• 한국진공학회지
• /
• 제5권4호
• /
• pp.327-332
• /
• 1996

Tungsten(W) polycide gate 구조에서 $WSi_x$의 두께가 증가하면 열처리 공정 후 Gate oxide의 두께가 증가하며, 전기적 신뢰도가 열화 되는 현상이 발생한다. 이러한 특성 열화를 일으키는 지배적인 요인은 $WSi_x$ 증착 공정 중 유입되어 후속 열 공정에 의하여 gate oxide로 환산되는 fluorine인 것으로 밝혀졌다. 이러한 현상을 규명하기 위하여 fluorine ion implantation된 poly Si과의 특성을 비교하였으며, SIMS 및 단면 TEM을 이용한 미세 구조 연구를 실시하였다. 그러나 $WSi_x$의 두께가 600$\AA$ 이상부터는이러한 특성 열화가 포화되는 현상이 관찰되었다. 600$\AA$ 이상의 $WSi_x$ 두께에서는 미세 구조가 표면이 거칠고, porous한 phase로 구성된 상부 구조와 비교적 dense하고, 매끈한 계면 상태를 갖는 하부 구조로 이루어졌으며, porous한 표면 부위는 후속 열공정 중 oxygen-rich한 phase로 변하여 fluorine을 포획하여 oxide로의 확산을 억제하여 특성 열화가 포화되는 것으로 해석되었다.

• 한국표면공학회지
• /
• 제55권6호
• /
• pp.368-375
• /
• 2022

YSZ (Yttria Stabilized Zirconia) is used as a thermal barrier coating material for gas turbines due to its low thermal conductivity and high fracture toughness. However, the operating temperature of the gas turbine is rising according to the market demand, and the problem that the coating layer of YSZ is peeled off due to the volume change due to the phase transformation at a high temperature of 1400℃ or higher is emerging. To solve this problem, various studies have been carried out to have phase stability, low thermal conductivity, and high fracture toughness in a high temperature environment of 1400℃ or higher by doping trivalent and tetravalent oxides to YSZ. In this study, the monoclinic phase formation behavior and crystallinity were comparatively analyzed according to the total doping amount of oxides by controlling the doping amounts of Sc₂O₃ and Gd₂O₃, which are trivalent oxides, and TiO₂, which are tetravalent oxides, in YSZ. Through comparative analysis of monoclinic phase formation and crystallinity, the thermal conductivity of the thermal barrier coating layer according to the amount of doping was predicted.

• The Korean Journal of Ceramics
• /
• 제6권1호
• /
• pp.68-73
• /
• 2000

The effects of oxygen annealing on the carbon content in MgO thin films were investigated, MgO thin films were deposited on Si(100) substrate at different temperatures of 400 to $700^{\circ}C$ and different deposition rates of 3.4 to 11.6$\AA$/min. Using rf magnetron sputtering method. Carbon content change on the surface of MgO thin films with the oxygen annealing at different temperatures was investigated using various method. The carbon content decreased as the annealing temperature increased. $Pb(Zr_{0.53}Ti_{0.47})O_3$(PZT) thin films were deposited on the MgO/Si(100) substrates. The effects of carbon content on the phase formation and the electrical properties of PZT thin films were also investigated.

• Structural Engineering and Mechanics
• /
• 제77권3호
• /
• pp.315-327
• /
• 2021

Here, in this research we have studied a two dimensional problem in a homogeneous orthotropic magneto-thermoelastic medium with higher order dual-phase-lag heat transfer with combined effects of rotation and hall current in generalized thermoelasticity due to time harmonic sources. As an application the bounding surface is subjected to uniformly distributed and concentrated loads (mechanical and thermal source). Fourier transform technique is used to solve the problem. The expressions for displacement components, stress components and temperature change are derived in frequency domain. Numerical inversion technique has been used to obtain the results in physical domain. The effect of frequency has been depicted with the help of graphs.

• Korean Chemical Engineering Research
• /
• 제49권2호
• /
• pp.200-205
• /
• 2011

직경 1.0 m인 파일럿 규모 슬러리 기포탑에서 기포체류량의 축방향, 반경방향분포를 고찰하였다. 기체의 유속, 연속 액상의 표면장력 그리고 슬러리상에 포함된 고체입자의 분율이 기포탑 내부 기포의 축방향 및 반경방향 분포에 미치는 영향을 검토하였다. 본 연구의 실험조건 모두에서 체류량은 기포탑의 중심으로부터 반경방향 무차원 거리가 증가함에 따라 감소하였으며, 기포탑의 분산판으로부터 축방향의 무차원의 거리가 증가함에 따라 증가하였다. 기포체류량의 반경방향 불균일도는 기체의 유속이 증가함에 따라 연속 액상의 표면장력이 감소함에 따라 증가하였으나 슬러리상에 포함된 고체입자 분율에는 크게 영향을 받지 않았다. 본 연구의 범위에서 축방향과 반경방향 기포체류량의 분포는 각각의 실험변수의 상관식으로 나타낼 수 있었다.

• 한국전자파학회논문지
• /
• 제24권4호
• /
• pp.459-465
• /
• 2013

본 논문에서는 차분 간섭 기법(differential interferometry)을 이용하여 지표면의 높이 변화를 탐지하고, 이를 이용하여 지표면 수분함유량의 변화를 알아낸다. 본 연구에서는 COSMO-SkyMed SAR 영상을 이용하여 DInSAR(DiFferential Interferometric SAR) 기법을 확인한다. 침투 깊이는 지표면 수분함유량에 따라 달라지며, 그에 따라 수신하는 신호의 위상이 변하게 된다. 지표면의 높이와 그 변위는 두 수신 신호의 위상차를 이용하는 레이더 간섭 기법(radar inteferometry)을 통하여 탐지할 수 있다. 변위 변화를 분석하기 위해 동일 지역의 영상 3장 중 한 장을 기준 영상(reference image)으로 사용한다. 동일 지역의 기준 영상과 나머지 두 영상은 각각 차분 간섭 기법으로 처리한다. 이 차분 간섭 기법을 검증하기 위해 실제 영상 획득 지역의 수분함유량을 측정하였다. 측정한 수분함유량을 이용하여 지표면의 침투 깊이를 계산하고, 차분 간섭 기법을 통하여 얻은 지표면 변위 정보와 비교 분석한다.

• 한국표면공학회지
• /
• 제27권2호
• /
• pp.65-73
• /
• 1994

Effects of deposition parameter on the ionic conductivity and structural change of the Lithium borosili-cate solid electrolyte films, prepared by rf sputtering using 7$LI_2O-3B_2O_3-1SiO_2$ single phase target and also a mosaic target enriched with $LI_2O$, were analyzed by measuring AC impedance and IR absorption spectra for the films. Thed solid electrolyte film deposited from the single phase target exhibited very low ionic conductivi-ty of $10^{-10}{\Omega}^{-1}cm{-1}$ at room temperature, a result of low $Li^+$ ion content(7.52 at%) in the film. The $Li^+$ con-ductivity for the films deposited from the mosaic target, however, significantly increased to $10^{-7}{\Omega}^{-1}cm{-1}$ due to both an increased $Li^+$content (14.75 at %) and a structural change of the films. The increased ionic conduc-tivity of the film appears to be associated with an easiness of ionic mobility by structural change of glassy film from a some close packed network structure to a open one. These structural changes of film were found to be closely related to the increase in the peak intensity at~$960cm^{-1}$ of IR absorption spectra for the glassy films. With increasing either argon pressure from 3 to 21 mtorr or rf power from 2 to 3 W/$cm^2$, the $Li^+$ conduc-tivity for the films significantly increased to an order of $10^{-6}{\Omega}^{-1}cm{-1}$ due to an increase in openness of film structure, as confirmed by both an increase in the IR absorption peak intensity at ~$960cm^{-1}$ and a resultant reduction of activation energy for mobility of $Li^+$ ion.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
• /
• pp.126.1-126.1
• /
• 2015

A quantitative relationship between Leidenfrost point and surface characteristics such as surface material and roughness is investigated. Based on the relationship, we have fabricated the surfaces with their Leidenfrost points (LFP) tuned by controlling surface coating and structures. As discovered by Leidenfrost, liquids placed on a hot plate levitate on the gas phase-air gap formed by the vaporization of liquids. This phenomenon is called 'Leidenfrost effect'. A change of LFP has attracted many researchers for several years but the ability to tune LFP is still a remaining issue. Many of previous work has progressed for various conditions so the systematic approach and analysis are needed to clearly correlate the LFP and the surface conditions. In this report, we investigate a relation of surface energy and LFP using various coating materials such as Octadecyltrichlorosilane (OTS) and 1H, 1H, 2H, 2H-Perfluorooctyltrichlorosilane (FOTS). Also, we analyze how surface roughness affects LFP via surface micro structuring with ICP-RIE fabrication process. The improved understanding can have potential applications such as the control of liquid droplet behavior at elevated temperatures for efficient cooling system.

• Carbon letters
• /
• 제3권4호
• /
• pp.219-225
• /
• 2002

The two-step surface modifications of activated carbon was carried out to improve the adsorption capacity of toxic heavy metal ions in liquid phase. Physical and chemical properties of the as-received activated carbon (AC) and two kinds of surface-modified activated carbons ($1^{st}AC$ and $2^{nd}AC$) were evaluated through the BET analysis, surface acidity, and oxides measurements. Specific surface area and pore volume did not significantly change, but surface oxide-group remarkably increased by the surface modification. Equilibrium and batch adsorptions of the various metals, such as Pb, Cd, and Cr, using AC, $1^{st}AC$, and $2^{nd}AC$ were performed at initial pH 5. The adsorption capacity and rate of $2^{nd}AC$ were higher than those of AC and $1^{st}AC$. The carboxylic/sodium carboxylate complex groups were developed from the two-step surface modification of activated carbon, which strongly affected the adsorption of metal ions.

• 한국수소및신에너지학회논문집
• /
• 제1권1호
• /
• pp.1-8
• /
• 1989

The hydriding kinetic mechanism and the change of the hydriding reaction rate of $MmNi_{4.5}Al_{0.5}$ during the thermally induced hydrogen absorption-desorption cycling are investigated. Comparison of the reaction rate data which are obtained by the pressure sweep method with the theoretical rate equations suggests that the hydriding rate controlling step has changed from the dissociative chemisorption of hydrogen molecules at the surface to the hydrogen diffusion through the hydride phase with the increase of the hydriding fraction. These hydriding kinetic mechanism is not changed during the cycling. However, the intrinsic hydriding reaction rate of $MmNi_{4.5}Al_{0.5}$ after 5500 cycles increases significantly comparing with the activated one. It is suggested that the change of the hydriding kinetic behavior due to intrinsic degradation of $MmNi_{4.5}Al_{0.5}$ can be interpreted as follows ; the formation of nickel cluster at the surface of the sample and the host metal atom exchange in bulk by thermal cycling.