• 제목/요약/키워드: Surface migration

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RIE induced damage recovery on trench surface (트렌치 표면에서의 RIE 식각 손상 회복)

  • 이주욱;김상기;배윤규;구진근
    • Journal of the Korean Vacuum Society
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    • v.13 no.3
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    • pp.120-126
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    • 2004
  • A damage-reduced trench was investigated in view of the defect distribution along trench sidewall and bottom using high resolution transmission electron microscopy, which was formed by HBr plasma and additive gases in magnetically enhanced reactive ion etching system. Adding $O_2$ and other additive gases into HBr plasma makes it possible to eliminate sidewall undercut and lower surface roughness by forming the passivation layer of lateral etching. To reduce the RIE induced damage and obtain the fine shape trench corner rounding, we investigated the hydrogen annealing effect after trench formation. Silicon atomic migration on trench surfaces using high temperature hydrogen annealing was observed with atomic scale view. Migrated atoms on crystal surfaces formed specific crystal planes such as (111), (113) low index planes, instead of fully rounded comers to reduce the overall surface energy. We could observe the buildup of migrated atoms against the oxide mask, which originated from the surface migration of silicon atoms. Using this hydrogen annealing, more uniform thermal oxide could be grown on trench surfaces, suitable for the improvement of oxide breakdown.

A Study on the Film-Formation Mechanism by Ionized Cluster Beam Deposition (이온화 클러스터 빔 증착의 박막 형성 기구에 관한 연구)

  • Shin, C.B.;Lee, K.H.;Hwang, G.S.;Moon, S.H.;Cho, W.I.;Yun, K.S.
    • Applied Chemistry for Engineering
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    • v.7 no.3
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    • pp.464-472
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    • 1996
  • The mechanism of thin-film formation by Ionized Cluster Beam Deposition(ICBD) was investigated. A simulation program based on the Monte-Carlo method was developed in order to investigate the effects of the acceleration voltage, substrate temperature, activation energy for the surface migration, and critical nuclei size on grain size and surface roughness. Studies of the effect of kinetic energy of clusters on the film formation processes revealed that high acceleration voltage enhanced the surface-migration of adatoms and made it easier for an epitaxial film to be formed. The relaxation time of kinetic energy of adatoms increased with the substrate temperature, which in turn increased the grain size of the crystalline film. This effect was more clearly distinguished when the critical nuclei size was large. The surface-migration activation energy was found to affect the interaction between the adatoms and the substrate and thus the relaxation time of kinetic energy. Investigations of the surface roughness revealed that the acceleration voltage, the substrate temperature, and the surface-migration activation energy exerted a collective effect on the morphology of the film surface.

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Numerical analysis of melt migration and solidification behavior in LBR severe accident with MPS method

  • Wang, Jinshun;Cai, Qinghang;Chen, Ronghua;Xiao, Xinkun;Li, Yonglin;Tian, Wenxi;Qiu, Suizheng;Su, G.H.
    • Nuclear Engineering and Technology
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    • v.54 no.1
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    • pp.162-176
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    • 2022
  • In Lead-based reactor (LBR) severe accident, the meltdown and migration inside the reactor core will lead to fuel fragment concentration, which may further cause re-criticality and even core disintegration. Accurately predicting the migration and solidification behavior of melt in LBR severe accidents is of prime importance for safety analysis of LBR. In this study, the Moving Particle Semi-implicit (MPS) method is validated and used to simulate the migration and solidification behavior. Two main surface tension models are validated and compared. Meanwhile, the MPS method is validated by the L-plate solidification test. Based on the improved MPS method, the migration and solidification behavior of melt in LBR severe accident was studied furthermore. In the Pb-Bi coolant, the melt flows upward due to density difference. The migration and solidification behavior are greatly affected by the surface tension and viscous resistance varying with enthalpy. The whole movement process can be divided into three stages depending on the change in velocity. The heat transfer of core melt is determined jointly by two heat transfer modes: flow heat transfer and solid conductivity. Generally, the research results indicate that the MPS method has unique advantage in studying the migration and solidification behavior in LBR severe accident.

A pre-stack migration method for damage identification in composite structures

  • Zhou, L.;Yuan, F.G.;Meng, W.J.
    • Smart Structures and Systems
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    • v.3 no.4
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    • pp.439-454
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    • 2007
  • In this paper a damage imaging technique using pre-stack migration is developed using Lamb (guided) wave propagation in composite structures for imaging multi damages by both numerical simulations and experimental studies. In particular, the paper focuses on the experimental study using a finite number of sensors for future practical applications. A composite laminate with a surface-mounted linear piezoelectric ceramic (PZT) disk array is illustrated as an example. Two types of damages, one straight-crack damage and two simulated circular-shaped delamination damage, have been studied. First, Mindlin plate theory is used to model Lamb waves propagating in laminates. The group velocities of flexural waves in the composite laminate are also derived from dispersion relations and validated by experiments. Then the pre-stack migration technique is performed by using a two-dimensional explicit finite difference algorithm to back-propagate the scattered energy to the damages and damages are imaged together with the excitation-time imaging conditions. Stacking these images together deduces the resulting image of damages. Both simulations and experimental results show that the pre-stack migration method is a promising method for damage identification in composite structures.

Tip Clearance Effects on Inlet Hot Streaks Migration Characteristics in Low Pressure Stage of a Vaneless Counter-Rotating Turbine

  • Zhao, Qingjun;Wang, Huishe;Zhao, Xiaolu;Xu, Jianzhong
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2008.03a
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    • pp.25-34
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    • 2008
  • In this paper, three-dimensional multiblade row unsteady Navier-Stokes simulations at a hot streak temperature ratio of 2.0 have been performed to reveal the effects of rotor tip clearance on the inlet hot streak migration characteristics in low pressure stage of a Vaneless Counter-Rotating Turbine. The hot streak is circular in shape with a diameter equal to 25% of the high pressure turbine stator span. The hot streak center is located at 50% of the span and the leading edge of the high pressure turbine stator. The tip clearance size studied in this paper is 2.0mm(2.59% high pressure turbine rotor height, and 2.09% low pressure turbine rotor height). The numerical results show that the hot streak is not mixed out by the time it reaches the exit of high pressure turbine rotor. The separation of colder and hotter fluid is observed at the inlet of low pressure turbine rotor. Most of hotter fluid migrates towards the rotor pressure surface, and only little hotter fluid migrates to the rotor suction surface when it convects into the low pressure turbine rotor. And the hotter fluid migrated to the tip region of the high pressure turbine rotor impinges on the leading edge of the low pressure turbine rotor after it goes through the high pressure turbine rotor. The migration of the hotter fluid directly results in very high heat load at the leading edge of the low pressure turbine rotor. The migration characteristics of the hot streak in the low pressure turbine rotor are dominated by the combined effects of secondary flow and leakage flow at the tip clearance. The leakage flow trends to drive the hotter fluid towards the blade tip on the pressure surface and to the hub on the suction surface, even partial hotter fluid near the pressure surface is also driven to the rotor suction surface through the tip clearance. Compared with the case without rotor tip clearance, the heat load of the low pressure turbine rotor is intensified due to the effects of the leakage flow. And the numerical results also indicate that the leakage flow effect trends to increase the low pressure turbine rotor outlet temperature at the tip region.

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Influence of Wax Molecular Weights on Wax Migration and Evaporation of Rubber Vulcanizates at Room Temperature (상온 노화 후 고무가황물에서 왁스의 이동과 증발에 미치는 왁스의 분자량 분포)

  • Im, Song-Hee;Choi, Sung-Seen
    • Elastomers and Composites
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    • v.44 no.4
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    • pp.397-400
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    • 2009
  • Ozone caused the crack on the surface of a rubber article by oxidation of double bond at room temperature. Wax migrates to the surface of a rubber article and makes a physical barrier to prevent process of ozonation. We investigated change of molecular weight distribution of waxes in unfilled NR, SBR, and BR vulcanizates before and after aging at room temperature for 6 months. Migration and evaporation behaviors of wax in a rubber article at ambient conditions help understand a role of wax as an antidegradant and appearance contamination of a rubber article. The relative intensity distribution of n-alkanes of the NR specimen after the aging was shifted to higher molecular weight compared with the relative intensity distribution before the aging, while those of the SBR specimen before and after the aging did not show a big difference.

Antistatic Behavior of UV-curable Multilayer Coating Containing Organic and Inorganic Conducting Materials (유·무기 전도성 물질을 함유한 UV 경화형 다층 코팅의 대전방지 특성)

  • Kim, Hwa-Suk;Kim, Hyun-Kyoung;Kim, Yang-Bae;Hong, Jin-Who
    • Journal of Adhesion and Interface
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    • v.3 no.3
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    • pp.22-29
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    • 2002
  • UV curable coating system described here consists of double layers, namely under layer and top laser coatings. The former consists of organic-inorganic conductive materials and the latter consists of multifunctional acrylates. Transparent double layer coatings were prepared on the transparent substrates i.e. PMMA, PC, PET etc. by the wet and wet coating procedure. Their surface resistances and film properties were measured as a function of the top layer thickness and relative humidity. As the thickness of the top layer was less than $10{\mu}m$, the surface resistance in the range of $10^8{\sim}10^{10}{\Omega}/cm^2$ was obtained. The surface properties of the two-layer coating were remarkably improved compared with the single layer coating. The effects of migration of conducting materials on the film properties of multilayer coating were investigated by using contact angle and Fourier transform infrared/attenuated total reflection(FT-IR/ATR). It was found that the migration of dopant(dodecyl benzenesulfonic acid, DBSA) molecules were occurred from film-substrate interface to film-air interface in the organic conductive coating system but not in the inorganic one.

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Electronic Structure, Bonding and Kithium Migration Effects of the Mixed Conductor $\beta-LiAl$ (혼합 전도체 $\beta-LiAl$의 전자구조, 결합과 Li 이온 이동에 따른 영향)

  • Jang, Gun-Eik;I.M Curelaru
    • Journal of the Korean Vacuum Society
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    • v.5 no.3
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    • pp.194-198
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    • 1996
  • Detailed expermental studies of theelectronic structure of the valence and conduction bands of the mixed conductor $\beta$-LiAlindicate that a quasi-gap opens at the Fermi level, and the conduction states are highlylocalized, as opposed to the theoretical band structure calculations that predict predominant metallic behavior. Evidence for complex lithium migration effects involving the surface of Lial , induced by particle (electron or ion) bombardment and mechanical treatment , has been obtained as a byproduct of these experiments.

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ECM and CAF Failure on PCBs (PCB의 ECM과 CAF 불량)

  • Lee, Jin-Ho
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2014.11a
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    • pp.61-74
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    • 2014
  • 전자제품에서 반도체 부품의 협피치화가 진행됨에 따라 PCB의 회로와 회로 사이의 간격 혹은 Hole과 Hole간의 간격이 줄어듬에 따라 ECM(Electrochemical Migration)과 CAF(Conductive Anodic Filament)의 불량이 증가하게 되었다. 특히 열악한 환경에서 사용되는 Power Supplier나 사용전압이 높아지는 전기 및 수소연료 자동차 분야에선 이들 불량방지에 노력을 기울여야겠다.

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