• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.434-435
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• 2012

Plasma enhanced chemical vapor deposition (PECVD) silicon dioxide thin films have many applications in semiconductor manufacturing such as inter-level dielectric and gate dielectric metal oxide semiconductor field effect transistors (MOSFETs). Fundamental chemical reaction for the formation of SiO2 includes SiH4 and O2, but mixture of SiH4 and N2O is preferable because of lower hydrogen concentration in the deposited film [1]. It is also known that binding energy of N-N is higher than that of N-O, so the particle generation by molecular reaction can be reduced by reducing reactive nitrogen during the deposition process. However, nitrous oxide (N2O) gives rise to nitric oxide (NO) on reaction with oxygen atoms, which in turn reacts with ozone. NO became a greenhouse gas which is naturally occurred regulating of stratospheric ozone. In fact, it takes global warming effect about 300 times higher than carbon dioxide (CO2). Industries regard that N2O is inevitable for their device fabrication; however, it is worthwhile to develop a marginable nitrous oxide free process for university lab classes considering educational and environmental purpose. In this paper, we developed environmental friendly and material cost efficient SiO2 deposition process by substituting N2O with O2 targeting university hands-on laboratory course. Experiment was performed by two level statistical design of experiment (DOE) with three process parameters including RF power, susceptor temperature, and oxygen gas flow. Responses of interests to optimize the process were deposition rate, film uniformity, surface roughness, and electrical dielectric property. We observed some power like particle formation on wafer in some experiment, and we postulate that the thermal and electrical energy to dissociate gas molecule was relatively lower than other runs. However, we were able to find a marginable process region with less than 3% uniformity requirement in our process optimization goal. Surface roughness measured by atomic force microscopy (AFM) presented some evidence of the agglomeration of silane related particles, and the result was still satisfactory for the purpose of this research. This newly developed SiO2 deposition process is currently under verification with repeated experimental run on 4 inches wafer, and it will be adopted to Semiconductor Material and Process course offered in the Department of Electronic Engineering at Myongji University from spring semester in 2012.

• Clean Technology
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• v.27 no.3
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• pp.261-268
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• 2021

Equilibrium, kinetics, and thermodynamics of adsorption of acid black 1 (AB1) by coal-based granular activated carbon (CGAC) were investigated with the adsorption variables of initial concentration of dye, contact time, temperature, and pH. The adsorption reaction of AB1 by activated carbon was caused by electrostatic attraction between the surface (H⁺) of activated carbon and the sulfite ions (SO₃^-) and nitrite ions (NO₂^-) possessed by AB1, and the degree of reaction was highest at pH 3 (97.7%). The isothermal data of AB1 were best fitted with Freundlich isotherm model. From the calculated separation factor (1/n) of Freundlich, it was confirmed that adsorption of AB1 by activated carbon could be very effective. The heat of adsorption in the Temkin model suggested a physical adsorption process (< 20 J mol^-1). The kinetic experiment favored the pseudo second order model, and the equilibrium adsorption amount estimated from the model agreed to that given by the experiments (error < 9.73% ). Intraparticle diffusion was a rate controlling step in this adsorption process. From the activation energy and enthalpy change, it was confirmed that the adsorption reaction is an endothermic reaction proceeding with physical adsorption. The entropy change was positive because of an active reaction at the solid-liquid interface during adsorption of AB1 on the activated carbon surface. The free energy change indicated that the spontaneity of the adsorption reaction increased as the temperature increased.

• Applied Chemistry for Engineering
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• v.32 no.3
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• pp.283-289
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• 2021

Adsorption characteristics of carbol fuchsin (CF) dye by coal-based activated carbon (CAC) were investigated using pH, initial concentration, temperature and contact time as adsorption variables. CF dissociates in water to have a cation, NH₂⁺, which is bonded to the negatively charged surface of the activated carbon in the basic region by electrostatic attraction. Under the optimum condition of pH 11, 96.6% of the initial concentration was adsorbed. Isothermal adsorption behavior was analyzed using Langmuir, Freundlich, Temkin and Dubinin-Radushkevich models. Langmuir's equation was the best fit for the experimental results. Therefore, the adsorption mechanism was expected to be adsorbed as a monolayer on the surface of activated carbon with a uniform energy distribution. From the evaluated Langmuir's dimensionless separation coefficients (R_L = 0.503~0.672), it was found that CF can be effectively treated by activated carbon. The adsorption energies determined by Temkin and Dubinin-Radushkevich models were E = 15.31~7.12 J/mol and B = 0.223~0.365 kJ/mol, respectively. Therefore, the adsorption process was physical (E < 20 J/mol, B < 8 kJ/mol). The experimental result of adsorption kinetics fit better the pseudo second order model. In the adsorption reaction of CF dye to CAC, the negative free energy change increased as the temperature increased. It was found that the spontaneity also increased with increasing temperature. The positive enthalpy change (40.09 kJ/mol) indicated an endothermic reaction.

• Korean Journal of Remote Sensing
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• v.37 no.5_1
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• pp.903-916
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• 2021

An area's topography refers to the shape of the earth's surface, described by its elevation, slope, and aspect, among other features. The topographical conditions determine energy flowsthat move water and energy from higher to lower elevations, such as how much solar energy will be received and how much wind or rain will affect it. Another common factor, the topographic wetness index (TWI), is a calculation in digital elevation models of the tendency to accumulate water per slope and unit area, and is one of the most widely referenced hydrologic topographic factors, which helps explain the location of forest vegetation. Analyses of topographical factors can be calculated using a geographic information system (GIS) program based on digital elevation model (DEM) data. Recently, a large number of free open source software (FOSS) GIS programs are available and developed for researchers, industries, and governments. FOSS GIS programs provide opportunitiesfor flexible algorithms customized forspecific user needs. The majority of biodiversity in island areas exists at about 20% higher elevations than in land ecosystems, playing an important role in ecological processes and therefore of high ecological value. However, island areas are vulnerable to disturbances and damage, such as through climate change, environmental pollution, development, and human intervention, and lacks systematic investigation due to geographical limitations (e.g. remoteness; difficulty to access). More than 4,000 of Korea's islands are within a few hours of its coast, and 88% are uninhabited, with 52% of them forested. The forest ecosystems of islands have fewer encounters with human interaction than on land, and therefore most of the topographical conditions are formed naturally and affected more directly by weather conditions or the environment. Therefore, the analysis of forest topography in island areas can be done more precisely than on its land counterparts, and therefore has become a major focus of attention in Korea. This study is focused on calculating the performance of different topographical factors using FOSS GIS programs. The test area is the island forests in Korea's south and the DEM of the target area was processed with GRASS GIS and SAGA GIS. The final slopes and TWI maps were produced as comparisons of the differences between topographic factor calculations of each respective FOSS GIS program. Finally, the merits of each FOSS GIS program used to calculate the topographic factors is discussed.

• Applied Chemistry for Engineering
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• v.25 no.5
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• pp.520-525
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• 2014

In this paper, the effect of silane-treated silicas and epoxidized soybean oil (ESBO) addition on adhesion properties of silicas-filled epoxy adhesives was examined. The silicas were treated by ${\gamma}$-methacryloxy propyltrimethoxy silane (MPS), ${\gamma}$-glycidoxy propyl trimethoxy silane (GPS), and ${\gamma}$-mercapto propyl trimethoxy silane (MCPS). Surface and structural properties of the adhesives were determined by using scanning electron microscope (SEM) and Fourier transform infrared spectroscopy (FT-IR). The t-peel strength of the adhesives was estimated using the universal testing machine (UTM). And, the equilibrium spreading pressure, surface free energy, and specific surface area were investigated by BET methods with $N_2$/77 K adsorption. As a result, the peel strength of the adhesives was increased in the presence of silane-treated silicas in the adhesives compared to that of untreated silicas. This result indicated that the silane coupling agent played an important role in improving the dispersion of silicas in epoxy adhesives. And, the adhesives treated by MCPS were superior to the others in adhesion.

• Journal of Welding and Joining
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• v.30 no.5
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• pp.64-69
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• 2012

Sn-Bi eutectic alloy has been widely used as one of the key solder materials for step soldering at low temperature. The Sn-58Bi solder paste containing chloride flux was adopted to compare with that using the chloride-free flux. The paste was applied on the electroless nickel-immersion gold (ENIG) surface finish by stencil printing, and the reflow process was then performed at $170^{\circ}C$ for 10 min. After reflow, the solder joints were aged at $125^{\circ}C$ for 100, 200, 300, 500 and 1000 h in an oven. The interfacial microstructures were obtained by using scanning electron microscopy (SEM), and the composition of intermetallic compounds (IMCs) was analyzed using energy dispersive spectrometer (EDS). Two different IMC layers, consisting of $Ni_3Sn_4$ and relatively very thin Sn-Bi-Ni-Au were formed at the solder/surface finish interface, and their thickness increased with increasing aging time. The wettability of solder joints was investigated by wetting balance test. The mechanical property of each aging solder joint was evaluated by the ball shear test in accordance with JEDEC standard (JESD22-B117A). The results show that the highest shear force was measured when the aging time was 100 h, and the fracture mode changed from ductile fracture to brittle fracture with increasing aging time. On the other hand, the chloride flux in the solder paste did not affect the shear force and fracture mode of the solder joints.

• Polymer(Korea)
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• v.33 no.4
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• pp.284-289
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• 2009

The morphology and mechanical properties of epoxy/polyamide/MPD reactive blends with various amount of polyamide were investigated. The cure behaviors, mechanical strengths, and morphological changes of the epoxy blend systems were analyzed by using DSC, UTM, and SEM, respectively. The amount of high soluble polyamide in epoxy ranged from 0 to 30 phr, and the cure reaction occurred at $170^{\circ}$ for 30 min. The start and maximum exothermic temperature in heat flows during cure reactions appeared at almost same temperature, indicating that soluble polyamide could rarely hinder the cure reactions. From the SEM images, it was found that the size of separated-phase was very fine about 100-300 nm, and at 20 phr of polyamide the boundary of separated-phase was unclear and the phase revealed co-continuous. By AP plasma treatment of specimen surface, the adhesion strength was increased by 20% due to enhanced surface free energy. By blending 20 phr of polyamide with epoxy, the adhesion strength was increased by 50% due to co-continuous phase in morphology. By considering the surface treatment of specimen and morphological tuning of the blends, it can be expected that the improvement in toughness and excellent adhesion strength can be achieved in structural adhesive systems.

• Korean Chemical Engineering Research
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• v.47 no.6
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• pp.762-767
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• 2009

In this study, the feasibility of using vegetable oil extracted from tropical crop seed as a biodiesel feedstock was investigated by producing biodiesel and analysing the quality parameters as a transport fuel. In order to produce biodiesel efficiently, two step reaction process(pre-treatment and transesterificaion) was required because the tropical crop oil have a high content of free fatty acids. To determine the suitable acid catalyst for the pre-esterification, three kinds of acid catalysts were tested and sulfuric acid was identified as the best catalyst. After constructing the experimental matrix based on RSM and analysing the statistical data, the optimal pre-treatment conditions were determined to be 26.7% of methanol and 0.982% of sulfuric acid. Trans-esterification experiments of the pre-esterified oil based on RSM were carried out, then discovered 1.24% of KOH catalyst and 22.76% of methanol as the optimal trans-esterification conditions. However, the quantity of KOH was higher than the previously established KOH concentration of our team. So, we carried out supplemental experiment to determine the quantity of catalyst and methanol. As a result, the optimal transesterification conditions were determined to be 0.8% of KOH and 16.13% of methanol. After trans-esterification of tropical crop oil, the produced biodiesel could meet the major quality standard specifications; 100.8% of FAME, 0.45 mgKOH/g of acid value, 0.00% of water, 0.04% of total glycerol, $4.041mm^2/s$ of kinematic viscosity(at $40^{\circ}C$).

• Korean Chemical Engineering Research
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• v.59 no.4
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• pp.565-573
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• 2021

Isotherms, kinetics and thermodynamic properties for adsorption of Brilliant Green(BG), Quinoline Yellow(QY) dyes by activated carbon were carried out using variables such as dose of adsorbent, pH, initial concentration, contact time, temperature and competitive. BG showed the highest adsorption rate of 92.4% at pH 11, and QY was adsorbed at 90.9% at pH 3. BG was in good agreement with the Freundlich isothermal model, and QY was well matched with Langmuir model. The separation coefficients of isotherm model indicated that these dyes could be effectively treated by activated carbon. Estimated adsorption energy by Temkin isotherm model indicated that the adsorption of BG and QY by activated carbon is a physical adsorption. The kinetic experimental results showed that the pseudo second order model had a better fit than the pseudo first order model with a smaller in the equilibrium adsorption amount. It was confirmed that surface diffusion was a rate controlling step by the intraparticle diffusion model. The activation energy and enthalpy change of the adsorption process indicated that the adsorption process was a relatively easy endothermic reaction. The entropy change indicated that the disorder of the adsorption system increased as the adsorption of BG and QY dyes to activated carbon proceeded. Gibbs free energy was found that the adsorption reaction became more spontaneous with increasing temperature. As a result of competitive adsorption of the mixed solution, it was found that QY was disturbed by BG and the adsorption reduced.

• Smart Structures and Systems
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• v.12 no.1
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• pp.55-71
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• 2013

Structural health monitoring (SHM) is vital for detecting the onset of damage and for preventing catastrophic failure of civil infrastructure systems. In particular, piezoelectric transducers have the ability to excite and actively interrogate structures (e.g., using surface waves) while measuring their response for sensing and damage detection. In fact, piezoelectric transducers such as lead zirconate titanate (PZT) and poly(vinylidene fluoride) (PVDF) have been used for various laboratory/field tests and possess significant advantages as compared to visual inspection and vibration-based methods, to name a few. However, PZTs are inherently brittle, and PVDF films do not possess high piezoelectricity, thereby limiting each of these devices to certain specific applications. The objective of this study is to design, characterize, and validate piezoelectric nanocomposites consisting of zinc oxide (ZnO) nanoparticles assembled in a PVDF copolymer matrix for sensing and SHM applications. These films provide greater mechanical flexibility as compared to PZTs, yet possess enhanced piezoelectricity as compared to pristine PVDF copolymers. This study started with spin coating dispersed ZnO- and PVDF-TrFE-based solutions to fabricate the piezoelectric nanocomposites. The concentration of ZnO nanoparticles was varied from 0 to 20 wt.% (in 5 % increments) to determine their influence on bulk film piezoelectricity. Second, their electric polarization responses were obtained for quantifying thin film remnant polarization, which is directly correlated to piezoelectricity. Based on these results, the films were poled (at 50 $MV-m^{-1}$) to permanently align their electrical domains and to enhance their bulk film piezoelectricity. Then, a series of hammer impact tests were conducted, and the voltage generated by poled ZnO-based thin films was compared to commercially poled PVDF copolymer thin films. The hammer impact tests showed comparable results between the prototype and commercial samples, and increasing ZnO content provided enhanced piezoelectric performance. Lastly, the films were further validated for sensing using different energy levels of hammer impact, different distances between the impact locations and the film electrodes, and cantilever free vibration testing for dynamic strain sensing.