• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.6
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• pp.515-520
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• 2005

CMP(chemical mechanical polishing) process has been attracted as an essential technology of multi-level interconnection. Also CMP process got into key process for global planarization in the chip manufacturing process. In this study, potentiodynamic polarization was carried out to investigate the influences of $H_2O_2$ concentration and metal oxide formation through the passivation on tungsten and titanium. Fortunately, the electrochemical behaviors of tungsten and titanium are similar, an one may expect. As an experimental result, electrochemical corrosion of the $5\;vol\%\;H_2O_2$ concentration of tungsten and titanium films was higher than the other concentrations. According to the analysis, the oxidation state and microstructure of surface layer were strongly influenced by different oxidizer concentration. Moreover, the oxidation kinetics and resulting chemical state of oxide layer played critical roles in determining the overall CMP performance. Therefore, we conclude that the CMP characteristics tungsten and titanium metal layer including surface roughness were strongly dependent on the amounts of hydrogen peroxide oxidizer.

• Journal of the Korean Ceramic Society
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• v.45 no.6
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• pp.324-330
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• 2008

Activated carbon/$TiO_2$ (AC/$TiO_2$) composites modified with different concentrations of Fe were prepared. The $N_2$ adsorption data showed that the composites had decreased surface area compared with the pristine activated carbon. This indicated the blocking of the micropores on the surface of AC, which was further supported by observation via SEM. XRD results showed patterns for the composites and an anatase typed titanium dioxide structure with a small part of rutile in a higher Fe concentration (> 1.0 mol/L). EDX results showed the presence of C and, O, with Ti peaks on the composites of Fe-AC/$TiO_2$ with relatively lower Ti concentration, which may be due to the higher Fe concentration incorporated into the composites. Subsequently, the photocatalytic effects on methylene blue (MB) were investigated. The improved decomposition of MB showed the combined effects of adsorptions and photodegradation. Especially, the composites modified by Fe revealed enhanced photodegradation behaviors of MB.

• 한국태양에너지학회:학술대회논문집
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• 2011.11a
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• pp.149-153
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• 2011

The PC1D is widely used for modeling the properties of crystalline silicon solar cell. Optimized doping profile in crystalline silicon solar cell fabrication is necessary to obtain high conversion efficiency. Doping profile in the forms of a uniform, gaussian, exponential and erfc function can be simulated using the PC1D program. In this paper, the doping profiles including junction depth, dopant concentration on surface and the form of doping profile (gaussian, gaussian+erfc function) were changed to study its effect on electrical properties of solar cell. As decreasing junction depth and doping concentration on surface, electrical properties of solar cell were improved. The characteristics for the solar cells with doping profile using the combination of gaussian and erfc function showed better open-circuit voltage, short-circuit current and conversion efficiency.

• Journal of the Korean institute of surface engineering
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• v.19 no.2
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• pp.31-43
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• 1986

The properties of the electroless nickel deposit mainly depends on the pH of the bath, the plating temperature, and the molar ratio of nickel to hypophosphite but they are also affected by its formulation and concentration of complexing and buffering agents. According to changeing the concentration of triethanolamine and boric acid, phosphorous contents, microsturcture, crystalline, hardness and wear resistance of deposits obtained from ammoniacal alkaline bath were investigated by EPMA, differential thermal analyser, X-ray diffractometer and wear tester. The results are as follows; (1) Increasing concentration of triethanolamine in the bath, the deposits is slightly inclined to increase its phosphorous content(3.7% P). (2) In the as-plated state, the deposits are not crystallized state but they are thermally unstable phase, and they are crystallized with precipitating $Ni_3P$ at 400$^{\circ}C$. (3) The deposit containing 2.3% P has higher hardness value in the as plated and heat treated state at below 300$^{\circ}C$ than those of 3.7% phosphorous deposit (1090Hk). But in the case of heat treating at 400$^{\circ}C$, the former has lower hardness value (1000Hk) than the latter and has remarkably Ni(III) orientation by heat treatment. (4) The 3.7% phosphorous deposit heat treated at 400$^{\circ}C$ has better wear resistance than hard chromium plating.

• Journal of Microbiology and Biotechnology
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• v.24 no.11
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• pp.1542-1550
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• 2014

Co-digesting molasses wastewater and sewage sludge was evaluated for hydrogen production by response surface methodology (RSM). Batch experiments in accordance with various dilution ratios (40- to 5-fold) and waste mixing composition ratios (100:0, 80:20, 60:40, 40:60, 20:80, and 0:100, on a volume basis) were conducted. Volatile solid (VS) concentration strongly affected the hydrogen production rate and yield compared with the waste mixing ratio. The specific hydrogen production rate was predicted to be optimal when the VS concentration ranged from 10 to 12 g/l at all the mixing ratios of molasses wastewater and sewage sludge. A hydrogen yield of over 50 ml $H_2/gVS_{removed}$ was obtained from mixed waste of 10% sewage sludge and 10 g/l VS (about 10-fold dilution ratio). The optimal chemical oxygen demand/total nitrogen ratio for co-digesting molasses wastewater and sewage sludge was between 250 and 300 with a hydrogen yield above 20 ml $H_2/gVS_{removed}$.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.1711-1713
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• 2000

We fabricated an IMI-O polymer containing an imidazole group that could form a complex structure between the monolayer and the metal ions at the air-water interface. Also, the surface analysis and the electrical properties of metal ion complex of Langmuir-Blodgett (LB) films were investigated by using $\pi$-A isotherms. Atomoic force microscopy (AFM), current-voltage (I-V) measurements. In the $\pi$-A isotherms the molecular area was expanded with $Fe^{3+}$ concentration increase. It is considered that the expansion of molecular area is due to electrostatic repulsion between the polymer chains and hydrophobic increase of ionic strength. In the I-V characteristics, it is found that the limiting area has effects on the change of conductivity. And, the dielectric relaxation time decreased for increase of the $Fe^{3+}$ concentration.

• Journal of the Korean Electrochemical Society
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• v.7 no.1
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• pp.9-15
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• 2004

Cyclic voltammetry and chronocoulometry have been used for characterization of catechol violet (CV) at the hanging mercury drop electrode in acetic acid-sodium acetate buffer solution. At pH 2.94 a nearly symmetric cyclic voltammetric wave due to an irreversible weak adsorption of CV on mercury was obtained at concentration of $0.53{\mu}mol\;dm ^{-3}$. Under these conditions, CV adsorbes in a monolayer. Upon increasing the concentration, the symmetry of the wave decreases; it can be attributed to a mixed diffusion adsorption process. The amount of the adsorbed catechol violet on the HMDE expressed as surface concentration as well as the surface areaf occupied by one molecule$(\sigma)$ were calculated. It was found that the values obtained for f and o utilizing cyclic voltammetric and chrono-coulometry are almost identical. A 1:1 and 1:2 Th (IV)-CV complexes are formed on addition of thorium (IV) to catechol violet. These complexes are adsorbed and reduced on the HMDE at more negative potentials than the peak potential of free CV, Using the square-wave (SW) technique, the adsorptive cathodic stripping voltammetry, ACSV, of these complexes was studied. It was found that the SW-ACSV of Th(IV)-CV can be applied to the determination of thorium at the nanomole level. Optimum conditions and the analytical method of determination were presented and discussed.

• Journal of the Korean institute of surface engineering
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• v.52 no.6
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• pp.342-349
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• 2019

Titanium nitride(TiN) thin films have been deposited on PEN(Polyethylene naphthalate) substrate by reactive RF(13.56 MHz) magnetron sputtering in a 25% N₂/Ar mixed gas atmosphere. The pulsed DC bias voltage of -50V on substrates was applied with a frequency of 350 kHz, and duty ratio of 40%(1.1 ㎲). The effects of pulsed DC substrate bias voltage on the crystallinity, color, electrical properties of TiN_x films have been investigated using XRD, SEM, XPS and measurement of the electrical properties such as electrical conductivity, carrier concentration, mobility. The deposition rates of TiN_x films was decreased with application of the pulsed DC substrate bias voltage. The TiN_x films deposited without and with pulsed bias of -50V to substrate exhibits gray and gold colors, respectively. XPS depth profiling revealed that the introduction of the substrate bias voltage resulted in decreasing oxygen concentration in TiN_x films, and increasing the electrical conductivities, carrier concentration, and mobility to about 10 times, 5 times, and 2 times degree, respectively.

• Journal of Powder Materials
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• v.10 no.4
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• pp.262-269
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• 2003

Nano-sized Ni-ferrite powder was fabricated by spray pyrolysis process using the waste solution resulting from shadow mask processing. The average particle size of the powder was below 100 nm. The effects of the concentration of raw material solution, the nozzle tip size and air pressure on the properties of powder were studied. As the concentration increased, the average particle size of the powder gradually increased and its specific surface area decreased, but size distribution was much wider and the fraction of the Ni-ferrite phase greatly increased as the concentration increasing. As the nozzle tip size increased from 1 mm to 2 mm, the average particle size of the powder decreased. In case of 3 mm nozzle tip size, the average particle size of the powder increased slightly. On the other hand, in case of 5 mm nozzle tip size, average particle size of the powder decreased. Size distribution of the powder was unhomogeneous, and the fraction of the Ni-ferrite phase decreased as the nozzle tip size increasing. As air pressure increased up to 1 kg/$cm^2$, the average particle size of the powder decreased slightly, on the other hand, the fraction of the Ni-ferrite phase was almost constant. In case of 3kg/$cm^2$ air pressure, average particle size of the powder and the fraction of the Ni-ferrite phase remarkably decreased, but size distribution was narrow.

• Environmental Engineering Research
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• v.17 no.4
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• pp.197-203
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• 2012

Phosphorus removal during discharge of wastewater is required to achieve in a very high level because eutrophication occurs even at a very low phosphorus concentration. However, there are limitations in the traditional technologies in the removal of phosphorus at very low concentration, such as at a level lower than 0.1 mg/L. Through a series of experiments, a possible technology which can remove phosphate to a very low level in the final effluent of wastewater was suggested. At first Al, Zn, Ca, Fe, and Mg were exposed to phosphate solution by impregnating them on the surface of activated alumina to select the material which has the highest affinity to phosphate. Kinetic tests and isotherm tests on phosphate solution have been performed on four media, which are Ca-impregnated activated alumina, activated alumina, Ca-impregnated loess ball, and loess ball. Results showed that Ca-impregnated activated alumina has the highest capacity to adsorb phosphate in water. Scanning electron microscope image analysis showed that activated alumina has high void volume, which provides a large surface area for phosphate to be adsorbed. Through a continuous column test of the Ca-impregnated activated alumina it was discovered that about 4,000 bed volumes of wastewater with about 0.2 mg/L of phosphate can be treated down to lower than 0.14 mg/L of concentration.