• 한국재료학회지
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• 제25권9호
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• pp.462-467
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• 2015

Pellicle is defined as a thin transparent film stretched over an aluminum (Al) frame that is glued on one side of a photomask. As semiconductor devices are pursuing higher levels of integration and higher resolution patterns, the cleaning of the Al flame surface is becoming a critical step because the contaminants on the Al flame can cause lithography exposure defects on the wafers. In order to remove these contaminants from the Al frame, a highly concentrated nitric acid ($HNO_3$) solution is used. However, it is difficult to fully remove them, which results in an increase in the Al surface roughness. In this paper, the pellicle frame cleaning is investigated using various cleaning solutions. When the mixture of sulfuric acid ($H_2SO_4$), hydrofluoric acid (HF), hydrogen peroxide ($H_2O_2$), and deionized water with ultrasonic is used, a high cleaning efficiency is achieved without $HNO_3$. Thus, this cleaning process is suitable for Al frame cleaning and it can also reduce the use of chemicals.

• 한국전기전자재료학회논문지
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• 제31권4호
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• pp.244-248
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• 2018

We propose a method for improving the reliability of a solar cell by applying a fluorinated surface coating to protect the cell from the outdoor environment using an atmospheric pressure plasma (APP) treatment. An APP source is operated by radio frequency (RF) power, Ar gas, and $O_2gas$. APP treatment can remove organic contaminants from the surface and improve other surface properties such as the surface free energy. We determined the optimal APP parameters to maximize the surface free energy by using the dyne pen test. Then we used the scratch test in order to confirm the correlation between the APP parameters and the surface properties by measuring the surface free energy and adhesive characteristics of the coating. Consequently, an increase in the surface free energy of the cover glass caused an improvement in the adhesion between the coating layer and the cover glass. After treatment, adhesion between the coating and cover glass was improved by 35%.

• 한국진공학회지
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• 제21권1호
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• pp.6-11
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• 2012

Sputter 방식으로 증착된 구리 seed 층(구리 seed/Ti/Si) 위에 형성된 오염물 제거과정을 이해하기 위하여, 강력한 계면 활성능력을 가진 약알칼리 탈지제 Metex TS-40A 용액을 사용하여 담금(dipping) 시간에 따른 구리 seed 층 표면의 변화형상 및 변화상태를 조사 분석하였다. Field emission scanning electron microscope을 이용하여 TS-40A 용액에 전처리 후 구리 seed 표면 형상이 grain이 명확히 보일 정도로 변화하는 것을 관찰하였고, X-ray photoelectron spectroscopy를 이용하여 표면 처리된 Cu seed 표면의 화학구조 및 불순물 상태를 조사하였다. TS-40 용액에서의 dipping 시간 변화에 따른 효과는 거의 없었다. TS-40A 용액에 전처리한 후, 구리 seed 층 표면위의 많은 탄소성분이 제거되었고, 약간의 산소가 제거되었으며, O=C 및 $Cu(OH)_2$에 해당되는 피크들이 감소되는 것이 관측되었다. 하지만 표면에서 불순물 Si이 silicate 상태로 검출되었다. TS-40A 용액에 포함되어 있는 silicate 성분이 구리 seed 층과 반응하여 이 silicate 불순물이 구리 seed 표면에 형성된 것으로 보여진다. 약알칼리 탈지제 Metex TS-40A 용액을 사용한 전처리 과정을 통해, 구리 seed 표면 위의 O=C 및 $Cu(OH)_2$ 등의 제거에는 탁월한 효과를 보였으나, 불순물 silicate가 형성되었으므로 이 알칼리 탈지제를 사용한다면, 이후에 산세정 및 다른 세정과정을 거쳐 표면에 존재하는 silicate를 제거할 필요성이 있다.

• 자원환경지질
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• 제56권6호
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• pp.675-695
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• 2023

군산 산북동 공룡과 익룡발자국 화석산지는 국내 최대의 전기 백악기 공룡발자국 화석지이며, 모든 발자국은 대형 조각류와 수각류 공룡들이 전기 백악기에 한반도에 서식하였음을 지시하는 중요한 증거이다. 산북동 화석산지는 2021년 보호각 설치 이전까지 야외 환경에서 방수포로 보호되어 있었다. 이로 인해 화석의 기반암에는 전단력, 하중 감소, 온습도변화, 산성비, 염분 및 미생물 등이 복합적으로 작용하여 발자국의 손상이 가중되었다. 이 연구에서는 발자국 화석 중 형태 및 보행렬 확인이 가능한 12개 보행렬의 159개 발자국을 대상으로 각각의 손상정도를 평가하고 6개의 손상유형으로 분류하였다. 화석산지 전체 표면에 대한 초음파 물성평가 결과, 대부분 완전풍화단계(CW)를 보였다. 또한 연구대상 화석산지에는 다양한 풍화양상이 나타나 층준별 표면의 오염원을 분석한 결과, 화석산지의 신선부와 오염물은 지점별로 양상은 상이하나 조성은 거의 유사하였다. 이를 바탕으로 공룡 및 익룡발자국 화석산지의 효율적인 보존관리체계를 구축하였으며 각 발자국의 보존처리 유형을 제안하였다.

• Bulletin of the Korean Chemical Society
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• 제31권5호
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• pp.1192-1198
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• 2010

Pharmaceuticals and personal care products (PPCPs) are emerging contaminants in the aquatic environment. Many pharmaceuticals are not completely removed during wastewater treatment, leading to their presence in wastewater treatment effluents, rivers, lakes, and ground water. Here, we developed analytical methods for monitoring ten pharmaceuticals from surface water by LC/ESI-MS/MS. For sample clean-up and extraction, MCX (mixed cation exchange) and HLB (hydrophilic-lipophilic balance) solid-phase extraction (SPE) cartridges were used. The limits of detection (LOD) in distilled water and the blank surface water were in the range of 0.006 - 0.65 and 1.66 - 45.05 pg/mL, respectively. The limits of quantitation (LOQ) for the distilled water and the blank surface water were in the range of 0.02 - 2.17 and 5.52 - 150.15 pg/mL, respectively. The absolute recoveries for fortified water samples were between 62.1% and 125.4%. Intra-day precision and accuracy for the blank surface water were 2.9% - 24.1% (R.S.D.) and -16.3% - 16.3% (bias), respectively. In surface wastewater near rivers, chlortetracycline and acetylsalicylic acid were detected frequently in the range of 0.017 - 5.404 and 0.029 - 0.269 ng/mL, respectively. Surface water near rivers had higher levels than surface water of domestic treatment plants.

• 한국항해항만학회:학술대회논문집
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• 한국항해항만학회 2015년도 춘계학술대회
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• pp.179-180
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• 2015

The variety of organic and inorganic pollutants are introduced to coastal sediment and making highly contaminated due to rapid development of industralization and economic development. Numerous contaminants are release into marine sediment and it significantly affect marine aquatic environment. In the present study stated the optimize the biostimulant ball (BSB) in coastal sedimentand stabilse the heavy metals present in the sediment. The effective variables like BSB size, distance and month variables on Cu stabilization was determined by using Response surface methodology(RSM). The analysis of variance (ANOVA) and coefficient determination (R2) of Cu reduction 0.9610 and maximum stabilisation was obtained in 3cm ball size and 5.5cm distance and 4 month interval time. This result revealed that the BSB in effective for Cu reduction in coastal sediment.

• 한국연초학회지
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• 제25권2호
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• pp.111-119
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• 2003

In this work, Rayon-based activated carbon fiber(KF-1500) was treated by HN $O_3$ and $H_2$S $O_4$ with different conditions. Specific surface areas(SSA, $S_{BET}$) of the treated activated carbon fibers were decreased by acidic treatment but, total surface acidities and surface functional groups were increased. In spite of the decrease of SSA, propylamin(PPA) adsorption and removal ability by activated carbon fiber(ACF) were increased by nitric acid treatment compared with the raw-ACF(KF-1500) and coconut based activated carbon. However, acidic treated activated carbon fibers were available to removal for various amines and contaminants by adsorption.n.

• 한국항해항만학회:학술대회논문집
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• 한국항해항만학회 2014년도 추계학술대회
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• pp.87-88
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• 2014

The Coastal sediment is highly contaminated due to ship transportation, industries discharges and urban sources. Various contaminants release into seawater and settle in marine sediment and it significantly affect marine eco system. In the present study evaluated the optimization of slow release biostimulant ball (BSB) in coastal sediment in busan. The effective variables like BSB size, distance and month variables on VS reduction was determined by using Response surface methodology(RSM). The analysis of variance (ANOVA) and coefficient determination (R2) of VS was 0.9369 and maximum reduction of VS was obtained in 3cm ball size and 5.5cm distance and 4 month interval time. This result revealed that the BSB in effective VS reduction in coastal sediment.

• 한국자기학회지
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• 제9권5호
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• pp.263-270
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• 1999

컴퓨터 하드디스크용 윤활제인 PFPE중 Z-DOL과 AM2001을 이용하여 pulling-up speed와 윤활제의 농도를 변화시키면서 윤활제의 두께변화를 알아보았으며, 또한 열처리를 통해 overcoat층인 carbon과 윤활제의 결합특성을 알아보았다. Pulling-up speed가 빠를수록, 그리고 윤활제의 농도가 증가할수록 윤활제의 두께는 두껍게 coating되었음을 알 수 있었으며, 또한 XPS을 이용하여 분석해 본 결과, overcoat층인 carbon에 존재하는 표면 오염물은 C-OH, CO가 지배적이었고, 열처리를 함으로써 overcoat층인 carbon과 윤활제의 결합력이 증진됨을 알 수 있었다.

• Advances in environmental research
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• 제2권2호
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• pp.99-118
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• 2013

Rainwater runoff has been identified as a significant source of contaminants having tremendous impact on the receiving aquatic environment. In the present study, trace element transport by the surface runoff in the predominantly urban catchment of Guwahati city, India was monitored with a view to determine the chemical denudation rates of the land surface. A number of trace metals, namely Cd, Co, Cr, Cu, Fe, Mn, Ni, Pb and Zn were measured in the runoff after 70 major rain events within the city. Cadmium was found to be the least abundant metal and Iron was the most abundant metal in the runoff. The results are interpreted on the basis of temporal and spatial variations in their concentrations. These variations are quite large in some of the events and reflect changes in the local environmental setting, differences in water utilization, variations in runoff volume, gradient and quality.