• 제목/요약/키워드: Surface Character

검색결과 353건 처리시간 0.024초

극한 환경 MEMS용 2" 3C-SiC기판의 직접접합 특성 (Direct Bonding Characteristics of 2" 3C-SiC Wafers for Harsh Environment MEMS Applications)

  • 정귀상
    • 한국전기전자재료학회논문지
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    • 제16권8호
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    • pp.700-704
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    • 2003
  • This paper describes on characteristics of 2" 3C-SiC wafer bonding using PECVD (plasma enhanced chemical vapor deposition) oxide and HF (hydrofluoride acid) for SiCOI (SiC-on-Insulator) structures and MEMS (micro-electro-mechanical system) applications. In this work, insulator layers were formed on a heteroepitaxial 3C-SiC film grown on a Si (001) wafer by thermal wet oxidation and PECVD process, successively. The pre-bonding of two polished PECVD oxide layers made the surface activation in HF and bonded under applied pressure. The bonding characteristics were evaluated by the effect of HF concentration used in the surface treatment on the roughness of the oxide and pre-bonding strength. Hydrophilic character of the oxidized 3C-SiC film surface was investigated by ATR-FTIR (attenuated total reflection Fourier transformed infrared spectroscopy). The root-mean-square suface roughness of the oxidized SiC layers was measured by AFM (atomic force microscope). The strength of the bond was measured by tensile strength meter. The bonded interface was also analyzed by IR camera and SEM (scanning electron microscope), and there are no bubbles or cavities in the bonding interface. The bonding strength initially increases with increasing HF concentration and reaches the maximum value at 2.0 % and then decreases. These results indicate that the 3C-SiC wafer direct bonding technique will offers significant advantages in the harsh MEMS applications.ions.

Chine형(型) 선체(船體)의 상하진동시(上下振動時) 선체표면(船體表面)에 작용(作用)하는 유체압력(流體壓力)에 관(關)한 고찰(考察) (On the Two-Dimensional Hydrodynamic Pressure on the Hull Surface of the Chine-Type Ship in Vertical Vibration)

  • 김극천
    • 대한조선학회지
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    • 제6권2호
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    • pp.11-16
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    • 1969
  • Chine형(型) 선체(船體)의 상하진동시(上下振動時) 수선하(水線下) 선체표면(船體表面)에 작용(作用)하는 2차원적(次元的) 유체압력(流體壓力)의 분포특성(分布特性)을 고찰(考察)할 목적(目的)으로 앞서 발표(發表)한 논문(論文) [1]에서 채용(採用)했던 Chine형(型) 선체단면형상(船體斷面形狀)을 주는 2경수군(徑數群) 등각사상함수(等角寫像函數)를 이용(利用)하여 변동압력(變動壓力)의 분포(分布)를 계산(計算)하고 이를 Hypotrocoid성질(性質)을 갖는 Lewis form, 원단면(圓斷面), 타원단면(楕圓斷面), 삼각형단면(三角形斷面) 및 사각형단면(四角形斷面) 등(等) 여러 가지 다른 단면형상(斷面形狀)을 가지는 주상체(柱狀體)들의 경우(境遇)와 비교검토(比較檢討)하였다.

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Machined 임플란트와 RBM surface 임플란트의 비교 연구 (A compare research of machined implant and RBM surface implant)

  • 유임수;임성빈;정진형;홍기석
    • Journal of Periodontal and Implant Science
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    • 제38권3호
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    • pp.467-474
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    • 2008
  • Purpose: To evaluate RBM surface implant which has its good character like that good initial stability, early bone formation. Material and Methods: In this study fixures have divided in 2 group: Machined(Group I), RBM(Group II). Total 10 fixtures were implanted on rabbit which sacrificed on week 2 and week 4 for the histological specimens. By these specimens polarized microscopic view, micro CT view, ISQ value were measured, compared and analysed by each group to figure out the evidence that clinical use of RBM implant. Result: ISQ value had no significance differences between 2 groups, However in each group 4, 8 weeks had higher ISQ value than 2 weeks. In polarized microscope, calcification level was following: Group II, Group I. In micro CT, formation of cancellous bone level was following: Group II, Group I. Conclusion: RBM implant was the most excellent on the early bone formation and good initial stability.

Generalized Rayleigh wave propagation in a covered half-space with liquid upper layer

  • Negin, Masoud
    • Structural Engineering and Mechanics
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    • 제56권3호
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    • pp.491-506
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    • 2015
  • Propagation of the generalized Rayleigh waves in an initially stressed elastic half-space covered by an elastic layer is investigated. It is assumed that the initial stresses are caused by the uniformly distributed normal compressional forces acting on the face surface of the covering layer. Two different cases where the compressional forces are "dead" and "follower" forces are considered. Three-dimensional linearized theory of elastic waves in initially stressed bodies in plane-strain state is employed and the elasticity relations of the materials of the constituents are described through the Murnaghan potential where the influence of the third order elastic constants is taken into consideration. The dispersion equation is derived and an algorithm is developed for numerical solution to this equation. Numerical results for the dispersion of the generalized Rayleigh waves on the influence of the initial stresses and on the influence of the character of the external compressional forces are presented and discussed. These investigations provide some theoretical foundations for study of the near-surface waves propagating in layered mechanical systems with a liquid upper layer, study of the structure of the soil of the bottom of the oceans or of the seas and study of the behavior of seismic surface waves propagating under the bottom of the oceans.

막 오염 저항성이 우수한 나노 소재 정밀 여과막의 특성 연구 (Characterization of the Nano-material U Membranes with Excellent Fouling Resistance)

  • 최정환;이정빈;김인철
    • 멤브레인
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    • 제15권4호
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    • pp.289-296
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    • 2005
  • MBR 공정에서 가장 문제시되는 부분은 실제 공정상에서 막 표면에 오염이 발생하는 문제이다. 일반적으로 막 오염은 활성 슬러지들이 막 표면에 퇴적되어서 일어나며 이로 인해 심각한 투과 유량의 감소를 야기하게 된다. 본 연구에서는 막 오염 저항성이 뛰어난 나노 입자를 분리막 표면에 함침시켜 MBR 막을 제작하였으며 이 입자들은 막 표면에서 활성 슬러지들이 쉽게 달라 붙지 못하는 역할을 수행하게 된다. 즉, 뛰어난 투수량을 지닌 정밀여과막에 나노 입자를 첨가함으로서 실제 MBR 공정에서 막 오염을 저감시킴으로서 투수량을 보전할 수 있게 하였다. 이들을 이용하여 MBR 공정에서 막 오염이 휠씬 적게 일어나는 것을 확인하였으며 이를 바탕으로 현장에 적용하여 막 오염 저항성을 확인하였다.

산성황산동 용액 내에서 동판위에 녹청 형성에 관한 기초적 조사 (An Investigation on the Patination of Copper in Acidic Copper Sulfate Solution)

  • 윤승열
    • 한국표면공학회지
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    • 제5권3호
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    • pp.77-85
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    • 1972
  • A method of preparation of synthetic ignorgaic coating on copper (patina) has been presented . An Eh--pH diagram was constructed for the present Cu-H2O-SO$_4$ system using the most recently available thermodynamic data. In the path of the patination at room temperature the general behaviour of copper in acidic copper sulfate solutions with potassium chlorate as an oxidizing agent appeared to follow those predictable in this Eh-pH diagram. In the presence 0.05 molar cupric sulfate at a temperature of about 28$^{\circ}C$ a green brochantite (CuSO$_4$$.$3Cu(OH)$_2$) layer was formed on copper sheet in 20 days. In a solution having an initial pH of 3.5 the development of a brochantite coating has been observed to take place in two stages. In the first, a layer of cuprous oxide formed on the copper at a relatively rapid rate. In the ensuing step the outer layer of cuptrite was oxidized at much slower rate to form brochantite. The syntetic coatings appeared to consist of crystal-lites of brochanitite growing perpendicular to the cuprose oxide surface. The outer tips of the -crystallites were reasily broken off and gave to the layer a rather chalky character. Underneath, at the brochantite Cu$_2$O interface, however, the green layers were firmely attached. The effect of reagent concentration , solution agitation , and moderate temperature increase were investigated to improve the quality of coating. So also in a qualitative way were the effect of light.

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Analysis of the fracture surface morphology of concrete by the method of vertical sections

  • Konkol, Janusz;Prokopski, Grzegorz
    • Computers and Concrete
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    • 제1권4호
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    • pp.389-400
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    • 2004
  • The examinations carried out have confirmed a relationship existing between the character of fracture surfaces and the composition and structure of (basalt and gravel) concretes. For both concretes investigated, a very good correlation was obtained between the profile line development factor, $R_L$, and the fracture surface development factor, $R_S$. With the increase in the $R_L$ parameter, the fracture surface development factor $R_S$ also increased. Agreement between the proposed relationship of $R_S=f(R_L)$ and the proposal given by Coster and Chermant (1983) was obtained. Stereological examinations carried out along with fractographic examinations made it possible to obtain a statistical model for the determination of $R_L$ (or $R_S$) based on the volume of air voids in concrete, $V_{air}$, the specific surface of air pores, $S_V_{air}$ the specific surface of coarse aggregate, $S_{Vagg.}$, and the volume of mortar, $V_m$. An effect of coarse aggregate type on the obtained values of the profile line development factor, $R_L$, as well as on the relationship $R_S=f(R_L)$ was observed. The increment in the fracture surface development factor $R_S$ with increasing $R_L$ parameter was larger in basalt concretes than in gravel concretes, which was a consequence of the level of complexity of fractures formed, resulting chiefly from the shape of coarse aggregate grains.

도시 경관향상을 위한 경전철 교각의 시각적 특성 (Visual Characteristics of Light Rail Transit Pier for Improving Urban Landscape)

  • 정성관;신재윤;김경태;임은나
    • 한국환경복원기술학회지
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    • 제16권4호
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    • pp.65-81
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    • 2013
  • Urban sprawl has been the limits of traffic accommodate and the supply road. Thus, Light Rail Transit(LRT) has been proposed as the best alternative. Owing to landscape damage from construction of LRT, landscape planning should be considered seriously in the urban planning step. This paper therefore seeks to determine landscape improvement direction of LRT pier. First, the methods in this study shared landscape improvement direction type of LRT pier through previous studies such as planting of surface(30%, 60%, 90% planting of surface), graphic(character, commercial advertising, symbol), and surface treatment type(exposed concrete, white painting, pattern dies). Next, respondent evaluated 3D simulated landscape image accordingly shared types by preference and landscape adjectives using in streetscape evaluation. As a result, visual preference was the highest in planting type of surface and the lowest in the surface treatment type. Covering 60%(4.48) in planting type of surface was the highest. Because it is similar to the golden ratio considering the visual principle, we will need to take advantage through the result of this paper. Also, most landscape improvement direction which satisfied with significant level showed a positive effect from landscape improvement. Comprehensively based on these results, it suggests desirable landscape improvement direction of LRT pier in the city for solution of landscape inhibition problem.

구형지하공동 형성이 지표침하에 미치는 영향에 대한 3차원 개별요소해석 (The effect of formation of spherical underground cavity on ground surface settlement : Numerical analysis using 3D DEM)

  • 이상현;이항로;송기일
    • 한국터널지하공간학회 논문집
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    • 제18권2호
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    • pp.129-142
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    • 2016
  • 지표침하를 발생시키는 다양한 원인 중에 하나로 알려진 지하에서 발생되는 공동은 지반의 불연속적 특징이다. 그러므로 기존의 연속체해석으로 분석하기에는 한계가 있을 것으로 판단된다. 본 연구에서는 지표침하를 발생시키는 구형지하공동에 대해서 개별요소법을 활용하여 분석하였다. 지표침하에 영향을 미치는 구형지하공동의 특성인자로서 지반의 물성치, 구형지하공동의 심도 및 크기를 선택하였고, 각 특성인자들의 값의 변화가 지표침하에 미치는 영향에 대해 분석하였다. 또한 지하공동의 직경에 대한 상대적 깊이와 지표침하의 관계를 분석하였고, 이를 통해 지하공동의 붕괴 예측 및 보강유무를 결정하기 위한 근간을 제시하였다.

Impact of Air Convection on H3PO4-Activated Biomass for Sequestration of Cu (II) and Cd (II) Ions

  • Girgis, Badie S.;Elkady, Ahmed A.;Attia, Amina A.;Fathy, Nady A.;Abdel Wahhab, M. A.
    • Carbon letters
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    • 제10권2호
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    • pp.114-122
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    • 2009
  • Crushed, depitted peach stones were impregnated activated with 50% $H_3PO_4$ followed by pyrolysis at $500^{\circ}C$. Two activated carbons were produced, one under its own evolved gases during pyrolysis, and the second conducted with air flow throughout the carbonization stage. Physicochemical properties were investigated by several procedures; carbon yield, ash content, elemental chemical analysis, TG/DTG and FTIR spectra. Porosity characteristics were determined by the conventional $N_2$ adsorption at 77 K, and data analyzed to get the major texture parameters of surface area and pore volume. Highly developed activated carbons were obtained, essentially microporous, with slight effect of air on the porous structure. Oxygen was observed to be markedly incorporated in the carbon matrix during the air treatment process. Cation exchange capacity towards Cu (II) and Cd (II) was tested in batch single ion experimental mode, which proved to be slow and a function of carbon dose, time and initial ion concentration. Copper was up taken more favorably than cadmium, under same conditions, and adsorption of both cations was remarkably enhanced as a consequence of the air treatment procedure. Sequestration of the metal ions was explained on basis of the combined effect of the oxygen functional groups and the phosphorous-containing compounds; both contributing to the total surface acidity character.