• Title/Summary/Keyword: Synchrotron

Search Result 440, Processing Time 0.025 seconds

Synchrotron Radiation Induced Photochemical Reactions for Semiconductor Processes

  • Rhee, Shi-Woo
    • Journal of the Korean Vacuum Society
    • /
    • v.3 no.2
    • /
    • pp.147-157
    • /
    • 1994
  • Valence or core electron excitations induced by Synchrotron radiation (SR) irradiation and ensuing chemical reactions can be applied for semiconductor processes i, e, deposition etching and modifications of thin film materials. Unique selectivity can be achieved by this photochemical reactions in deposition and etching. Some materials can be ecvaporated by SR irradiation which can be utilized for low temperature surface cleaning of thin films. Also SR irradiation significantly lowers the reaction temperature and photon activated surface reactions can be utilized for direct writing or projection lithography of electronic materials. This technique is especially effective in making nanoscale feature size with abrupt and well defined interfaces for next generation electronic devices.

  • PDF

The Development of SOR Lithography Technology

  • Ishihara, Sunao
    • The Magazine of the IEIE
    • /
    • v.22 no.2
    • /
    • pp.37-50
    • /
    • 1995
  • This paper reviews NTT Laboratories' research and development of x-ray lithography during the last ten years since the application of synchrotron orbital radiation(SOR). First, the historical background of x-ray lithograhpy research, NTT's research programs on synchrotron x-ray lithography(SOR lithography), and the current status of NTT's SOR lithography system are overviewed. Then, the key elements of SOR lithography system are reviewed, including the electron storage ring, the x-ray stepper, and the x-ray mask. Finally the appilcation of SOR lithography technology to device fabrication is reported.

  • PDF

Characterization of uranium species in molten salt : An application of synchrotron-based XAFS spectroscopy

  • Cho, Young-Hwan;Choi, In-Kyu;Kim, Won-Ho
    • Proceedings of the Korean Nuclear Society Conference
    • /
    • 2002.10a
    • /
    • pp.319.2-319
    • /
    • 2002
  • Synchrotron-based X-ray absorption spectroscopy has been applied to determine the changes in bulk oxidation state of uranium oxides in molten salt. From an analysis of XANES data, one can determine the cahnges in bulk oxidation-state of U compounds in salts(LiCl/KCl). XAFS spectroscpy is a powerful tool for probing the changes in valence state and structure of uranium compounds in colten salt as well as in noncrystalline form and doped in other matrices.

  • PDF

VIBRATION CONTROL OF SYNCHROTRON LIGHT SOURCE BUILDING USING EXPERIMENTAL MODAL ANALYSIS (실험적 모우드 해석을 이용한 방사광 가속기 건물의 진동제어)

  • 박상규;이홍기;권형오
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
    • /
    • 1993.10a
    • /
    • pp.157-161
    • /
    • 1993
  • Optical devices and electronic equipments used in the laboratory of the synchrotron light source building of the accelerator have stringent vibration limits. In order to control the vibration of the building structure and HVAC systems which are main vibration sources are evaluated using experimental modal analysis. Double anti-vibration system is used for the HVAC system and results show that the double anti-vibration system reduces the vibrations of the building to acceptable levels.

  • PDF

Survey on ultrafast time resolved X-ray diffraction measurements of crystal structure (X선의 초고속 결정구조 측정법)

  • Koo, Y.D.;Kim, Y.C.;Oh, C.S.
    • Journal of Energy Engineering
    • /
    • v.23 no.3
    • /
    • pp.13-16
    • /
    • 2014
  • We have surveyed on significant progress in recent developments of accelerator-based pulsed X-ray sources has offered the opportunity for time-resolved studies on fast structure dynamics on the nanometer scale. The required and currently available techniques for time resolved X-ray diffraction measurements using the third-generation synchrotron radiation sources are summarized. Ultrafast X-ray experimental techniques are discussed for femtosecond studies at future synchrotron radiation sources.

ENERGY SPECTRUM OF NONTHERMAL ELECTRONS ACCELERATED AT A PLANE SHOCK

  • Kang, Hye-Sung
    • Journal of The Korean Astronomical Society
    • /
    • v.44 no.2
    • /
    • pp.49-58
    • /
    • 2011
  • We calculate the energy spectra of cosmic ray (CR) protons and electrons at a plane shock with quasi-parallel magnetic fields, using time-dependent, diffusive shock acceleration (DSA) simulations, including energy losses via synchrotron emission and Inverse Compton (IC) scattering. A thermal leakage injection model and a Bohm type diffusion coefficient are adopted. The electron spectrum at the shock becomes steady after the DSA energy gains balance the synchrotron/IC losses, and it cuts off at the equilibrium momentum $p_{eq}$. In the postshock region the cutoff momentum of the electron spectrum decreases with the distance from the shock due to the energy losses and the thickness of the spatial distribution of electrons scales as $p^{-1}$. Thus the slope of the downstream integrated spectrum steepens by one power of p for $p_{br}$ < p < $p_{eq}$, where the break momentum decreases with the shock age as $p_{br}\;{\infty}\;t^{-1}$. In a CR modified shock, both the proton and electron spectrum exhibit a concave curvature and deviate from the canonical test-particle power-law, and the upstream integrated electron spectrum could dominate over the downstream integrated spectrum near the cutoff momentum. Thus the spectral shape near the cutoff of X-ray synchrotron emission could reveal a signature of nonlinear DSA.

Real-time Observation and Analysis of Solidification Sequence of Fe-Rich Al-Si-Cu Casting Alloy by Synchrotron X-ray Radiography (가속 방사광을 활용한 Fe함유 Al-Si-Cu 주조용 합금의 응고과정 실시간 관찰 및 분석)

  • Kim, Bong-Hwan;Lee, Sang-Hwan;Yasuda, Hideyuki;Lee, Sang-Mok
    • Journal of Korea Foundry Society
    • /
    • v.30 no.3
    • /
    • pp.100-110
    • /
    • 2010
  • The solidification sequence and formation of intermetallic phase of Fe-rich Al-Si-Cu alloy were investigated by using real-time imaging of synchrotron X-ray radiation. Effects of cooling rate during uni-directional solidification on the resultant solidification behavior was also studied in a specially constructed vacuum chamber in the SPring-8 facility. The series of radiographic images were complementarily analyzed with conventional analysis of OM and SEM/EDX for phase identification. Detailed solidification sequence and formation mechanisms of various phases were discussed based on real-time image analysis. The growth rates of $\alpha$-AlFeMnSi and ${\beta}-Al_5FeSi$ were measured in order to understand the growth behavior of each phase. It is suggested that real-time imaging technique can be a powerful tool for the precise understanding of solidification behavior of various industrial materials.

Vibration Estimation of Synchrotron Light Source Building Using Experimental Modal Analysis (실험적 모드해석을 이용한 방사광 가속기 건물의 진동평가)

  • 박상규;이홍기;권형오
    • Journal of KSNVE
    • /
    • v.5 no.3
    • /
    • pp.413-421
    • /
    • 1995
  • Synchrotron light source building of the accelerator has stringent vibration limits since the performance of the optical devices and electronic equipments in the laboratory is strongly influenced by the vibrations of the building. In this study, vibrations of the synchrotron light source building are estimated using experimental modal analysis and force response simulation technique. Dynamic properties of the building are identified from the modal parameters and vibration responses are predicted from the force response simulation. A double anti vibration system is designed and applied to the HVAC equipments and it has been shown that the measured vibrations of the building with the double anti vibration system satisfy the vibration criteria.

  • PDF