• Title/Summary/Keyword: Surface Roughness

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Effect of Deposition Temperature on the Characteristics of Low Dielectric Fluorinated Amorphous Carbon Thin Films (증착온도가 저유전 a-C:F 박막의 특성에 미치는 영향)

  • Park, Jeong-Won;Yang, Sung-Hoon;Park, Jong-Wan
    • Korean Journal of Materials Research
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    • v.9 no.12
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    • pp.1211-1215
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    • 1999
  • Fluorinated amorphous carbon (a-C:F) films were prepared by an electron cyclotron resonance chemical vapor deposition (ECRCVD) system using a gas mixture of $C_2F_6$ and $CH_4$ over a range of deposition temperature (room temperature ~ 300$^{\circ}C$). 500$^{\AA}C$ thick DLC films were pre-deposited on Si substrate to improve the strength between substrate and a-C:F film. The chemical bonding structure, chemical composition, surface roughness and dielectric constant of a-C:F films deposited by varying the deposition temperature were studied with a variety of techniques, such as Fourier transform infrared spectroscopy(FTIR), X-ray photoelectron spectroscopy(XPS), atomic force microscopy (AFM) and capacitance-voltage(C-V) measurement. Both deposition rate and fluorine content decreased linearly with increasing deposition temperature. As the deposition temperature increased from room temperature to 300$^{\circ}C$, the fluorine concentration decreased from 53.9at.% down to 41.0at.%. The dielectric constant increased from 2.45 to 2.71 with increasing the deposition temperature from room temperature to 300$^{\circ}C$. The film shrinkage was reduced with increasing deposition temperature. This results ascribed by the increased crosslinking in the films at the higher deposition temperature.

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Growth of Epitaxial AlN Thin Films on Sapphire Substrates by Plasma-Assisted Molecular Beam Epitaxy (플라즈마분자선에피탁시법을 이용한 사파이어 기판 위 질화알루미늄 박막의 에피탁시 성장)

  • Lee, Hyo-Sung;Han, Seok-Kyu;Lim, Dong-Seok;Shin, Eun-Jung;Lim, Se-Hwan;Hong, Soon-Ku;Jeong, Myoung-Ho;Lee, Jeong-Yong;Yao, Takafumi
    • Korean Journal of Materials Research
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    • v.21 no.11
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    • pp.634-638
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    • 2011
  • We report growth of epitaxial AlN thin films on c-plane sapphire substrates by plasma-assisted molecular beam epitaxy. To achieve two-dimensional growth the substrates were nitrided by nitrogen plasma prior to the AlN growth, which resulted in the formation of a two-dimensional single crystalline AlN layer. The formation of the two-dimensional AlN layer by the nitridation process was confirmed by the observation of streaky reflection high energy electron diffraction (RHEED) patterns. The growth of AlN thin films was performed on the nitrided AlN layer by changing the Al beam flux with the fixed nitrogen flux at 860$^{\circ}C$. The growth mode of AlN films was also affected by the beam flux. By increasing the Al beam flux, two-dimensional growth of AlN films was favored, and a very flat surface with a root mean square roughness of 0.196 nm (for the 2 ${\mu}m$ ${\times}$ 2 ${\mu}m$ area) was obtained. Interestingly, additional diffraction lines were observed for the two-dimensionally grown AlN films, which were probably caused by the Al adlayer, which was similar to a report of Ga adlayer in the two-dimensional growth of GaN. Al droplets were observed in the sample grown with a higher Al beam flux after cooling to room temperature, which resulted from the excessive Al flux.

Development of Outer Support Ring using Complex Forging Processes (복합단조 공정을 적용한 Outer Support Ring 개발)

  • Ju, Won Hong;Park, Sung-young
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.4
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    • pp.653-659
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    • 2017
  • In this study, the complex forging process of an outer support ring was developed and the prototype was manufactured. The current process, hot forging and MCT machining, has a disadvantage of excessive material removal rates and longer machining hours. To overcome this disadvantage, a general shape is given through hot forging and the precision is achieved through cold forging. The complex forging process was developed with the minimal machining process. Forging analysis was carried out to design a forging process using the commercial program, Deform-3D. The hot and cold forging processes were set up based on the analyzed result. The mold and prototype were manufactured. Hardness, surface roughness, internal defect, the grain low line of the prototype were evaluated. The results showed no particular problems, and there were no problems in mass production. Using complex forging, the material was reduced by approximately 27 % compared to the process using hot forging and MCT machining. In addition, the production speed was improved 2.15 fold compared to that of hot forging and MCT machining. Through this study, a cost-effective process and mold design technology were established, which is expected to have positive effects on other related automotive parts production.

Growth and Magnetic Properties of $Y_{3-x}La_xFe_5O_{12}(0.0{\le}X{\le}1.0)$ Powders and Thin Films by a Sol-Gel Method (Sol-Gel 법에 의한 $Y_{3-x}La_xFe_5O_{12}(0.0{\le}X{\le}1.0)$ 분말과 박막의 합성 및 자기적 특성에 관한 연구)

  • 엄영랑;김철성;임연수;이재광
    • Journal of the Korean Magnetics Society
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    • v.8 no.6
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    • pp.350-356
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    • 1998
  • $Y_{3-x}La_xFe_5O_{12}$ (x=0.0, 0.25, 0.5, 0.75, 1.0) powders and thin films were fabricated by a sol-gel method and their magnetic properties and crystal structure were investigated by using X-ray diffraction (XRD), atomic force microscopy (AFM), scanning electron microscopy (SEM), vibrating sample magnetometer (VSM), and Mossbauer spectroscopy. XRD and Mossbauer spectroscopy measurements show that garnet powders annealed at 900 $^{\circ}C$ for 8 hours were single-phased and that thin films fired at 800 $^{\circ}C$ for 2 hours were crystallized without any preferred direction. X-ray diffraction patterns of $Y_{3-x}La_xFe_5O_{12}$ powders annealed at 1000 $^{\circ}C$ had only peaks of the garnet structure in case of x$\leq$0.75 but those of $Y_2LaFe_5O_{12}$ powders consisted of peaks from garnets and $LaFeO_3$. Mossbauer sepectra of garnet powders grown by the sol-gel method had a similar shape of those of powders grown by a conventional ceramic method. Grain sizes of garnet powders were 200~300 nm and the averaged surface roughness was 3.17 nm. Results of VSM measurements show the powders and thin films had soft magnetic properties and that the garnet powders had the largest saturation magnetization, 30 emu/g, and the lowest coercivity, 52 Oe.

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A Study on the Radiometric Correction of Sentinel-1 HV Data for Arctic Sea Ice Detection (북극해 해빙 탐지를 위한 Sentinel-1 HV자료의 방사보정 연구)

  • Kim, Yunjee;Kim, Duk-jin;Kwon, Ui-Jin;Kim, Hyun-Cheol
    • Korean Journal of Remote Sensing
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    • v.34 no.6_2
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    • pp.1273-1282
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    • 2018
  • Recently, active research on the Arctic Ocean has been conducted due to the influence of global warming and new Arctic ship route. Although previous studies already calculated quantitative extent of sea ice using passive microwave radiometers, melting at the edge of sea ice and surface roughness were hardly considered due to low spatial resolution. Since Sentienl-1A/B data in Extended Wide (EW) mode are being distributed as free of charge and bulk data for Arctic sea can be generated during a short period, the entire Arctic sea ice data can be covered in high spatial resolution by mosaicking bulk data. However, Sentinel-1A/B data in EW mode, especially in HV polarization, needs significant radiometric correction for further classification. Thus, in this study, we developed algorithms that can correct thermal noise and scalloping effects, and confirmed that Arctic sea ice and open-water were well classified using the corrected dual-polarization SAR data.

Effect of RTA Temperature on the Structural and Optical Properties of HfO2 Thin Films (급속 열처리 온도가 HfO2 박막의 구조적 및 광학적 특성에 미치는 효과)

  • Chung, Yeun-Gun;Joung, Yang-Hee;Kang, Seong-Jun
    • The Journal of the Korea institute of electronic communication sciences
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    • v.14 no.3
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    • pp.497-504
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    • 2019
  • We fabricated $HfO_2$ thin films using RF magnetron sputtering method, and investigated structural and optical properties of $HfO_2$ thin films with RTA temperatures in $N_2$ ambient. $HfO_2$ thin films exhibited polycrystalline structure regardless of annealing process, FWHM of M (-111) showed reduction trend. The surface roughness showed the smallest of 3.454 nm at a annealing temperature of $600^{\circ}C$ in result of AFM. All $HfO_2$ thin films showed the transmittance of about 80% in visible light range. By fitting the refractive index from the transmittance and reflectance to the Sellmeir dispersion relation, we can predict the refractive index of the $HfO_2$ thin film according to the wavelength. The $HfO_2$ thin film annealed at $600^{\circ}C$ exhibited a high refractive index of 2.0223 (${\lambda}=632nm$) and an excellent packing factor of 0.963.

Calculations of the Single-Scattering Properties of Non-Spherical Ice Crystals: Toward Physically Consistent Cloud Microphysics and Radiation (비구형 빙정의 단일산란 특성 계산: 물리적으로 일관된 구름 미세물리와 복사를 향하여)

  • Um, Junshik;Jang, Seonghyeon;Kim, Jeonggyu;Park, Sungmin;Jung, Heejung;Han, Suji;Lee, Yunseo
    • Atmosphere
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    • v.31 no.1
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    • pp.113-141
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    • 2021
  • The impacts of ice clouds on the energy budget of the Earth and their representation in climate models have been identified as important and unsolved problems. Ice clouds consist almost exclusively of non-spherical ice crystals with various shapes and sizes. To determine the influences of ice clouds on solar and infrared radiation as required for remote sensing retrievals and numerical models, knowledge of scattering and microphysical properties of ice crystals is required. A conventional method for representing the radiative properties of ice clouds in satellite retrieval algorithms and numerical models is to combine measured microphysical properties of ice crystals from field campaigns and pre-calculated single-scattering libraries of different shapes and sizes of ice crystals, which depend heavily on microphysical and scattering properties of ice crystals. However, large discrepancies between theoretical calculations and observations of the radiative properties of ice clouds have been reported. Electron microscopy images of ice crystals grown in laboratories and captured by balloons show varying degrees of complex morphologies in sub-micron (e.g., surface roughness) and super-micron (e.g., inhomogeneous internal and external structures) scales that may cause these discrepancies. In this study, the current idealized models representing morphologies of ice crystals and the corresponding numerical methods (e.g., geometric optics, discrete dipole approximation, T-matrix, etc.) to calculate the single-scattering properties of ice crystals are reviewed. Current problems and difficulties in the calculations of the single-scattering properties of atmospheric ice crystals are addressed in terms of cloud microphysics. Future directions to develop physically consistent ice-crystal models are also discussed.

Review on factors affecting the optical properties of dental zirconia (치과용 지르코니아의 광학적 성질에 영향을 미치는 요소에 대한 문헌고찰)

  • Park, Chan-Ho;Ko, Kyung-Ho;Park, Chan-Jin;Cho, Lee-Ra;Huh, Yoon-Hyuk
    • Journal of Dental Rehabilitation and Applied Science
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    • v.37 no.4
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    • pp.177-185
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    • 2021
  • Clinical applications of translucent zirconia as well as traditional zirconia (3 mol% yttria stabilized tetragonal zirconia polycrystal, 3Y-TZP) are increasing. For this reason, studies on factors affecting the optical properties of dental zirconia have been continuously reported. The optical effect of dental zirconia may vary depending on the yttria content, the thickness of the prosthesis, the sintering process, polishing, glazing and cementation in laboratory and clinical procedures. Increasing the yttria concentration can reduce the masking effect. Translucency decreases as the thickness of the restoration increases, but the required thickness may vary depending on the properties of the zirconia block. The high-speed sintering method can shorten the manufacturing time, but in some cases, the translucency of the prosthesis may decrease. In addition, the optical properties can be affected by the surface roughness of zirconia and the polishing process. The use of an appropriate colored cement can help with the masking effect of zirconia and can be useful for color matching for more esthetic results.

Reduction of VOCs and the Antibacterial Effect of a Visible-Light Responsive Polydopamine (PDA) Layer-TiO2 on Glass Fiber Fabric (Polydopamine (PDA)-TiO2 코팅 유리섬유 직물을 이용한 VOCs의 저감 성능 및 항균성 연구)

  • Park, Seo-Hyun;Choi, Yein;Lee, Hong Joo;Park, Chan-gyu
    • Journal of Environmental Health Sciences
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    • v.47 no.6
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    • pp.540-547
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    • 2021
  • Background: Indoor air pollutants are caused by a number of factors, such as coming in from the outside or being generated by internal activities. Typical indoor air pollutants include nitrogen dioxide and carbon monoxide from household items such as heating appliances and volatile organic compounds from building materials. In addition there is carbon dioxide from human breathing and bacteria from speaking, coughing, and sneezing. Objectives: According to recent research results, most indoor air pollution is known to be greatly affected by internal factors such as burning (biomass for cooking) and various pollutants. These pollutants can have a fatal effect on the human body due to a lack of ventilation facilities. Methods: We fabricated a polydopamine (PDA) layer with Ti substrates as a coating on supported glass fiber fabric to enhance its photo-activity. The PDA layer with TiO2 was covalently attached to glass fiber fabric using the drop-casting method. The roughness and functional groups of the surface of the Ti substrate/PDA coated glass fiber fabric were verified through infrared imaging microscopy and field emission scanning electron microscopy (FE-SEM). The obtained hybrid Ti substrate/PDA coated glass fiber fabric was investigated for photocatalytic activity by the removal of ammonia and an epidermal Staphylococcus aureus reduction test with lamp (250 nm, 405 nm wavelength) at 24℃. Results: Antibacterial properties were found to reduce epidermal staphylococcus aureus in the Ti substrate/PDA coated glass fiber fabric under 405 nm after three hours. In addition, the Ti substrate/PDA coated glass fiber fabric of VOC reduction rate for ammonia was 50% under 405 nm after 30 min. Conclusions: An electron-hole pair due to photoexcitation is generated in the PDA layer and transferred to the conduction band of TiO2. This generates a superoxide radical that degrades ammonia and removes epidermal Staphylococcus aureus.

A Fundamental Study on Shearing/Bonding Characteristics of Interface Between Rock Mass and Backfills in Mine Openings (폐광산 채움재와 암반 경계부의 전단 및 접합특성에 관한 기초 연구)

  • Kim, Byung-Ryeol;Lee, Hyeon-woo;Kim, Young-Jin;Cho, Kye-Hong;Choi, Sung-Oong
    • Tunnel and Underground Space
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    • v.31 no.6
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    • pp.623-646
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    • 2021
  • As the demand for electric power increases with acceleration of electrification at home and abroad, the needs for coal-fired electrical power plant are accordingly increased. However, these coal-fired electrical power plants induce also many environmental problems such as increase of air pollutants, increase of possibility of land contamination by reclamation of coal ash, even though these power plants have a good economical efficiency. In case of a by-product of coal-fired electrical power plants, only 70% of them are recycled and the remaining 30% of by-product are fully buried in surrounding ground. Consequently, this study deals with coal ash backfilling mechanism in abandoned mine openings for the purposes of increasing the coal ash recycling rate as well as securing the mine area stability. In order to analyze the backfill and ground reinforcement by interaction between rock mass and backfills, the copying samples of discontinuous surface with different roughnesses were produced for bond strength tests and direct shear tests. And statistical analysis was also conducted to decide the characteristics of bond and shear behavior with joint roughness and their curing day. Numerical simulations were also analyzed for examining the effect of interface behavior on ground stability.