and vanadium in vivo has been reported. Ti-8Ta-3Nb alloy is recently developed in the R&D Center for Ti and Special Alloys and it was reported that this alloy has high mechanical strength, no cytotoxicity and similar biocompatibility to commercial pure titanium, but many studies are needed for its clinical use. In these experiment, we carried out different surface treatment on each Ti-8Ta-3Nb alloy disks, then cultured cell on it and assessed biological response. Materials and Methods: cpTi, Ti-6Al-4V, Ti-8Ta-3Nb alloy disks were prepared and carried out sandblasting and acid etching (SLA) or alkali-heat treatment (AH) on the Ti-8Ta-3Nb alloy disks. We cultured primary rat calvarial cells on each surface and assessed early cell attachment and proliferation by scanning electron microscopy, cell proliferation, alkaline phosphatase activity. Result: The rates of cell proliferation on the cpTi, Ti-8Ta-3Nb AH disks were higher than others (p<0.05) and alkaline phosphatase activity was significantly enhanced on the Ti-STa-8Nb AH disks(p<0.05). Conclusion: Most favorable cell response was shown on the Ti-8Ta-3Nb AH surfaces. It is supposed that alkali-heat treatment of the Ti-8Ta-3Nb alloy could be induced earlier bone healing and osseointegration than smooth surface.

• 한국진공학회지
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• 제9권4호
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• pp.360-366
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• 2000

LSMCD (Liquid Source Misted Chemical Deposition)공정으로 Sr/Ta몰비 0.35~0.65 조성범위에서 150 nm 두께의 $Sr_xBi_{2.4}Ta_2O_9$ (SBT)박막을 제조하여, Sr/Ta몰비에 따른 결정상과 미세구조, 강유전 특성 및 누설전류 특성을 분석하였다. LSMCD 공정으로 제조한 SBT박막은 Sr/Ta 몰비 0.425의 조성에서 최적의 강유전 특성을 나타내어 $\pm$5 V의 구동전압 인가시 15.01 $\mu$C/$\textrm{cm}^2$의 잔류분극 $2P_{r}$과 41kV/cm의 항전계 $E_{c}$를 나타내었다. LSMCD공정으로 제조한 Sr/Ta 몰비 0.35~0.5 범위의 SBT 박막은 100 kV/cm의 전기장 하에서 $10^{-5}$A/$\textrm{cm}^2$ 미만의 낮은 누설전류 밀도를 나타내었으며, $\pm$5V의 구동전압 인가시 $10^{10}$회의 스위칭 후에도 잔류분극 감소가 1% 미만인 우수한 분극피로 특성을 나타내었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.283.2-283.2
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• 2013

The variation of chemical and interfacial state during the growth of Ta2O5 films on the Si substrate by atomic layer deposition (ALD) was investigated using in-situ synchrotron radiation photoemission spectroscopy. A newly synthesized liquid precursor Ta(NtBu)(dmamp)2Me was used as the metal precursor, with Ar as a purging gas and H2O as the oxidant source. The core-level spectra of Si 2p, Ta 4f, and O 1s revealed that Ta suboxide and Si dioxide were formed at the initial stages of Ta2O5 growth. However, the Ta suboxide states almost disappeared as the ALD cycles progressed. Consequently, the Ta5+ state, which corresponds with the stoichiometric Ta2O5, only appeared after 4.0 cycles. Additionally, tantalum silicate was not detected at the interfacial states between Ta2O5 and Si. The measured valence band offset value between Ta2O5 and the Si substrate was 3.08 eV after 2.5 cycles.

• 한국식품위생안전성학회지
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• 제15권4호
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• pp.297-303
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• 2000

우리나라 전통 장류인 간장, 된장, 고추장, 청국장의 위생화를 위한 방사선 조사기술의 이용 가능성을 검토할 목적으로 방사선 조사를 실시한 후 유전독성학적 안전성 실험의 일환으로 Ames test를 실시하였다. 감마선 조사 및 비조사된 간장, 된장, 고추장, 청국장 물추출 분획의 Salmonella typhimurium TA98, TA100, TA1535 및 TA1537에 대한 복귀변이 집락수를 조사한 결과, 대사활성계 도입 및 부재시 모두, 모든 시험균주에서 시험적용 농도인 10,000 $\mu\textrm{g}$/plate까지의 농도에서 복귀변이 집락수의 농도 의존적인 증가 혹은 감소를 보이지 않아 20 kGy의 고선량 감마선 조사된 간장, 된장, 고추장, 청국장은 돌연변이원성이 없는 것을 확인할 수 있었다.

• 대한간호학회지
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• 제27권3호
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• pp.520-530
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• 1997

Antineoplastic agents may exhibit effects not only in patients therapeutically exposed, but also in health workers who prepare and administer these drugs. This study was done to clarify whether nurses who handle anticancer drugs show signs of drug absorption. The experimental group was 14 nurses handling anticancer drugs at three medical wards of a hospital in J city ; the control group was 12 psychiatric nurses at the same hospital. The test materials were the nurses' 24hr urine specimens, which were concentrated by XAD-2 column chromatograpy. Tester strains were TA98(±S9mix), TA100(±S9 mix), TA1535(±S9 mix) and TA1537(±S9 mix) : the salmonella mammalian microsomal test (Ames test) was used for the urinary mutagenicity assay. The results are summarized as follow : 1. In qualitative analysis of the results, both experimental group and control group showed 15.4% urine toxicity. 2. The experimental group revealed significantly higher urinary mutagenicity both in the activation method test and non-activation method test of the tester strains TA98, TA100 and TA1535. In the case of TA1537, the two groups showed no difference in the non-activation method test, but the activation method revealed a difference. 3. In urinary mutagenicity of the experimental group by ward career, there was a significant difference between the group with more than 20 months experience and the group with less than 20 months on the tester strains TA98, TA100, and TA1537. No Significant difference was found between two groups by the tester strain TA1535.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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• pp.9-12
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• 2004

This paper investigated the stability of Ta-Mo alloy on thin gate dielectric. Ta-Mo alloy was deposited by using co-sputtering process after thermal growing of 3.4nm and 4.2nm silicon dioxide. When the sputtering power of Ta and Mo were 100W and 70W, respectively, the suitable work function for NMOS gate electrode, 4.2eV, could obtain. To prove interface thermal stability of thin film gate dielectric and Ta-Mo alloy, rapid thermal annealing was performed at $600^{\circ}C$ and $700^{\circ}C$ for 10sec in Ar ambient. The results of interface reaction were surveyed by change of silicon dioxide thickness and work function after annealing process. Also, the reliability of alloy gate and gate dielectric could be confirmed by quantity of leakage current. Ta-Mo alloy was showed low sheet resistance and thermal stability, namely, little change of gate dielectric and work function, after $700^{\circ}C$ annealing process.