• 열처리공학회지
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• 제18권1호
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• pp.24-28
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• 2005

New post plasma nitriding can achieve a high uniformity that have been difficult in DC nitriding and have a high productivity comparable to gas nitriding. However, it has not a enough high nitriding potential for a rapid nitriding, because surface activation or ion etching in the general plasma nitriding cannot be expected. Thus, in this study, the effects of pre-treatments with oxidation and reduction gas have been investigated to improve the nitriding kinetics of post plasma nitriding. An effective pre-treatment consisting of oxidation and reduction resulted in the increase of surface energy of STD 11. This induced the surface hardness and the effective nitriding depth of STD 11. It is thought that the increase of the surface energy and the surface area with pre-treatment promote the nucleation of nitriding layer.

• Macromolecular Research
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• 제12권6호
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• pp.608-614
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• 2004

Isotactic polypropylene (PP) surfaces were modified with argon and oxygen plasmas using a radio­frequency (RF) glow discharge at 240 mTorr and 40 W. The changes in topography and surface structure were investigated by atomic force microscopy (AFM) in conjunction with specular reflectance of infrared (IR) microspectroscopy. Under our operating conditions, the AFM image analysis revealed that longer plasma treatment resulted in significant ablation on the PP surface, regardless of the kind of plasma employed, but the topography was dependent on the nature of the gases. Specular reflectance IR spectroscopic analysis indicated that the constant removal of surface material was an important ablative aspect when using either plasma, but the nature of the ablative behavior and the resultant aging effects were clearly dependent on the choice of plasma. The use of argon plasma resulted in a negligible aging effect; in contrast, the use of oxygen plasma caused a noticeable aging effect, which was due to reactions of trapped or isolated radicals with oxygen in air, and was partly responsible for the increased surface area caused by ablation. The use of oxygen plasma is believed to be an advantageous approach to modifying polymeric materials with functionalized surfaces, e.g., for surface grafting of unsaturated monomers and incorporating oxygen-containing groups onto PP.

• 한국세라믹학회지
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• 제53권1호
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• pp.93-98
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• 2016

Cold plasma and heat treatment were selected as technologies to reduce unburned carbon in fly ash to less than 1.0%. Both cold plasma and heat treatment made it possible to eliminate unburned carbon to less than 1.0%. In the case of fly ash, which almost entirely eliminated unburned carbon with an ignition loss of 0.5%, heat treatment caused adhesion among particles and the BET specific surface area rapidly decreased as the mean particle size increased. On the other hand, with cold plasma, unburned carbon elimination caused the BET specific surface area to decrease and, as no adhesion occurred among particles, the mean particle size became small. Also, cold plasma treatment allowed small spherical particles confined within the unburned carbon particles to be released with the elimination of the unburned carbon frame, so that the quantity of fine particles had a tendency to slightly increase.

• Korean Chemical Engineering Research
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• 제49권3호
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• pp.271-276
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• 2011

대면적 대기압 플라즈마 반응 장비를 플라즈마-용액 시스템에 적용하여 액상 내부에 잠입된 폴리프로필렌(PP) 필름의 표면손상 없이 관능기 도입 가능성을 탐색하였다. 액상으로 1-butyl-3-methylimidazolium tetrafluoroborate: $[BMIM]^{+}[BF_{4}]^{-}$ 이온성 액체 수용액을 사용한 경우, 안정적으로 플라즈마를 발생시킬 수 있었다. PP 필름의 플라즈마 처리 결과, PP 표면에 다양한 산소 함유 관능기들이 도입되었음을 확인할 수 있었다. 플라즈마 처리 후 PP의 표면 자유에너지는 처리시간, 전압의 증가에 따라서 증가하며, 1.5M 이온성 액체 수용액 농도에서 가장 큰 값을 나타내었다. ATR-FTIR 분석 결과, 다양한 카르보닐 기(1,726 $cm^{-1}$, 1,643 $cm^{-1}$)와 하이드록시 기$(3,100{\sim}3,500\;cm^{-1})$의 흡광도가 증가하였고, XPS 분석은 ATR-FTIR 분석 결과를 뒷받침하여 주었다.

• 한국진공학회지
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• 제19권1호
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• pp.45-51
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• 2010

마그네트론 타겟에서 일어나는 다양한 물리적 현상에 의한 결과로 인해 발생하는 타겟 표면의 온도를 측정함으로써 그 분포가 플라즈마, 혹은 증착되는 박막에 영향을 줄 수 있는 가능성을 분석하였다. 마그네트론 스퍼터링의 타겟은 크게 원형 타겟과 사각 타겟으로 구분되는데, 사각 타겟에서는 자기장에 의한 corner effect 등에 의해 전자 집중 방전 영역이 발생하고 그것에 의해 타겟 표면에서 불균일한 온도분포가 생성됨을 확인했다. 국부적으로 온도가 높게 올라가는 지역은 비스퍼터링 지역에 비해 $10{\sim}20^{\circ}C$ 정도 높았으며, 스퍼터링 공정 시 문제점 중에 하나인 particle이 발생하면 그 부분에서 온도가 $20^{\circ}C$ 정도 더 상승함을 알 수 있었다. 이런 영향은 증착되는 박막의 균일도에도 적지 않은 영향을 주었으며 세라믹 타겟의 경우, 균열의 원인이 될 수 있고, 불균일한 타겟 침식으로 타겟의 수명을 단축시키는 문제를 유발하기도 한다.

• Carbon letters
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• 제6권4호
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• pp.243-247
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• 2005

Plasma polymerization of allylamine subsequently after plasma pre-treatment was conducted on the activated carbon fibers (ACFs) for the immobilization of amine groups in the surface of ACFs. The change of structural properties of ACFs with respect to different polymerization conditions was investigated through BET method. The change of surface morphologies of ACFs with respect to different plasma polymerization power was also studied through AFM. It was found that the structural properties such as specific surface area and micropore volume could be optimized under certain plasma deposition conditions. It was reckoned that treatment and deposition showed adverse effect on plasma polymerization, in which the former developed the micro-structures of the ACFs and the latter tended to block the micro pores. The Fourier transform infrared spectroscopy (FTIR) revealed that the poly(allylamine) was successfully immobilized on the surface of ACFs and the amount of the deposited polymer layer was related to the plasma polymerization power. SEM results showed that the plasma deposited polymer layer were small and homogenously distributed. The size and the distribution of particles deposited were closely related to the plasma polymerization power, too.

• Elastomers and Composites
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• 제37권3호
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• pp.192-194
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• 2002

Polyester cord yarns have been treated in an atmospheric-pressure nitrogen plasma reactor in order to enhance their adhesion to rubber. A thin layer or the plasma was generated in the close vicinity of the yam surface using various types or surface discharge. To assess the effect of the plasma treatment on fiber surface properties, the cord thread/rubber matrix adhesion values measured using the untreated and threads cord threads were compared. The static and dynamic adhesion of the cord thread to rubber was characterized by using the standard Henley test. The dynamic adhesion values for the reference and plasma treated fiber were $7,3{\pm}1,2\;N$ and $83,5{\pm}3,5\;N$. The surface properties were investigated by scanning electron microscopy, infrared spectroscopy and electron spin resonance spectroscopy. It is concluded that both polar group interactions and increased surface area of the fibers are responsible for the improved adhesive strength.

• 한국응용과학기술학회지
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• 제40권1호
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• pp.71-80
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• 2023

실버 페이스트는 상대적으로 낮은 열처리로 공정이 가능하기 때문에 전자 소자 응용분야에서 유용한 전극 재료이다. 본 연구에서는 은 페이스트 전극에 대기압 플라즈마 제트를 이용하여 전극 표면을 처리 했다. 이 플라즈마 제트는 11.5 kHz 작동 주파수에서 5.5 ~ 6.5 kV의 고전압을 사용하여 아르곤 분위기에서 생성되었다. 플라즈마 제트는 대기압에서 수행함으로써 인쇄 공정에 더 유용할 수 있다. 플라즈마 처리시간, 인가된 전압, 가스유량에 따라 전극의 표면은 빠르게 친수성화 되었으며 접촉각의 변화가 관찰되었다. 또한, 대면적 샘플에서 플라즈마 처리 후 접촉각의 편차가 없었는데, 이는 기판의 크기에 관계없이 균일한 결과를 얻을 수 있었다는 것을 의미한다. 본 연구의 결과는 대면적 전자소자의 제조 및 향후 응용 분야에서 적층 구조를 형성하는데 매우 유용할 것으로 기대된다.

• 마이크로전자및패키징학회지
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• 제26권3호
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• pp.51-57
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• 2019

구리 표면을 대기 중의 산화로부터 보호하기 위해서 아르곤(Ar)과 질소($N_2$) 가스를 이용하는 two-step플라즈마 공정으로 산화 방지층인 구리 질화물 패시베이션 형성을 연구하였다. Ar 플라즈마는 구리 표면에 존재하는 이물질을 제거하는 동시에 표면을 활성화시켜 다음 단계에서 진행되는 $N_2$ 플라즈마 공정 시 질소 원자와 구리의 반응을 촉진시키는 역할을 수행한다. 본 연구에서는 two-step 플라즈마 공정 중 Ar 플라즈마 공정 조건이 구리 질화물 패시베이션 형성에 미치는 영향을 실험계획법의 완전요인설계를 통하여 분석하였다. XPS 분석에 의하면 Ar 플라즈마 공정 시 낮은 RF 파워와 압력을 사용할 경우 구리 산화물 피크(peak) 면적은 감소하고, 반대로 구리 질화물(Cu4N, Cu3N) 피크 면적은 증가하였다. Ar 플라즈마 공정 시 구리 질화물 형성의 주 효과는 RF 파워로 나타났으며 플라즈마 공정 변수간 교호작용은 거의 없었다.

• Journal of Welding and Joining
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• 제13권1호
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• pp.103-114
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• 1995

Plasma Transferred arc(PTA) hard facing process has been developed to obtain an overlay weld metal having excellent wear resistance. The effect of Ti, TiSi$_{2}$ and TiC powders addition on the surface of Aluminum alloy 5083 has been investigated with PTA process. This paper describes the result of test the performance of the overlay weld metal. The result can be summarized as follows 1. Intermetallic compound is formed on surface of base metal in Ti or TiSi$_{2}$ powder but the reaction with surface of base metal is little seen in TiC powder. 2. In formation of composite layer on aluminum alloy surface by plasma transferred arc welding process, high melting ceramics like TiC powder is excellent. 3. The multipass welding process is available for formation of high density of powder. But the more number of pass, the less effect of powder, it is considered, and limits of number of pass. 4. By increasing area fraction of TiC powder on Al alloy surface, in especially TiC powder the hardness increase more than 40% area fraction and 88% shows about Hv 700.