Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)
- Volume 6 Issue 4
- /
- Pages.11-15
- /
- 2007
- /
- 1738-2270(pISSN)
Preparation of Al electrode with Ar-Kr gas mixture for OLED application
Ar-Kr 혼합가스를 이용한 OLED용 Al 전극 제작
- Kim, Sang-Mo (Department of Electrical Engineering, Kyungwon University) ;
- Jang, Kyung-Wook (Department of Electrical Engineering, Kyungwon University) ;
- Lee, Won-Jae (Department of Electronics Engineering, Kyungwon University) ;
- Kim, Kyung-Hwan (Department of Electrical Engineering, Kyungwon University)
- Published : 2007.12.30
Abstract
As preparing electrode for the OLED with the sputtering process, in order to be lower damage of the bottom organic layer and increase the life-time of the OLED, we prepared Al electrode for that by using Facing Targets Sputtering (FTS) system. Al electrode directly deposited on the cell (LiF/EML/HTL/Bottom electrode). Deposition condition was the working gas (Ar, Kr and Ar+Kr) and working gas pressure (1 and 6 mTorr). The film thickness and I-V curve of Al/cell were evaluated by a