• Title/Summary/Keyword: Surface etching effect

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Fabrication of Ordered Nanoporous Alumina Membrane by PDMS Pre-Patterning

  • Kim, Byeol;Lee, Jin-Seok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.265.1-265.1
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    • 2013
  • Nanoporous anodic aluminum oxide (AAO), a self-ordered hexagonal array has various applications for nanofabrication such as nanotemplate, and nanostructure. In order to obtain highly-ordered porous alumina membranes, Masuda et al. proposed a two-step anodization process however this process is confined to small domain size and long hours. Recently, alternative methods overcoming limitations of two-step process were used to make prepatterned Al surface. In this work, we confirmed that there is a specific tendency used a PDMS stamp to obtain a pre-patterned Al surface. Using the nanoindentaions of a PDMS stamp as chemical carrier for wet etching, we can easily get ordered nanoporous template without two-step process. This chemical etching method using a PDMS stamp is very simple, fast and inexpensive. We use two types of PDMS stamps that have different intervals (800nm, 1200nm) and change some parameters have influenced the patterning of being anodized, applied voltage, soaking and stamping time. Through these factors, we demonstrated the patterning effect of large scale PDMS stamp.

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A STUDY OF THE EFFECT OF CHEMO-MECHANICAL CARIES REMOVAL SYSTEM ON THE REMOVAL OF CARIOUS DENTIN AND RESIN ADHESION TO DENTIN (화학제재를 이용한 우식상아질 제거효과 및 레진과의 결합강도에 관한 연구)

  • Kang, Dug-Il;Park, In-Chon;Lee, Nan-Young;Lee, Sang-Ho;Lee, Chang-Seop
    • Journal of the korean academy of Pediatric Dentistry
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    • v.30 no.4
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    • pp.581-592
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    • 2003
  • The aim of this study was to evaluate the effect of chemo-mechanical caries removal system($Carisolv^{TM}$, Medi Team, Sweden) for resin adhesion to carious primary and permanent dentin compared with conventional drilling method. The buccal surface of 92 primary molars and 92 permanent molars were used. Exposed dentins were occurred artificial caries. 32 tooth of primary molars and 32 tooth of permanent molars were prepared to observe treated dentin surface with $Carisolv^{TM}$ and conventional drilling method by SEM. Other tooth were prepared to measure resin-dentin shear bonding strength according to caries removal methods and dentin adhesive system. Two adhesive systems and a composite resin were used; single bonding agent(Scotchbond Multi-Purpose Plus, 3M) and self-etching bonding system(Prompt L-pop, 3M ESPE), and a composite resin (Z-250, 3M). The results were as follows : 1. The removal effect of carious dentin on $Carisolv^{TM}$ was stronger on the primary dentin than that to permanent dentin, and dentin surface became rougher with treated $Carisolv^{TM}$ than drilling method. 2. Acid-etched dentin surfaces were showed smoothening without smear layer. 3. In specimen applied single bonding system hybrid layer and adhesive layer were $2-4{\mu}m$ and $10-15{\mu}m$ in thickness, whereas self-etching bonding system were showed only thin hybrid layer($1-2{\mu}m$). 4. The shear bonding strength of group applied single bonding agent was higher than that applied self-etching priming system(P<0.05). 5. The shear bonding strength of group applied $Carisolv^{TM}$ and self-etching priming system were slightly higher than that applied conventional drilling method and self-etching priming system(P>0.05).

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EFFECT OF SURFACE TREATMENTS ON THE REPAIR BOND STRENGTH OF COMPOSITES (복합레진의 수리 시 표면처리가 결합강도에 미치는 영향)

  • Choi, Jung-In;Kim, Young-Jae;Kim, Jung-Wook;Lee, Sang-Hoon;Kim, Chong-Chul;Hahn, Se-Hyun;Jang, Ki-Taek
    • Journal of the korean academy of Pediatric Dentistry
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    • v.35 no.4
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    • pp.692-699
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    • 2008
  • The purpose of this study was to evaluate the effect of surface treatment on the shear bond strength between new and old composite resin. The prepared resin specimens were separated 6 groups, and each group then received a different surface treatment. Then the repair material was added. Shear bond strengths for repair were measured after 7 days and the results were analyzed by using one way ANOVA. The results were as follows; 1. Group 3, 4(air abrasion) showed significantly higher shear bond strength than Group 1(phosphoric acid)(p<0.05). Group 5, 6(diamond bur) showed higher bond strength than Group 1(phosphoric acid) but not significantly different( p>0.05). 2. Group 2(self-etching adhesive) showed lower shear bond strength than Group 1(phosphoric acid) but not significantly different(p>0.05). 3. There was no statistically significant difference between Group 3(air abrasion) and Group 4(air abrasion+etching). 4. There was no statistically significant difference between Group 5(diamond bur) and Group 6(diamond bur+etching). In conclusion, the surface treatment with air abrasion resulted in higher repair bond strength than other methods. Repair bond strength was not significantly affected by acid etching.

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The study of evaluating surface characteristics and effect of thermal annealing process for AlN single crystal grown by PVT method (PVT법으로 성장된 AlN 단결정의 표면 특성 평가 및 고온 어닐링 공정의 효과에 대한 연구)

  • Kang, Hyo Sang;Kang, Suk Hyun;Park, Cheol Woo;Park, Jae Hwa;Kim, Hyun Mi;Lee, Jung Hun;Lee, Hee Ae;Lee, Joo Hyung;Kang, Seung Min;Shim, Kwang Bo
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.27 no.3
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    • pp.143-147
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    • 2017
  • To evaluate surface characteristics and improve crystalline quality of AlN single crystal grown by physical vapor transport (PVT) method, wet chemical etching process using $KOH/H_2O_2$ mixture in a low temperature condition and thermal annealing process was proceeded respectively. Conventional etching process using strong base etchant at a high temperature (above $300^{\circ}C$) had formed over etching phenomenon according to crystalline quality of materials. When it occurred to over etching phenomenon, it had a low reliability of dislocation density because it cannot show correct number of etch pits per estimated area. Therefore, it was proceeded to etching process in a low temperature (below $100^{\circ}C$) using $H_2O_2$ as an oxidizer in KOH aqueous solution and to be determined optimum etching condition and dislocation density via scanning electron microscope (SEM). For improving crystalline quality of AlN single crystal, thermal annealing process was proceeded. When compared with specimens as-prepared and as-annealed, full width at half maximum (FWHM) of the specimen as-annealed was decreased exponentially, and we analyzed the mechanism of this process via double crystal X-ray diffraction (DC-XRD).

EFFECT OF SURFACE MODIFICATION ON BOND STRENGTH IN TITANIUM-PORCELAIN SYSTEM (티타늄의 표면처리 방법에 따른 저온소성도재와의 결합강도)

  • Roh, Sung-Wook;Vang, Mong-Sook;Yang, Hong-So;Park, Sang-Won;Park, Ha-Ok;Lim, Hyun-Pil
    • The Journal of Korean Academy of Prosthodontics
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    • v.45 no.5
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    • pp.589-600
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    • 2007
  • Statement of Problem: Titanium has many advantages of high biocompatibility, physical porperties, low-weight, low price and radiolucency, but it is incompatible with conventional dental porcelain due to titanium's oxidative nature. Many previous studies have shown that they used the method of sandblast surface treatment prior to porcelain application, the researchs are processing about the method of acid etching or surface coating. Purpose: The purpose of this research is to study the effect on bond strength between titanium and porcelain when using macro-surface treatment and micro-surface treatment and macro and micro surface treatment. Material and method: In this study, we evaluated the bond strength by using 3-point bending test based on ISO 9693 after classified 7 groups-group P : polished with #1200 grit SiC paper, group SS : sandblasted with $50{\mu}m$ aluminum oxides, group LS : sandblasted with $250{\mu}m$ alumium oxides, group HC : treated with 10% hydrochloric acid, group NF : treated with 17% solution of fluoric acid and nitric acid, group SHC : treated with 10% hydrochloric aicd after sandblsting with $50{\mu}m$ alumium oxides, group SNF treated with 17% solution of fluoric acid and nitric acid. Results : Within the confines of our research, the following results can be deduced. 1. Group SS which was sandblasted with $50{\mu}m$ aluminum oxides showed the highest bond strength of 61.74 MPa and significant differences(P<0.05). The bond strengths with porcelain in groups treated acid etching after sandblasting decreased more preferable than the group treated with sandblasting only. It gives significant differences(P<0.05). 2. After surface treatments, the group treated with sandblasting showed irregular aspect formed many undercuts, in the SEM photographs. The group treated with hydrochloric acid had the sharp serrated surfaces, the group treated with the solution of fluoric acid and nitric acid had the smooth surfaces, the group with sandblasting and hydrochloric acid had irrigular and porous structure, the group with sandblasting and the solution of fluoric acid and nitric acid had crater-like surfaces. But all of the groups treated with acid etching was not found and undercut. Conclusion: In above results, average surface roughness increase, bond strength also increase, but surface topographs influences more greatly on bond strengths.

Sliding Friction Property of Angle Effect for Crosshatch Micro-grooved Pattern under Lubricated (마이크로 크기를 가지는 빗살무늬 그루우브 패턴의 빗살각도변화에 대한 실험적 마찰특성)

  • Kim, Seock-Sam;Chae, Youn-Ghun
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.10 no.3
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    • pp.94-99
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    • 2011
  • Micro-scale surface pattern has an benefit of tribological application under lubricated sliding contact. Therefore, a special pattern, that has to reduce the coulomb friction under contact, is considered to be necessary for improved efficiency of machines. The current study investigated the friction property of angle effect for micro-scale grooved crosshatch pattern on bearing steel surface using pin-on-disk type. The samples fabricated by photolithography process and then these are carry out the electrochemical etching process. We discuss the friction property due to the influence of hatched-angle on contact surface. We could be explained the lubrication mechanism for a Stribeck curve. It was found that the friction coefficient depend on an angle of the crosshatch on contact surface. It was thus verified that micro-scale crosshatch grooved pattern could affect the friction reduction.

Study of Low Reflectance and RF Frequency by Rie Surface Texture Process in Multi Crystall Silicon Solar Cells (공정가스와 RF 주파수에 따른 웨이퍼 표면 텍스쳐 처리 공정에서 저반사율에 관한 연구)

  • Yun, Myoung-Soo;Hyun, Deoc-Hwan;Jin, Beop-Jong;Choi, Jong-Young;Kim, Joung-Sik;Kang, Hyoung-Dong;Yi, Jun-Sin;Kwon, Gi-Chung
    • Journal of the Korean Vacuum Society
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    • v.19 no.2
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    • pp.114-120
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    • 2010
  • Conventional surface texturing in crystalline silicon solar cell have been use wet texturing by Alkali or Acid solution. But conventional wet texturing has the serious issue of wafer breakage by large consumption of wafer in wet solution and can not obtain the reflectance below 10% in multi crystalline silicon. Therefore it is focusing on RIE texturing, one method of dry etching. We developed large scale plasma RIE (Reactive Ion Etching) equipment which can accommodate 144 wafers (125 mm) in tray in order to provide surface texturing on the silicon wafer surface. Reflectance was controllable from 3% to 20% in crystalline silicon depending on the texture shape and height. We have achieved excellent reflectance below 4% on the weighted average (300~1,100 nm) in multi crystalline silicon using plasma texturing with gas mixture ratio such as $SF_6$, $Cl_2$, and $O_2$. The texture shape and height on the silicon wafer surface have an effect on gas chemistry, etching time, RF frequency, and so on. Excellent conversion efficiency of 16.1% is obtained in multi crystalline silicon by RIE process. In order to know the influence of RF frequency with 2 MHz and 13.56 MHz, texturing shape and conversion efficiency are compared and discussed mutually using RIE technology.

Temperature effect on Dry Etching of ZrO2 in Cl2/BCl3/Ar Plasma (기판 온도에 따른 Cl2/BCl3/Ar 플라즈마에서 ZrO2 박막의 건식 식각)

  • Yang, Xue;Ha, Tae-Kyung;Wi, Jae-Hyung;Um, Doo-Seung;Kim, Chang-Il
    • Journal of the Korean institute of surface engineering
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    • v.42 no.6
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    • pp.256-259
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    • 2009
  • The wafer surface temperature is an important parameter in the etching process which influences the reaction probabilities of incident species, the vapor pressure of etch products, and the re-deposition of reaction products on feature surfaces. In this study, we investigated all of the effects of substrate temperature on the etch rate of $ZrO_2$ thin film and selectivity of $ZrO_2$ thin film over $SiO_2$ thin film in inductively coupled plasma as functions of $Cl_2$ addition in $BCl_3$/Ar plasma, RF power and dc-bias voltage based on the substrate temperature in range of $10^{\circ}C$ to $80^{\circ}C$. The elements on the surface were analyzed by x-ray photoelectron spectroscopy (XPS).

Development of Nitric Acid Free Desmut Solution for the Aluminum Alloy in Alkaline Etching and Acid Desmut Processes (Aluminum 합금소재의 알칼리에칭 공정으로 발생한 Smut 제거를 위한 무질산 혼합산용액 개발)

  • Choo, Soo-Tae;Choi, Sang Kyo
    • Clean Technology
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    • v.9 no.2
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    • pp.57-61
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    • 2003
  • A novel nitric acid-free desmut solution has been developed to remove smut, which is produced from a NaOH etching, on the surface of aluminum alloy metal in metal surface treatment processes. Comparing with the performance of 5% $HNO_3$ desmut solution, the mixed acid solution containing 2% $H_2O_2$, 0.5% HF, and 10% $H_2SO_4$ shows the same effect of smut removal for aluminum alloy samples of A16061 and A15052. To examine the surface alterations of the aluminum samples, in addition, the surface analysis is carried out with scanning electron microscopy (SEM) and electron probe microanalysis (EPMA).

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