• Title/Summary/Keyword: Surface crystal growth

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Morphological study on non-seeded grown AlN single crystals (무종자결정 상에 성장된 AlN 결정의 형태학적 연구)

  • Kang, Seung-Min
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.22 no.6
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    • pp.265-268
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    • 2012
  • The growth of AlN single crystals of large size and good quality is of prime importance for UV LEDs and power devices applications. However, the crystals having the size of more than 1 inch and high quality have not been reported in the world. In the PVT growth of AlN, the crystal morphology of as grown were important because the preferred orientation of growth of it was evaluated for growth rate increase. In the present study, the AlN single crystals grown by PVT process were evaluated by the side of the growth morphology. Optical microscopic characterization was carried out to observe the shape of the crystals and the growth facets. Furthermore the growth habit of it were discussed by observation of the surface of AlN crystals.

EFFECTS OF FLUORIDE CONCENTRATION AND SEED MATERIAL ON SEEDED CRYSTAL GROWTH (불소의 농도와 Seed Material이 Crystal Growth에 미치는 영향)

  • Oh, Seung-Yeon;Jung, Il-Young;Kum, Kee-Yeon;Lee, Chan-Young
    • Restorative Dentistry and Endodontics
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    • v.22 no.2
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    • pp.560-574
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    • 1997
  • The present study was undertaken to investigate the crystal growth onto human enamel mineral and synthetic hydroxyapatite(HA) seeds in media resembling the enamel fluid composition. Effects of fluoride at high concentrations on the precipitation were also examined in a bench-top crystal growth model adopting a miniaturized reaction column. The Ca, P and F concentrations and pH values of the inlet and outlet solutions were determined. The recovered solid samples were weighed to assess the amount of minerals precipitated during the experimental period, and finally viewed under a scanning electron microscope. Remarkable findings were that 1) both biological and synthetic seeds with the same total surface areas yielded similar amounts of crystal growth, 2) the amount of crystal growth was accelerated in a manner depending on fluoride concentrations in the media, 3) SEM observations disclosed that without the addition of fluoride, precipitation of thin, plate-like OCP crystals became prominent, but by increasing the fluoride concentration(beyond 1ppm F), rod-like crystals having a pointed edge were most frequently observed, without any evidence for precipitation of the plate-like crystals. Furthermore, the dimension of rod-like crystals was increased in proportion to fluoride concentrations, 4) there was no difference in the morphological feature of precipitated mineral phase upon seeding between human enamel seed and synthetic HA seed. The overall results support the view that the seeded crystal growth model is of value to gain insight into the mechanism of enamel crystal growth under fluoride regimens.

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Surface analysis of reactively ion-etched aluminum films in $CF_4$ plasma ($CF_4$ 플라즈마에서 반응성 이온식각한 알루미늄 박막의 표면분석)

  • 김동원;이원종
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.5 no.4
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    • pp.351-357
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    • 1995
  • The surface layer of the aluminum film reactively ion etched in $CF_4$ plasma was ana alyzed by using XPS. $AlF_3$ which is nonvolatile is formed at the aluminum surface. As the analyzed depth increases, the intensity of the $Al_{2p}$ peak of Al - F bonds decreases while that of a aluminum metallic bond increases. The thickness of the $AlF_x$ surface layer is 50~100 $\AA$ and the deep penetration of fluorine atoms is attributed to the mixing effect by the bombardment of incident particles. For the aluminum oxide film which is etched in $CF_4$ plasma under the same conditions, oxygen atoms are substituted by fluorine atoms to form $$AIF_x$ surface layer, which is m much thinner than that formed on aluminum surface.

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Low-temperature Epitaxial Growth of a Uniform Polycrystalline Si Film with Large Grains on SiO2 Substrate by Al-assisted Crystal Growth

  • Ahn, Kyung Min;Kang, Seung Mo;Moon, Seon Hong;Kwon, HyukSang;Ahn, Byung Tae
    • Current Photovoltaic Research
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    • v.1 no.2
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    • pp.103-108
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    • 2013
  • Epitaxial growth of a high-quality thin Si film is essential for the application to low-cost thin-film Si solar cells. A polycrystalline Si film was grown on a $SiO_2$ substrate at $450^{\circ}C$ by a Al-assisted crystal growth process. For the purpose, a thin Al layer was deposited on the $SiO_2$ substrate for Al-assisted crystal growth. However, the epitaxial growth of Si film resulted in a rough surface with humps. Then, we introduced a thin amorphous Si seed layer on the Al film to minimize the initial roughness of Si film. With the help of the Si seed layer, the surface of the epitaxial Si film was smooth and the crystallinity of the Si film was much improved. The grain size of the $1.5-{\mu}m$-thick Si film was as large as 1 mm. The Al content in the Si film was 3.7% and the hole concentration was estimated to be $3{\times}10^{17}/cm^3$, which was one order of magnitude higher than desirable value for Si base layer. The results suggest that Al-doped Si layer could be use as a seed layer for additional epitaxial growth of intrinsic or boron-doped Si layer because the Al-doped Si layer has large grains.

Microstructures and electron mobilities of $Si/Si_{1-x}Ge_x$ MODFET structures grown by gas-source MBE (가스원 분자선 에피택시 증착법에 의한 $Si/Si_{1-x}Ge_x$ MODFET 구조의 미세조직과 전기이동도에 관한 연구)

  • 이원재
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.9 no.2
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    • pp.207-211
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    • 1999
  • $Si/Si_{1-x}Ge_x$ MODFET structures, incorporating linearly-graded buffer layers have been grown by GaS Source Molecular Beam Epitaxy. The growth temperature of the graded layers has not significantly changed the distribution of misfit dislocation. However, the surface undulation and surface defects were increased with increasing growth temperature. In $Si/Si_{1-x}Ge_x$ MODFET structures, the densities of misfit dislocations near the Si-active layers were considerably reduced in comparison with the region of graded layers. The electron mobility of $Si/Si_{1-x}Ge_x$ MODFET structure has increased with lowering the growth temperature.

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Early stage of heteroepitaxial Ge growth on Si(100) substrate with surface treatments using inductively coupled plasma (ICP) (ICP 표면 처리된 Si 기판 위에 성장된 Ge 층의 초기 성장 상태 연구)

  • Yang, Hyun-Duk;Kil, Yeon-Ho;Shim, Kyu-Hwan;Choi, Chel-Jong
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.21 no.4
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    • pp.153-157
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    • 2011
  • We have investigated the effect of inductively coupled plasma (ICP) treatment on the early growth stage of heteroepitaxial Ge layers grown on Si(100) substrates using low pressure chemical vapor deposition (LPCVD), The Si(100) substrates were treated by ICP process with various source and bias powers, followed by the Ge deposition, The ICP treatment led to the enhancement in the coalescence of Ge islands, The growth rate of Ge on Si(100) with ICP surface treatment is about 5 times higher than that without ICP surface treatment. A missing dimer caused by the ICP surface treatment can act as a nucleation site for Ge adatoms, which could be responsible for the improvement in growth behavior of Ge on Si(100) substrates.

Effect of crystal and crucible rotations on the mass transfer in magnetohydrodynamic Czochralski crystal growth of silicon (자기장이 가하여진 초크랄스키 실리콘 단결정 성장에서 질량전달에 미치는 성장결정과 도가니의 회전효과)

  • 김창녕
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.7 no.4
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    • pp.536-547
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    • 1997
  • For various angular velocities of crucible and crystal, the characteristics of melt flows, temperatures and concentrations of oxygen are numerically studied in the Czochralski furnace with a uniform axial magnetic field. Buoyancy effect due to the heating of crucible wall and thermocapillary effect due to the temperature gradient at the free surface, can be differentiably suppressed by the centrifugal forces due to the rotations of the crucible and crystal. The most important factor which yields the centrifugal forces is the rotation velocity of the crucible, that influences the fields of velocities, temperatures and concentrations. In the case that the crucible rotation velocity is not high, the rotations of the crystal gives rise to the centrifugal forces effectively.

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Crystal growing of NaX type zeolite

  • Ha, Jong-Pil;Seo, Dong-Nam;Jung, Mi-Jeong;Moon, In-Ho;Cho, Sang-Joon;Park, Hyun-Min;Kim, Ik-Jin
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.9 no.4
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    • pp.371-376
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    • 1999
  • A large NaX type zeolite crystal of a uniform particle size of 20$\mu\textrm{m}$ are grown with various {{{{{H}_{2}O}}}} content by hydrothermal reaction and added seed crystal (2~3$\mu\textrm{m}$) to reactant solution as a function of different adding seed levels from 3 to 15%. The result that increased purity of NaX zeolite above 95% and homogeneity of crystal size by increasing adding seed levels, also decreased crystallization time. It was explained that adding seed to synthesis solution leaded out increase of surface area for physical contact reaction and directed growth of seed crystal, so more rapid consumption of reaction gel as increase seeding levels.

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Measurement of the temperature and velocity fluctuations occurred by the baroclinic instability in the melt for Czochralski crystal growth method (초크랄스키 단결정 성장 멜트에서 baroclinic 불안정에 의해 발생하는 유동과 온도 변동의 측정)

  • 손승석;이경우
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.10 no.6
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    • pp.381-388
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    • 2000
  • The temperature and velocity fluctuations occurred by the baroclinic instability in the melt for Czochralski crystal growth method were experimentally investigated. Wood's metal, which has similar Pr number to the silicon melt, was used as the working fluid and azimuthal velocity was measured using incorporated magnet probe. The azimuthal velocities near the free surface are faster than velocities near the bottom and the rotational velocities near the model crystal become very fast. The results of measured temperature fluctuation as increasing rotation rate were shown that baroclinic instability occurred at the region of Ro<1.01, Ta>$9.63{\times}10^8$. In these region, the fluctuations of temperature and velocity have the same frequency.

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SiC single crystal grown on a seed with an inserted epitaxial layer for the power device application

  • An, Jun-Ho;Kim, Jeong-Gon;Seo, Jeong-Du;Kim, Jeong-Gyu;Gyeon, Myeong-Ok;Lee, Won-Jae;Kim, Il-Su;Sin, Byeong-Cheol;Gu, Gap-Ryeol
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.232-232
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    • 2006
  • SiC single crystal Ingots were prepared onto different seed material using sublimation PVT techniques and then their crystal quality was systematically compared. In this study, the conventional SiC seed material and the new SiC seed material with an inserted SiC epitaxial layer on a seed surface were used as a seed for SiC bulk growth. The inserted epitaxial layer was grown by a sublimation epitaxy method called the CST with a low growth rate of $2{\mu}m/h$ N-type 2"-SIC single crystals exhibiting the polytype of 6H-SiC were successfully fabricated and carrier concentration levels of below $10^{17}/cm^3$ were determined from the absorption spectrum and Hall measurements. The slightly higher growth rate and carrier concentration were obtained in SiC single crystal Ingot grown on new SiC Seed materials with the inserted epitaxial layer on the seed surface, maintaining the high quality.

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