Growth of Epitaxial AlN Thin Films on Sapphire Substrates by Plasma-Assisted Molecular Beam Epitaxy |
Lee, Hyo-Sung
(Department of Advanced Materials Engineering, Chungnam National University)
Han, Seok-Kyu (Department of Advanced Materials Engineering, Chungnam National University) Lim, Dong-Seok (Graduate school of Green Energy Technology, Chungnam National University) Shin, Eun-Jung (Graduate school of Green Energy Technology, Chungnam National University) Lim, Se-Hwan (Graduate school of Green Energy Technology, Chungnam National University) Hong, Soon-Ku (Department of Advanced Materials Engineering, Chungnam National University) Jeong, Myoung-Ho (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) Lee, Jeong-Yong (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) Yao, Takafumi (Center for Interdisciplinary Research, Tohoku University) |
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