• Title/Summary/Keyword: Surface Profiler

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A study on the Deposition Characteristics of AIN Thin Films by using RF Sputtering (RF 스퍼터링을 이용한 AIN 박막의 증착특성에 관한 연구)

  • 이민건;장동훈;강성준;윤영섭
    • Proceedings of the IEEK Conference
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    • 2003.07b
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    • pp.1049-1052
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    • 2003
  • This study shows the change of the structural characteristic of AIN thin film deposition with the change of the deposition conditions such as Ar/$N_2$ gas ratio, operating pressure in chamber, and the distance between substrate and target in RF Magnetron Sputtering. The orientation and surface roughness of AIN thin film are studied by using XRD and AFM and the thickness is measured by using STYLUS PROFILER. While we can not identify the orientation of the thin film deposited in Ar only, we can obtain the (100) orientation of the thin film with the addition of $N_2$ to Ar. Especially the thin film deposited at 10% of Ar/$N_2$ gas ratio appears to be the most (100) oriented. The (100) orientation of thin film becomes weaker as the operating pressure becomes higher. The further distance between substrate and target is stronger the (100) orientation of the thin film is. The (100) orientation becomes weaker and (002) orientation starts to appear as the distance is shorter.

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Critical Parameters to Improve the Fatigue Properties in the High Carbon Steel Wires (고 강도 극 세선의 피로 특성 향상을 위한 특정 인자 제시)

  • Yang, Y.S.;Bae, J.G.;Park, C.G.
    • Transactions of Materials Processing
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    • v.17 no.2
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    • pp.91-96
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    • 2008
  • The governing parameters affecting the fatigue properties have been investigated experimentally in the high carbon steel wires with 0.94 wt.%C. In order to find the crucial factors, the advanced analysis techniques such as optical 3-D profiler, focused ion beam(FIB) and transmission electron microscope(TEM) were used. The two-type steel wires with different drawing strain were fabricated. The fatigue properties were measured by hunter rotating beam tester, specially designed for thin-sized steel wires. It was found that the fatigue properties of the steel wires with high drawing strain was higher than that with other wires because of low residual stress and high adhesion condition of brass coating layer.

Measurement of vertical migration speed of Sound Scattering Layer using an bottom mooring type Acoustic Doppler Current Profiler (해저설치형 음향도플러유향유속계를 이용한 음향산란층의 연직이동속도 측정)

  • Jo, Hyeon-Jeong;Lee, Kyoung-Hoon
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.46 no.4
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    • pp.449-457
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    • 2010
  • This study shows that the vertical migration speed of sound scattering layers (SSLs), which is distributed in near Funka Bay, were measured by 3D velocity components acquired from a bottom moorng ADCP. While the bottom mooring type has a problem to measure the velocity vectors of sound scattering layer distributed near to surface, both the continuous vertical migration patterns and variability of backscatterers were routinely investigated as well. In addition, the velocity vectors were compared with the vertical migration velocity estimated from echograms of Mean Volume Backscattering Strength, and estimated to produce observational bias due to SSLs which is composed of backscatterers such as euphausiids, nekton, and fishes have swimming ability.

Physical Envirionment Associated with Upwelling off the Southeast Coast of Korea (한국 남동해안의 용승과 관련된 물리환경)

  • Lee, Jae Chul;Kim, Dae Hyun
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.51 no.5
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    • pp.579-589
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    • 2018
  • Data from the two bottom moorings of ADCP (acoustic doppler current profiler), coastal weather station and CTC (conductivity temperature depth) observations for 2001 were analyzed to describe the physical processes associated with upwelling off the southeast coast of Korea. Winds were favorable for upwelling during summer, but were not correlated with currents. Shoaling of isotherms toward the coast due to the baroclinic tilting of the strong East Korean Warm Current (EKWC) provided a favorable background for immediate upwelling-response of surface temperature to southerly winds. This baroclinic effect was supported by a significant inverse coherence between the upper-layer current and bottom temperature near the coast. This upwelling is similar to the Guinea Current upwelling, which is driven by remote forcing (Houghton, 1989). Persistent southward flow was observed below approximately $10^{\circ}C$ isotherm throughout the observation period.

Experimental Study on the Thermal Performance of Passive Solar Trombe Wall System (자연형태양열 트롬월 축열벽 시스템의 열성능 특성 실측 분석 연구)

  • Yoon, Jong-Ho;Baek, Nam-Choon;Shin, U-Cheul
    • Journal of the Korean Solar Energy Society
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    • v.28 no.1
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    • pp.75-81
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    • 2008
  • Thermal performance of passive solar Trombe wall system which is applied on the south wall of KIER Zero energy Solar House has been monitored for 6 months of heating season. Based upon the long-term measurement results, extensive statistical analysis was conducted to investigate temperature profiler and heat flow pattern in Trombe wall system under actual operating condition. Heat flow characteristics depending on the time variation of day and month was clearly revealed. Heat gain and loss on the inner surface of the Trombe wall was calculated base upon measured temperature data. Those results would be utilized to improve the efficiency of new type solar storage wall system.

Properties of AZO Thin Film deposited on the PES Substrate (PES 기판상에 증착된 AZO 박막의 특성)

  • Kim, Sang-Mo;Kim, Kyung-Hwan
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.20 no.12
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    • pp.1072-1076
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    • 2007
  • We prepared the Al doped ZnO (AZO) thin film on polyethersulfon (PES) without any substrate heating by Facing Targets Sputtering (FTS) system. FTS system has two different facing targets. One is ZnO doped the content of Al 2 wt% and the other is Zn in order to decrease resistivity. The electrical, structural and optical properties of AZO thin films were investigated. To evaluate the as-deposited thin film properties, we employed four-point probe (CMT-R100nw, Changmin), Surface profiler (Alpha-step, Tencor), UV/VIS spectrometer (HP), X-ray diffractometer (XRD, Rigaku) and Field Emission Scanning Electron Microscopy (FESEM, Hitachi S-4700). As a result, We obtained that AZO thin film deposited on PES substrate at a DC Power of 150 W, working pressure of 1 mTorr and $O_2$ gas flow ratio of 0.2 exhibited the resistivity of $4.2{\times}10^{-4}\;[{\Omega}cm]$ and the optical transmittance of about 85 % in the visible range.

Laser dissect writing from copper(II) formate using Ar+ laser (아르곤 이온 레이저를 이용한 CU의 직접 쓰기 기술)

  • Lee, Hong-Kyu;Lee, Cheon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.663-666
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    • 2000
  • Laser direct writing of micro-patterned copper lines has been achieved by pyrolytic decomposition of copper formate films (Cu(HCOO)$_2$$.$4H$_2$O), as a precursor, using a focused Ar$\^$+/ laser beam ($\lambda$= 514 nm) on PCB boards and glass substrates. The linewidth and thickness of the lines were investigated as a function of laser power and scan speed. The profiles of the lines were measured by scanning electron microscope (SEM), surface profiler (${\alpha}$-step) and atomic force microscopy (AFM). The electrical resistivities of the patterned lines were also investigated as a function of laser parameter using probe station and semiconductor analyzer. we compared resistivities of the patterned lines with that of the Cu bulk, respectively.

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Effects of $H_2$ Pretreatment using plasma for improved characteristics of Cu thin films (Cu 박막의 특성개선을 위한 플라즈마를 이용한 $H_2$ 전처리 효과)

  • 이종현;이정환;최시영
    • Journal of the Korean Vacuum Society
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    • v.8 no.3A
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    • pp.249-255
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    • 1999
  • Deposition characteristics of Cu thin films using Ar carrier gas and $H_2$ processing gas at various working pressures and substrate temperatures were investigated. Also, effects of $H_2$ pretreatment using plasma at $200^{\circ}C$ of substrate temperature and 0.6 Torr of chamber pressure were stdied. Cu thin films were deposited on TiN/Si substrate at working pressure of 0.5~1.5 Torr, substrate temperatures of 140~$240^{\circ}C$ with (hface)Cu(tmvs). Substrates were pretreated by $H_2$ plasma, and Cu films deposited in situ using twofold shower head. The purity, electrical resistivity, thickness, surface morphology, optical properties of the deposited Cu films were measured b the AES, four point probe, stylus profiler, SEM,. and the uv-visible spectrophotometer. This study suggests that $H_2$ plasma is an effective method for enhancing deposition rate and for producing high quality copper thin films.

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Optimization of Process Variables of Shape Drawing for Steering Spline Shaft (조향장치용 스플라인 샤프트 이형인발 공정변수 최적화)

  • Lee, S.K.;Kim, S.M.;Lee, S.B.;Kim, B.M.
    • Transactions of Materials Processing
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    • v.19 no.2
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    • pp.132-137
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    • 2010
  • In the multi-pass shape drawing process, the appropriate process design is very important to produce sound products. The reduction ratio, die angle, and the intermediate die shape are very important process variable of the multi-pass shape drawing. The aim of this study is the determination of the reduction ratio, die angle, and the intermediate die shape of the 2 pass shape drawing process for producing steering spline shaft. In this study, FE analysis, Taguchi method, and ANN(artificial neural network) were applied to determine the appropriate reduction ratio, die angle, and intermediate die shape. After the determination of the process variables, FE analysis and drawing experiment were performed to evaluate the effectiveness of the determined process variables. The dimensional accuracy of the final drawn spline shaft was evaluated by using 3D surface profiler and 3D laser digitizing system.

Preparation of Al electrode with Ar-Kr gas mixture for OLED application (Ar-Kr 혼합가스를 이용한 OLED용 Al 전극 제작)

  • Kim, Sang-Mo;Jang, Kyung-Wook;Lee, Won-Jae;Kim, Kyung-Hwan
    • Journal of the Semiconductor & Display Technology
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    • v.6 no.4
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    • pp.11-15
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    • 2007
  • As preparing electrode for the OLED with the sputtering process, in order to be lower damage of the bottom organic layer and increase the life-time of the OLED, we prepared Al electrode for that by using Facing Targets Sputtering (FTS) system. Al electrode directly deposited on the cell (LiF/EML/HTL/Bottom electrode). Deposition condition was the working gas (Ar, Kr and Ar+Kr) and working gas pressure (1 and 6 mTorr). The film thickness and I-V curve of Al/cell were evaluated by a $\acute{a}$-step profiler and a semiconductor parameter (HP4156A) measurement. The thin film surface image was observed by a Atomic Force Microscope (AFM). In result, in comparison with about 11 [V] of the turn-on voltage of Al/cell with using the pure Ar gas, when Al thin film was deposited using the Ar-Kr mixture gas, the surface morphology was improved in some region and the turn-on voltage of Al/cell could be decreased to about 7 [V].

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