• 한국정보디스플레이학회:학술대회논문집
• /
• 2003.07a
• /
• pp.1038-1041
• /
• 2003

In the paper, we investigated silicon surface microstructures formed by reactive ion etching in hollow cathode system. Wet anisotropic chemical etching technique use to form random pyramidal structure on <100> silicon wafers usually is not effective in texturing of low-cost multicrystalline silicon wafers because of random orientation nature, but High density hollow cathode plasma system illustrates high deposition rate, better film crystal structure, improved etching characteristics. The etched silicon surface is covered by columnar microstructures with diameters form 50 to 100nm and depth of about 500nm. We used $SF_{6}$ and $O_{2}$ gases in HCP dry etch process. This paper demonstrates very high plasma density of $2{\times}10^{12}$ $cm^{-3}$ at a discharge current of 20 mA. Silicon etch rate of 1.3 ${\mu}s/min$. was achieved with $SF_{6}/O_{2}$ plasma conditions of total gas pressure=50 mTorr, gas flow rate=40 sccm, and rf power=200 W. Our experimental results can be used in various display systems such as thin film growth and etching for TFT-LCDs, emitter tip formations for FEDs, and bright plasma discharge for PDP applications. In this paper we directed our study to the silicon etching properties such as high etching rate, large area uniformity, low power with the high density plasma.

• Journal of the Korean institute of surface engineering
• /
• v.51 no.6
• /
• pp.344-353
• /
• 2018

Plasma electrolytic oxidation of Ti-25Ta-xHf alloy in electrolyte containing Ca and P for dental implants was investigated using various experimental techniques. Ti-25Ta-xHf (x=0 and 15 wt.%) alloys were manufactured in an arc-melting vacuum furnace. Micropores were formed in PEO films on Ti-25Ta-xHf alloys in 0.15 M calcium acetate monohydrate + 0.02 M calcium glycerophosphate at 240 V, 270 V and 300 V for 3 min, respectively. The microstructure of Ti-25Ta-xHf alloys changed from (${\alpha}^{\prime}+{\alpha}^{{\prime}{\prime}}$) phase to (${\alpha}^{{\prime}{\prime}}+{\beta}$) phase by addition of Hf. As the applied potential increased, the number of pore and the area ratio of occupied by micro-pore decreased, whereas the pore size increased. The anatase phase increase as the applied potential increased. Also, the crystallite size of anatase-$TiO_2$ can be controlled by applied voltage.

• Applied Chemistry for Engineering
• /
• v.30 no.6
• /
• pp.719-725
• /
• 2019

In this study, activated carbon fibers were treated with oxygen plasma to investigate gas sensing properties of the dimethyl methylphosphonate (DMMP), which is a simulant gas of the chemical warfare agent, according to oxygen functional group contents. As the flow rate of oxygen plasma treatment increased, oxygen groups were introduced to the surface of activated carbon fibers from 6.90 up to 36.6%, increasing the -OH group which influences the DMMP gas sensing properties. However, as the flow rate of oxygen plasma increases, the specific surface area tends to decrease because etching on the surface of activated carbon fibers occurs due to active species generated during the oxygen plasma treatment. The resistance change rate of the DMMP gas sensor increased from 4.2 up to 25.1% as the oxygen plasma treatment flow rate increased. This is attributed to the hydrogen bonding between DMMP gas and introduced hydroxyl functional group on activated carbon fibers by the oxygen plasma treatment. Therefore, the oxygen plasma is considered to be one of the important surface treatment methods for detecting chemical warfare agents at room temperature.

• Korean Journal of Materials Research
• /
• v.12 no.10
• /
• pp.776-783
• /
• 2002

Austenitic stainless steel (STS304) has been carburized using glow discharge plasma and its microstructure, wear resistance and corrosion property have been investigated. A repeat boost-diffuse carburizing was used as an effective plasma carburizing method. The effective case depth of the plasma carburized specimens was increased with the carbon concentration at the surface area. The specimens prepared by 3 hours plasma carburizing under $600^{\circ}C$ did not have the standard hardness for the effective case depth, but the specimen prepared by 11 hours plasma carburizing at $500^{\circ}C$ had nearly the same hardness with the specimen plasma carburized for 3 hours at $800^{\circ}C$. The wear resistance increased with temperature but the corrosion properties of the specimens prepared over $600^{\circ}C$ decreased rapidly due to the grain boundary sensitization. However, the specimen plasma carburized for 11 hours at $500^{\circ}C$ had nearly the same wear resistance with the specimen plasma carburized for 3 hours at $800^{\circ}C$ without deterioration of corrosion property. This could be resulted from the fact that the microstructure of the specimen plasma carburized for 11 hours at $500^{\circ}C$ was composed of martensite and austenite, because a partial martensite transformation was occurred only in the specimen plasma carburized for 11 hours at 50$0^{\circ}C$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2002.07a
• /
• pp.240-243
• /
• 2002

Carbon nitride films have been deposited on Si(100) substrate by a high voltage discharge plasma combined with laser ablation in a nitrogen atmosphere. The films were grown both with and without the Presence of an assisting focused Nd:YAG laser ablation. The laser ablation of the graphite target leads to vapor Plume plasma expending into the ambient nitrogen arc discharge area. X-ray photoelectron spectroscopy and Auger electron spectroscopy were used to identify the binding structure and the content of the nitrogen species in the deposited films. The surface morphology of the films was studied using a scanning electron microscopy Data of infrared spectroscopy and x-ray photoelectron spectroscopy indicate the existence of carbon-nitrogen bonds in the films. The x-ray diffraction measurements have also been taken to characterize the crystal properties of the obtain films.

• Journal of the Korean Burn Society
• /
• v.22 no.2
• /
• pp.25-29
• /
• 2019

Purpose: This study was performed to investigate the effect of plasma lactate clearance as predictive factor of major burn patients. Methods: A retrospective review was performed on 119 patients from January 2014 to December 2018, who were admitted as severe burn patients to ICU unit. Plasma lactate was measured upon admission to the hospital and 24hrs after admission. And, hospital day, ICU day, TBSA (Total Body Surface Area) and numbers of surgical intervention were collected after admission. Results: Higher lactate clearance showed negative statistical correlation with survival, hospital day, ICU day & number of surgical interventions. Conclusion: In this study, 24hr lactate clearance might be used as predictor of clinical prognosis following major burn injury.

• Journal of the Korean Vacuum Society
• /
• v.19 no.1
• /
• pp.28-35
• /
• 2010

A new electrode structure in a plasma display panel was designed in a way to increase the bright room contrast ratio (BRCR). The area of the black matrix pattern to get a low reflection from the panel surface was enlarged using the new electrode design concept. The electrical characteristics such as firing voltage, voltage margin and power consumption were measured. The luminance of the panel was measured and the luminous efficiency was calculated. It was found that the new electrode structure was very effective to enhance the BRCR.

• Journal of the Korean Ceramic Society
• /
• v.48 no.1
• /
• pp.1-5
• /
• 2011

Silicon carbide (SiC) has recently drawn an enormous industrial interest because of its useful mechanical properties such as thermal resistance, abrasion resistance and thermal conductivity at high temperature. RF Thermal plasma (PL-35 Induction Plasma, Tekna CO., Canada) has been utilized for synthesis of high purity SiC powder from cheap inorganic solution (Tetraethyl Orthosilicate, TEOS). It is found that the powders by thermal plasma consist of SiC with free carbon and amorphous silica ($SiO_2$) and, by thermal treatment and HF treatment, the impurities are driven off resulting high purity SiC nano-powder. The synthesized SiC powder lies below 30 nm and its properties such microstructure, phase composition, specific surface area and free carbon content have been characterized by X-ay diffraction (XRD), field emission scanning electron microscopy (FE-SEM), thermogravimetric (TG) and Brunauer-Emmett-Teller (BET).

• Journal of the Korean Ceramic Society
• /
• v.49 no.6
• /
• pp.523-527
• /
• 2012

Silicon carbide (SiC) has recently drawn an enormous amount of industrial interest due to its useful mechanical properties, such as its thermal resistance, abrasion resistance and thermal conductivity at high temperatures. In this study, RF thermal plasma (PL-35 Induction Plasma, Tekna CO., Canada) was utilized for the synthesis of high-purity SiC powder from an organic precursor (hexamethyldisilazane, vinyltrimethoxysilane). It was found that the SiC powders obtained by the RF thermal plasma treatment included free carbon and amorphous silica ($SiO_2$). The SiC powders were further purified by a thermal treatment and a HF treatment, resulting in high-purity SiC nano-powder. The particle diameter of the synthesized SiC powder was less than 30 nm. Detailed properties of the microstructure, phase composition, and free carbon content were characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), a thermogravimetric (TG) analysis, according to the and Brunauer-Emmett-Teller (BET) specific surface area from N2 isotherms at 77 K.

• The Korean Journal of Food And Nutrition
• /
• v.30 no.2
• /
• pp.290-296
• /
• 2017

In this study, using the surface dielectric barrier discharge (DBD) produced at atmospheric pressure to improve the physiological activities of quercetin was investigated. Quercetin (at 200 ppm) was treated using air DBD with an input power of 250 W. The tyrosinase inhibition effect and total phenolic content of quercetin increased from 38.96 to 91.58% and from 134.53 to 152.93 ppm, respectively, after 20 min of plasma treatment. The antioxidant activity of quercetin treated for 20 min in the lipid models was higher than that of quercetin treated for 0, 5, and 10 min. Furthermore, plasma-treated quercetin exhibited antimicrobial activity against Listeria monocytogenes, Salmonella Typhimurium, and Staphylococcus aureus, whereas activity was not shown in the control. Structural modifications of the quercetin molecule induced by plasma might be responsible for the improvements in its physiological activity. These results indicate that DBD plasma could be used to enhance the physiological activity of quercetin for various applications in food.